DE69602300D1 - Verfahren zur Abscheidung von Kohlenstoffschichten - Google Patents

Verfahren zur Abscheidung von Kohlenstoffschichten

Info

Publication number
DE69602300D1
DE69602300D1 DE69602300T DE69602300T DE69602300D1 DE 69602300 D1 DE69602300 D1 DE 69602300D1 DE 69602300 T DE69602300 T DE 69602300T DE 69602300 T DE69602300 T DE 69602300T DE 69602300 D1 DE69602300 D1 DE 69602300D1
Authority
DE
Germany
Prior art keywords
deposition
carbon layers
layers
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69602300T
Other languages
English (en)
Other versions
DE69602300T2 (de
Inventor
Xiaohong C O Shanghai Room Oui
Joseph V Mantese
Alaa A Elmoursi
Aboud H Hamdi
Blake P Wood
Kevin C Walter
Michael A Nastasi
Gerard W Malaczynski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motors Liquidation Co
Original Assignee
Motors Liquidation Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motors Liquidation Co filed Critical Motors Liquidation Co
Publication of DE69602300D1 publication Critical patent/DE69602300D1/de
Application granted granted Critical
Publication of DE69602300T2 publication Critical patent/DE69602300T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
DE69602300T 1995-03-08 1996-02-12 Verfahren zur Abscheidung von Kohlenstoffschichten Expired - Lifetime DE69602300T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/401,110 US5458927A (en) 1995-03-08 1995-03-08 Process for the formation of wear- and scuff-resistant carbon coatings

Publications (2)

Publication Number Publication Date
DE69602300D1 true DE69602300D1 (de) 1999-06-10
DE69602300T2 DE69602300T2 (de) 1999-09-02

Family

ID=23586345

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69602300T Expired - Lifetime DE69602300T2 (de) 1995-03-08 1996-02-12 Verfahren zur Abscheidung von Kohlenstoffschichten

Country Status (3)

Country Link
US (1) US5458927A (de)
EP (1) EP0731190B1 (de)
DE (1) DE69602300T2 (de)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5354381A (en) * 1993-05-07 1994-10-11 Varian Associates, Inc. Plasma immersion ion implantation (PI3) apparatus
CA2184206C (en) * 1995-08-29 2002-10-08 Yasuaki Sakamoto Molded glass plate produced by mold with modified surface
US5672054A (en) * 1995-12-07 1997-09-30 Carrier Corporation Rotary compressor with reduced lubrication sensitivity
DE19601436A1 (de) * 1996-01-17 1997-07-24 Siegfried Dr Ing Straemke Verfahren und Vorrichtung zur Oberflächenbehandlung von Werkstücken
KR970064327A (ko) * 1996-02-27 1997-09-12 모리시다 요이치 고주파 전력 인가장치, 플라즈마 발생장치, 플라즈마 처리장치, 고주파 전력 인가방법, 플라즈마 발생방법 및 플라즈마 처리방법
AT411070B (de) * 1996-03-25 2003-09-25 Electrovac Verfahren zur herstellung eines substrates mit einer polykristallinen diamantschicht
US5840427A (en) * 1996-05-21 1998-11-24 Teledyne Industries Incorporated Method for making corrosion resistant electrical components
DE19635736C2 (de) 1996-09-03 2002-03-07 Saxonia Umformtechnik Gmbh Diamantähnliche Beschichtung
US5763017A (en) * 1996-10-28 1998-06-09 Toyo Technologies Inc. Method for producing micro-bubble-textured material
WO1999020086A2 (en) * 1997-09-24 1999-04-22 The Regents Of The University Of California Process for forming adherent coatings using plasma processing
JP3555844B2 (ja) * 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
US6821571B2 (en) 1999-06-18 2004-11-23 Applied Materials Inc. Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers
US6205291B1 (en) 1999-08-25 2001-03-20 A. O. Smith Corporation Scale-inhibiting heating element and method of making same
US6579833B1 (en) 1999-09-01 2003-06-17 The Board Of Trustees Of The University Of Illinois Process for converting a metal carbide to carbon by etching in halogens
US6660340B1 (en) 2000-02-08 2003-12-09 Epion Corporation Diamond-like carbon film with enhanced adhesion
US6409104B1 (en) * 2000-04-19 2002-06-25 Ford Global Technologies, Inc. Silicon-doped amorphous carbon coating for paint bell atomizers
US6739238B2 (en) 2000-11-20 2004-05-25 Nissan Motor Co., Ltd. Sliding structure for a reciprocating internal combustion engine and a reciprocating internal combustion engine using the sliding structure
JP2003184883A (ja) 2001-12-20 2003-07-03 Nissan Motor Co Ltd 軸受摺動部材
FR2836157B1 (fr) * 2002-02-19 2004-04-09 Usinor Procede de nettoyage de la surface d'un materiau enduit d'une susbstance organique, generateur et dispositif de mise en oeuvre
JP3555891B2 (ja) 2002-02-22 2004-08-18 新日本石油株式会社 低摩擦摺動材料及びこれに用いる潤滑油組成物
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
US6991219B2 (en) * 2003-01-07 2006-01-31 Ionbond, Llc Article having a hard lubricious coating
KR20060009934A (ko) 2003-05-16 2006-02-01 블루 멤브레인스 게엠베하 탄소 기재 물질에 의한 기질 코팅 방법
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
WO2005014761A2 (ja) 2003-08-06 2005-02-17 Nissan Motor Co., Ltd. 低摩擦摺動機構、低摩擦剤組成物及び摩擦低減方法
JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
JP2005090489A (ja) * 2003-08-11 2005-04-07 Nissan Motor Co Ltd 内燃機関用バルブリフター
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (de) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Getriebe enthaltend eine getriebeölzusammensetzung
US9771648B2 (en) 2004-08-13 2017-09-26 Zond, Inc. Method of ionized physical vapor deposition sputter coating high aspect-ratio structures
US9123508B2 (en) 2004-02-22 2015-09-01 Zond, Llc Apparatus and method for sputtering hard coatings
US7095179B2 (en) 2004-02-22 2006-08-22 Zond, Inc. Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
US20050271808A1 (en) * 2004-03-25 2005-12-08 Nomadics, Inc. Process and apparatus for layer by layer assembly of reinforced composite materials
US7383807B2 (en) * 2005-05-23 2008-06-10 Federal-Mogul World Wide, Inc. Coated power cylinder components for diesel engines
US8642135B2 (en) * 2005-09-01 2014-02-04 Micron Technology, Inc. Systems and methods for plasma doping microfeature workpieces
US20070259184A1 (en) * 2006-05-04 2007-11-08 Commonwealth Scientific And Industrial Research Organisation Method of mounting objects for chemical vapour deposition
DE202006007420U1 (de) * 2006-05-09 2007-09-20 Pepperl + Fuchs Gmbh Gehäuseanordnung
DE102007023931A1 (de) * 2007-05-23 2008-12-04 Dürr Systems GmbH Kolbenstangendichtung für einen Isolationszylinder einer Beschichtungsanlage
MY154004A (en) * 2007-05-23 2015-04-30 Southwest Res Inst Plasma immersion ion processing fro coating of hollow substrates
FR2920656B1 (fr) * 2007-09-07 2013-02-22 Cie Mediterraneenne Des Cafes Piece pour un circuit hydraulique de machine de preparation de boissons comprenant un revetement.
FR2920657B1 (fr) * 2007-09-07 2013-02-22 Cie Mediterraneenne Des Cafes Chaudiere pour machine de preparation de boissons.
US8550792B2 (en) * 2008-06-30 2013-10-08 Eaton Corporation Energy conversion device and method of reducing friction therein
US9175381B2 (en) * 2008-07-09 2015-11-03 Southwest Research Institute Processing tubular surfaces using double glow discharge
US8030624B2 (en) * 2009-03-03 2011-10-04 GM Global Technology Operations LLC Photoluminescent coating for vehicles
US8753725B2 (en) 2011-03-11 2014-06-17 Southwest Research Institute Method for plasma immersion ion processing and depositing coatings in hollow substrates using a heated center electrode
US9121540B2 (en) 2012-11-21 2015-09-01 Southwest Research Institute Superhydrophobic compositions and coating process for the internal surface of tubular structures
BR102013031497A2 (pt) * 2013-12-06 2015-11-10 Mahle Int Gmbh processo de revestimento de um cilindro de um motor a combustão interna e cilindro/camisa de motor
US9476485B2 (en) * 2014-03-14 2016-10-25 Ford Global Technologies, Llc Diamond-like carbon coating on chain guides and tensioning arms for internal combustion engines
EP2963145B1 (de) * 2014-06-30 2018-01-31 IHI Hauzer Techno Coating B.V. Beschichtung und verfahren zu ihrer abscheidung zum betrieb unter grenzflächenschmierungs-bedingungen und bei erhöhter temperatur

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR890002162B1 (ko) * 1985-11-28 1989-06-21 가부시키가이샤 도시바 세라믹스가 코팅된 슬라이딩 부재와 그의 제조 방법
FR2596775B1 (fr) * 1986-04-07 1992-11-13 Univ Limoges Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone
US4764394A (en) * 1987-01-20 1988-08-16 Wisconsin Alumni Research Foundation Method and apparatus for plasma source ion implantation
US4960643A (en) * 1987-03-31 1990-10-02 Lemelson Jerome H Composite synthetic materials
JP2689146B2 (ja) * 1988-10-31 1997-12-10 新日本製鐵株式会社 硬質炭素膜のコーティング方法
FR2682125A1 (fr) * 1991-10-07 1993-04-09 Nitruvid Procede de traitement pour deposer une couche de carbone en phase vapeur sur la surface d'une piece metallique et piece ainsi obtenue.
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition
US5237967A (en) * 1993-01-08 1993-08-24 Ford Motor Company Powertrain component with amorphous hydrogenated carbon film
US5309874A (en) * 1993-01-08 1994-05-10 Ford Motor Company Powertrain component with adherent amorphous or nanocrystalline ceramic coating system

Also Published As

Publication number Publication date
EP0731190A1 (de) 1996-09-11
DE69602300T2 (de) 1999-09-02
US5458927A (en) 1995-10-17
EP0731190B1 (de) 1999-05-06

Similar Documents

Publication Publication Date Title
DE69602300D1 (de) Verfahren zur Abscheidung von Kohlenstoffschichten
DE69410301T2 (de) Verfahren zur Herstellung funktioneller niedergeschlagener Schichten
DE69618310D1 (de) Verfahren zur Selektion von Adsorptionsmitteln
DE69431573T2 (de) Verfahren zur Herstellung von Schichten
DE69627613D1 (de) Verfahren zur Rückgewinnung von Substraten
DE59600015D1 (de) Verfahren zur Herstellung von Thermoplasten
DE59404573D1 (de) Verfahren zur Herstellung von Mehrschichtlackierungen
DE59307302D1 (de) Verfahren zur Herstellung von Mehrschichtlackierungen
DE59308693D1 (de) Verfahren zur Herstellung von Mehrschichtlackierungen
DE69603337D1 (de) Verfahren zur Zersetzung von halogenenthaltendem Gas
DE59600302D1 (de) Verfahren zur Herstellung von Thermoplasten
ATE215405T1 (de) Verfahren zur herstellung von mehrschichtigen überzügen
DE59605604D1 (de) Verfahren zur herstellung von mehrschichtigen überzügen
DE69400257T2 (de) Verfahren zur Reinigung von Pentafluorethan
DE59600373D1 (de) Verfahren zur Herstellung von Thermoplasten
DE59607675D1 (de) Verfahren zur Nachbehandlung von thermoplastischen Fluorpolymeren
DE59603541D1 (de) Verfahren zur Reinigung von Bisphenol-A
DE69502137T2 (de) Verfahren zur Methathesis von Olefinen
DE69504563T2 (de) Verfahren zur Herstellung von Dünnschichten
DE59600080D1 (de) Verfahren zur Herstellung von Thermoplasten
DE69433634D1 (de) Verfahren zur Umsetzung von Kohlenwasserstoffen
DE59811264D1 (de) Verfahren zur Abscheidung optischer Schichten
DE59603312D1 (de) Verfahren zur reaktiven Schichtabscheidung
DE69618481D1 (de) Verfahren zur herstellung von halogenkohlenwasserstoffen
DE69424710D1 (de) Verbessertes Verfahren zur Bildung von kontinuierlichen Diamant-Schichten

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8380 Miscellaneous part iii

Free format text: PFANDRECHT