CN100523299C - 覆盖有中间涂层和硬质碳涂层的基材 - Google Patents

覆盖有中间涂层和硬质碳涂层的基材 Download PDF

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CN100523299C
CN100523299C CNB2004800191906A CN200480019190A CN100523299C CN 100523299 C CN100523299 C CN 100523299C CN B2004800191906 A CNB2004800191906 A CN B2004800191906A CN 200480019190 A CN200480019190 A CN 200480019190A CN 100523299 C CN100523299 C CN 100523299C
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CN1816648A (zh
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J·德努尔
E·德克姆潘尼尔
W·德博谢尔
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Oerlikon Metaplas GmbH
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Abstract

本发明涉及至少部分履盖有叠层涂层的基材。叠层涂层包括中间涂层和硬质碳涂层。中间涂层包括沉积在基材上的第一金属层，该第一金属层包含IVB族、VB族或VIB族的至少一种元素；沉积在第一金属层上的氮化物层，该氮化物层包含IVB族、VB族或VIB族元素的至少一种氮化物；沉积在氮化物层上的第二金属层，该第二金属层包含IVB族、VB族或VIB族的至少一种元素；沉积在第二金属层上的过渡层，该过渡层包含IVB族、VB族或VIB族元素的至少一种碳化物。

Description

覆盖有中间涂层和硬质碳涂层的基材
发明领域
本发明涉及至少部分覆盖有中间涂层和硬质碳涂层的基材。
发明背景
硬质碳涂层如类金刚石碳(DLC)涂层是有吸引力的涂层，例如因为其高硬度和低摩擦系数、化学惰性和生物相容性。DLC涂层的一个主要问题是附着于基材的附着力低。
已经发现在DLC层和基材之间施加一个或多个中间层能够提高附着强度。已经测试了各种中间层，例如Ti、TiN或TiC的中间层。
FR 2596775描述了TiN-TiCN中间层的应用。然而，DLC涂层附着于基材的附着力仍然是一个问题。
发明概述
本发明的一个目的是提供与基材具有提高附着力的涂层。
根据本发明的第一方面，提供至少部分覆盖有叠层涂层的基材。
叠层涂层包括中间涂层和硬质碳涂层。该中间涂层包括：
-沉积在基材上的第一金属层，该第一金属层包含IVB族、VB族或VIB族的至少一种元素；
-沉积在第一金属层上的氮化物层，该氮化物层包含IVB族、VB族或VIB族元素的至少一种氮化物；
-沉积在氮化物层上的第二金属层，该第二金属层包含IVB族、VB族或VIB族的至少一种元素；
-沉积在所述第二金属层上的过渡层，该过渡层包含IVB族、VB族或VIB族元素的至少一种碳化物。
第一和第二金属层是附着力提高层：
-第一金属层也就是位于基材与氮化物层之间的层，提高氮化物层附着于基材的附着力。
-第二金属层也就是位于氮化物层与碳化物层之间的层，提高碳化物层附着于氮化物层的附着力。
硬质碳涂层可以包括现有技术中已知的任何碳基涂层。
优选地，硬质碳涂层包括类金刚石涂层。类金刚石涂层是具有高硬度和低摩擦系数的无定形碳基涂层，其独特的组成和结构导致优异的耐磨性和不粘附性。
类金刚石涂层包括例如类金刚石碳(DLC)涂层和类金刚石纳米复合(DLN)涂层，或者类金刚石碳(DLC)和类金刚石纳米复合(DLN)涂层的叠层结构。
类金刚石涂层包括无定形氢化碳涂层(a-C:H)；而类金刚石纳米复合涂层包括a-C:H和a-Si:O的相互贯通网络。代表性的DLN层涂包含30到70at％的C，20到40at％的H，5到15at％的Si和5到15at％的0。
DLN涂层甚至在高湿度或潮湿环境中表现出很低的摩擦系数。
可以通过现有技术中已知的任何技术沉积硬质碳涂层如类金刚石涂层。优选技术包括化学气相沉积(CVD)，例如等离子体辅助化学气相沉积(PACVD)。
为影响其导电性，硬质碳涂层如DLC或DLN层能够进一步掺杂过渡金属。特别是W、Zr、Ti、Nb和Ta非常适合作为掺杂元素。
DLC或DLN涂层还可包含惰性气体如Ne、Ar或Kr，例如数量为0.5到5at％。
第一金属层和第二金属层可以包含IVB族、VB族或VIB族的任何元素或元素的组合。在优选实施方案中，第一和/或第二金属层包含Ti或Cr。
第一金属层和第二金属层优选具有介于0.001到1μm的厚度范围，例如介于0.001和0.1μm之间，例如0.05μm。
氮化物层可以包含IVB族、VB族或VIB族元素的至少一种氮化物。在优选实施方案中，氮化物层包含TiN或CrN。
氮化物层与硬质碳涂层联合给予叠层涂层所需的机械性能。
氮化物层的厚度优选地介于0到5μm。更优选地，氮化物层具有介于0.001到1μm的厚度，例如0.75或1μm。
沉积在第二金属层上的过渡层包含IVB族、VB族或VIB族元素的至少一种碳化物。过渡层优选地包含TixCy或CrxCy。过渡层包含如化学计量组成的TiC或Cr2C3。然而，过渡层也可以包含非化学计量组成的TixCy或CrxCy。优选地，过渡层显示出梯度，由此，从过渡层与第二金属层接触的一侧朝向过渡层与硬质碳层接触的一侧，碳含量增加，金属含量减少。
碳化物层的厚度优选地介于0.001到1μm，例如0.1μm。
基于前述优点的叠层涂层同时具有与基材的良好附着力和高硬度的特性。
采用洛氏硬度C压痕测试，根据本发明的叠层涂层的附着力优于HF2，更优选地等于HF1(VDI 3198标准)。在划痕硬度试验(欧洲标准推荐(EuropeanStandard suggestion)prEN 1071-3)中，获得离层的临界载荷高于35N，更优选地高于50N。
根据本发明的叠层涂层的硬度高于10GPa。在优选实施方案中，达到至少20GPa的硬度。硬度可能受到对叠层涂层的顶层进行选择的影响。
待涂覆的基材可以包括任何基材，柔性的或刚性的。基材的例子包括钢基材、硬质金属陶瓷、硅基材、铝或铝合金基材、钛或钛合金基材、铜或铜合金基材、陶瓷或玻璃基材。
根据本发明的叠层涂层能够用于大量用途。DLC涂层的组成能够作特别调整以满足预定的要求，例如低摩擦、高硬度、高耐磨、高耐蚀和不粘附特性。
根据本发明的叠层涂层能够例如用于涂敷各种各样的造型装置(mouldingsmeans)、医用植入物、汽车传动部件、纺织元件......
发明优选实施方案的描述
为了评估第一金属层的影响，比较两个样品。
第一个样品中，TiN层直接沉积到基材上；第二个样品中，Ti层(0.010μm)沉积到基材上，TiN层沉积到Ti层上。
在第一个样品中，从基材支架上移开后，TiN层立即剥离。在样品的边缘剥离最显著。由于边缘场效应，生长过程中在这些边缘处离子轰击更强烈，这样在涂层中可形成可使涂层更容易剥离的较高应力。压痕测试(HF6)和划痕硬度试验(临界载荷＝16N)证实了低附着力。
第二个样品显示了通过压痕测试(HF1)和划痕硬度试验(临界载荷>30N)得到证实的良好附着力。在一个实施方案中，划痕硬度试验显示临界载荷高于47N。为了在沉积硬质碳层如DLC层前检查过渡层的必要性，DLC直接沉积在TiN层上(0.01μm Ti/0.6μm TiN/1.3μm DLC)。
能够观察到DLC从TiN剥离。通过很差的压痕结果和划痕硬度试验中的低临界载荷(28N)，证实这种低附着力。
该结果证明TiN和DLC涂层之间的过渡是关键性的，某种过渡层是必要的。
比较三个不同样品：
1)叠层涂层，包含
0.1μm Ti/0.6μm TiN/0.6μm TiC/1.3μm DLC；
2)叠层涂层，包含
0.1μm Ti/0.6μm TiN/0.3μm TiNC/1.3μm DLC；
3)叠层涂层，包含
0.01μm Ti/0.75μm TiN/0.01μm Ti/0.1μm TiC/1.3μm DLC。
第一和第二个样品显示了低附着力，而第三个样品显示了良好的附着力。通过压痕测试(HF1)和划痕硬度试验(临界载荷>40N)，证实了第三个样品的良好附着力。
在另一个例子中，叠层涂层含中间涂层，所述中间涂层包括：
-第一Cr层；
-CrN层；
-第二Cr层；
-CrxCy层，例如Cr3C2层。

Claims (15)

1、至少部分覆盖有叠层涂层的基材，所述叠层涂层包括中间涂层和硬质碳涂层，其特征在于所述中间涂层包括
-沉积在基材上的第一金属层，所述第一金属层包含IVB族、VB族或VIB族的至少一种元素；
-沉积在所述第一金属层上的氮化物层，所述氮化物层包含IVB族、VB族或VIB族元素的至少一种氮化物；
-沉积在所述氮化物层上的第二金属层，所述第二金属层包含IVB族、VB族或VIB族的至少一种元素；
-沉积在所述第二金属层上的过渡层，所述过渡层包含IVB族、VB族或VIB族元素的至少一种碳化物。
2、根据权利要求1的基材，其中所述硬质碳涂层包括类金刚石碳涂层。
3、根据权利要求1的基材，其中所述硬质碳涂层包括类金刚石纳米复合涂层。
4、根据权利要求1的基材，其中所述硬质碳涂层包括类金刚石碳涂层和类金刚石纳米复合涂层的叠层结构。
5、根据权利要求1-4中任一项的基材，其中所述硬质碳涂层掺杂有过渡金属和/或惰性气体。
6、根据权利要求1-4中任一项的基材，其中所述第一金属层包含Ti或Cr。
7、根据权利要求1-4中任一项的基材，其中所述氮化物层包含TiN或CrN。
8、根据权利要求1-4中任一项的基材，其中所述第二金属层包含Ti或Cr。
9、根据权利要求1-4中任一项的基材，其中所述过渡层包含TixCy或CrxCy。
10、根据权利要求1-4中任一项的基材，其中所述第一金属层和所述第二金属层具有介于0.001到1μm的厚度。
11、根据权利要求1-4中任一项的基材，其中所述氮化物层具有介于0到5μm的厚度。
12、根据权利要求1-4中任一项的基材，其中所述过渡层具有介于0.001到1μm的厚度。
13、根据权利要求1-4中任一项的基材，其中借助于洛氏硬度C测试，所述叠层涂层表现出的附着力优于HF2。
14、根据权利要求1-4中任一项的基材，其中借助于得到离层的临界载荷，所述叠层涂层表现出的附着力高于35N。
15、根据权利要求1-4中任一项的基材，其中所述叠层涂层具有至少10GPa的硬度。
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