KR960015836A - 집적회로 시험장치 - Google Patents

집적회로 시험장치 Download PDF

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Publication number
KR960015836A
KR960015836A KR1019950038194A KR19950038194A KR960015836A KR 960015836 A KR960015836 A KR 960015836A KR 1019950038194 A KR1019950038194 A KR 1019950038194A KR 19950038194 A KR19950038194 A KR 19950038194A KR 960015836 A KR960015836 A KR 960015836A
Authority
KR
South Korea
Prior art keywords
integrated circuit
circuit tester
tester
integrated
circuit
Prior art date
Application number
KR1019950038194A
Other languages
English (en)
Other versions
KR100223077B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR960015836A publication Critical patent/KR960015836A/ko
Application granted granted Critical
Publication of KR100223077B1 publication Critical patent/KR100223077B1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318516—Test of programmable logic devices [PLDs]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
KR1019950038194A 1994-10-31 1995-10-30 집적회로 시험장치 KR100223077B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-267645 1994-10-31
JP6267645A JP2725615B2 (ja) 1994-10-31 1994-10-31 集積回路試験装置

Publications (2)

Publication Number Publication Date
KR960015836A true KR960015836A (ko) 1996-05-22
KR100223077B1 KR100223077B1 (ko) 1999-10-15

Family

ID=17447561

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950038194A KR100223077B1 (ko) 1994-10-31 1995-10-30 집적회로 시험장치

Country Status (4)

Country Link
US (1) US6031382A (ko)
JP (1) JP2725615B2 (ko)
KR (1) KR100223077B1 (ko)
DE (1) DE19540621A1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8477468B2 (en) 2011-11-04 2013-07-02 Mersen Usa Newburyport-Ma, Llc Circuit protection device
US8810988B2 (en) 2011-11-04 2014-08-19 Mersen Usa Newburyport-Ma, Llc Circuit protection device

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6525555B1 (en) 1993-11-16 2003-02-25 Formfactor, Inc. Wafer-level burn-in and test
US6275962B1 (en) * 1998-10-23 2001-08-14 Teradyne, Inc. Remote test module for automatic test equipment
US6499121B1 (en) * 1999-03-01 2002-12-24 Formfactor, Inc. Distributed interface for parallel testing of multiple devices using a single tester channel
JP3371869B2 (ja) 1999-10-29 2003-01-27 日本電気株式会社 ベアチップｌｓｉ搭載基板の高速テスト装置
US7337088B2 (en) * 2001-05-23 2008-02-26 Micron Technology, Inc. Intelligent measurement modular semiconductor parametric test system
US6764869B2 (en) * 2001-09-12 2004-07-20 Formfactor, Inc. Method of assembling and testing an electronics module
US7162386B2 (en) * 2002-04-25 2007-01-09 Micron Technology, Inc. Dynamically adaptable semiconductor parametric testing
US7010451B2 (en) * 2003-04-17 2006-03-07 Micron Technology, Inc. Dynamic creation and modification of wafer test maps during wafer testing
US8581610B2 (en) 2004-04-21 2013-11-12 Charles A Miller Method of designing an application specific probe card test system
US7803693B2 (en) * 2007-02-15 2010-09-28 John Trezza Bowed wafer hybridization compensation
US7888955B2 (en) * 2007-09-25 2011-02-15 Formfactor, Inc. Method and apparatus for testing devices using serially controlled resources
US7977959B2 (en) 2007-09-27 2011-07-12 Formfactor, Inc. Method and apparatus for testing devices using serially controlled intelligent switches
US8122309B2 (en) 2008-03-11 2012-02-21 Formfactor, Inc. Method and apparatus for processing failures during semiconductor device testing
US8095841B2 (en) 2008-08-19 2012-01-10 Formfactor, Inc. Method and apparatus for testing semiconductor devices with autonomous expected value generation
US7944225B2 (en) 2008-09-26 2011-05-17 Formfactor, Inc. Method and apparatus for providing a tester integrated circuit for testing a semiconductor device under test
JP4437508B1 (ja) * 2009-02-27 2010-03-24 株式会社アドバンテスト 試験装置
JP4437838B1 (ja) * 2009-07-13 2010-03-24 株式会社アドバンテスト 試験装置
JP4482707B1 (ja) * 2009-07-13 2010-06-16 株式会社アドバンテスト 試験装置
US7987591B2 (en) * 2009-08-13 2011-08-02 International Business Machines Corporation Method of forming silicon chicklet pedestal
US8400176B2 (en) 2009-08-18 2013-03-19 Formfactor, Inc. Wafer level contactor

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3232215A1 (de) * 1982-08-30 1984-03-01 Siemens AG, 1000 Berlin und 8000 München Monolithisch integrierte digitale halbleiterschaltung
DE3526485A1 (de) * 1985-07-24 1987-02-05 Heinz Krug Schaltungsanordnung zum pruefen integrierter schaltungseinheiten
JPH0680708B2 (ja) * 1986-04-15 1994-10-12 松下電子工業株式会社 半導体チツプの検査方法
JP2520234B2 (ja) * 1986-05-10 1996-07-31 工業技術院長 メモリ試験装置
JPS62284384A (ja) * 1986-06-03 1987-12-10 日立電子エンジニアリング株式会社 プロ−ビング方式
JPS6348479A (ja) * 1986-08-19 1988-03-01 Mitsubishi Electric Corp Ｉｃテスト装置
DE3637502A1 (de) * 1986-11-04 1988-05-11 Messerschmitt Boelkow Blohm Mikromechanische testeinrichtung
DE3724144A1 (de) * 1987-07-21 1989-02-02 Siemens Ag Anordnung zum pruefen von auf einem baustein integrierten schaltungen
US5020219A (en) * 1988-05-16 1991-06-04 Leedy Glenn J Method of making a flexible tester surface for testing integrated circuits
EP0397937A3 (en) * 1988-05-18 1991-07-24 Hewlett-Packard Company Control system and method for automated parametric test equipment
US5206582A (en) * 1988-05-18 1993-04-27 Hewlett-Packard Company Control system for automated parametric test equipment
JP2660028B2 (ja) * 1988-12-13 1997-10-08 株式会社東芝 Ｌｓｉのテスト装置
JPH02237047A (ja) * 1989-03-09 1990-09-19 Mitsubishi Electric Corp 半導体試験装置
JPH02239641A (ja) * 1989-03-14 1990-09-21 Toshiba Corp 半導体ウエーハ用プロービング装置
US5023545A (en) * 1990-06-04 1991-06-11 The United States Of America Circuit probing system
JPH04366776A (ja) * 1991-06-13 1992-12-18 Nec Kyushu Ltd Ｉｃ試験装置
US5177439A (en) * 1991-08-30 1993-01-05 U.S. Philips Corporation Probe card for testing unencapsulated semiconductor devices
JPH05275504A (ja) * 1992-01-16 1993-10-22 Toshiba Corp プローブカード
US5420520A (en) * 1993-06-11 1995-05-30 International Business Machines Corporation Method and apparatus for testing of integrated circuit chips

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8477468B2 (en) 2011-11-04 2013-07-02 Mersen Usa Newburyport-Ma, Llc Circuit protection device
US8810988B2 (en) 2011-11-04 2014-08-19 Mersen Usa Newburyport-Ma, Llc Circuit protection device

Also Published As

Publication number Publication date
KR100223077B1 (ko) 1999-10-15
US6031382A (en) 2000-02-29
DE19540621A1 (de) 1996-05-02
JPH08129053A (ja) 1996-05-21
JP2725615B2 (ja) 1998-03-11

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
J201 Request for trial against refusal decision
AMND Amendment
B701 Decision to grant
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee