DE69125478T2 - Gekapselte feldemissionsvorrichtung - Google Patents

Gekapselte feldemissionsvorrichtung

Info

Publication number
DE69125478T2
DE69125478T2 DE69125478T DE69125478T DE69125478T2 DE 69125478 T2 DE69125478 T2 DE 69125478T2 DE 69125478 T DE69125478 T DE 69125478T DE 69125478 T DE69125478 T DE 69125478T DE 69125478 T2 DE69125478 T2 DE 69125478T2
Authority
DE
Germany
Prior art keywords
field emission
emission device
vis
enclosed field
enclosed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69125478T
Other languages
English (en)
Other versions
DE69125478D1 (de
Inventor
Robert Kane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE69125478D1 publication Critical patent/DE69125478D1/de
Publication of DE69125478T2 publication Critical patent/DE69125478T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J21/00—Vacuum tubes
    • H01J21/02—Tubes with a single discharge path
    • H01J21/06—Tubes with a single discharge path having electrostatic control means only
    • H01J21/10—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
    • H01J21/105—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Gas-Insulated Switchgears (AREA)
  • Measurement Of Radiation (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Microwave Tubes (AREA)
DE69125478T 1990-02-09 1991-01-30 Gekapselte feldemissionsvorrichtung Expired - Fee Related DE69125478T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/477,686 US5079476A (en) 1990-02-09 1990-02-09 Encapsulated field emission device
PCT/US1991/000640 WO1991012625A1 (en) 1990-02-09 1991-01-30 Encapsulated field emission device

Publications (2)

Publication Number Publication Date
DE69125478D1 DE69125478D1 (de) 1997-05-07
DE69125478T2 true DE69125478T2 (de) 1997-10-02

Family

ID=23896926

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69125478T Expired - Fee Related DE69125478T2 (de) 1990-02-09 1991-01-30 Gekapselte feldemissionsvorrichtung
DE4103585A Withdrawn DE4103585A1 (de) 1990-02-09 1991-02-06 Gekapselte feldemissionsvorrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE4103585A Withdrawn DE4103585A1 (de) 1990-02-09 1991-02-06 Gekapselte feldemissionsvorrichtung

Country Status (7)

Country Link
US (1) US5079476A (de)
EP (1) EP0514444B1 (de)
JP (1) JPH05504021A (de)
CN (1) CN1020828C (de)
AT (1) ATE151198T1 (de)
DE (2) DE69125478T2 (de)
WO (1) WO1991012625A1 (de)

Families Citing this family (19)

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US5247223A (en) * 1990-06-30 1993-09-21 Sony Corporation Quantum interference semiconductor device
US5536193A (en) 1991-11-07 1996-07-16 Microelectronics And Computer Technology Corporation Method of making wide band gap field emitter
US5543684A (en) 1992-03-16 1996-08-06 Microelectronics And Computer Technology Corporation Flat panel display based on diamond thin films
US5449970A (en) 1992-03-16 1995-09-12 Microelectronics And Computer Technology Corporation Diode structure flat panel display
US5763997A (en) 1992-03-16 1998-06-09 Si Diamond Technology, Inc. Field emission display device
US6127773A (en) 1992-03-16 2000-10-03 Si Diamond Technology, Inc. Amorphic diamond film flat field emission cathode
US5675216A (en) 1992-03-16 1997-10-07 Microelectronics And Computer Technololgy Corp. Amorphic diamond film flat field emission cathode
US5686791A (en) 1992-03-16 1997-11-11 Microelectronics And Computer Technology Corp. Amorphic diamond film flat field emission cathode
US5679043A (en) * 1992-03-16 1997-10-21 Microelectronics And Computer Technology Corporation Method of making a field emitter
US5256888A (en) * 1992-05-04 1993-10-26 Motorola, Inc. Transistor device apparatus employing free-space electron emission from a diamond material surface
US5598052A (en) * 1992-07-28 1997-01-28 Philips Electronics North America Vacuum microelectronic device and methodology for fabricating same
EP0681311B1 (de) * 1993-01-19 2002-03-13 KARPOV, Leonid Danilovich Feldeffekt-emissionsvorrichtung
KR100366191B1 (ko) 1993-11-04 2003-03-15 에스아이 다이아몬드 테크놀로지, 인코포레이티드 플랫패널디스플레이시스템및구성소자의제조방법
US5442193A (en) * 1994-02-22 1995-08-15 Motorola Microelectronic field emission device with breakdown inhibiting insulated gate electrode
US5604399A (en) * 1995-06-06 1997-02-18 International Business Machines Corporation Optimal gate control design and fabrication method for lateral field emission devices
JPH10289650A (ja) * 1997-04-11 1998-10-27 Sony Corp 電界電子放出素子及びその製造方法並びに電界電子放出型ディスプレイ装置
US6441550B1 (en) 1998-10-12 2002-08-27 Extreme Devices Inc. Carbon-based field emission electron device for high current density applications
US6181055B1 (en) 1998-10-12 2001-01-30 Extreme Devices, Inc. Multilayer carbon-based field emission electron device for high current density applications
JP5708910B2 (ja) * 2010-03-30 2015-04-30 ソニー株式会社 薄膜トランジスタおよびその製造方法、並びに表示装置

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GB730920A (en) * 1952-04-09 1955-06-01 Philips Electrical Ind Ltd Improvements in or relating to high-vacuum electric discharge tubes of the kind comprising cold electrodes
US3755704A (en) * 1970-02-06 1973-08-28 Stanford Research Inst Field emission cathode structures and devices utilizing such structures
US3789471A (en) * 1970-02-06 1974-02-05 Stanford Research Inst Field emission cathode structures, devices utilizing such structures, and methods of producing such structures
US3812559A (en) * 1970-07-13 1974-05-28 Stanford Research Inst Methods of producing field ionizer and field emission cathode structures
US3883760A (en) * 1971-04-07 1975-05-13 Bendix Corp Field emission x-ray tube having a graphite fabric cathode
US3735187A (en) * 1971-12-22 1973-05-22 Bendix Corp Cathode blade for a field emission x-ray tube
US3894332A (en) * 1972-02-11 1975-07-15 Westinghouse Electric Corp Solid state radiation sensitive field electron emitter and methods of fabrication thereof
JPS5325632B2 (de) * 1973-03-22 1978-07-27
US3970887A (en) * 1974-06-19 1976-07-20 Micro-Bit Corporation Micro-structure field emission electron source
JPS5436828B2 (de) * 1974-08-16 1979-11-12
US3921022A (en) * 1974-09-03 1975-11-18 Rca Corp Field emitting device and method of making same
US4178531A (en) * 1977-06-15 1979-12-11 Rca Corporation CRT with field-emission cathode
SU855782A1 (ru) * 1977-06-28 1981-08-15 Предприятие П/Я Г-4468 Эмиттер электронов
NL184589C (nl) * 1979-07-13 1989-09-01 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenbundel en werkwijze voor het vervaardigen van een dergelijke halfgeleiderinrichting.
US4350926A (en) * 1980-07-28 1982-09-21 The United States Of America As Represented By The Secretary Of The Army Hollow beam electron source
US4307507A (en) * 1980-09-10 1981-12-29 The United States Of America As Represented By The Secretary Of The Navy Method of manufacturing a field-emission cathode structure
US4578614A (en) * 1982-07-23 1986-03-25 The United States Of America As Represented By The Secretary Of The Navy Ultra-fast field emitter array vacuum integrated circuit switching device
US4513308A (en) * 1982-09-23 1985-04-23 The United States Of America As Represented By The Secretary Of The Navy p-n Junction controlled field emitter array cathode
JPS6025132A (ja) * 1983-07-22 1985-02-07 Hitachi Ltd 二極形電子銃
FR2568394B1 (fr) * 1984-07-27 1988-02-12 Commissariat Energie Atomique Dispositif de visualisation par cathodoluminescence excitee par emission de champ
GB8621600D0 (en) * 1986-09-08 1987-03-18 Gen Electric Co Plc Vacuum devices
FR2604823B1 (fr) * 1986-10-02 1995-04-07 Etude Surfaces Lab Dispositif emetteur d'electrons et son application notamment a la realisation d'ecrans plats de television
US4685996A (en) * 1986-10-14 1987-08-11 Busta Heinz H Method of making micromachined refractory metal field emitters
JP2518833B2 (ja) * 1987-01-28 1996-07-31 キヤノン株式会社 電子放出装置
US4721885A (en) * 1987-02-11 1988-01-26 Sri International Very high speed integrated microelectronic tubes
GB2204991B (en) * 1987-05-18 1991-10-02 Gen Electric Plc Vacuum electronic devices
JPS6433833A (en) * 1987-07-29 1989-02-03 Canon Kk Electron emitting element
GB8720792D0 (en) * 1987-09-04 1987-10-14 Gen Electric Co Plc Vacuum devices
US4874981A (en) * 1988-05-10 1989-10-17 Sri International Automatically focusing field emission electrode
US4956574A (en) * 1989-08-08 1990-09-11 Motorola, Inc. Switched anode field emission device
JP2745814B2 (ja) * 1989-09-29 1998-04-28 モトローラ・インコーポレイテッド 電解放出デバイスを用いる平面パネル・ディスプレイ
JP2634295B2 (ja) * 1990-05-17 1997-07-23 双葉電子工業株式会社 電子放出素子

Also Published As

Publication number Publication date
DE4103585A1 (de) 1991-08-14
WO1991012625A1 (en) 1991-08-22
EP0514444A1 (de) 1992-11-25
JPH05504021A (ja) 1993-06-24
CN1020828C (zh) 1993-05-19
EP0514444A4 (en) 1993-02-17
EP0514444B1 (de) 1997-04-02
US5079476A (en) 1992-01-07
DE69125478D1 (de) 1997-05-07
ATE151198T1 (de) 1997-04-15
CN1056375A (zh) 1991-11-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee