DE69506999D1 - Strahlungsempfindliche Zusammensetzung - Google Patents
Strahlungsempfindliche ZusammensetzungInfo
- Publication number
- DE69506999D1 DE69506999D1 DE69506999T DE69506999T DE69506999D1 DE 69506999 D1 DE69506999 D1 DE 69506999D1 DE 69506999 T DE69506999 T DE 69506999T DE 69506999 T DE69506999 T DE 69506999T DE 69506999 D1 DE69506999 D1 DE 69506999D1
- Authority
- DE
- Germany
- Prior art keywords
- radiation sensitive
- sensitive composition
- composition
- radiation
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26957994A JP3549592B2 (ja) | 1994-11-02 | 1994-11-02 | 放射線感応性組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69506999D1 true DE69506999D1 (de) | 1999-02-11 |
DE69506999T2 DE69506999T2 (de) | 1999-08-19 |
Family
ID=17474336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69506999T Expired - Lifetime DE69506999T2 (de) | 1994-11-02 | 1995-11-02 | Strahlungsempfindliche Zusammensetzung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5738972A (de) |
EP (1) | EP0710885B1 (de) |
JP (1) | JP3549592B2 (de) |
KR (1) | KR100383471B1 (de) |
DE (1) | DE69506999T2 (de) |
TW (1) | TW284860B (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08262720A (ja) * | 1995-03-28 | 1996-10-11 | Hoechst Ind Kk | 可塑剤を含む放射線感応性組成物 |
JPH0954437A (ja) * | 1995-06-05 | 1997-02-25 | Fuji Photo Film Co Ltd | 化学増幅型ポジレジスト組成物 |
JPH09325496A (ja) * | 1996-06-04 | 1997-12-16 | Sony Corp | 感光性組成物 |
JP3679205B2 (ja) * | 1996-09-20 | 2005-08-03 | 富士写真フイルム株式会社 | ポジ型感光性組成物 |
JP3873372B2 (ja) * | 1997-05-26 | 2007-01-24 | 住友化学株式会社 | ポジ型フォトレジスト組成物 |
JP3052917B2 (ja) * | 1997-10-24 | 2000-06-19 | 日本電気株式会社 | 化学増幅系レジスト |
JP3955384B2 (ja) * | 1998-04-08 | 2007-08-08 | Azエレクトロニックマテリアルズ株式会社 | 化学増幅型レジスト組成物 |
KR100596125B1 (ko) * | 1998-12-22 | 2006-07-05 | 제이에스알 가부시끼가이샤 | 감방사선성 수지 조성물 |
US6323287B1 (en) | 1999-03-12 | 2001-11-27 | Arch Specialty Chemicals, Inc. | Hydroxy-amino thermally cured undercoat for 193 NM lithography |
SG78412A1 (en) | 1999-03-31 | 2001-02-20 | Ciba Sc Holding Ag | Oxime derivatives and the use thereof as latent acids |
US6737212B1 (en) * | 1999-10-07 | 2004-05-18 | Clariant Finance (Bvi) Limited | Photosensitive composition |
JP4272805B2 (ja) * | 1999-12-27 | 2009-06-03 | 富士フイルム株式会社 | ポジ型感放射線性組成物 |
JP4562240B2 (ja) * | 2000-05-10 | 2010-10-13 | 富士フイルム株式会社 | ポジ型感放射線性組成物及びそれを用いたパターン形成方法 |
EP1179750B1 (de) | 2000-08-08 | 2012-07-25 | FUJIFILM Corporation | Positiv arbeitende lichtempfindliche Zusammensetzung und Verfahren zur Herstellung einer integrierten Präzisions-Schaltung mit derselben |
JP4694686B2 (ja) * | 2000-08-31 | 2011-06-08 | 東京応化工業株式会社 | 半導体素子製造方法 |
DE10243745A1 (de) * | 2002-09-20 | 2004-04-15 | Infineon Technologies Ag | Hochempfindlicher und hochauflösender Fotoresist für die Ionenprojektions-Lithographie |
DE10243742B4 (de) * | 2002-09-20 | 2007-11-08 | Qimonda Ag | Verfahren zur Strukturierung von Halbleitersubstraten unter Verwendung eines Fotoresists |
US7851130B2 (en) | 2006-09-19 | 2010-12-14 | Fujifilm Corporation | Photosensitive composition, compound for use in the photosensitive composition, and pattern-forming method using the photosensitive composition |
