DE69603337T2 - Verfahren zur Zersetzung von halogenenthaltendem Gas - Google Patents

Verfahren zur Zersetzung von halogenenthaltendem Gas

Info

Publication number
DE69603337T2
DE69603337T2 DE69603337T DE69603337T DE69603337T2 DE 69603337 T2 DE69603337 T2 DE 69603337T2 DE 69603337 T DE69603337 T DE 69603337T DE 69603337 T DE69603337 T DE 69603337T DE 69603337 T2 DE69603337 T2 DE 69603337T2
Authority
DE
Germany
Prior art keywords
decomposition
halogen
containing gas
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69603337T
Other languages
English (en)
Other versions
DE69603337D1 (de
Inventor
Hisaji Nakano
Nobuhiko Matsuoka
Tetsuo Ueda
Shinsuke Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP28146995A external-priority patent/JP3216868B2/ja
Priority claimed from JP19098396A external-priority patent/JP3228459B2/ja
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Application granted granted Critical
Publication of DE69603337D1 publication Critical patent/DE69603337D1/de
Publication of DE69603337T2 publication Critical patent/DE69603337T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/30—Alkali metal compounds
    • B01D2251/306—Alkali metal compounds of potassium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/60—Inorganic bases or salts
    • B01D2251/604—Hydroxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
DE69603337T 1995-10-30 1996-10-30 Verfahren zur Zersetzung von halogenenthaltendem Gas Expired - Fee Related DE69603337T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28146995A JP3216868B2 (ja) 1995-10-30 1995-10-30 ハロゲン化物ガスの分解方法
JP19098396A JP3228459B2 (ja) 1996-07-19 1996-07-19 ハロゲン化物ガスの分解方法

Publications (2)

Publication Number Publication Date
DE69603337D1 DE69603337D1 (de) 1999-08-26
DE69603337T2 true DE69603337T2 (de) 1999-11-18

Family

ID=26506412

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69603337T Expired - Fee Related DE69603337T2 (de) 1995-10-30 1996-10-30 Verfahren zur Zersetzung von halogenenthaltendem Gas

Country Status (3)

Country Link
US (1) US5817284A (de)
EP (1) EP0771579B1 (de)
DE (1) DE69603337T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6509511B1 (en) 1998-10-07 2003-01-21 Guild Associates, Inc. Process for the conversion of perfluoroalkanes, a catalyst for use therein and a method for its preparation
US6676913B2 (en) 1996-06-12 2004-01-13 Guild Associates, Inc. Catalyst composition and method of controlling PFC and HFC emissions
US6888040B1 (en) * 1996-06-28 2005-05-03 Lam Research Corporation Method and apparatus for abatement of reaction products from a vacuum processing chamber
JP3713333B2 (ja) * 1996-07-04 2005-11-09 同和鉱業株式会社 弗化炭素類の分解法
EP0895801A3 (de) * 1997-08-07 1999-04-14 Showa Denko Kabushiki Kaisha Verfahren zur Zersetzung von Stickstofffluorid oder Schwefelfluorid und Zersetzungsmittel dafür
DE19813582A1 (de) * 1998-03-27 1999-09-30 Abb Research Ltd Verfahren zur Entsorgung eines in einem Behälter eingeschlossenen, fluorierten Gases und Vorrichtung zur Durchführung dieses Verfahrens
US6589494B1 (en) 1998-03-31 2003-07-08 Institut Francais Du Petrole Process for eliminating halogen-containing compounds contained in a gas or liquid using an adsorbent composition based on at least one metallic element
US6482367B1 (en) * 1998-06-18 2002-11-19 Kanken Techno Co., Ltd. Method and apparatus for removing harmful components in an exhaust gas
FR2780300B1 (fr) * 1998-06-25 2000-11-10 Rhodia Chimie Sa Procede de traitement de gaz ou de liquides issus de reformage catalytique
US6689252B1 (en) * 1999-07-28 2004-02-10 Applied Materials, Inc. Abatement of hazardous gases in effluent
US6468490B1 (en) 2000-06-29 2002-10-22 Applied Materials, Inc. Abatement of fluorine gas from effluent
US6375912B1 (en) * 1999-08-16 2002-04-23 Agere Systems Guardian Corp. Electrochemical abatement of perfluorinated compounds
GB9923951D0 (en) * 1999-10-08 1999-12-08 Boc Group Plc Treatment of gas mixture
JP2001219031A (ja) * 2000-02-08 2001-08-14 Air Liquide Japan Ltd パーフルオロ化合物の分解方法及び分解装置
US6673323B1 (en) 2000-03-24 2004-01-06 Applied Materials, Inc. Treatment of hazardous gases in effluent
US6391146B1 (en) 2000-04-11 2002-05-21 Applied Materials, Inc. Erosion resistant gas energizer
US6673326B1 (en) * 2000-08-07 2004-01-06 Guild Associates, Inc. Catalytic processes for the reduction of perfluorinated compounds and hydrofluorocarbons
GB0101769D0 (en) 2001-01-24 2001-03-07 Ineos Fluor Ltd Decomposition of fluorine compounds
US6824748B2 (en) * 2001-06-01 2004-11-30 Applied Materials, Inc. Heated catalytic treatment of an effluent gas from a substrate fabrication process
US6962679B2 (en) 2001-07-11 2005-11-08 Battelle Memorial Institute Processes and apparatuses for treating halogen-containing gases
US7220396B2 (en) * 2001-07-11 2007-05-22 Battelle Memorial Institute Processes for treating halogen-containing gases
US20030072703A1 (en) * 2001-09-13 2003-04-17 Toshikazu Sugiura Method for removing the harmful effects of organic halogen compound gas, apparatus for removing the harmful effects of organic halogen compound gas, system for fabricating semiconductor devices, and method for fabricating semiconductor devices
DE60232351D1 (de) * 2001-10-12 2009-06-25 Asahi Glass Co Ltd Verfahren zur entfernung von halogenhaltigem gas
US7138551B2 (en) * 2004-11-05 2006-11-21 E. I. Du Pont De Nemours And Company Purification of fluorinated alcohols
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
JP5102217B2 (ja) 2005-10-31 2012-12-19 アプライド マテリアルズ インコーポレイテッド プロセス削減反応器
GB0702837D0 (en) * 2007-02-14 2007-03-28 Boc Group Plc Method of treating a gas stream
US9440218B2 (en) * 2013-06-13 2016-09-13 Clariant Corporation Methods and active materials for reducing halide concentration in gas streams
EP3546055B1 (de) * 2018-03-28 2021-01-13 ABB Schweiz AG Verfahren und system zur zersetzung eines fluoroketons in wegwerfbare abbauprodukte
CN111595991B (zh) * 2020-05-28 2022-08-12 国网浙江省电力有限公司电力科学研究院 一种六氟化硫电分解中间产物提取装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1490546A (en) * 1920-11-27 1924-04-15 Kvafveindustri Ab Apparatus for producing pure nitrogen
US3699209A (en) * 1971-02-26 1972-10-17 Universal Oil Prod Co Hf removal system
JPS5378999A (en) * 1976-12-23 1978-07-12 Nippon Petrochemicals Co Ltd Method of treating hydrofluoric acid
DE3447337C2 (de) * 1984-12-24 1986-11-06 Nukem Gmbh, 6450 Hanau Verfahren zur chemisch-thermischen Zersetzung von höher halogenierten Kohlenwasserstoffen
JPS61204025A (ja) * 1985-03-06 1986-09-10 Central Glass Co Ltd Ｎｆ↓３の除害方法
JPS6380830A (ja) * 1986-09-25 1988-04-11 Osaka Oxygen Ind Ltd 半導体工業における排ガス処理剤
DE3826971A1 (de) * 1988-08-09 1990-02-15 Ftu Gmbh Verfahren zur herstellung modifizierter calciumhydroxide fuer die gas- und abgasreinigung unter verwendung von wirkstoffkonzentraten
DE4212451A1 (de) * 1992-04-14 1993-10-21 Huels Chemische Werke Ag Verfahren zur Entfernung von Fluor und/oder anorganischen Fluorverbindungen aus Gasen sowie die Verwendung von gebrauchten Katalysatoren auf Basis von Titandioxid hierzu
US5416247A (en) * 1993-11-19 1995-05-16 E. I. Du Pont De Nemours And Company Chemical disposal of halocarbons
JPH08215538A (ja) * 1995-02-17 1996-08-27 Central Glass Co Ltd ハロゲン系ガスの除去法

Also Published As

Publication number Publication date
EP0771579B1 (de) 1999-07-21
DE69603337D1 (de) 1999-08-26
EP0771579A1 (de) 1997-05-07
US5817284A (en) 1998-10-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee