FR2596775B1 - Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone - Google Patents

Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone

Info

Publication number
FR2596775B1
FR2596775B1 FR8604944A FR8604944A FR2596775B1 FR 2596775 B1 FR2596775 B1 FR 2596775B1 FR 8604944 A FR8604944 A FR 8604944A FR 8604944 A FR8604944 A FR 8604944A FR 2596775 B1 FR2596775 B1 FR 2596775B1
Authority
FR
France
Prior art keywords
carbon
titanium
hard coating
coating made
ion deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8604944A
Other languages
English (en)
Other versions
FR2596775A1 (fr
Inventor
Jean Machet
Claude Lory
Christian Weissmantel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Limoges
Original Assignee
Universite de Limoges
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite de Limoges filed Critical Universite de Limoges
Priority to FR8604944A priority Critical patent/FR2596775B1/fr
Publication of FR2596775A1 publication Critical patent/FR2596775A1/fr
Application granted granted Critical
Publication of FR2596775B1 publication Critical patent/FR2596775B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
FR8604944A 1986-04-07 1986-04-07 Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone Expired - Lifetime FR2596775B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8604944A FR2596775B1 (fr) 1986-04-07 1986-04-07 Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8604944A FR2596775B1 (fr) 1986-04-07 1986-04-07 Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone

Publications (2)

Publication Number Publication Date
FR2596775A1 FR2596775A1 (fr) 1987-10-09
FR2596775B1 true FR2596775B1 (fr) 1992-11-13

Family

ID=9333971

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8604944A Expired - Lifetime FR2596775B1 (fr) 1986-04-07 1986-04-07 Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone

Country Status (1)

Country Link
FR (1) FR2596775B1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3790317T (fr) * 1986-06-18 1988-06-23
FR2682125A1 (fr) * 1991-10-07 1993-04-09 Nitruvid Procede de traitement pour deposer une couche de carbone en phase vapeur sur la surface d'une piece metallique et piece ainsi obtenue.
JPH0649645A (ja) * 1992-07-31 1994-02-22 Yoshida Kogyo Kk <Ykk> 硬質多層膜形成体およびその製造方法
DE4343354C2 (de) * 1993-12-18 2002-11-14 Bosch Gmbh Robert Verfahren zur Herstellung einer Hartstoffschicht
FR2728272B1 (fr) * 1994-12-20 1997-01-24 Commissariat Energie Atomique Couche d'interface entre un revetement mince a base de carbone et un substrat en alliage de titane, materiau multicouche comprenant ladite couche et son procede de fabrication
US5458927A (en) * 1995-03-08 1995-10-17 General Motors Corporation Process for the formation of wear- and scuff-resistant carbon coatings
DE19610342A1 (de) * 1996-03-18 1997-09-25 Saacke Zorn Walztech Verwendung einer elementaren Kohlenstoff enthaltenden Schicht auf Werkzeugen für spanende Formgebung
DE10018143C5 (de) 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
US8470019B1 (en) * 2001-11-30 2013-06-25 Advanced Cardiovascular Systems, Inc. TiNxOy modified surface for an implantable device and a method of producing the same
CN100523299C (zh) 2003-07-25 2009-08-05 贝卡尔特股份有限公司 覆盖有中间涂层和硬质碳涂层的基材
CN114959551B (zh) * 2022-04-29 2023-12-19 超微中程纳米科技（苏州）有限公司 模具钢刀具离子氮化工艺

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6011372B2 (ja) * 1976-09-28 1985-03-25 松下電器産業株式会社 磁気記録媒体の製造方法
DD141039A1 (de) * 1977-08-04 1980-04-09 Klaus Bewilogua Verfahren zur herstellung harter schichten mit hoher haftfestigkeit
JPS5625960A (en) * 1979-08-09 1981-03-12 Mitsubishi Metal Corp Surface-coated high speed steel material for cutting tool
JPS5629670A (en) * 1980-07-25 1981-03-25 Sumitomo Electric Ind Ltd Preparation of coated high speed steel
JPS5928629B2 (ja) * 1981-03-30 1984-07-14 工業技術院長 硬質被膜の製造方法
JPS5864377A (ja) * 1981-10-12 1983-04-16 Nachi Fujikoshi Corp 表面被覆工具およびその製造方法
AT381268B (de) * 1982-05-05 1986-09-25 Ver Edelstahlwerke Ag Werkzeug und verfahren zu dessen herstellung
JPS59170262A (ja) * 1983-03-14 1984-09-26 Mitsubishi Metal Corp 耐摩耗性のすぐれた表面被覆工具部材
KR890002747B1 (ko) * 1983-11-07 1989-07-26 가부시기가이샤 히다찌세이사꾸쇼 이온 빔에 의한 성막방법 및 그 장치
SE453474B (sv) * 1984-06-27 1988-02-08 Santrade Ltd Kompoundkropp belagd med skikt av polykristallin diamant

Also Published As

Publication number Publication date
FR2596775A1 (fr) 1987-10-09

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