KR100913058B1 (ko) * | 2008-08-25 | 2009-08-20 | 금호석유화학 주식회사 | 포지티브형 감광성 수지 조성물, 패턴 형성 방법 및 반도체소자 |
WO2011104127A1 (en) | 2010-02-24 | 2011-09-01 | Basf Se | Latent acids and their use |
US8932796B2 (en) * | 2011-11-10 | 2015-01-13 | International Business Machines Corporation | Hybrid photoresist composition and pattern forming method using thereof |
KR102537349B1 (ko) | 2015-02-02 | 2023-05-26 | 바스프 에스이 | 잠재성 산 및 그의 용도 |
US9921480B2 (en) * | 2016-02-10 | 2018-03-20 | Taiwan Semiconductor Manufacturing Co., Ltd | Extreme ultraviolet photoresist |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3853114T2 (de) * | 1987-09-16 | 1995-06-14 | Hoechst Ag | Poly(3-mono oder 3,5-disubstituierte acetoxystyrole) und deren Verwendung. |
EP0307751A3 (de) * | 1987-09-16 | 1990-05-16 | Hoechst Aktiengesellschaft | 3-Mono- und 3,5-disubstituierte-4-Acetoxy und -4-Hydroxystyrole und ein Verfahren zu ihrer Herstellung |
US5342727A (en) * | 1988-10-21 | 1994-08-30 | Hoechst Celanese Corp. | Copolymers of 4-hydroxystyrene and alkyl substituted-4-hydroxystyrene in admixture with a photosensitizer to form a photosensitive composition |
DE3930087A1 (de) * | 1989-09-09 | 1991-03-14 | Hoechst Ag | Positiv arbeitendes strahlungsempfindliches gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial |
JPH0450851A (ja) * | 1990-06-14 | 1992-02-19 | Sumitomo Chem Co Ltd | ポジ型感放射線性レジスト組成物 |
DE4120173A1 (de) * | 1991-06-19 | 1992-12-24 | Hoechst Ag | Positiv arbeitendes strahlungsempfindliches gemisch und damit hergestelltes strahlungsempfindliches aufzeichnungsmaterial |
EP0537524A1 (de) * | 1991-10-17 | 1993-04-21 | Shipley Company Inc. | Strahlungsempfindliche Zusammensetzungen und Verfahren |
DE4222968A1 (de) * | 1992-07-13 | 1994-01-20 | Hoechst Ag | Positiv-arbeitendes strahlungsempfindliches Gemisch und damit hergestelltes Aufzeichnungsmaterial |
KR100355254B1 (en) * | 1993-02-15 | 2003-03-31 | Clariant Finance Bvi Ltd | Positive type radiation-sensitive mixture |
JP3573358B2 (ja) * | 1994-02-25 | 2004-10-06 | クラリアント インターナショナル リミテッド | 放射線感応性組成物 |
JPH08110635A (ja) * | 1994-10-07 | 1996-04-30 | Shin Etsu Chem Co Ltd | 化学増幅ポジ型レジスト材料 |
-
1994
- 1994-11-02 JP JP26957994A patent/JP3549592B2/ja not_active Expired - Lifetime
-
1995
- 1995-11-01 KR KR1019950039142A patent/KR100383471B1/ko not_active IP Right Cessation
- 1995-11-01 TW TW084111546A patent/TW284860B/zh not_active IP Right Cessation
- 1995-11-02 DE DE69506999T patent/DE69506999T2/de not_active Expired - Lifetime
- 1995-11-02 EP EP95117268A patent/EP0710885B1/de not_active Expired - Lifetime
-
1997
- 1997-05-28 US US08/864,375 patent/US5738972A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW284860B (de) | 1996-09-01 |
JPH08129260A (ja) | 1996-05-21 |
KR960018762A (ko) | 1996-06-17 |
DE69506999T2 (de) | 1999-08-19 |
EP0710885B1 (de) | 1998-12-30 |
US5738972A (en) | 1998-04-14 |
KR100383471B1 (ko) | 2003-08-21 |
EP0710885A1 (de) | 1996-05-08 |
JP3549592B2 (ja) | 2004-08-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AZ ELECTRONIC MATERIALS USA CORP., SOMERVILLE, N.J |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: PATENTANWAELTE ISENBRUCK BOESL HOERSCHLER WICHMANN HU |