DE69300544T2 - Organische Chloride, mit einem schwachen Effekt auf die Zerstörung der Ozonschicht, zur thermischen Oxidation von Silizium und zur Reinigung der Reaktionskammer. - Google Patents

Organische Chloride, mit einem schwachen Effekt auf die Zerstörung der Ozonschicht, zur thermischen Oxidation von Silizium und zur Reinigung der Reaktionskammer.

Info

Publication number
DE69300544T2
DE69300544T2 DE69300544T DE69300544T DE69300544T2 DE 69300544 T2 DE69300544 T2 DE 69300544T2 DE 69300544 T DE69300544 T DE 69300544T DE 69300544 T DE69300544 T DE 69300544T DE 69300544 T2 DE69300544 T2 DE 69300544T2
Authority
DE
Germany
Prior art keywords
dichloroethylene
tca
chlorohydrocarbon
silicon
hcl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69300544T
Other languages
German (de)
English (en)
Other versions
DE69300544D1 (de
Inventor
Arthur Kenneth Hochberg
Andre Lagendijk
David Allen Roberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25410134&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69300544(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Publication of DE69300544D1 publication Critical patent/DE69300544D1/de
Application granted granted Critical
Publication of DE69300544T2 publication Critical patent/DE69300544T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
    • H10P14/6306—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials
    • H10P14/6308—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors
    • H10P14/6309—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors of silicon in uncombined form, i.e. pure silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6322—Formation by thermal treatments
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/20—Cleaning during device manufacture

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
DE69300544T 1992-06-15 1993-06-08 Organische Chloride, mit einem schwachen Effekt auf die Zerstörung der Ozonschicht, zur thermischen Oxidation von Silizium und zur Reinigung der Reaktionskammer. Expired - Lifetime DE69300544T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/898,857 US5288662A (en) 1992-06-15 1992-06-15 Low ozone depleting organic chlorides for use during silicon oxidation and furnace tube cleaning

Publications (2)

Publication Number Publication Date
DE69300544D1 DE69300544D1 (de) 1995-11-02
DE69300544T2 true DE69300544T2 (de) 1996-03-21

Family

ID=25410134

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69300544T Expired - Lifetime DE69300544T2 (de) 1992-06-15 1993-06-08 Organische Chloride, mit einem schwachen Effekt auf die Zerstörung der Ozonschicht, zur thermischen Oxidation von Silizium und zur Reinigung der Reaktionskammer.

Country Status (6)

