DE3669543D1 - Ablagern von titanaluminiden. - Google Patents

Ablagern von titanaluminiden.

Info

Publication number
DE3669543D1
DE3669543D1 DE8686114884T DE3669543T DE3669543D1 DE 3669543 D1 DE3669543 D1 DE 3669543D1 DE 8686114884 T DE8686114884 T DE 8686114884T DE 3669543 T DE3669543 T DE 3669543T DE 3669543 D1 DE3669543 D1 DE 3669543D1
Authority
DE
Germany
Prior art keywords
titanaluminides
depositing
depositing titanaluminides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686114884T
Other languages
English (en)
Inventor
Robert Edwards Benander
Robert Alfred Holzl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE3669543D1 publication Critical patent/DE3669543D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
DE8686114884T 1985-10-31 1986-10-27 Ablagern von titanaluminiden. Expired - Lifetime DE3669543D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/793,616 US4698244A (en) 1985-10-31 1985-10-31 Deposition of titanium aluminides

Publications (1)

Publication Number Publication Date
DE3669543D1 true DE3669543D1 (de) 1990-04-19

Family

ID=25160364

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686114884T Expired - Lifetime DE3669543D1 (de) 1985-10-31 1986-10-27 Ablagern von titanaluminiden.

Country Status (4)

Country Link
US (1) US4698244A (de)
EP (1) EP0222241B1 (de)
CA (1) CA1309903C (de)
DE (1) DE3669543D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5300159A (en) * 1987-12-23 1994-04-05 Mcdonnell Douglas Corporation Method for manufacturing superplastic forming/diffusion bonding tools from titanium
DE4119967C1 (de) * 1991-06-18 1992-09-17 Mtu Muenchen Gmbh
US5264245A (en) * 1991-12-04 1993-11-23 Howmet Corporation CVD method for forming uniform coatings
US5261963A (en) * 1991-12-04 1993-11-16 Howmet Corporation CVD apparatus comprising exhaust gas condensation means
US5358901A (en) * 1993-03-01 1994-10-25 Motorola, Inc. Process for forming an intermetallic layer
US6689422B1 (en) * 1994-02-16 2004-02-10 Howmet Research Corporation CVD codeposition of A1 and one or more reactive (gettering) elements to form protective aluminide coating
US5989733A (en) * 1996-07-23 1999-11-23 Howmet Research Corporation Active element modified platinum aluminide diffusion coating and CVD coating method
US6274486B1 (en) 1998-09-02 2001-08-14 Micron Technology, Inc. Metal contact and process
US6699305B2 (en) * 2000-03-21 2004-03-02 James J. Myrick Production of metals and their alloys
US6440494B1 (en) 2000-04-05 2002-08-27 Tokyo Electron Limited In-situ source synthesis for metal CVD
US6602356B1 (en) * 2000-09-20 2003-08-05 General Electric Company CVD aluminiding process for producing a modified platinum aluminide bond coat for improved high temperature performance
US6793966B2 (en) * 2001-09-10 2004-09-21 Howmet Research Corporation Chemical vapor deposition apparatus and method
US20030047141A1 (en) * 2001-09-10 2003-03-13 Warnes Bruce M. Coating gas generator and method
JP3803788B2 (ja) * 2002-04-09 2006-08-02 農工大ティー・エル・オー株式会社 Ａｌ系ＩＩＩ−Ｖ族化合物半導体の気相成長方法、Ａｌ系ＩＩＩ−Ｖ族化合物半導体の製造方法ならびに製造装置
US7390535B2 (en) * 2003-07-03 2008-06-24 Aeromet Technologies, Inc. Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings
WO2007106076A2 (en) * 2006-03-03 2007-09-20 Prasad Gadgil Apparatus and method for large area multi-layer atomic layer chemical vapor processing of thin films

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB765793A (en) * 1950-12-13 1957-01-16 Onera (Off Nat Aerospatiale) Method of forming mixed superficial diffusion alloys, including chromium, on metallic objects
US3276903A (en) * 1953-02-04 1966-10-04 Onera (Off Nat Aerospatiale) Heat treatment of metals
GB798853A (en) * 1954-05-31 1958-07-30 Siemens Planiawerke Ag Improvements in or relating to processes for depositing coatings of aluminium or of aluminium-base alloys on a basis metal and for the production of pulverous aluminium-base alloys
US2886469A (en) * 1954-05-31 1959-05-12 Siemens Planiawerke Ag Method of coating metallic bodies with aluminum utilizing vaporous sub-chlorides
US3252823A (en) * 1961-10-17 1966-05-24 Du Pont Process for aluminum reduction of metal halides in preparing alloys and coatings
US3464843A (en) * 1962-03-21 1969-09-02 Union Carbide Corp Pyrolytic graphite alloys and method of making the same
US3415672A (en) * 1964-11-12 1968-12-10 Gen Electric Method of co-depositing titanium and aluminum on surfaces of nickel, iron and cobalt
US4082864A (en) * 1974-06-17 1978-04-04 Fiber Materials, Inc. Reinforced metal matrix composite
FR2508063A1 (fr) * 1981-06-18 1982-12-24 Snecma Procede, en phase vapeur, pour le depot d'un revetement protecteur sur une piece metallique, dispositif pour sa mise en oeuvre et pieces obtenues selon ledit procede
FR2511396A1 (fr) * 1981-08-14 1983-02-18 Electricite De France Procede de revetement de surfaces metalliques par diffusion d'aluminium pour la protection contre le soufre a haute temperature

Also Published As

Publication number Publication date
US4698244A (en) 1987-10-06
EP0222241A1 (de) 1987-05-20
CA1309903C (en) 1992-11-10
EP0222241B1 (de) 1990-03-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee