DE69233067D1 - Integrierte Schaltungen - Google Patents
Integrierte SchaltungenInfo
- Publication number
- DE69233067D1 DE69233067D1 DE69233067T DE69233067T DE69233067D1 DE 69233067 D1 DE69233067 D1 DE 69233067D1 DE 69233067 T DE69233067 T DE 69233067T DE 69233067 T DE69233067 T DE 69233067T DE 69233067 D1 DE69233067 D1 DE 69233067D1
- Authority
- DE
- Germany
- Prior art keywords
- integrated circuits
- circuits
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/469—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After-treatment of these layers
- H01L21/47—Organic layers, e.g. photoresist
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
- H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
- H01J2237/31777—Lithography by projection
- H01J2237/31788—Lithography by projection through mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
- H01J2237/31777—Lithography by projection
- H01J2237/31791—Scattering mask
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/814,953 US5260151A (en) | 1991-12-30 | 1991-12-30 | Device manufacture involving step-and-scan delineation |
US814953 | 1991-12-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69233067D1 true DE69233067D1 (de) | 2003-06-26 |
DE69233067T2 DE69233067T2 (de) | 2004-04-01 |
Family
ID=25216448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69233067T Expired - Lifetime DE69233067T2 (de) | 1991-12-30 | 1992-12-10 | Integrierte Schaltungen |
Country Status (7)
Country | Link |
---|---|
US (1) | US5260151A (de) |
EP (1) | EP0550173B1 (de) |
JP (1) | JP3457346B2 (de) |
KR (1) | KR100272116B1 (de) |
CA (1) | CA2083112C (de) |
DE (1) | DE69233067T2 (de) |
TW (1) | TW198138B (de) |
Families Citing this family (68)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5130213A (en) * | 1989-08-07 | 1992-07-14 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
US5674413A (en) * | 1993-12-23 | 1997-10-07 | International Business Machines Corporation | Scattering reticle for electron beam systems |
US5466904A (en) * | 1993-12-23 | 1995-11-14 | International Business Machines Corporation | Electron beam lithography system |
US5624774A (en) * | 1994-06-16 | 1997-04-29 | Nikon Corporation | Method for transferring patterns with charged particle beam |
JP3378413B2 (ja) * | 1994-09-16 | 2003-02-17 | 株式会社東芝 | 電子線描画装置及び電子線描画方法 |
JPH08124833A (ja) * | 1994-10-26 | 1996-05-17 | Nikon Corp | 荷電粒子線転写用マスク |
JPH08124834A (ja) * | 1994-10-26 | 1996-05-17 | Nikon Corp | 荷電粒子線転写装置 |
US5773837A (en) * | 1994-11-22 | 1998-06-30 | Nikon Corporation | Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus |
US5689117A (en) * | 1994-11-22 | 1997-11-18 | Nikon Corporation | Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus |
JPH0974064A (ja) * | 1995-06-26 | 1997-03-18 | Nikon Corp | 荷電粒子線によるパターン転写方法及び転写装置 |
JP3940824B2 (ja) * | 1995-08-14 | 2007-07-04 | 株式会社ニコン | 荷電粒子線によるパターン転写方法および転写装置 |
JP3518097B2 (ja) * | 1995-09-29 | 2004-04-12 | 株式会社ニコン | 荷電粒子線転写装置,パターン分割方法,マスクおよび荷電粒子線転写方法 |
JP3601630B2 (ja) * | 1995-11-01 | 2004-12-15 | 株式会社ニコン | 荷電粒子線転写方法 |
JPH09180987A (ja) * | 1995-12-26 | 1997-07-11 | Nikon Corp | 荷電粒子線転写装置 |
US5798194A (en) * | 1996-05-22 | 1998-08-25 | Nikon Corporation | Masks for charged-particle beam microlithography |
JPH1050584A (ja) * | 1996-08-07 | 1998-02-20 | Nikon Corp | マスク保持装置 |
KR100253580B1 (ko) * | 1996-10-02 | 2000-04-15 | 김영환 | 스티칭 노광 공정에 사용되는 마스크 |
JPH10135103A (ja) * | 1996-10-25 | 1998-05-22 | Nikon Corp | 荷電粒子線転写用マスクまたはx線転写用マスクの製造方法 |
US5824441A (en) * | 1996-12-03 | 1998-10-20 | Lucent Technologies Inc. | Lithographic process for device fabrication utilizing back-scattered electron beam signal intensity for alignment |
US6051344A (en) * | 1997-06-17 | 2000-04-18 | Intel Corporation | Multiple reduction photolithography technique |
US6180289B1 (en) | 1997-07-23 | 2001-01-30 | Nikon Corporation | Projection-microlithography mask with separate mask substrates |
US5780188A (en) * | 1997-08-22 | 1998-07-14 | Micron Technology, Inc. | Lithographic system and method for exposing a target utilizing unequal stepping distances |
JP4207232B2 (ja) * | 1997-09-02 | 2009-01-14 | 株式会社ニコン | 荷電ビーム露光装置 |
JPH11142121A (ja) | 1997-11-11 | 1999-05-28 | Nikon Corp | レチクルの歪み計測方法および歪み計測装置 |
JPH11168059A (ja) | 1997-12-03 | 1999-06-22 | Nikon Corp | 荷電粒子線投影光学系 |
JPH11204422A (ja) * | 1998-01-14 | 1999-07-30 | Nikon Corp | 荷電粒子線転写方法 |
US6051346A (en) * | 1998-04-29 | 2000-04-18 | Lucent Technologies Inc. | Process for fabricating a lithographic mask |
GB2338084B (en) * | 1998-05-05 | 2001-12-19 | Ims Ionen Mikrofab Syst | Lithographic imaging of a structure pattern onto one or more fields on a substrate |
US6177218B1 (en) | 1998-08-07 | 2001-01-23 | Lucent Technologies Inc. | Lithographic process for device fabrication using electron beam imaging |
JP2000100715A (ja) | 1998-09-17 | 2000-04-07 | Nikon Corp | 電子ビーム露光装置の調整方法 |
JP2000124114A (ja) * | 1998-10-14 | 2000-04-28 | Nikon Corp | 荷電粒子線投影露光方法、荷電粒子線投影露光装置及びそれに用いるレチクル |
US5985498A (en) * | 1999-03-01 | 1999-11-16 | Advanced Micro Devices, Inc. | Method of characterizing linewidth errors in a scanning lithography system |
JP2000323390A (ja) | 1999-05-12 | 2000-11-24 | Nikon Corp | 荷電粒子線露光装置 |
JP3348779B2 (ja) * | 1999-06-23 | 2002-11-20 | 日本電気株式会社 | パターン露光マスク、パターン露光方法及び装置、回路製造方法及びシステム、マスク製造方法 |
JP2001007013A (ja) * | 1999-06-24 | 2001-01-12 | Nikon Corp | 転写マスクブランクス及びその製造方法 |
JP3706527B2 (ja) | 1999-06-30 | 2005-10-12 | Hoya株式会社 | 電子線描画用マスクブランクス、電子線描画用マスクおよび電子線描画用マスクの製造方法 |
US6601025B1 (en) | 1999-08-10 | 2003-07-29 | International Business Machines Corporation | Method to partition the physical design of an integrated circuit for electrical simulation |
US7345290B2 (en) * | 1999-10-07 | 2008-03-18 | Agere Systems Inc | Lens array for electron beam lithography tool |
EP1091383A3 (de) * | 1999-10-07 | 2005-01-19 | Lucent Technologies Inc. | Elektronenstrahl-Abbildungsgerät |
US6333508B1 (en) | 1999-10-07 | 2001-12-25 | Lucent Technologies, Inc. | Illumination system for electron beam lithography tool |
US6261726B1 (en) | 1999-12-06 | 2001-07-17 | International Business Machines Corporation | Projection electron-beam lithography masks using advanced materials and membrane size |
JP2001189257A (ja) | 1999-12-28 | 2001-07-10 | Nikon Corp | 荷電粒子線照明光学系の調整方法 |
AU2001253715A1 (en) * | 2000-04-20 | 2001-11-07 | Coorstek, Inc. | Ceramic supports and methods |
US6440619B1 (en) | 2000-05-25 | 2002-08-27 | Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College | Method of distortion compensation by irradiation of adaptive lithography membrane masks |
US6404481B1 (en) * | 2000-05-25 | 2002-06-11 | Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College | Adaptive lithography membrane masks |
US6630984B2 (en) | 2000-08-03 | 2003-10-07 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
DE10041040A1 (de) * | 2000-08-22 | 2002-03-07 | Zeiss Carl | Vorrichtung und Verfahren zur Belichtung einer strahlungsempfindlichen Schicht mittels geladener Teilchen sowie Maske hierfür |
US6855467B2 (en) * | 2000-09-05 | 2005-02-15 | Hoya Corporation | Transfer mask, method of dividing pattern or transfer mask, and method of manufacturing transfer mask |
US6528799B1 (en) | 2000-10-20 | 2003-03-04 | Lucent Technologies, Inc. | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems |
US6635389B1 (en) | 2000-11-07 | 2003-10-21 | International Business Machines Corporation | Method of defining and forming membrane regions in a substrate for stencil or membrane marks |
TW591342B (en) * | 2000-11-30 | 2004-06-11 | Asml Netherlands Bv | Lithographic projection apparatus and integrated circuit manufacturing method using a lithographic projection apparatus |
DE10117025A1 (de) | 2001-04-05 | 2002-10-10 | Zeiss Carl | Teilchenoptische Vorrichtung,Beleuchtungsvorrichtung und Projektionssystem sowie Verfahren unter Verwendung derselben |
US6610464B2 (en) | 2001-05-24 | 2003-08-26 | Agere Systems Inc. | Process for patterning a membrane |
JP3674573B2 (ja) * | 2001-06-08 | 2005-07-20 | ソニー株式会社 | マスクおよびその製造方法と半導体装置の製造方法 |
KR100522725B1 (ko) * | 2002-04-04 | 2005-10-20 | 주식회사 디엠에스 | 대면적 마스크 및 이를 구비한 노광 시스템 |
CN100464440C (zh) * | 2002-06-03 | 2009-02-25 | 三星移动显示器株式会社 | 用于有机电致发光装置的薄层真空蒸发的掩模框组件 |
JP2004088072A (ja) * | 2002-06-28 | 2004-03-18 | Sony Corp | マスクおよびその検査方法 |
US6838213B2 (en) * | 2002-07-23 | 2005-01-04 | Agere Systems Inc. | Process for fabricating a mask |
EP1503244A1 (de) | 2003-07-28 | 2005-02-02 | ASML Netherlands B.V. | Lithographischer Projektionsapparat und Verfahren zur Herstellung einer Vorrichtung |
JP2005340835A (ja) * | 2004-05-28 | 2005-12-08 | Hoya Corp | 電子線露光用マスクブランクおよびマスク |
US20070085984A1 (en) * | 2005-10-18 | 2007-04-19 | Asml Netherlands B.V. | Lithographic projection apparatus, device manufacturing method and device manufactured thereby |
TWI330762B (en) * | 2005-03-29 | 2010-09-21 | Asml Netherlands Bv | Seal of a lithographic apparatus, lithographic apparatus, device manufacturing method and data storage medium |
WO2006123447A1 (ja) * | 2005-05-17 | 2006-11-23 | Kyoto University | 電子ビーム露光装置 |
EP2130086A4 (de) * | 2007-03-02 | 2012-03-14 | Protochips Inc | Membranhalterungen mit verstärkungsmerkmalen |
EP2919255A1 (de) * | 2007-05-09 | 2015-09-16 | Protochips, Inc. | Auflagestrukturen für die mikroskopie |
US9312097B2 (en) | 2007-05-09 | 2016-04-12 | Protochips, Inc. | Specimen holder used for mounting samples in electron microscopes |
FR2951288A1 (fr) * | 2009-10-09 | 2011-04-15 | Commissariat Energie Atomique | Masque de photolithographie en extreme ultra-violet, en transmission, et procede de masquage |
TWI477925B (zh) | 2011-10-04 | 2015-03-21 | Nuflare Technology Inc | Multi - beam charged particle beam mapping device and multi - beam charged particle beam rendering method |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4388386A (en) * | 1982-06-07 | 1983-06-14 | International Business Machines Corporation | Mask set mismatch |
ATA331285A (de) * | 1985-11-13 | 1988-11-15 | Ims Ionen Mikrofab Syst | Verfahren zur herstellung einer transmissionsmaske |
DE68924122T2 (de) * | 1988-10-20 | 1996-05-09 | Fujitsu Ltd | Herstellungsverfahren für Halbleitervorrichtungen und durchsichtige Maske für den geladenen Teilchenstrahl. |
-
1991
- 1991-12-30 US US07/814,953 patent/US5260151A/en not_active Expired - Lifetime
-
1992
- 1992-05-14 TW TW081103753A patent/TW198138B/zh not_active IP Right Cessation
- 1992-11-17 CA CA002083112A patent/CA2083112C/en not_active Expired - Fee Related
- 1992-12-10 DE DE69233067T patent/DE69233067T2/de not_active Expired - Lifetime
- 1992-12-10 EP EP92311251A patent/EP0550173B1/de not_active Expired - Lifetime
- 1992-12-24 JP JP34391392A patent/JP3457346B2/ja not_active Expired - Lifetime
- 1992-12-29 KR KR1019920025970A patent/KR100272116B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100272116B1 (ko) | 2000-12-01 |
TW198138B (de) | 1993-01-11 |
EP0550173A1 (de) | 1993-07-07 |
EP0550173B1 (de) | 2003-05-21 |
DE69233067T2 (de) | 2004-04-01 |
KR930014841A (ko) | 1993-07-23 |
CA2083112C (en) | 1996-10-22 |
JPH05251317A (ja) | 1993-09-28 |
JP3457346B2 (ja) | 2003-10-14 |
CA2083112A1 (en) | 1993-07-01 |
US5260151A (en) | 1993-11-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
R071 | Expiry of right |
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