Country Link
US (2) US5288662A (enExample)
EP (1) EP0574809B1 (enExample)
JP (1) JPH0799743B2 (enExample)
KR (1) KR970000421B1 (enExample)
DE (1) DE69300544T2 (enExample)
TW (1) TW224446B (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1244891C (zh) * 1992-08-27 2006-03-08 株式会社半导体能源研究所 有源矩阵显示器
US5843225A (en) * 1993-02-03 1998-12-01 Semiconductor Energy Laboratory Co., Ltd. Process for fabricating semiconductor and process for fabricating semiconductor device
JP3497198B2 (ja) 1993-02-03 2004-02-16 株式会社半導体エネルギー研究所 半導体装置および薄膜トランジスタの作製方法
US6997985B1 (en) 1993-02-15 2006-02-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor, semiconductor device, and method for fabricating the same
DE69428387T2 (de) * 1993-02-15 2002-07-04 Semiconductor Energy Lab Herstellungsverfahren für eine kristallisierte Halbleiterschicht
US5985741A (en) 1993-02-15 1999-11-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
US6413805B1 (en) 1993-03-12 2002-07-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device forming method
US6875628B1 (en) 1993-05-26 2005-04-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and fabrication method of the same
JPH06349735A (ja) 1993-06-12 1994-12-22 Semiconductor Energy Lab Co Ltd 半導体装置
JP3450376B2 (ja) 1993-06-12 2003-09-22 株式会社半導体エネルギー研究所 半導体装置の作製方法
US5488000A (en) 1993-06-22 1996-01-30 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating a thin film transistor using a nickel silicide layer to promote crystallization of the amorphous silicon layer
US6713330B1 (en) 1993-06-22 2004-03-30 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating a thin film transistor
TW369686B (en) 1993-07-27 1999-09-11 Semiconductor Energy Lab Corp Semiconductor device and process for fabricating the same
JP3417665B2 (ja) * 1994-07-07 2003-06-16 株式会社東芝 半導体装置の製造方法
US5915174A (en) * 1994-09-30 1999-06-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for producing the same
US5599425A (en) * 1995-02-06 1997-02-04 Air Products And Chemicals, Inc. Predecomposition of organic chlorides for silicon processing
US5704986A (en) * 1995-09-18 1998-01-06 Taiwan Semiconductor Manufacturing Company Ltd Semiconductor substrate dry cleaning method
US5985740A (en) 1996-01-19 1999-11-16 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device including reduction of a catalyst
JP3729955B2 (ja) 1996-01-19 2005-12-21 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3645380B2 (ja) 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、ナビゲーションシステム、携帯電話、ビデオカメラ、投射型表示装置
JP3645379B2 (ja) * 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
US6478263B1 (en) 1997-01-17 2002-11-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method
JP3645378B2 (ja) 1996-01-19 2005-05-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
US5888858A (en) 1996-01-20 1999-03-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and fabrication method thereof
US7056381B1 (en) * 1996-01-26 2006-06-06 Semiconductor Energy Laboratory Co., Ltd. Fabrication method of semiconductor device
US6180439B1 (en) 1996-01-26 2001-01-30 Semiconductor Energy Laboratory Co., Ltd. Method for fabricating a semiconductor device
US6465287B1 (en) 1996-01-27 2002-10-15 Semiconductor Energy Laboratory Co., Ltd. Method for fabricating a semiconductor device using a metal catalyst and high temperature crystallization
US6100562A (en) 1996-03-17 2000-08-08 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
KR100398621B1 (ko) * 1996-12-31 2003-12-31 주식회사 하이닉스반도체 반도체소자의 게이트산화막 제조방법
US5843239A (en) * 1997-03-03 1998-12-01 Applied Materials, Inc. Two-step process for cleaning a substrate processing chamber
US6387827B1 (en) 1997-03-28 2002-05-14 Imec (Vzw) Method for growing thin silicon oxides on a silicon substrate using chlorine precursors
US6501094B1 (en) * 1997-06-11 2002-12-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising a bottom gate type thin film transistor
US6303522B1 (en) 1997-11-19 2001-10-16 Imec Vzw Oxidation in an ambient comprising ozone and the reaction products of an organic chloro-carbon precursor
US5990014A (en) * 1998-01-07 1999-11-23 Memc Electronic Materials, Inc. In situ wafer cleaning process
US6271153B1 (en) * 1998-07-22 2001-08-07 Micron Technology, Inc. Semiconductor processing method and trench isolation method
WO2002003438A1 (en) * 2000-07-06 2002-01-10 Mattson Thermal Products Inc. Method and apparatus for rapid thermal processing (rtp) of semiconductor wafers
JP3967199B2 (ja) * 2002-06-04 2007-08-29 シャープ株式会社 半導体装置及びその製造方法
US20040014327A1 (en) * 2002-07-18 2004-01-22 Bing Ji Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
US7357138B2 (en) * 2002-07-18 2008-04-15 Air Products And Chemicals, Inc. Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
US20040011380A1 (en) * 2002-07-18 2004-01-22 Bing Ji Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
US7055263B2 (en) * 2003-11-25 2006-06-06 Air Products And Chemicals, Inc. Method for cleaning deposition chambers for high dielectric constant materials
US7531464B2 (en) * 2005-12-20 2009-05-12 Texas Instruments Incorporated Semiconductive device fabricated using a substantially disassociated chlorohydrocarbon
US8246751B2 (en) 2010-10-01 2012-08-21 General Electric Company Pulsed detonation cleaning systems and methods

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3837905A (en) * 1971-09-22 1974-09-24 Gen Motors Corp Thermal oxidation of silicon
US4563367A (en) * 1984-05-29 1986-01-07 Applied Materials, Inc. Apparatus and method for high rate deposition and etching
JPS63269548A (ja) * 1987-04-27 1988-11-07 Seiko Instr & Electronics Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0669194A (ja) 1994-03-11
DE69300544D1 (de) 1995-11-02
KR970000421B1 (ko) 1997-01-09
EP0574809B1 (en) 1995-09-27
TW224446B (enExample) 1994-06-01
JPH0799743B2 (ja) 1995-10-25
HK1002325A1 (en) 1998-08-14
EP0574809A1 (en) 1993-12-22
US5298075A (en) 1994-03-29
US5288662A (en) 1994-02-22
KR940001312A (ko) 1994-01-11

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8363 Opposition against the patent