DE69323980T2 - Verfahren zur Herstellung von Vorformen für optische Wellenleiter - Google Patents

Verfahren zur Herstellung von Vorformen für optische Wellenleiter

Info

Publication number
DE69323980T2
DE69323980T2 DE69323980T DE69323980T DE69323980T2 DE 69323980 T2 DE69323980 T2 DE 69323980T2 DE 69323980 T DE69323980 T DE 69323980T DE 69323980 T DE69323980 T DE 69323980T DE 69323980 T2 DE69323980 T2 DE 69323980T2
Authority
DE
Germany
Prior art keywords
preforms
production
optical waveguides
waveguides
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69323980T
Other languages
English (en)
Other versions
DE69323980D1 (de
Inventor
Anthony Joseph Antos
Michael Gregg Blankenship
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of DE69323980D1 publication Critical patent/DE69323980D1/de
Application granted granted Critical
Publication of DE69323980T2 publication Critical patent/DE69323980T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/34Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/34Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
    • C03B2201/36Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers doped with rare earth metals and aluminium, e.g. Er-Al co-doped
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/06Concentric circular ports
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/12Nozzle or orifice plates
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/20Specific substances in specified ports, e.g. all gas flows specified
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/20Specific substances in specified ports, e.g. all gas flows specified
    • C03B2207/26Multiple ports for glass precursor
    • C03B2207/28Multiple ports for glass precursor for different glass precursors, reactants or modifiers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/30For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32Non-halide
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/50Multiple burner arrangements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
DE69323980T 1992-12-28 1993-12-06 Verfahren zur Herstellung von Vorformen für optische Wellenleiter Expired - Fee Related DE69323980T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/997,204 US5296012A (en) 1992-12-28 1992-12-28 Method of making optical waveguide preforms

Publications (2)

Publication Number Publication Date
DE69323980D1 DE69323980D1 (de) 1999-04-22
DE69323980T2 true DE69323980T2 (de) 1999-10-14

Family

ID=25543748

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69323980T Expired - Fee Related DE69323980T2 (de) 1992-12-28 1993-12-06 Verfahren zur Herstellung von Vorformen für optische Wellenleiter

Country Status (9)

Country Link
US (1) US5296012A (de)
EP (1) EP0604785B1 (de)
JP (1) JPH06234537A (de)
KR (1) KR100286271B1 (de)
CN (1) CN1052964C (de)
AU (1) AU662851B2 (de)
CA (1) CA2109474A1 (de)
DE (1) DE69323980T2 (de)
TW (1) TW246749B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5599371A (en) * 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds
KR0167132B1 (ko) * 1996-03-30 1999-01-15 윤종용 어븀 첨가 광섬유의 제조 방법 및 장치
ID24873A (id) * 1997-07-08 2000-08-31 Corning Inc Persediaan-umpan germanium klorida dan siloksan untuk membentu kaca silika dan metoda pembuatannya
US6698246B1 (en) * 1999-10-18 2004-03-02 Corning Incorporated Method for making nanocrystalline glass-ceramic fibers
ES2364453T3 (es) * 2001-04-27 2011-09-02 Prysmian S.P.A. Procedimiento para producir una preforma de fibra óptica.
US7003984B2 (en) * 2001-04-30 2006-02-28 Verrillon, Inc. Hybrid manufacturing process for optical fibers
US20030104209A1 (en) * 2001-11-30 2003-06-05 Bellman Robert A. Precursor and method of growing doped glass films
US20030167800A1 (en) * 2002-03-11 2003-09-11 Atkins Robert M. Soot layer formation for solution doping of glass preforms
US6769275B2 (en) * 2002-03-15 2004-08-03 Fibercore, Inc. Method for making optical fiber preform using simultaneous inside and outside deposition
DE102011119341A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas nach der Sootmethode
US20200262735A1 (en) * 2017-08-29 2020-08-20 Sumitomo Electric Industries, Ltd. Method for producing glass particulate deposit, method for producing glass preform, and glass preform

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3933454A (en) * 1974-04-22 1976-01-20 Corning Glass Works Method of making optical waveguides
US4125388A (en) * 1976-12-20 1978-11-14 Corning Glass Works Method of making optical waveguides
US4314837A (en) * 1979-03-01 1982-02-09 Corning Glass Works Reactant delivery system method
JPS5717440A (en) * 1980-07-07 1982-01-29 Nippon Telegr & Teleph Corp <Ntt> Manufacture of porous glass base material for single- polarization single-mode optical fiber
JPS5767037A (en) * 1980-10-06 1982-04-23 Nippon Telegr & Teleph Corp <Ntt> Manufacture of base material for single-mode optical fiber
JPS5767046A (en) * 1980-10-06 1982-04-23 Nippon Telegr & Teleph Corp <Ntt> Manufacture of glass base material for laser
JPS57170835A (en) * 1981-04-15 1982-10-21 Nippon Telegr & Teleph Corp <Ntt> Manufacture of single-mode optical fiber
JPS57191243A (en) * 1981-05-22 1982-11-25 Fujitsu Ltd Manufacturing of optical fiber preform
US4501602A (en) * 1982-09-15 1985-02-26 Corning Glass Works Process for making sintered glasses and ceramics
US4639079A (en) * 1982-09-29 1987-01-27 Corning Glass Works Optical fiber preform and method
US4568370A (en) * 1982-09-29 1986-02-04 Corning Glass Works Optical fiber preform and method
CA1284921C (en) * 1984-02-27 1991-06-18 Hiroyuki Suda Method, apparatus and burner for fabricating an optical fiber preform
JPS62202833A (ja) * 1986-02-28 1987-09-07 Mitsubishi Cable Ind Ltd 石英系ガラス光フアイバ母材の製造方法
JPS62202834A (ja) * 1986-02-28 1987-09-07 Mitsubishi Cable Ind Ltd 石英系ガラス光フアイバ母材の製造方法
US4826288A (en) * 1987-04-09 1989-05-02 Polaroid Corporation, Patent Department Method for fabricating optical fibers having cores with high rare earth content
JPS6476929A (en) * 1987-09-18 1989-03-23 Hitachi Cable Production of optical fiber preserving plane of polarization
GB8724736D0 (en) * 1987-10-22 1987-11-25 British Telecomm Optical fibre
JPH02275724A (ja) * 1989-04-17 1990-11-09 Nippon Telegr & Teleph Corp <Ntt> 光ファイバ母材の製造方法
JPH0665614B2 (ja) * 1989-05-22 1994-08-24 株式会社フジクラ 光ファイバ母材の製造方法
CA2030748C (en) * 1989-12-22 2000-08-15 Marcella Rose Backer Optical waveguide fiber with titania-silica outer cladding and method of manufacturing
US5078092A (en) * 1989-12-22 1992-01-07 Corning Incorporated Flash vaporizer system for use in manufacturing optical waveguide fiber
US5140665A (en) * 1989-12-22 1992-08-18 Corning Incorporated Optical waveguide fiber with titania-silica outer cladding
EP0443781A1 (de) * 1990-02-23 1991-08-28 AT&T Corp. Verfahren zum Dotieren von optischen Fasern
US5058976A (en) * 1990-08-03 1991-10-22 At&T Bell Laboratories System comprising Er-doped optical fiber
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
JPH04300218A (ja) * 1991-03-28 1992-10-23 Kokusai Denshin Denwa Co Ltd <Kdd> 希土類元素ド−プ石英ガラスの製造方法
US5141549A (en) * 1991-05-17 1992-08-25 The Charles Stark Draper Laboratories Method of fabricating rare earth doped planar optical waveguide for integrated optical circuit

Also Published As

Publication number Publication date
EP0604785B1 (de) 1999-03-17
TW246749B (de) 1995-05-01
KR940015542A (ko) 1994-07-21
US5296012A (en) 1994-03-22
DE69323980D1 (de) 1999-04-22
CN1090258A (zh) 1994-08-03
AU5250093A (en) 1994-07-07
EP0604785A1 (de) 1994-07-06
CN1052964C (zh) 2000-05-31
JPH06234537A (ja) 1994-08-23
KR100286271B1 (ko) 2001-04-16
CA2109474A1 (en) 1994-06-29
AU662851B2 (en) 1995-09-14

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee