DE69301393D1 - Fassung zum testen von integrierten schaltkreisen - Google Patents
Fassung zum testen von integrierten schaltkreisenInfo
- Publication number
- DE69301393D1 DE69301393D1 DE69301393T DE69301393T DE69301393D1 DE 69301393 D1 DE69301393 D1 DE 69301393D1 DE 69301393 T DE69301393 T DE 69301393T DE 69301393 T DE69301393 T DE 69301393T DE 69301393 D1 DE69301393 D1 DE 69301393D1
- Authority
- DE
- Germany
- Prior art keywords
- version
- integrated circuits
- testing integrated
- testing
- circuits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/03—Covers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2442—Contacts for co-operating by abutting resilient; resiliently-mounted with a single cantilevered beam
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0483—Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/02—Arrangements of circuit components or wiring on supporting structure
- H05K7/10—Plug-in assemblages of components, e.g. IC sockets
- H05K7/1053—Plug-in assemblages of components, e.g. IC sockets having interior leads
- H05K7/1061—Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by abutting
- H05K7/1069—Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by abutting with spring contact pieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00013—Fully indexed content
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R2201/00—Connectors or connections adapted for particular applications
- H01R2201/20—Connectors or connections adapted for particular applications for testing or measuring purposes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Connecting Device With Holders (AREA)
- Lead Frames For Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/859,149 US5247250A (en) | 1992-03-27 | 1992-03-27 | Integrated circuit test socket |
| PCT/US1993/001215 WO1993020675A1 (en) | 1992-03-27 | 1993-02-11 | Integrated circuit test socket |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69301393D1 true DE69301393D1 (de) | 1996-03-07 |
| DE69301393T2 DE69301393T2 (de) | 1996-05-30 |
Family
ID=25330174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69301393T Expired - Fee Related DE69301393T2 (de) | 1992-03-27 | 1993-02-11 | Fassung zum testen von integrierten schaltkreisen |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5247250A (de) |
| EP (1) | EP0632950B1 (de) |
| JP (1) | JP3214858B2 (de) |
| KR (1) | KR950701186A (de) |
| DE (1) | DE69301393T2 (de) |
| ES (1) | ES2082636T3 (de) |
| WO (1) | WO1993020675A1 (de) |
Families Citing this family (74)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5476211A (en) | 1993-11-16 | 1995-12-19 | Form Factor, Inc. | Method of manufacturing electrical contacts, using a sacrificial member |
| US5829128A (en) | 1993-11-16 | 1998-11-03 | Formfactor, Inc. | Method of mounting resilient contact structures to semiconductor devices |
| JPH0677467B2 (ja) * | 1992-12-25 | 1994-09-28 | 山一電機株式会社 | Icソケット |
| US5342206A (en) * | 1993-07-15 | 1994-08-30 | The Whitaker Corporation | Socket for direct electrical connection to an integrated circuit chip |
| US7073254B2 (en) | 1993-11-16 | 2006-07-11 | Formfactor, Inc. | Method for mounting a plurality of spring contact elements |
| US20020053734A1 (en) | 1993-11-16 | 2002-05-09 | Formfactor, Inc. | Probe card assembly and kit, and methods of making same |
| US5596282A (en) * | 1993-12-10 | 1997-01-21 | Texas Instruments Incorporated | Tester for integrated circuits |
| JPH07239363A (ja) * | 1994-01-06 | 1995-09-12 | Hewlett Packard Co <Hp> | 集積回路の試験アセンブリ、導電性ブリッジ装置および集積回路の試験方法 |
| US5800184A (en) * | 1994-03-08 | 1998-09-01 | International Business Machines Corporation | High density electrical interconnect apparatus and method |
| US5493237A (en) * | 1994-05-27 | 1996-02-20 | The Whitaker Corporation | Integrated circuit chip testing apparatus |
| GB2290176B (en) * | 1994-06-10 | 1997-07-02 | Wayne Kay Pfaff | Mounting apparatus for ball grid array device |
| USRE40209E1 (en) | 1994-06-13 | 2008-04-01 | Matsushita Electric Industrial Co., Ltd. | Cell potential measurement apparatus having a plurality of microelectrodes |
| JP3256796B2 (ja) * | 1994-08-23 | 2002-02-12 | 日本テキサス・インスツルメンツ株式会社 | ソケット及びソケットを用いた電気部品の試験方法 |
| NL9401657A (nl) * | 1994-10-07 | 1996-05-01 | Framatome Connectors Belgium | Connector voor een substraat met een elektronische schakeling. |
| JP2857838B2 (ja) | 1994-12-01 | 1999-02-17 | 日本航空電子工業株式会社 | パッケージ用ソケットコネクタ |
| US6046597A (en) * | 1995-10-04 | 2000-04-04 | Oz Technologies, Inc. | Test socket for an IC device |
| US5791914A (en) * | 1995-11-21 | 1998-08-11 | Loranger International Corporation | Electrical socket with floating guide plate |
| US5647756A (en) * | 1995-12-19 | 1997-07-15 | Minnesota Mining And Manufacturing | Integrated circuit test socket having toggle clamp lid |
| US8033838B2 (en) | 1996-02-21 | 2011-10-11 | Formfactor, Inc. | Microelectronic contact structure |
| US5923179A (en) * | 1996-03-29 | 1999-07-13 | Intel Corporation | Thermal enhancing test/burn in socket for C4 and tab packaging |
| JP3572795B2 (ja) * | 1996-04-22 | 2004-10-06 | 株式会社エンプラス | Icソケット |
| US5788526A (en) * | 1996-07-17 | 1998-08-04 | Minnesota Mining And Manufacturing Company | Integrated circuit test socket having compliant lid and mechanical advantage latch |
| US5788524A (en) * | 1996-07-22 | 1998-08-04 | Itt Manufacturing Enterprises Inc. | Test clip with standard interface |
| JP3761997B2 (ja) * | 1996-11-15 | 2006-03-29 | 株式会社アドバンテスト | Bgaパッケージ用icソケット |
| TW400666B (en) * | 1997-01-29 | 2000-08-01 | Furukawa Electric Co Ltd | IC socket |
| BR9805973A (pt) * | 1997-02-04 | 2000-01-18 | Ut Automotive Dearborn Inc | Dispositivo para manter um componente elétrico em uma posição desejada |
| US6059609A (en) * | 1997-02-04 | 2000-05-09 | Lear Automotive Dearborn, Inc. | Moveable fuse-holder |
| ES1036315Y (es) * | 1997-02-04 | 1997-12-16 | Mecanismos Aux Ind | Portafusiles movil. |
| JPH11162601A (ja) * | 1997-11-27 | 1999-06-18 | Texas Instr Japan Ltd | ソケット |
| US6033252A (en) * | 1998-01-14 | 2000-03-07 | Lear Automotive Dearborn, Inc. | Component retaining device |
| US5952843A (en) * | 1998-03-24 | 1999-09-14 | Vinh; Nguyen T. | Variable contact pressure probe |
| US6267603B1 (en) * | 1998-04-01 | 2001-07-31 | Molex Incorporated | Burn-in test socket |
| US6292003B1 (en) * | 1998-07-01 | 2001-09-18 | Xilinx, Inc. | Apparatus and method for testing chip scale package integrated circuits |
| EP0969560A1 (de) * | 1998-07-02 | 2000-01-05 | Framatome Connectors International | Frontalkontakt für elektrischen Steckverbinder für Mobilfunktelefonzusatzgeräte |
| US6164982A (en) * | 1998-07-09 | 2000-12-26 | Advantest Corporation | IC socket for holding IC having multiple parallel pins |
| US6217361B1 (en) * | 1999-02-26 | 2001-04-17 | The Whitaker Corporation | Zip socket having movable frame |
| US6419500B1 (en) * | 1999-03-08 | 2002-07-16 | Kulicke & Soffa Investment, Inc. | Probe assembly having floatable buckling beam probes and apparatus for abrading the same |
| AU4503000A (en) * | 1999-05-04 | 2000-11-17 | Wells-Cti, Inc. | Chip carrier socket |
| US6270357B1 (en) * | 1999-05-06 | 2001-08-07 | Wayne K. Pfaff | Mounting for high frequency device packages |
| US6259263B1 (en) * | 1999-06-11 | 2001-07-10 | Micron Technology, Inc. | Compliant contactor for testing semiconductors |
| JP4579361B2 (ja) * | 1999-09-24 | 2010-11-10 | 軍生 木本 | 接触子組立体 |
| FR2802346B1 (fr) * | 1999-12-13 | 2002-02-08 | Upsys Probe Technology Sas | Connecteur de test de haute densite d'interconnexion destine notamment a la verification de circuits integres |
| US6459042B1 (en) * | 1999-12-17 | 2002-10-01 | Autoliv Asp, Inc. | Electrical connector with an electrical component holder |
| US6353329B1 (en) | 2000-03-14 | 2002-03-05 | 3M Innovative Properties Company | Integrated circuit test socket lid assembly |
| US6529027B1 (en) * | 2000-03-23 | 2003-03-04 | Micron Technology, Inc. | Interposer and methods for fabricating same |
| JP2001326046A (ja) * | 2000-05-17 | 2001-11-22 | Enplas Corp | コンタクトピン集合体、コンタクトピン組立体及び電気部品用ソケット |
| US7254889B1 (en) * | 2000-09-08 | 2007-08-14 | Gabe Cherian | Interconnection devices |
| JP4721580B2 (ja) * | 2001-09-11 | 2011-07-13 | 株式会社センサータ・テクノロジーズジャパン | ソケット |
| JP4439151B2 (ja) * | 2001-10-31 | 2010-03-24 | 株式会社リコー | Icソケット |
| US7077665B2 (en) * | 2002-03-19 | 2006-07-18 | Enplas Corporation | Contact pin and socket for electrical parts |
| JP3531644B2 (ja) * | 2002-05-31 | 2004-05-31 | 沖電気工業株式会社 | 半導体ソケットおよび該ソケットのプローブ交換方法 |
| US7170306B2 (en) * | 2003-03-12 | 2007-01-30 | Celerity Research, Inc. | Connecting a probe card and an interposer using a compliant connector |
| TW200401899A (en) * | 2003-08-11 | 2004-02-01 | Speed Tech Corp | Matrix type connector |
| US7273386B2 (en) * | 2004-07-28 | 2007-09-25 | Hewlett-Packard Development Company, L.P. | Pin shroud |
| US7218128B2 (en) * | 2005-02-14 | 2007-05-15 | International Business Machines Corporation | Method and apparatus for locating and testing a chip |
| WO2006115109A1 (ja) * | 2005-04-21 | 2006-11-02 | Fontage Co., Ltd. | 組立て構造 |
| US20070230142A1 (en) * | 2006-03-29 | 2007-10-04 | Engel John B | Zero parts strain relief |
| JP2007273233A (ja) * | 2006-03-31 | 2007-10-18 | Fujitsu Ltd | ソケット、ソケットを有する回路部品及び回路部品を備える情報処理装置 |
| US7473101B2 (en) * | 2006-05-05 | 2009-01-06 | International Business Machines Corporation | Connector for mezzanine mounting of a printed wiring board |
| JP4749359B2 (ja) * | 2007-02-28 | 2011-08-17 | スリーエム カンパニー | コンタクト及びそれを用いた集積回路用ソケット |
| JP4658081B2 (ja) * | 2007-03-06 | 2011-03-23 | 新科實業有限公司 | プローブ組立体、バーの研磨装置、およびバーの研磨方法 |
| TWM324868U (en) * | 2007-05-07 | 2008-01-01 | Hon Hai Prec Ind Co Ltd | Electrical connector |
| CN201075475Y (zh) * | 2007-05-28 | 2008-06-18 | 富士康(昆山)电脑接插件有限公司 | 电连接器 |
| TWM342638U (en) * | 2008-03-10 | 2008-10-11 | Hon Hai Prec Ind Co Ltd | Electrical connector |
| TWM344658U (en) * | 2008-03-31 | 2008-11-11 | Hon Hai Prec Ind Co Ltd | Electrical connector |
| TWM350847U (en) * | 2008-07-21 | 2009-02-11 | Hon Hai Prec Ind Co Ltd | Electrical connector |
| US7637750B1 (en) * | 2008-07-22 | 2009-12-29 | Hon Hai Precision Ind. Co., Ltd. | Electrical connector system with protective plate |
| TWM405098U (en) * | 2010-10-27 | 2011-06-01 | Hon Hai Prec Ind Co Ltd | Electrical connector |
| RU2674582C1 (ru) * | 2017-10-20 | 2018-12-11 | Акционерное общество "Ангстрем" (АО "Ангстрем") | Контактное устройство |
| JP7281250B2 (ja) * | 2018-05-11 | 2023-05-25 | 株式会社アドバンテスト | 試験用キャリア |
| KR102566041B1 (ko) * | 2019-11-05 | 2023-08-16 | 주식회사 프로웰 | 반도체 소자 테스트 장치 |
| CN114731019A (zh) * | 2019-11-21 | 2022-07-08 | 株式会社友华 | 插座及工具 |
| CN115436675A (zh) * | 2021-06-04 | 2022-12-06 | 迪科特测试科技(苏州)有限公司 | 测试装置及其探针组件 |
| KR102594175B1 (ko) * | 2021-08-17 | 2023-10-26 | 미르텍알앤디 주식회사 | 반도체 테스트 소켓 및 그 제조 방법 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3771109A (en) * | 1972-05-01 | 1973-11-06 | Bunker Ramo | Electrical connector for integrated circuit device |
| US3954175A (en) * | 1975-07-17 | 1976-05-04 | The Singer Company | Adjustable integrated circuit carrier |
| US4130327A (en) * | 1977-05-27 | 1978-12-19 | Bunker Ramo Corporation | Electrical connector having a resilient cover |
| US4341433A (en) * | 1979-05-14 | 1982-07-27 | Amp Incorporated | Active device substrate connector |
| US4349238A (en) * | 1980-11-05 | 1982-09-14 | Amp Incorporated | Integrated circuit package connector |
| US4376560A (en) * | 1980-12-15 | 1983-03-15 | Amp Incorporated | Socket for a ceramic chip carrier |
| US4378139A (en) * | 1981-07-14 | 1983-03-29 | Wells Electronics, Inc. | Integrated circuit carrier connector |
| JPS6081654U (ja) * | 1983-11-10 | 1985-06-06 | 山一電機工業株式会社 | Icパツケ−ジのキヤリア |
| US4553805A (en) * | 1984-01-23 | 1985-11-19 | E. I. Du Pont De Nemours And Company | Chip carrier connector |
| US4533192A (en) * | 1984-04-25 | 1985-08-06 | Minnesota Mining And Manufacturing Company | Integrated circuit test socket |
| US4621884A (en) * | 1984-12-19 | 1986-11-11 | Amp Incorporated | Electrical socket having a hinged cover |
| JPS6276273A (ja) * | 1985-09-30 | 1987-04-08 | 日本電気株式会社 | Icソケツト |
| JPS6276274A (ja) * | 1985-09-30 | 1987-04-08 | 日本電気株式会社 | Icソケツト |
| US4799897A (en) * | 1985-12-30 | 1989-01-24 | Dai-Ichi Seiko Kabushiki Kaisha | IC tester socket |
| JPS6317550A (ja) * | 1986-07-10 | 1988-01-25 | Yamaichi Electric Mfg Co Ltd | Ic載接形ソケツト |
| US4789345A (en) * | 1987-05-15 | 1988-12-06 | Wells Electronics, Inc. | Socket device for fine pitch lead and leadless integrated circuit package |
| US4750890A (en) * | 1987-06-18 | 1988-06-14 | The J. M. Ney Company | Test socket for an integrated circuit package |
| JPH0636388B2 (ja) * | 1988-03-08 | 1994-05-11 | 山一電機工業株式会社 | Icキャリア搭載形ソケットにおける位置決め方法 |
| JPH0250282A (ja) * | 1988-08-12 | 1990-02-20 | Casio Comput Co Ltd | データ読取り装置 |
| US4962356A (en) * | 1988-08-19 | 1990-10-09 | Cray Research, Inc. | Integrated circuit test socket |
| DE3903060A1 (de) * | 1989-02-02 | 1990-08-09 | Minnesota Mining & Mfg | Vorrichtung zum pruefen von integrierten schaltungsanordnungen |
| US4969828A (en) * | 1989-05-17 | 1990-11-13 | Amp Incorporated | Electrical socket for TAB IC's |
| US4986760A (en) * | 1989-05-19 | 1991-01-22 | Minnesota Mining And Manufacturing Company | Socket for tab burn-in and test |
| JPH07114136B2 (ja) * | 1989-05-22 | 1995-12-06 | 第一精工株式会社 | 検査用icソケット |
| US5127837A (en) * | 1989-06-09 | 1992-07-07 | Labinal Components And Systems, Inc. | Electrical connectors and IC chip tester embodying same |
| JPH0658998B2 (ja) * | 1989-12-22 | 1994-08-03 | 山一電機工業株式会社 | Icキャリア |
| US5120238A (en) * | 1991-03-15 | 1992-06-09 | Wells Electronics, Inc. | Latching IC connector |
-
1992
- 1992-03-27 US US07/859,149 patent/US5247250A/en not_active Expired - Lifetime
-
1993
- 1993-02-11 WO PCT/US1993/001215 patent/WO1993020675A1/en not_active Ceased
- 1993-02-11 DE DE69301393T patent/DE69301393T2/de not_active Expired - Fee Related
- 1993-02-11 ES ES93905875T patent/ES2082636T3/es not_active Expired - Lifetime
- 1993-02-11 JP JP51742793A patent/JP3214858B2/ja not_active Expired - Fee Related
- 1993-02-11 EP EP93905875A patent/EP0632950B1/de not_active Expired - Lifetime
-
1994
- 1994-09-22 KR KR1019940703284A patent/KR950701186A/ko not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| US5247250A (en) | 1993-09-21 |
| EP0632950A1 (de) | 1995-01-11 |
| ES2082636T3 (es) | 1996-03-16 |
| KR950701186A (ko) | 1995-02-20 |
| EP0632950B1 (de) | 1996-01-24 |
| WO1993020675A1 (en) | 1993-10-14 |
| JP3214858B2 (ja) | 2001-10-02 |
| DE69301393T2 (de) | 1996-05-30 |
| JPH07505255A (ja) | 1995-06-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69301393D1 (de) | Fassung zum testen von integrierten schaltkreisen | |
| DE69400884D1 (de) | Fassung zum Testen von integrierten Schaltkreisen | |
| DE69431844D1 (de) | Testgerät für gedruckte schaltungen | |
| DE69430457D1 (de) | Verfahren zum teilweisen Sägen von intergrierter Schaltkreise | |
| DE69232154D1 (de) | Verbesserte halterung zum testen von leiterplatten | |
| DE69327389D1 (de) | Verfahren zum Prüfen von Entwürfen für programmierbare Logikschaltungen | |
| DE69033792D1 (de) | Schaltung zum Testen von Drahtpaaren | |
| DE69404014D1 (de) | Gurt zum Festhalten von Schrauben | |
| DE69512730D1 (de) | IC-Fassung | |
| ATA4190A (de) | Befestigungsvorrichtung zum verbinden von bauteilen | |
| DE69510534D1 (de) | Vorrichtung zum spülen von gegenständen | |
| DE69308361D1 (de) | Halbleiteranordnung und Verfahren zum Zusammensetzen derselben | |
| KR960015836A (ko) | 집적회로 시험장치 | |
| FI952318L (fi) | Telekanavan testausjärjestely | |
| ATA100994A (de) | Einrichtung zum verriegeln von beweglichen weichenteilen | |
| DE69223786D1 (de) | Strommessanordnung zum Testen von integrierten Schaltungen | |
| DE69329351D1 (de) | Verfahren zum Bewerten von Halbleiterscheiben | |
| DE69215100D1 (de) | Gerät zum bleichen von haarsträhnen | |
| DE69430725D1 (de) | Testen von Halbleiterbauelementen | |
| DK132992D0 (da) | Helstoebt omslutningsstykke | |
| DE69217996D1 (de) | Gerät zum Prüfen von Wicklungskomponenten | |
| ATA255891A (de) | Vorrichtung zum halten von leiterplatten | |
| NO960149D0 (no) | Testanordning | |
| NO962493D0 (no) | Skumdemper-testapparat | |
| ATA14592A (de) | Einrichtung zum verbinden von schienen |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |