DE69226600T2 - Strahlungsempfindliche positiv-arbeitende Resistzusammensetzung - Google Patents
Strahlungsempfindliche positiv-arbeitende ResistzusammensetzungInfo
- Publication number
- DE69226600T2 DE69226600T2 DE69226600T DE69226600T DE69226600T2 DE 69226600 T2 DE69226600 T2 DE 69226600T2 DE 69226600 T DE69226600 T DE 69226600T DE 69226600 T DE69226600 T DE 69226600T DE 69226600 T2 DE69226600 T2 DE 69226600T2
- Authority
- DE
- Germany
- Prior art keywords
- resist composition
- radiation sensitive
- positive working
- working resist
- sensitive positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/04—Chromates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/11—Vinyl alcohol polymer or derivative
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
- Phenolic Resins Or Amino Resins (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3287648A JP3039048B2 (ja) | 1991-11-01 | 1991-11-01 | ポジ型感放射線性レジスト組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69226600D1 DE69226600D1 (de) | 1998-09-17 |
DE69226600T2 true DE69226600T2 (de) | 1999-02-04 |
Family
ID=17719932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69226600T Expired - Fee Related DE69226600T2 (de) | 1991-11-01 | 1992-10-08 | Strahlungsempfindliche positiv-arbeitende Resistzusammensetzung |
Country Status (8)
Country | Link |
---|---|
US (1) | US5275910A (de) |
EP (1) | EP0539778B1 (de) |
JP (1) | JP3039048B2 (de) |
KR (1) | KR100192769B1 (de) |
CA (1) | CA2078830A1 (de) |
DE (1) | DE69226600T2 (de) |
MX (1) | MX9206155A (de) |
TW (1) | TW269019B (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0831370A4 (de) * | 1995-01-17 | 1999-08-18 | Nippon Zeon Co | Positiv arbeitende photolackzusammensetzung |
JP3427562B2 (ja) * | 1995-05-09 | 2003-07-22 | 住友化学工業株式会社 | ポジ型レジスト組成物 |
JP3433017B2 (ja) * | 1995-08-31 | 2003-08-04 | 株式会社東芝 | 感光性組成物 |
JPH1124271A (ja) * | 1997-06-30 | 1999-01-29 | Kurarianto Japan Kk | 高耐熱性放射線感応性レジスト組成物 |
JP4057704B2 (ja) * | 1998-07-10 | 2008-03-05 | 本州化学工業株式会社 | 9,9−ビス(アルキル置換−4−ヒドロキシフェニル)フルオレン類とその製造方法 |
JP4429620B2 (ja) * | 2002-10-15 | 2010-03-10 | 出光興産株式会社 | 感放射線性有機化合物 |
EP2381308B1 (de) * | 2003-06-23 | 2015-07-29 | Sumitomo Bakelite Co., Ltd. | Positiv arbeitende lichtempfindliche Harzzusammensetzung, Verfahren zur Herstellung einer strukturgebildeten Harzschicht, Halbleiterbauelement, Anzeigevorrichtung und Verfahren zur Herstellung des Halbleiterbauelements und der Anzeigevorrichtung |
EP1666970A4 (de) * | 2003-09-18 | 2009-09-02 | Mitsubishi Gas Chemical Co | Zusammensetzung für resist und strahlungsempfindliche zusammensetzung |
US7303855B2 (en) | 2003-10-03 | 2007-12-04 | Shin-Etsu Chemical Co., Ltd. | Photoresist undercoat-forming material and patterning process |
JP4575680B2 (ja) * | 2004-02-23 | 2010-11-04 | 大阪瓦斯株式会社 | 新規フルオレン化合物 |
EP1734032A4 (de) * | 2004-04-05 | 2008-04-02 | Idemitsu Kosan Co | Calixresorcinarenverbindungen, photoresistbasismaterialien und zusammensetzungen davon |
JP4678195B2 (ja) * | 2005-02-03 | 2011-04-27 | 三菱瓦斯化学株式会社 | フェナントレンキノン誘導体及びその製造方法 |
DE102008017591A1 (de) | 2008-04-07 | 2009-10-08 | Merck Patent Gmbh | Neue Materialien für organische Elektrolumineszenzvorrichtungen |
KR100913058B1 (ko) * | 2008-08-25 | 2009-08-20 | 금호석유화학 주식회사 | 포지티브형 감광성 수지 조성물, 패턴 형성 방법 및 반도체소자 |
JPWO2016148176A1 (ja) * | 2015-03-19 | 2017-12-28 | 東レ株式会社 | ポジ型感光性樹脂組成物、硬化膜、tft基板、層間絶縁膜、表示装置、およびその製造方法 |
CN112745201A (zh) * | 2020-12-25 | 2021-05-04 | 长春长光宇航复合材料有限公司 | 含芴环结构生物基双酚单体、生物基环氧树脂单体、生物基环氧树脂材料及其制备方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0358871B1 (de) * | 1988-07-07 | 1998-09-30 | Sumitomo Chemical Company, Limited | Strahlungsempfindliche, positiv arbeitende Resistzusammensetzung |
AT393502B (de) * | 1989-04-17 | 1991-11-11 | Isovolta | Verfahren zur synthese von 9,9-bis(4-hydroxyphenyl)fluoren |
JP2629990B2 (ja) * | 1989-12-20 | 1997-07-16 | 住友化学工業株式会社 | ポジ型レジスト用組成物 |
JPH087435B2 (ja) * | 1989-12-28 | 1996-01-29 | 日本ゼオン株式会社 | ポジ型レジスト組成物 |
JPH061377B2 (ja) * | 1989-12-28 | 1994-01-05 | 日本ゼオン株式会社 | ポジ型レジスト組成物 |
JP2629403B2 (ja) * | 1990-04-28 | 1997-07-09 | 東レ株式会社 | ポジ型フォトレジスト組成物 |
JPH0413146A (ja) * | 1990-05-02 | 1992-01-17 | Sumitomo Chem Co Ltd | 新規レジスト組成物 |
US5130225A (en) * | 1990-05-24 | 1992-07-14 | Sumitomo Chemical Co. Ltd. | Positive resist composition comprising a cyclic dimer of isopropenyl phenol, also known as a 1,1,3 trimethyl-3-hydroxyphenyl indane |
-
1991
- 1991-11-01 JP JP3287648A patent/JP3039048B2/ja not_active Expired - Lifetime
-
1992
- 1992-09-22 CA CA002078830A patent/CA2078830A1/en not_active Abandoned
- 1992-09-22 TW TW081107482A patent/TW269019B/zh not_active IP Right Cessation
- 1992-10-08 EP EP92117200A patent/EP0539778B1/de not_active Expired - Lifetime
- 1992-10-08 DE DE69226600T patent/DE69226600T2/de not_active Expired - Fee Related
- 1992-10-14 US US07/960,695 patent/US5275910A/en not_active Expired - Lifetime
- 1992-10-22 KR KR1019920019477A patent/KR100192769B1/ko not_active IP Right Cessation
- 1992-10-26 MX MX9206155A patent/MX9206155A/es not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0539778B1 (de) | 1998-08-12 |
CA2078830A1 (en) | 1993-05-02 |
DE69226600D1 (de) | 1998-09-17 |
EP0539778A1 (de) | 1993-05-05 |
KR100192769B1 (ko) | 1999-06-15 |
JP3039048B2 (ja) | 2000-05-08 |
TW269019B (de) | 1996-01-21 |
JPH05127374A (ja) | 1993-05-25 |
KR930010615A (ko) | 1993-06-22 |
MX9206155A (es) | 1993-05-01 |
US5275910A (en) | 1994-01-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69326184T2 (de) | Strahlungsempfindliche Zusammensetzungen | |
DE69408761T2 (de) | Strahlungsempfindliche Zusammensetzung | |
DE68928823T2 (de) | Strahlungsempfindliche, positiv arbeitende Resistzusammensetzung | |
DE69232042D1 (de) | Positiv-arbeitende lichtempfindliche Zusammensetzung | |
DE69228574D1 (de) | Strahlungsempfindliche Harzzusammensetzung | |
DE69130130D1 (de) | Strahlungsempfindliche Harzzusammensetzung | |
DE69226920D1 (de) | Lichtempfindliche Zusammensetzung | |
DE69219011T2 (de) | Kopierschutz | |
BR9200693A (pt) | Composicao sensivel a radiacao e emprego | |
DE69229332D1 (de) | Positiv-arbeitende Resistzusammensetzung | |
DE69506999D1 (de) | Strahlungsempfindliche Zusammensetzung | |
DE69226600D1 (de) | Strahlungsempfindliche positiv-arbeitende Resistzusammensetzung | |
DE69220612D1 (de) | Positivarbeitende Photoresistzusammensetzung | |
DE69309769T2 (de) | Positivarbeitende Resistzusammensetzung | |
DE69228584D1 (de) | Positiv-arbeitendes Resistmaterial | |
DE69219747T2 (de) | Lichtempfindliche Zusammensetzung | |
DE69121739T2 (de) | Strahlungsempfindliche, positiv arbeitende Resistmasse | |
DE69126868D1 (de) | Positivresistzusammensetzung | |
DE69209356D1 (de) | Positiv-arbeitende Resistzusammensetzung | |
DE69032830D1 (de) | Strahlungsempfindliche positiv-arbeitende Resistmasse | |
DE69028364T2 (de) | Strahlungsempfindliche Kunststoffzusammensetzung | |
DE69224801T2 (de) | Lichtempfindliche Zusammensetzung | |
DE69223083T2 (de) | Positivarbeitende Resistzusammensetzung | |
DE69220327D1 (de) | Strahlungshärtbare Zusammensetzungen | |
DE69213996D1 (de) | Positivarbeitende Resistzusammensetzung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |