DE68917503T2 - Epitaktische Ablagerung von dünnen Schichten. - Google Patents

Epitaktische Ablagerung von dünnen Schichten.

Info

Publication number
DE68917503T2
DE68917503T2 DE68917503T DE68917503T DE68917503T2 DE 68917503 T2 DE68917503 T2 DE 68917503T2 DE 68917503 T DE68917503 T DE 68917503T DE 68917503 T DE68917503 T DE 68917503T DE 68917503 T2 DE68917503 T2 DE 68917503T2
Authority
DE
Germany
Prior art keywords
thin layers
epitaxial deposition
epitaxial
deposition
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68917503T
Other languages
English (en)
Other versions
DE68917503D1 (de
Inventor
John E Epler
Harlan F Chung
Thomas L Paoli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE68917503D1 publication Critical patent/DE68917503D1/de
Application granted granted Critical
Publication of DE68917503T2 publication Critical patent/DE68917503T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
DE68917503T 1988-04-04 1989-04-03 Epitaktische Ablagerung von dünnen Schichten. Expired - Fee Related DE68917503T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17756388A 1988-04-04 1988-04-04

Publications (2)

Publication Number Publication Date
DE68917503D1 DE68917503D1 (de) 1994-09-22
DE68917503T2 true DE68917503T2 (de) 1995-03-30

Family

ID=22649087

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68917503T Expired - Fee Related DE68917503T2 (de) 1988-04-04 1989-04-03 Epitaktische Ablagerung von dünnen Schichten.

Country Status (3)

Country Link
EP (1) EP0336672B1 (de)
JP (1) JP2871712B2 (de)
DE (1) DE68917503T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5135695A (en) * 1989-12-04 1992-08-04 Board Of Regents The University Of Texas System Positioning, focusing and monitoring of gas phase selective beam deposition
US5017317A (en) * 1989-12-04 1991-05-21 Board Of Regents, The Uni. Of Texas System Gas phase selective beam deposition
US5611883A (en) * 1995-01-09 1997-03-18 Board Of Regents, The University Of Texas System Joining ceramics and attaching fasteners to ceramics by gas phase selective beam deposition
US20020063753A1 (en) * 1995-06-28 2002-05-30 Masahiko Kubota Liquid ejecting printing head, production method thereof and production method for base body employed for liquid ejecting printing head
DE19703338C2 (de) * 1996-12-27 1998-11-12 Ardenne Anlagentech Gmbh Verfahren zur Vorwärmung von Werkstücken bei der Vakuumbeschichtung
DE10047625A1 (de) * 2000-09-26 2002-04-11 Max Planck Gesellschaft Stöchiometrieänderung eines ionisch aufgebauten Feststoffes
WO2003029516A1 (en) 2001-09-29 2003-04-10 Cree, Inc. Apparatus for inverted cvd
US7122844B2 (en) 2002-05-13 2006-10-17 Cree, Inc. Susceptor for MOCVD reactor
US8366830B2 (en) 2003-03-04 2013-02-05 Cree, Inc. Susceptor apparatus for inverted type MOCVD reactor
DE102009005297B4 (de) * 2009-01-16 2013-05-08 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Beschichtung von Substraten mittels Vakuumbedampfung
CN103603038B (zh) * 2013-12-10 2016-06-22 吉林大学 具有水平式多孔喷淋装置的光辅助mocvd反应器
EP3835452B1 (de) * 2019-12-09 2024-01-31 The Swatch Group Research and Development Ltd Herstellungsverfahren einer dekoroberfläche
DE102022116962A1 (de) 2022-07-07 2024-01-18 Forschungsverbund Berlin E.V. Verfahren und Züchtungsaufbau zum Herstellen lokalisierter Strukturen

Also Published As

Publication number Publication date
EP0336672A2 (de) 1989-10-11
JPH01300516A (ja) 1989-12-05
DE68917503D1 (de) 1994-09-22
EP0336672B1 (de) 1994-08-17
EP0336672A3 (en) 1990-10-10
JP2871712B2 (ja) 1999-03-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee