DE69231596T2 - Konfokaler optischer Scanner - Google Patents

Konfokaler optischer Scanner

Info

Publication number
DE69231596T2
DE69231596T2 DE69231596T DE69231596T DE69231596T2 DE 69231596 T2 DE69231596 T2 DE 69231596T2 DE 69231596 T DE69231596 T DE 69231596T DE 69231596 T DE69231596 T DE 69231596T DE 69231596 T2 DE69231596 T2 DE 69231596T2
Authority
DE
Germany
Prior art keywords
optical scanner
confocal optical
confocal
scanner
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69231596T
Other languages
English (en)
Other versions
DE69231596D1 (de
Inventor
Takeo Tanaami
Kenta Mikuriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3286112A external-priority patent/JP2663766B2/ja
Priority claimed from JP1541192A external-priority patent/JP2663780B2/ja
Priority claimed from JP4149320A external-priority patent/JP2970223B2/ja
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Application granted granted Critical
Publication of DE69231596D1 publication Critical patent/DE69231596D1/de
Publication of DE69231596T2 publication Critical patent/DE69231596T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
DE69231596T 1991-10-31 1992-08-28 Konfokaler optischer Scanner Expired - Lifetime DE69231596T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3286112A JP2663766B2 (ja) 1991-10-31 1991-10-31 共焦点用光スキャナ
JP1541192A JP2663780B2 (ja) 1991-05-29 1992-01-30 共焦点用光スキャナ
JP4149320A JP2970223B2 (ja) 1992-06-09 1992-06-09 共焦点用光スキャナ

Publications (2)

Publication Number Publication Date
DE69231596D1 DE69231596D1 (de) 2001-01-11
DE69231596T2 true DE69231596T2 (de) 2001-06-28

Family

ID=27280998

Family Applications (4)

Application Number Title Priority Date Filing Date
DE69222733T Expired - Lifetime DE69222733T2 (de) 1991-10-31 1992-08-28 Nipkowscheibe für konfokalen optischen Scanner
DE69231596T Expired - Lifetime DE69231596T2 (de) 1991-10-31 1992-08-28 Konfokaler optischer Scanner
DE0727684T Pending DE727684T1 (de) 1991-10-31 1992-08-28 Konfokaler optischer Scanner
DE92114750T Pending DE539691T1 (de) 1991-10-31 1992-08-28 Nipkowscheibe für konfokalen optischen Scanner.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69222733T Expired - Lifetime DE69222733T2 (de) 1991-10-31 1992-08-28 Nipkowscheibe für konfokalen optischen Scanner

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE0727684T Pending DE727684T1 (de) 1991-10-31 1992-08-28 Konfokaler optischer Scanner
DE92114750T Pending DE539691T1 (de) 1991-10-31 1992-08-28 Nipkowscheibe für konfokalen optischen Scanner.

Country Status (3)

Country Link
US (3) US5428475A (de)
EP (2) EP0727684B1 (de)
DE (4) DE69222733T2 (de)

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DE4437896C1 (de) * 1994-10-22 1996-05-15 Leica Lasertechnik Scan-Vorrichtung für konfokale Mikroskope
US5717519A (en) * 1995-07-13 1998-02-10 Yokogawa Electric Corporation Confocal microscope
US6002509A (en) * 1995-10-21 1999-12-14 Leica Lasertechnik Gmbh Beam scanner for confocal microscopes
JP3533295B2 (ja) * 1996-01-31 2004-05-31 株式会社ニデック 共焦点走査型顕微鏡
US5760950A (en) * 1996-07-25 1998-06-02 Advanced Scanning, Ltd. Scanning confocal microscope
JP3438855B2 (ja) * 1997-01-23 2003-08-18 横河電機株式会社 共焦点装置
US6545789B1 (en) * 1997-04-25 2003-04-08 John J. Lemasters Device to improve Z-axis resolution in confocal microscopy
JP3816632B2 (ja) * 1997-05-14 2006-08-30 オリンパス株式会社 走査型顕微鏡
US6108127A (en) * 1997-05-15 2000-08-22 3M Innovative Properties Company High resolution confocal microscope
JPH10333054A (ja) * 1997-05-30 1998-12-18 Yokogawa Electric Corp 共焦点顕微鏡
US6147800A (en) * 1997-09-25 2000-11-14 Kramer Scientific Corporation Fluorescence stereo microscope illuminator
US6147798A (en) * 1997-10-24 2000-11-14 Atto Instruments, Llc. Microscope attachment for high precision and efficient imaging
CA2318573A1 (en) * 1998-01-12 1999-07-15 Wallac Oy Confocal microscope with plural scanning beams
JP3560123B2 (ja) * 1998-03-17 2004-09-02 横河電機株式会社 共焦点装置
JPH11271622A (ja) * 1998-03-19 1999-10-08 Yokogawa Electric Corp 光学顕微鏡
JP2000098259A (ja) * 1998-09-22 2000-04-07 Olympus Optical Co Ltd 共焦点顕微鏡用撮影装置
KR100319206B1 (ko) * 1998-10-20 2002-01-10 윤종용 박막트랜지스터 제조방법과 이에 의해 제조된 기판 및 박막트랜지스터
US6548796B1 (en) * 1999-06-23 2003-04-15 Regents Of The University Of Minnesota Confocal macroscope
US6731383B2 (en) 2000-09-12 2004-05-04 August Technology Corp. Confocal 3D inspection system and process
US6870609B2 (en) 2001-02-09 2005-03-22 August Technology Corp. Confocal 3D inspection system and process
JP3741051B2 (ja) * 2001-05-10 2006-02-01 横河電機株式会社 バイオチップ読取装置
DE10133017C2 (de) 2001-07-06 2003-07-03 Leica Microsystems Konfokales Mikroskop
US6970287B1 (en) * 2001-07-16 2005-11-29 August Technology Corp. Confocal 3D inspection system and process
US6882415B1 (en) 2001-07-16 2005-04-19 August Technology Corp. Confocal 3D inspection system and process
US20030031596A1 (en) * 2001-08-09 2003-02-13 Yokogawa Electric Corporation Biochip reader and fluorometric imaging apparatus
DE10206004A1 (de) * 2002-02-14 2003-08-28 Zeiss Carl Jena Gmbh Vorrichtung zur konfokalen optischen Mikroanalyse
US6934079B2 (en) * 2002-05-03 2005-08-23 Max-Planck-Gesellschaft zur Förderung der Wissen-schaften e. V. Confocal microscope comprising two microlens arrays and a pinhole diaphragm array
GB0224067D0 (en) * 2002-10-16 2002-11-27 Perkinelmer Uk Ltd Improvements in and relating to imaging
JP4014536B2 (ja) 2003-05-14 2007-11-28 横河電機株式会社 共焦点光スキャナ
US7247348B2 (en) * 2004-02-25 2007-07-24 Honeywell International, Inc. Method for manufacturing a erosion preventative diamond-like coating for a turbine engine compressor blade
DE102004034990A1 (de) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Zoomoptik für ein Lichtrastermikroskop mit linienförmiger Abtastung und Verwendung
DE102004034993A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Lichtrastermikroskop mit linienförmiger Abtastung und Verwendung
DE102004034981A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Lichtrastermikroskop mit punktförmiger Lichtquellenverteilung und Verwendung
DE102004034991A1 (de) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Zoomoptik für ein Lichtrastermikroskop
KR100601964B1 (ko) * 2004-09-07 2006-07-19 삼성전자주식회사 다채널 다중 컬러 측정을 위한 광검출장치 및 이를 채용한다채널 시료 분석기
JP2006078772A (ja) * 2004-09-09 2006-03-23 Yokogawa Electric Corp 共焦点顕微鏡
JP2006091507A (ja) * 2004-09-24 2006-04-06 Nikon Corp 共焦点顕微鏡
DE102004058044B4 (de) * 2004-12-01 2014-02-06 Friedrich-Schiller-Universität Jena Ortsfrequenzfiltervorrichtung und Verfahren zur Ortsfrequenzfilterung von Laserstrahlen
DE102005009188A1 (de) * 2005-03-01 2006-09-07 Carl Zeiss Jena Gmbh Punktscannendes Laser-Scanning-Mikroskop sowie Verfahren zur Einstellung eines Mikroskopes
US8014053B2 (en) 2006-04-20 2011-09-06 Nanofocus Ag Method for generating a universal pinhole pattern for use in confocal microscopes
DE102007009551B3 (de) 2007-02-27 2008-08-21 Ludwig-Maximilian-Universität Vorrichtung für die konfokale Beleuchtung einer Probe
DE102008004233A1 (de) 2007-08-01 2009-02-05 Hochschule Ostwestfalen-Lippe Verfahren zur Lokalisierung und Sanierung von Schäden an Ver- und Entsorgungsleitungen einschließlich des umlagernden Baugrundes
US8229294B2 (en) * 2007-12-10 2012-07-24 Mitsubishi Electric Research Laboratories, Inc. Cameras with varying spatio-angular-temporal resolutions
DE102008020889A1 (de) * 2008-04-22 2009-11-05 Nanolit Gmbh Verfahren und Vorrichtung zum volumetrischen Scannen
US8275226B2 (en) 2008-12-09 2012-09-25 Spectral Applied Research Ltd. Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope
US8670178B2 (en) 2009-12-08 2014-03-11 Spectral Applied Research Inc. Imaging distal end of multimode fiber
GB201107556D0 (en) 2011-05-06 2011-06-22 Sheblee Jafer Spatial resolution enhancements in multibeam confocal scanning systems
US9606343B2 (en) 2011-05-06 2017-03-28 Visitech International Ltd Enhancing spatial resolution utilizing multibeam confocal scanning systems
CN102928969A (zh) * 2011-08-12 2013-02-13 赖博 一种微透镜增强型滑块式共聚焦光学扫描仪
DE102013001238B4 (de) * 2013-01-25 2020-06-10 Carl Zeiss Microscopy Gmbh Lichtmikroskop und Mikroskopieverfahren
DE102013005563A1 (de) 2013-03-28 2014-10-02 Carl Zeiss Microscopy Gmbh Lichtmikroskop und verfahren zum untersuchen einer mikroskopischen probe
DE102013015933A1 (de) 2013-09-19 2015-03-19 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie
WO2015164844A1 (en) 2014-04-24 2015-10-29 Vutara, Inc. Super resolution microscopy
KR101471638B1 (ko) * 2014-07-28 2014-12-24 한국기계연구원 닙코우 디스크의 핀홀 배치 방법
DE102015112960B3 (de) 2015-08-06 2016-10-20 Till I.D. Gmbh Vorrichtung für die konfokale Beleuchtung einer Probe
DE102015011552A1 (de) 2015-09-02 2017-03-02 Visitron Systems GmbH Verfahren und Anordnung zur Lichteinkopplung in ein Multifokales Konfokalmikroskop
JP6743788B2 (ja) * 2017-09-14 2020-08-19 横河電機株式会社 変位センサ
CN109375355A (zh) * 2018-10-19 2019-02-22 上海市计量测试技术研究院 共聚焦三维测量装置及其多孔径尼普科夫圆盘
CN109758123A (zh) * 2019-03-28 2019-05-17 长春嵩韵精密仪器装备科技有限责任公司 一种手持式口腔扫描仪

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US4994664A (en) * 1989-03-27 1991-02-19 Massachusetts Institute Of Technology Optically coupled focal plane arrays using lenslets and multiplexers
JP2578376B2 (ja) * 1989-12-19 1997-02-05 横河電機株式会社 ピンホール基板及びその作製方法
US5067805A (en) * 1990-02-27 1991-11-26 Prometrix Corporation Confocal scanning optical microscope
US5083220A (en) * 1990-03-22 1992-01-21 Tandem Scanning Corporation Scanning disks for use in tandem scanning reflected light microscopes and other optical systems
DE4023650A1 (de) * 1990-07-25 1992-01-30 Max Planck Gesellschaft Ueberaufloesendes konfokales mikroskop
US5162941A (en) * 1991-07-23 1992-11-10 The Board Of Governors Of Wayne State University Confocal microscope

Also Published As

Publication number Publication date
US5428475A (en) 1995-06-27
DE727684T1 (de) 1997-02-13
EP0727684A3 (de) 1996-10-30
DE539691T1 (de) 1993-10-14
DE69222733T2 (de) 1998-03-12
EP0727684A2 (de) 1996-08-21
EP0539691B1 (de) 1997-10-15
US5579157A (en) 1996-11-26
EP0727684B1 (de) 2000-12-06
DE69222733D1 (de) 1997-11-20
EP0539691A2 (de) 1993-05-05
DE69231596D1 (de) 2001-01-11
US5633751A (en) 1997-05-27
EP0539691A3 (en) 1993-06-02

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