DE69125061D1 - Herstellungsverfahren für Dünnfilmkopfgleiter - Google Patents

Herstellungsverfahren für Dünnfilmkopfgleiter

Info

Publication number
DE69125061D1
DE69125061D1 DE69125061T DE69125061T DE69125061D1 DE 69125061 D1 DE69125061 D1 DE 69125061D1 DE 69125061 T DE69125061 T DE 69125061T DE 69125061 T DE69125061 T DE 69125061T DE 69125061 D1 DE69125061 D1 DE 69125061D1
Authority
DE
Germany
Prior art keywords
thin film
manufacturing process
film head
head sliders
sliders
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69125061T
Other languages
English (en)
Other versions
DE69125061T2 (de
Inventor
Keith R Hussinger
Michael L Mallary
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quantum Corp
Original Assignee
Quantum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quantum Corp filed Critical Quantum Corp
Application granted granted Critical
Publication of DE69125061D1 publication Critical patent/DE69125061D1/de
Publication of DE69125061T2 publication Critical patent/DE69125061T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1272—Assembling or shaping of elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1871—Shaping or contouring of the transducing or guiding surface
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y10T29/4905—Employing workholding means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4981—Utilizing transitory attached element or associated separate material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49998—Work holding

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Magnetic Heads (AREA)
DE69125061T 1990-06-29 1991-06-11 Herstellungsverfahren für Dünnfilmkopfgleiter Expired - Fee Related DE69125061T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/546,176 US5095613A (en) 1990-06-29 1990-06-29 Thin film head slider fabrication process

Publications (2)

Publication Number Publication Date
DE69125061D1 true DE69125061D1 (de) 1997-04-17
DE69125061T2 DE69125061T2 (de) 1997-07-10

Family

ID=24179203

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69125061T Expired - Fee Related DE69125061T2 (de) 1990-06-29 1991-06-11 Herstellungsverfahren für Dünnfilmkopfgleiter

Country Status (6)

Country Link
US (2) US5095613A (de)
EP (1) EP0463765B1 (de)
JP (1) JP2704067B2 (de)
CA (1) CA2044496C (de)
DE (1) DE69125061T2 (de)
SG (1) SG52425A1 (de)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5321882A (en) * 1992-09-22 1994-06-21 Dastek Corporation Slider fabrication
US5468177A (en) * 1993-02-26 1995-11-21 Quantum Corporation Lapping fixture for disk sliders
US5494473A (en) * 1993-07-07 1996-02-27 Quantum Corporation Electrical access for electrical lapping guides
US5442850A (en) * 1993-11-01 1995-08-22 International Business Machines Corporation Magnetic head slider process
US5406694A (en) * 1993-11-24 1995-04-18 Rocky Mountain Magnetics, Inc. Scalable method of fabricating thin-film sliders
US5462636A (en) * 1993-12-28 1995-10-31 International Business Machines Corporation Method for chemically scribing wafers
US5531017A (en) * 1994-02-14 1996-07-02 International Business Machines Corporation Thin film magnetic head fabrication method
JP2758560B2 (ja) * 1994-02-21 1998-05-28 ティーディーケイ株式会社 薄膜磁気ヘッドの製造方法
US5739048A (en) * 1994-05-23 1998-04-14 International Business Machines Corporation Method for forming rows of partially separated thin film elements
US5509554A (en) * 1994-11-14 1996-04-23 International Business Machines Corporation Sacrificial structure masking method for disk drive slider assemblies and sliders made thereby
US5735036A (en) * 1994-12-16 1998-04-07 International Business Machines Corporation Lapping process for minimizing shorts and element recession at magnetic head air bearing surface
US5749769A (en) * 1994-12-16 1998-05-12 International Business Machines Corporation Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface
US5620356A (en) * 1995-01-27 1997-04-15 Lackey; Stanley Row tool balance and bow correction apparatus
JP2996131B2 (ja) * 1995-03-02 1999-12-27 ティーディーケイ株式会社 薄膜磁気ヘッドの製造方法
US5722156A (en) * 1995-05-22 1998-03-03 Balfrey; Brian D. Method for processing ceramic wafers comprising plural magnetic head forming units
US5745983A (en) * 1995-10-31 1998-05-05 Mke-Quantum Components Colorado Llc Tool for processing magnetic read/write heads
US5805382A (en) * 1996-06-21 1998-09-08 International Business Machines Corporation Integrated conductor magnetic recording head and suspension having cross-over integrated circuits for noise reduction
US5867888A (en) * 1996-10-08 1999-02-09 International Business Machines Corporation Magnetic head/silicon chip integration method
US5940956A (en) * 1996-10-31 1999-08-24 Aiwa Co., Ltd. Chemical-mechanical contouring (CMC) method for forming a contoured surface
US5951371A (en) * 1996-11-04 1999-09-14 Seagate Technology, Inc. Multi-point bending of bars during fabrication of magnetic recording heads
USRE38340E1 (en) * 1996-11-04 2003-12-02 Seagate Technology Llc Multi-point bending of bars during fabrication of magnetic recording heads
KR20000053046A (ko) * 1996-11-04 2000-08-25 토마스 에프.멀베니 자기 기록 헤드의 제작 중 여러 지점에서 바아를 굴곡하는 장치
US6287170B1 (en) 1996-12-13 2001-09-11 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
US6475064B2 (en) 1996-12-13 2002-11-05 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
JP3466041B2 (ja) * 1997-03-03 2003-11-10 アルプス電気株式会社 磁気ヘッドおよびその製造方法
JP3403605B2 (ja) * 1997-04-08 2003-05-06 富士通株式会社 部材接着方法及び部材接着装置
US5932113A (en) * 1997-09-04 1999-08-03 International Business Machines Corporation Low temperature encapsulation system
JPH1186251A (ja) * 1997-09-12 1999-03-30 Tdk Corp 磁気ヘッドの製造方法
US6311388B1 (en) 1997-09-22 2001-11-06 Seagate Technology, Inc. Method of making air bearing with corner steps
JPH11134614A (ja) * 1997-10-28 1999-05-21 Tdk Corp 薄膜磁気ヘッドの製造方法及び製造システム
US6563785B2 (en) * 1997-12-15 2003-05-13 Seagate Technology Llc Method of manufacturing rounded edge recording head
US5871655A (en) * 1998-03-19 1999-02-16 International Business Machines Corporation Integrated conductor magnetic recording head and suspension having cross-over integrated circuits for noise reduction
JP3604559B2 (ja) 1998-05-06 2004-12-22 Ｔｄｋ株式会社 スライダの製造方法および製造用補助具
JPH11316928A (ja) * 1998-05-06 1999-11-16 Tdk Corp スライダの製造方法および装置
US6064529A (en) * 1998-07-02 2000-05-16 Optiteck, Inc. Spherical aberration correction using flying lens and method
JP2000040215A (ja) * 1998-07-23 2000-02-08 Alps Electric Co Ltd スライダの製造方法
JP2000158335A (ja) 1998-11-27 2000-06-13 Alps Electric Co Ltd 定寸ラップ装置
JP2000222711A (ja) 1999-01-28 2000-08-11 Alps Electric Co Ltd 薄膜磁気ヘッドの製造方法および製造装置
US6663817B1 (en) 1999-03-26 2003-12-16 Hitachi Global Storage Technologies Netherlands, B.V. Method for manufacture of sliders
JP2000306226A (ja) * 1999-04-19 2000-11-02 Fujitsu Ltd 記録ディスク用ヘッドスライダ
JP3647687B2 (ja) 1999-09-16 2005-05-18 アルプス電気株式会社 磁気ヘッド及び磁気ヘッドの製造方法
JP2001126225A (ja) 1999-10-21 2001-05-11 Tdk Corp 磁気ヘッドスライダの製造方法およびバーの固定方法ならびに硬化剤
JP3332222B2 (ja) 1999-10-21 2002-10-07 ティーディーケイ株式会社 スライダ用素材の製造方法、スライダの製造方法およびスライダ用素材
JP2003036508A (ja) * 2001-07-09 2003-02-07 Shinka Jitsugyo Kk バーブロックの加工方法及び薄膜磁気ヘッドの製造方法
US6728067B2 (en) * 2001-07-30 2004-04-27 Hitachi Global Storage Technologies Netherlands B.V. Slider having integrated lapping guides
JP2003217105A (ja) * 2002-01-23 2003-07-31 Tdk Corp 薄膜磁気ヘッドの製造方法
US6799365B2 (en) 2002-03-06 2004-10-05 Seagate Technology Llc Process of manufacturing a disc drive slider with bar reducing load/unload damage
US7223350B2 (en) * 2002-03-29 2007-05-29 International Business Machines Corporation Planarization in an encapsulation process for thin film surfaces
US6857937B2 (en) * 2002-05-30 2005-02-22 Komag, Inc. Lapping a head while powered up to eliminate expansion of the head due to heating
US6758722B2 (en) * 2002-07-12 2004-07-06 Sae Magentics, (H.K.) Ltd. Dual-purpose lapping guide for the production of magneto-resistive heads
US6922890B2 (en) * 2002-11-15 2005-08-02 International Business Machines Corporation Planarization process for thin film surfaces
US7028394B2 (en) * 2003-09-30 2006-04-18 Hitachi Global Storage Technologies Netherlands B.V. System for automatically debonding, processing, and handling fragile slider rows
US6843298B1 (en) 2003-09-30 2005-01-18 Hitachi Global Storage Technologies Netherlands, B.V. Apparatus for automatically debonding, processing, and handling fragile slider rows
US6843878B1 (en) 2003-09-30 2005-01-18 Hitachi Global Storage Technologies Netherlands, B.V. Method of automatically debonding, processing, and handling fragile slider rows
US6994608B1 (en) 2004-11-12 2006-02-07 Hitachi Global Storage Technologies Netherlands, B.V. Methods of manufacturing sliders
CN1801330B (zh) * 2004-11-16 2010-09-22 新科实业有限公司 磁头制造方法
JP2007059015A (ja) * 2005-08-26 2007-03-08 Shinka Jitsugyo Kk スライダの製造方法
US9865284B2 (en) 2016-01-07 2018-01-09 Western Digital Technologies, Inc. Fabrication process for slider with extended three-dimensional air-bearing surface
US10672423B2 (en) 2018-04-10 2020-06-02 Seagate Technology Llc Electronic test structures for one or more magnetoresistive elements, and related methods

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58194164A (ja) * 1982-05-04 1983-11-12 Hitachi Ltd 磁気ヘツドの製造方法
JPS6022724A (ja) * 1983-07-19 1985-02-05 Mitsubishi Electric Corp 磁気ヘツドの製造方法
DE3376036D1 (en) * 1983-08-17 1988-04-21 Ibm Deutschland Method of manufacturing a magnetic head flying body
DE3433334A1 (de) * 1983-11-28 1985-06-05 Magnetic Peripherals Inc., Minneapolis, Minn. Verfahren zur herstellung eines unterdruck-schlittens fuer einen magnetkopf
JPS62262210A (ja) * 1986-05-08 1987-11-14 Alps Electric Co Ltd 薄膜磁気ヘツドの製造方法
DE3727054A1 (de) * 1987-08-13 1989-02-23 Siemens Ag Verfahren zum herstellen von flugkoerpern fuer duennschicht-magnetkoepfe
US4939837A (en) * 1988-09-01 1990-07-10 International Business Machines Corporation Batch fabrication process for magnetic heads
US4914868A (en) * 1988-09-28 1990-04-10 International Business Machines Corporation Lapping control system for magnetic transducers
JP2677399B2 (ja) * 1988-11-16 1997-11-17 ティーディーケイ株式会社 薄膜磁気ヘッドの製造方法
CN1247518C (zh) * 2001-03-08 2006-03-29 克莱里安特财务(Bvi)有限公司 羟基羧酸和二醇类或甘油的缩合产物

Also Published As

Publication number Publication date
EP0463765A2 (de) 1992-01-02
DE69125061T2 (de) 1997-07-10
JP2704067B2 (ja) 1998-01-26
EP0463765A3 (en) 1992-05-13
USRE35477E (en) 1997-03-18
CA2044496C (en) 1998-08-04
EP0463765B1 (de) 1997-03-12
US5095613A (en) 1992-03-17
CA2044496A1 (en) 1991-12-30
SG52425A1 (en) 1998-09-28
JPH04289511A (ja) 1992-10-14

Similar Documents

Publication Publication Date Title
DE69125061T2 (de) Herstellungsverfahren für Dünnfilmkopfgleiter
DE69032936D1 (de) Herstellungsverfahren für Dünnfilm-Magnetköpfe
DE69227848T2 (de) Herstellungsverfahren für retroreflektierende folie
DE69117389D1 (de) Flacher Dünnfilmmagnetkopf
DE69132640D1 (de) Giessform für Plattenkassette
DE69104671D1 (de) Strukturen von Dünnschichten für Magnetköpfe.
DE69116726D1 (de) Tragbänder für Reissverschlüsse
DE69025821T2 (de) Dünnfilm-Magnetkopf
DE69117905D1 (de) Herstellungsverfahren für Alkoxyphthalocyanine
DE69025820T2 (de) Dünnfilmmagnetkopf
DE69220312T2 (de) Herstellungsverfahren für oxidischen supraleitenden film
DE69123487T2 (de) Dünnfilmmagnetkopf
DE69110959D1 (de) Zusammengesetzter Film für die elektrostatische Aufzeichnung.
DE69123921D1 (de) Segmentiertes Hologram für Mehrfachanzeige
EP0467263A3 (en) Thin film magnetic head and method for manufacturing the same
DE69119860T2 (de) Dünnfilmmagnetkopf
DE69120693T2 (de) Magnetkopfvorrichtung für magnetische Bänder
DE69026997T2 (de) Dünnfilmmagnetkopf
DE69116212D1 (de) Kassette für die Kapillarelectroforese
DE69128070T2 (de) Aufnahmeschicht für Overheadprojektion
DE69224214T2 (de) Herstellungsverfahren für Dünnschicht-Supraleiter
DE69121300D1 (de) Dünnfilmmagnetkopf
DE69115764T2 (de) Herstellungsverfahren für supraleitenden dünnen Film
DE69306534D1 (de) Dekorative Schieber für Reissverschlüsse
DE69119835T2 (de) Dünnfilm-Magnetkopf

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee