DE69226220T2 - Transistor mit hoher Elektronenbeweglichkeit und Verfahren zu seiner Herstellung - Google Patents

Transistor mit hoher Elektronenbeweglichkeit und Verfahren zu seiner Herstellung

Info

Publication number
DE69226220T2
DE69226220T2 DE69226220T DE69226220T DE69226220T2 DE 69226220 T2 DE69226220 T2 DE 69226220T2 DE 69226220 T DE69226220 T DE 69226220T DE 69226220 T DE69226220 T DE 69226220T DE 69226220 T2 DE69226220 T2 DE 69226220T2
Authority
DE
Germany
Prior art keywords
manufacture
electron mobility
high electron
mobility transistor
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69226220T
Other languages
English (en)
Other versions
DE69226220D1 (de
Inventor
John C Huang
Gordon S Jackson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24802749&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69226220(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Raytheon Co filed Critical Raytheon Co
Publication of DE69226220D1 publication Critical patent/DE69226220D1/de
Application granted granted Critical
Publication of DE69226220T2 publication Critical patent/DE69226220T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0891—Source or drain regions of field-effect devices of field-effect transistors with Schottky gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
    • H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
DE69226220T 1991-05-09 1992-05-07 Transistor mit hoher Elektronenbeweglichkeit und Verfahren zu seiner Herstellung Expired - Lifetime DE69226220T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/697,830 US5140386A (en) 1991-05-09 1991-05-09 High electron mobility transistor

Publications (2)

Publication Number Publication Date
DE69226220D1 DE69226220D1 (de) 1998-08-20
DE69226220T2 true DE69226220T2 (de) 1999-02-04

Family

ID=24802749

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69226220T Expired - Lifetime DE69226220T2 (de) 1991-05-09 1992-05-07 Transistor mit hoher Elektronenbeweglichkeit und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (1) US5140386A (de)
EP (1) EP0514079B1 (de)
JP (1) JP3602150B2 (de)
DE (1) DE69226220T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010008288A1 (en) * 1988-01-08 2001-07-19 Hitachi, Ltd. Semiconductor integrated circuit device having memory cells
JP2924239B2 (ja) * 1991-03-26 1999-07-26 三菱電機株式会社 電界効果トランジスタ
FR2679071B1 (fr) * 1991-07-08 1997-04-11 France Telecom Transistor a effet de champ, a couches minces de bande d'energie controlee.
US5304825A (en) * 1992-08-20 1994-04-19 Motorola, Inc. Linear heterojunction field effect transistor
US5408111A (en) * 1993-02-26 1995-04-18 Sumitomo Electric Industries, Ltd. Field-effect transistor having a double pulse-doped structure
JP3631506B2 (ja) * 1994-02-18 2005-03-23 三菱電機株式会社 電界効果トランジスタの製造方法
JPH07283237A (ja) * 1994-04-07 1995-10-27 Toyota Central Res & Dev Lab Inc 電界効果トランジスタ
JP2643859B2 (ja) * 1994-09-29 1997-08-20 日本電気株式会社 化合物半導体電界効果トランジスタ
US5668387A (en) * 1995-10-26 1997-09-16 Trw Inc. Relaxed channel high electron mobility transistor
JP3604502B2 (ja) * 1996-04-18 2004-12-22 本田技研工業株式会社 高電子移動度トランジスタ
JP3077599B2 (ja) * 1996-09-20 2000-08-14 日本電気株式会社 電界効果トランジスタ
JP3416532B2 (ja) 1998-06-15 2003-06-16 富士通カンタムデバイス株式会社 化合物半導体装置及びその製造方法
US6242293B1 (en) * 1998-06-30 2001-06-05 The Whitaker Corporation Process for fabricating double recess pseudomorphic high electron mobility transistor structures
US6307221B1 (en) * 1998-11-18 2001-10-23 The Whitaker Corporation InxGa1-xP etch stop layer for double recess pseudomorphic high electron mobility transistor structures
US6271547B1 (en) * 1999-08-06 2001-08-07 Raytheon Company Double recessed transistor with resistive layer
US6797994B1 (en) 2000-02-14 2004-09-28 Raytheon Company Double recessed transistor
US6703638B2 (en) 2001-05-21 2004-03-09 Tyco Electronics Corporation Enhancement and depletion-mode phemt device having two ingap etch-stop layers
JP2003133334A (ja) * 2001-10-25 2003-05-09 Murata Mfg Co Ltd ヘテロ接合電界効果トランジスタ
US6838325B2 (en) * 2002-10-24 2005-01-04 Raytheon Company Method of forming a self-aligned, selectively etched, double recess high electron mobility transistor
US7432142B2 (en) * 2004-05-20 2008-10-07 Cree, Inc. Methods of fabricating nitride-based transistors having regrown ohmic contact regions
US7842972B2 (en) * 2004-12-01 2010-11-30 Retro Reflective Optics, Llc Low-temperature-grown (LTG) insulated-gate PHEMT device and method
US7550785B1 (en) 2005-12-02 2009-06-23 Skyworks Solutions, Inc. PHEMT structure having recessed ohmic contact and method for fabricating same
JP2007227884A (ja) * 2006-01-30 2007-09-06 Matsushita Electric Ind Co Ltd 電界効果トランジスタ
EP2080228B1 (de) 2006-10-04 2020-12-02 LEONARDO S.p.A. Leistungsbauelement mit einem pseudomorphen transistor mit hoher elektronenmobilität (phemt) mit einzelspannungsversorgung und herstellungsprozess dafür
WO2011005444A1 (en) 2009-06-22 2011-01-13 Raytheon Company Gallium nitride for liquid crystal electrodes
US9876082B2 (en) 2015-04-30 2018-01-23 Macom Technology Solutions Holdings, Inc. Transistor with hole barrier layer
US11876128B2 (en) * 2021-09-13 2024-01-16 Walter Tony WOHLMUTH Field effect transistor

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5381086A (en) * 1976-12-27 1978-07-18 Fujitsu Ltd Gallium aresenide field effect transistor
JPS5726472A (en) * 1980-07-24 1982-02-12 Fujitsu Ltd Semiconductor device
JPS594085A (ja) * 1982-06-30 1984-01-10 Fujitsu Ltd 半導体装置
JPS59119768A (ja) * 1982-12-24 1984-07-11 Fujitsu Ltd 半導体装置
US4600932A (en) * 1984-10-12 1986-07-15 Gte Laboratories Incorporated Enhanced mobility buried channel transistor structure
US4652896A (en) * 1985-06-27 1987-03-24 The United States Of America As Represented By The Secretary Of The Air Force Modulation doped GaAs/AlGaAs field effect transistor
US4916498A (en) * 1985-09-15 1990-04-10 Trw Inc. High electron mobility power transistor
US4821093A (en) * 1986-08-18 1989-04-11 The United States Of America As Represented By The Secretary Of The Army Dual channel high electron mobility field effect transistor
JP2559412B2 (ja) * 1987-06-22 1996-12-04 株式会社日立製作所 半導体装置
JPH0194674A (ja) * 1987-10-06 1989-04-13 Sanyo Electric Co Ltd ヘテロ接合電界効果トランジスタ
JPH0682691B2 (ja) * 1987-11-12 1994-10-19 松下電器産業株式会社 電界効果型トランジスタ
JPH01199475A (ja) * 1988-02-03 1989-08-10 Sanyo Electric Co Ltd ヘテロ接合電界効果トランジスタ
JP2630446B2 (ja) * 1988-10-12 1997-07-16 富士通株式会社 半導体装置及びその製造方法
US5008717A (en) * 1989-03-03 1991-04-16 At&T Bell Laboratories Semiconductor device including cascaded modulation-doped quantum well heterostructures

Also Published As

Publication number Publication date
DE69226220D1 (de) 1998-08-20
EP0514079A3 (en) 1993-07-21
JPH05129341A (ja) 1993-05-25
JP3602150B2 (ja) 2004-12-15
EP0514079B1 (de) 1998-07-15
EP0514079A2 (de) 1992-11-19
US5140386A (en) 1992-08-18

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