DE69603337D1 - Verfahren zur Zersetzung von halogenenthaltendem Gas - Google Patents
Verfahren zur Zersetzung von halogenenthaltendem GasInfo
- Publication number
- DE69603337D1 DE69603337D1 DE69603337T DE69603337T DE69603337D1 DE 69603337 D1 DE69603337 D1 DE 69603337D1 DE 69603337 T DE69603337 T DE 69603337T DE 69603337 T DE69603337 T DE 69603337T DE 69603337 D1 DE69603337 D1 DE 69603337D1
- Authority
- DE
- Germany
- Prior art keywords
- decomposition
- halogen
- containing gas
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/30—Alkali metal compounds
- B01D2251/306—Alkali metal compounds of potassium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/60—Inorganic bases or salts
- B01D2251/604—Hydroxides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28146995A JP3216868B2 (ja) | 1995-10-30 | 1995-10-30 | ハロゲン化物ガスの分解方法 |
JP19098396A JP3228459B2 (ja) | 1996-07-19 | 1996-07-19 | ハロゲン化物ガスの分解方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69603337D1 true DE69603337D1 (de) | 1999-08-26 |
DE69603337T2 DE69603337T2 (de) | 1999-11-18 |
Family
ID=26506412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69603337T Expired - Fee Related DE69603337T2 (de) | 1995-10-30 | 1996-10-30 | Verfahren zur Zersetzung von halogenenthaltendem Gas |
Country Status (3)
Country | Link |
---|---|
US (1) | US5817284A (de) |
EP (1) | EP0771579B1 (de) |
DE (1) | DE69603337T2 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6509511B1 (en) | 1998-10-07 | 2003-01-21 | Guild Associates, Inc. | Process for the conversion of perfluoroalkanes, a catalyst for use therein and a method for its preparation |
US6676913B2 (en) | 1996-06-12 | 2004-01-13 | Guild Associates, Inc. | Catalyst composition and method of controlling PFC and HFC emissions |
US6888040B1 (en) * | 1996-06-28 | 2005-05-03 | Lam Research Corporation | Method and apparatus for abatement of reaction products from a vacuum processing chamber |
JP3713333B2 (ja) * | 1996-07-04 | 2005-11-09 | 同和鉱業株式会社 | 弗化炭素類の分解法 |
EP0895801A3 (de) * | 1997-08-07 | 1999-04-14 | Showa Denko Kabushiki Kaisha | Verfahren zur Zersetzung von Stickstofffluorid oder Schwefelfluorid und Zersetzungsmittel dafür |
DE19813582A1 (de) * | 1998-03-27 | 1999-09-30 | Abb Research Ltd | Verfahren zur Entsorgung eines in einem Behälter eingeschlossenen, fluorierten Gases und Vorrichtung zur Durchführung dieses Verfahrens |
US6589494B1 (en) | 1998-03-31 | 2003-07-08 | Institut Francais Du Petrole | Process for eliminating halogen-containing compounds contained in a gas or liquid using an adsorbent composition based on at least one metallic element |
US6482367B1 (en) * | 1998-06-18 | 2002-11-19 | Kanken Techno Co., Ltd. | Method and apparatus for removing harmful components in an exhaust gas |
FR2780300B1 (fr) * | 1998-06-25 | 2000-11-10 | Rhodia Chimie Sa | Procede de traitement de gaz ou de liquides issus de reformage catalytique |
US6689252B1 (en) * | 1999-07-28 | 2004-02-10 | Applied Materials, Inc. | Abatement of hazardous gases in effluent |
US6468490B1 (en) * | 2000-06-29 | 2002-10-22 | Applied Materials, Inc. | Abatement of fluorine gas from effluent |
US6375912B1 (en) * | 1999-08-16 | 2002-04-23 | Agere Systems Guardian Corp. | Electrochemical abatement of perfluorinated compounds |
GB9923951D0 (en) * | 1999-10-08 | 1999-12-08 | Boc Group Plc | Treatment of gas mixture |
JP2001219031A (ja) * | 2000-02-08 | 2001-08-14 | Air Liquide Japan Ltd | パーフルオロ化合物の分解方法及び分解装置 |
US6673323B1 (en) | 2000-03-24 | 2004-01-06 | Applied Materials, Inc. | Treatment of hazardous gases in effluent |
US6391146B1 (en) | 2000-04-11 | 2002-05-21 | Applied Materials, Inc. | Erosion resistant gas energizer |
US6673326B1 (en) * | 2000-08-07 | 2004-01-06 | Guild Associates, Inc. | Catalytic processes for the reduction of perfluorinated compounds and hydrofluorocarbons |
GB0101769D0 (en) | 2001-01-24 | 2001-03-07 | Ineos Fluor Ltd | Decomposition of fluorine compounds |
US6824748B2 (en) * | 2001-06-01 | 2004-11-30 | Applied Materials, Inc. | Heated catalytic treatment of an effluent gas from a substrate fabrication process |
US7220396B2 (en) * | 2001-07-11 | 2007-05-22 | Battelle Memorial Institute | Processes for treating halogen-containing gases |
US6962679B2 (en) * | 2001-07-11 | 2005-11-08 | Battelle Memorial Institute | Processes and apparatuses for treating halogen-containing gases |
JP2003159513A (ja) * | 2001-09-13 | 2003-06-03 | Seiko Epson Corp | 有機ハロゲン化合物ガスの除害方法、有機ハロゲン化合物ガスの除害装置、半導体装置の製造システム及び半導体装置の製造方法 |
CN100344345C (zh) * | 2001-10-12 | 2007-10-24 | 旭硝子株式会社 | 卤素类气体的除去方法 |
US7138551B2 (en) * | 2004-11-05 | 2006-11-21 | E. I. Du Pont De Nemours And Company | Purification of fluorinated alcohols |
US7736599B2 (en) | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
KR101036734B1 (ko) | 2005-10-31 | 2011-05-24 | 어플라이드 머티어리얼스, 인코포레이티드 | 공정 저감 반응로 |
GB0702837D0 (en) * | 2007-02-14 | 2007-03-28 | Boc Group Plc | Method of treating a gas stream |
US9440218B2 (en) | 2013-06-13 | 2016-09-13 | Clariant Corporation | Methods and active materials for reducing halide concentration in gas streams |
EP3546055B1 (de) * | 2018-03-28 | 2021-01-13 | ABB Schweiz AG | Verfahren und system zur zersetzung eines fluoroketons in wegwerfbare abbauprodukte |
CN111595991B (zh) * | 2020-05-28 | 2022-08-12 | 国网浙江省电力有限公司电力科学研究院 | 一种六氟化硫电分解中间产物提取装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1490546A (en) * | 1920-11-27 | 1924-04-15 | Kvafveindustri Ab | Apparatus for producing pure nitrogen |
US3699209A (en) * | 1971-02-26 | 1972-10-17 | Universal Oil Prod Co | Hf removal system |
JPS5378999A (en) * | 1976-12-23 | 1978-07-12 | Nippon Petrochemicals Co Ltd | Method of treating hydrofluoric acid |
DE3447337C2 (de) * | 1984-12-24 | 1986-11-06 | Nukem Gmbh, 6450 Hanau | Verfahren zur chemisch-thermischen Zersetzung von höher halogenierten Kohlenwasserstoffen |
JPS61204025A (ja) * | 1985-03-06 | 1986-09-10 | Central Glass Co Ltd | Nf↓3の除害方法 |
JPS6380830A (ja) * | 1986-09-25 | 1988-04-11 | Osaka Oxygen Ind Ltd | 半導体工業における排ガス処理剤 |
DE3826971A1 (de) * | 1988-08-09 | 1990-02-15 | Ftu Gmbh | Verfahren zur herstellung modifizierter calciumhydroxide fuer die gas- und abgasreinigung unter verwendung von wirkstoffkonzentraten |
DE4212451A1 (de) * | 1992-04-14 | 1993-10-21 | Huels Chemische Werke Ag | Verfahren zur Entfernung von Fluor und/oder anorganischen Fluorverbindungen aus Gasen sowie die Verwendung von gebrauchten Katalysatoren auf Basis von Titandioxid hierzu |
US5416247A (en) * | 1993-11-19 | 1995-05-16 | E. I. Du Pont De Nemours And Company | Chemical disposal of halocarbons |
JPH08215538A (ja) * | 1995-02-17 | 1996-08-27 | Central Glass Co Ltd | ハロゲン系ガスの除去法 |
-
1996
- 1996-10-29 US US08/738,588 patent/US5817284A/en not_active Expired - Fee Related
- 1996-10-30 DE DE69603337T patent/DE69603337T2/de not_active Expired - Fee Related
- 1996-10-30 EP EP96117420A patent/EP0771579B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5817284A (en) | 1998-10-06 |
DE69603337T2 (de) | 1999-11-18 |
EP0771579A1 (de) | 1997-05-07 |
EP0771579B1 (de) | 1999-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |