USRE38340E1 - Multi-point bending of bars during fabrication of magnetic recording heads - Google Patents

Multi-point bending of bars during fabrication of magnetic recording heads Download PDF

Info

Publication number
USRE38340E1
USRE38340E1 US09951165 US95116501A USRE38340E US RE38340 E1 USRE38340 E1 US RE38340E1 US 09951165 US09951165 US 09951165 US 95116501 A US95116501 A US 95116501A US RE38340 E USRE38340 E US RE38340E
Authority
US
Grant status
Grant
Patent type
Prior art keywords
control
bar
carrier
lapping
points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US09951165
Inventor
Shanlin X. Hao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Images

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00Head arrangements not specific to the method of recording or reproducing
    • G11B21/16Supporting the heads; Supporting the sockets for plug-in heads
    • G11B21/24Head support adjustments
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/005Control means for lapping machines or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/048Lapping machines or devices; Accessories designed for working plane surfaces of sliders and magnetic heads of hard disc drives or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/3116Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3169Working or finishing the interfacing surface of heads, e.g. lapping of heads
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3173Batch fabrication, i.e. producing a plurality of head structures in one batch
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/4826Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/56Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head support for the purpose of adjusting the position of the head relative to the record carrier, e.g. manual adjustment for azimuth correction or track centering
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/187Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1871Shaping or contouring of the transducing or guiding surface
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/398Specially shaped layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49004Electrical device making including measuring or testing of device or component part

Abstract

A device for lapping a bar of the type which carries a plurality of sliders used in magnetic storage systems includes first, second and third actuators adapted to couple to the bar, and impart a first, second and third controllable force in response to a first, second and third control signal, respectively. An arm couples to the first, second and third actuators and applies a lapping force to the bar which presses the bar against a lapping surface thereby causing material to be removed from the bar. A controller provides the first, second and third control signals to the first, second and third actuators, respectively, to impart a plurality of forces onto the bar. The actuators are controlled to obtain a desired profile of the bar and to obtain a desired distribution of the lapping force across the profile of the bar.

Description

The present invention claims the benefit of earlier filed U.S. Provisional Application No. 60/030,276, entitled MULTI-POINT BENDING TOOL (CARRIER) FOR ULTRA-PRECISION MACHINING filed on Nov. 4, 1996

BACKGROUND OF THE INVENTION

The present invention relates generally to the fabrication of magnetoresistive (MR) and inductive recording sensors or transducers for data storage application. More specifically, the present invention relates to a method and apparatus for bending a bar which carries a plurality of sliders at multiple points during the fabrication process and specifically during the lapping process.

During the fabrication of magnetic heads for use in magnetic data storage applications, an array of transducers are fabricating on a common substrate (also called a wafer) by depositing a plurality of layers onto a surface of the substrate. The array of transducers are patterned using, for example, a photolithographic process in combination with various etching and liftoff processes. The finished substrate or wafer is then optically and/or electrically inspected and subsequently cut into smaller arrays, typically a plurality of bars, i.e. rows of transducers. Next, the individual rows or bars of transducers are machined or “lapped” to obtain a desired dimension. (Lapping is a material removal process described below in more detail.) For MR transducers, this dimension is sometimes referred to as stripe height (SH) and for inductive transducers this dimension is sometimes referred to as throat height (TH). Often, electrical lap guides (ELGs, described below) are deposited upon the same substrate and are used as sensors during the lapping process. Following the lapping process, the recording heads are diced to produce individual transducers or heads which are used to form sliders. These sliders are used to read back and/or write information onto a surface of a magnetic disc, for example, which moves at a high rate of rotation.

In order to establish adequate performance for high efficiency recording heads, it is necessary to achieve the desired strip height or throat height. There are many factors which affect variations in the ultimate stripe height or throat height. These factors include variations in the position and size of elements induced during wafer processing. The step of slicing the substrate into bars can also introduce variations. Mounting induced thermal stress can also cause variations during the processing of the wafers into sliders. Further, the profile of the lapping surface can lead to variations.

Electrical lapping guides (ELGs) are sensors which are deposited onto the wafer during the fabrication process. The output from the ELGs can be used to determine when to stop the lapping process. Typically, the ELGs are fabricated along with the transducers using the same wafer processing steps. This is described, for example, in U.S. Pat. No. 4,477,968 which issued Oct. 23, 1984 and U.S. Pat. No. 4,559,743 which issued Dec. 24, 1985.

Lapping generally refers to machining processes in which material is very slowly, at a controllable rate, removed from a surface. Typically, the process involved applying a work surface of the work piece to a moving surface which is slightly abrasive. One such device is described in U.S. Pat. No. 4,536,992 which issued Aug. 27, 1985. Thus, by controlling the lapping process in response to the output from the ELGs, a closed loop machining process is set up in which the output from the ELGs are used as feedback to the lapping machine.

During the lapping process, the slider is held on a carrier which attaches to the arm of the lapping apparatus. Such a carrier is described in U.S. Pat. No. 4,457,114 which issued Jul. 3, 1984. The carrier in U.S. Pat. No. 4,457,114 uses two actuators to bend the bar during the lapping process. In U.S. Pat. No. 4,457,114, the carrier provides bending of the bar at both ends around the center of the bar. This bending is used to provide non-uniform removal of material from the bar in order to compensate for variations in the bar and the throat height or stripe height of the sensor. In U.S. Pat. No. 4,457,114, the actuators comprises pins which are heated to thereby expand and apply a force to the bar which bends the bar. A variation on this technique is to use three different actuators to apply force to a bar at three different points.

Generally, the prior art has focused on improved ELGs and lapping mechanisms. However, as the data storage industry is continuously driven to higher and higher densities and in an ongoing effort to reduce costs of fabrication, a number of competing factors are observed. First, the sensor height tolerance requirement is getting smaller. Second, the density of heads carried on each bar is getting larger. Third, the aspect ratio of the length to the thickness of each bar is getting larger. Therefore, existing lapping and bending systems are often inadequate for controlling the lapping process. These factors not only lead to heads which are more sensitive to processing induced disturbances, but also lead to bars which are more easily disturbed because they are thinner and the stiffness of the bar is related to the cube of its thickness.

SUMMARY OF THE INVENTION

The present invention includes a lapping apparatus which provides improved control during the lapping process. In one embodiment, a device for lapping a bar which carries a plurality of sliders includes a first actuator adapted to couple to the bar and to impart a first controllable force in response to a first control signal and a second actuator adapted to couple to the bar through the actuators and applies a lapping force to the bar and against the lapping surface. A controller provides first and second control signals to the first and second actuators, respectively, to thereby impart a plurality of forces on the bar. The forces are selected to obtain a desired profile of the bar and to obtain a desired distribution of the lapping surface across the profile of the bar.

In one embodiment, seven different actuators are used to provide seven separate control points for bending of the bar.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a head carrying bar of the type used in the present invention.

FIG. 2 is a simplified schematic diagram of a prior art carrier having two actuated points and a fixed point.

FIG. 3 is a simplified schematic diagram of a prior art carrier having three actuated control points and two fixed control points.

FIG. 4 is a simplified schematic diagram showing a carrier in accordance with one embodiment of the present invention.

FIG. 5 is a graph showing deflection for the carrier of FIG. 3 and the carrier of FIG. 4.

FIG. 6A is a front plan view and FIG. 6B is a top perspective view, respectively, of a carrier in accordance with one embodiment of the invention having nine control points.

FIG. 7 is a graph showing deflection versus position of a carrier in accordance with the present invention having a single control point actuated.

FIG. 8 is a simplified diagram of a lapping system in accordance with the present invention.

FIG. 9 is a front plan view of a carrier iii in accordance with another embodiment having seven adjacent actuated control points and fixed control points on either end of a profile of the carrier.

FIG. 10 is a front plan view of a carrier in accordance with another embodiment.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention provides a method and apparatus for accurately lapping a bar carrying a plurality of heads of the type used to write and/or read back information from the surface of a magnetic storage disc. FIG. 1 is a perspective view of bar 10 which carries a plurality of heads 12. The dimensions of head 12 are significant and it has been known to use a lapping process to obtain the desired dimensions. As described in the Background section, lapping is a controlled material removal process in which a work surface of bar 10 is pressed against a moving, abrasive surface to thereby selectively and controllably remove material from bar 10. This lapping is performed using a lapping machine which includes an arm, a lapping surface and a carrier which couples bar 10 to the arm. The arm presses the bar against the lapping surface to thereby cause material to be removed from bar 10.

It has been known in the prior art to control the profile of the carrier. This control is used to more accurately control the material removal. Specifically, as illustrated by FIG. 1, bar 10 is an elongated element which may bend or have deformities. By controlling the profile of carrier used to hold bar 10 during lapping, it is possible to compensate for these bends or deformations.

FIG. 2 is a simplified schematic diagram of a prior art carrier 14 having a profile 16. In FIG. 2, fulcrum 18 represents a fixed portion of carrier 14 and bi-directional arrows 20 and 22 represent actuators at either end of profile 16. Profile 16 is adapted to couple to a bar, such as bar 10. FIG. 2 is similar to the carrier described in U.S. Pat. No. 4,457,114, issued Jul. 3, 1984. Thus, carrier 14 provides limited control of profile 16 such that variations in bar 10 can be compensated. FIG. 3 is a simplified schematic diagram of another prior art carrier 30. Carrier 30 has a carrier profile 32 which is coupled to fixed control points or fulcrums 34 and 36 and actuators which control actuated control points represented by bi-directional arrows 38, 40 and 42.

One aspect of the present invention includes the recognition that there are two parameters which must be controlled during lapping. These parameters are bending of the bar profile and balancing of the force applied to the bar. Bending of the bar refers to adjusting the profile of the bar such that the bar becomes relatively straight (or is otherwise shaped as desired). Balancing, on the other hand, is the distribution of pressure across the bar. For example, in the prior art design of FIG. 3, balancing is determined by the relative positions of fulcrums 34 and 36. The actuators represented by arrows 38, 40 and 42 are used to control the shape of the bar profile.

Another aspect of the present invention includes the recognition that the use of additional control points on a carrier can be used to provide more accurate control of a bar during a lapping process. The present invention includes determination of the number of control points needed to achieve a desired degree of control for a bar having a desired length. For example, given a bar profile for I bars defined by J data pints, xij, yij where i=1, 2, . . . I, and j=1, 2, . . . J. A polynomial curve fit function is formed using a least squares fit analysis:

{overscore (y)}ij=f(a1, a2 . . . , ak, xij)  Eq. 1

where k equals 2, 3, . . . and is the order of the curve and a, a2, . . . are the coefficients of the curve. Next, the root mean square (RMS) of the residuals for each k are calculated according to the following formula: RMS k = 1 IJ - 1 i , j Σ ( y ij - y _ ij ) 2 Eq . 2

Figure USRE038340-20031202-M00001

Using Equation 2, the number of control points (k) required to achieve the desired amount of control can be determined by assuming that a (k−1)th order curve can be bent straight and setting RMSk to the desired minimum variation in the bar profile. One can then calculate the necessary order of the RMS curve fit which also provides the number of control points. For example, if RMSk is less than 1 pinch Equation 2 is solved with k equal to 10. This analysis has been verified experimentally using carriers having five control points over a 2 inch long bar and five control points over a 1 inch long bar. The standard deviation of the 2 inch long bar was 2.3 μinch while the standard deviation of the 1 inch long bar was 0.78 μinches. This leads to the conclusion that nine control points is sufficient to obtain a variation of less than 1 μinch in the finished bar profile for a standard 2 inch long bar. Table 1 shows that between 9 and 10 control points are needed to achieve control to within 1 μinch in a 2 inch bar.

TABLE 1
RMS of residuals between
Curve Fit individual point and RMS over
Parameter curve on each bar 15 × 24 STD measure =
# mean median 75% 90% points 1.67 μinch
2 39.32 33.44 60.28 72.85 46.67 46.64
3 19.87 13.59 27.57 46.91 25.13 25.07
4 8.96 6.54 10.96 18.78 11.4 11.28
5 6.06 4.48 6.54 9.63 7.5 7.31
6 4.67 3.39 5.77 8.63 5.6 5.35
7 3.21 2.57 3.82 7.26 3.62 3.21
8 2.56 2.23 2.97 4.66 2.82 2.27
9 2.09 2.02 2.61 2.98 2.19 1.42
10  1.69 1.62 2.01 2.78 1.74 0.49

FIG. 4 is a simplified schematic diagram of a carrier 50 in accordance with one embodiment of the present invention. Carrier 50 is shown with profile 52 having control points A, B, C, D, E, F, G, H and I. Control points A, B, D, E, F, H and I are coupled to actuators (not shown in FIG. 4) while control points C and G are stationary fulcrums 54 and 56, respectively. In FIG. 4, control point A is shown actuated a distance of U1, control point B is shown actuated distance U2, control point D is shown actuated distance U3, control point E is shown actuated distance U4, control point F is shown actuated a distance U5, control point H is shown actuated a distance U6 and control point I is shown actuated a distance U7. Thus, there are nine separate control points shown in FIG. 4 of which seven are individually actuated and two are fixed. This provides eight different segments to profile 52 which can be controlled, segments A-B, B-C, C-D, D-E, E-F, F-G, G-H and H-I. The slope θ of a line passing through control points C and G can be used to control balance of carrier 50 and the distribution of the lapping force across profile 52. During operation, the actuators which couple to points A, B, D, E, F, H and I are preferably controlled such that profile 50 is a substantially straight line.

FIG. 5 is a comparison of deflection using a prior art three-point bending carrier such as shown in FIG. 3 and a seven-point bending carrier such as shown in FIG. 4. FIG. 5 is a graph showing the average difference between a deformed carrier shape and a bar bow at various positions along the length of the bar. Line 60 is for a three-point carrier and line 62 is for a seven-point carrier. The graph of FIG. 5 was calculated using a finite element method (FEM) modeling technique. As shown in FIG. 5, the three-point bending allows substantial variation to the profile, particularly between the end point actuators (i.e., between 34 and 38 and between 36 and 42 shown in FIG. 3.)

FIG. 6A is a front plan view and FIG. 6B is a top perspective view of carrier 50 in accordance with one embodiment of the present invention. Carrier 50 includes main body 70 having detents 72 formed therein and presenting carrier profile 52. Profile 52 includes control points A-I. Nine control areas 74, 76, 78, 80, 82, 84, 86, 88 and 90 are formed in main body 70 adjacent control points A-I, respectively. Control areas 74-90 are defined by regions of reduced strength in main body 70 formed by cutouts 92, 94, 96, 98, 100, 102, 104 106, 108 and 110. Further, plate spring cutouts 112, 114 and 116 are positioned parallel to and opposite profile 52. Actuator couplings 120, 122, 124, 126, 128, 130 and 132 are positioned within control areas 74, 76, 80, 82, 84, 88 and 90, respectively. Main body 70 may also optionally carry bar code information 140. The design of carrier 50 in FIGS. 6A and 6B is selected based upon the design goal of balancing structure bending stiffness while achieving the desired bar bow correction requirements based upon available bending capacity (load and travel) of the actuators.

In operation, actuators (not shown in FIGS. 6A and 6B) are adapted to couple to actuator couplings 120-132 to control the profile 52 as desired. Using control area 74 as an example, cutouts 92 and 94 allow vertical movement which is transferred to control point A. Furthermore, control area 78 controls control point C. The cutout portions 92-110 have a shape selected to reduce the coupling to adjacent control areas. However, control area 78 is more closely coupled to main body 70 because of the spacing between parallel spring cutouts 112 and 114. This is also true for control area 86 with respect to cutouts 114 and 116. Thus, control areas 78 and 86 provide stationary control points or fulcrums 54 and 56, respectively, shown in FIG. 4. Another aspect of the present invention is the vertical offset between adjacent actuator couplings 120 and 122, for example. This offset allows the actuator couplings to be more closely spaced thus allowing additional control points and therefore greater control. Further, cutouts 96 and 104 are staggered to further improve spacing. Plate spring cutouts 112, 114 and 116 provide a plate spring parallel mechanism which yields more linear bending on the bar and reduces off-plane displacement due to the lapping force or an off center bending force. Cutouts 112, 114 and 116 reduce the amount of twisting motion which could be imparted to profile 52 due to the lapping force of the lapping surface as it is moved past profile 52.

Another aspect of the present invention includes the use non-uniform spacing between control points in order to improve control or more evenly distribute control. For example, referring back to FIG. 5, the deflection between the two end points in graph 62 indicates that the maximum variation occurs between points A and B and points H and I. Therefore, rather than uniformly distributing the control points, the design of FIGS. 6A and 6B has reduced spacing between side control points (i.e., sections A-B, B-C, G-H and H-I) than that of the middle control points (i.e., sections C-D, D-E, E-F and F-G). This spacing may be adjusted as appropriate to achieve either a uniform distribution or any desired distribution. Detents 72 are used to clamp carrier 50 to the arm of the lapping device. Registration sections 142 provide a reference surface for the lapping arm during the lapping process. In one preferred embodiment, carrier 50 is formed of white TZP Zirconia ceramic which allows for easy maintenance. The bar code 140 can be used to track carrier 50 and/or an associated bar carried on profile 52 during the machining process.

One aspect of the present invention includes characterizing the carrier for subsequent use during the lapping process. FIG. 7 is a graph based upon FEM modeling which shows the response of profile 52 when point D is actuated through actuator coupling 124. FIG. 7 is a graph of deflection versus bar length. FIG. 7 shows that the individual bending control points are closely coupled together in the present invention. Note that this is in contrast to the prior art designs shown in FIGS. 2 and 3 in which the points are spaced further apart and each actuated control point is separated by a fixed control point. Thus, in the present invention, the movement of a single control point significantly alters the entire profile of the carrier. Therefore, in order to actively control the bending of the bar during the lapping process, an accurate transfer function must be determined which describes the carrier response to different loading situations. This transfer function may be defined as a matrix. Assume that: {overscore (F)}=[F1, F2, . . . F7] is the applied bending forces on the carrier 50 at each control point, and {overscore (U)}=[U1, U2, . . . U7] is the resulting displacement of profile 52 for each of the control points A-I, respectively. A sensitivity matrix {overscore (K)} can be generated according to the formula:

{overscore (K)}·{overscore (F)}={overscore (U)}  Eq. 3

where: K = [ k11 k12 k13 k17 k21 k22 k27 k31 k71 k72 k77 ]

Figure USRE038340-20031202-M00002

The sensitivity matrix {overscore (K)} defines the behavior of profile 52 in response to forces applied at each of the actuator coupling points 120-132. The major diagonal components in {overscore (K)} describe the direct effect of forces applied at individual bending points. The off-diagonal components in {overscore (K)} describe the coupling effect between the various points.

The sensitivity matrix {overscore (K)} can be established by quantifying the carrier displacement response to individually applied known bending forces. This may be performed either through actual experimental measurements or using FEM modeling techniques. During the lapping process, the equation is solved in reverse. First, the normalized bar bow profile is formed using ELG feedback information. The profile of the bar is leveled using balancing of the fixed control points. The carrier deflection required to bend the bar straight is calculated in accordance with the equation:

{overscore (U)}=[U1, U2, . . . U7]  Eq. 5

Where U1-U7 represent a flat profile. Next, equation 3 is solved for {overscore (F)}:

{overscore (F)}=[F1, F2, . . . F7]  Eq. 6

Where F1-F7 are the forces which must be applied by each actuator to achieve the desired profile described by {overscore (U)}.

FIG. 8 is a simplified diagram showing a lapping system 98 in accordance with the present invention. Lapping system 198 includes armature 200 having clamps 202 which are adapted to clamp to carrier 50 at detents 72. Armature 200 is carried on elongated arm 204 which couples to fulcrum 206. Armature 200 is positioned whereby bar 10 which couples to carrier 50 is in contract with a lapping surface 208. Armature 200 carriers actuators 220, 222, 224, 226, 228, 230 and 232 which couples to couplings 220-232 through actuator armatures 240, 242, 244, 246, 248, 250 and 252, respectively. Actuators 220-232 receive control signals through control lines 260 1-7 from control system 262. Armature 200 also couples to balancing actuator 264 which is positioned opposite carrier 50 relative to fulcrum 206. Actuator 264 also couples to control system 262. A feedback connection 266 is provided from electronic lapping guides (ELGs) carrier on bar 10. Control system 262 includes a user input 270, such as a keypad, a user output 272, such as an LED display, memory 274, ELG input 276 a controller 278, such as a microprocessor, and an actuator driver.

In operation, the lapping process is controlled by control system 262. Controller 278 retrieves instructions and parameters from memory 274. For example, the matrix of Equation 4 may be stored in memory 274. Instructions and information are received from user input 270 and the status of the lapping process may be displayed on display 272. Additionally, lapping system 198 may include a bar code reader (not shown) to read bar code information 140 for use by controller 278. Feedback regarding the progress of the lapping operation is received through ELG input 276 and provided to controller 278. Controller 278 solves Equation 3 for {overscore (F)} and responsively controls actuators 220-232 and 264 using driver 280. Driver 280 may comprise, for example, a transistor circuit providing a power output to actuate the actuators. Actuators 220-232 and 264 may be any appropriate actuator which is capable of providing a controlled movement such as a hydraulic system, a voice coil, a pneumatic actuator, a piezo electric system, thermal, magnetorestrictive, etc. Those skilled in the art will recognize that the present invention is not limited to any particular actuator. Actuator 264 is used to provide a balance control to balance distribution of the force applied to bar 10. Actuators 220-232 are used to apply the individual forces of vector {overscore (F)}. The total amount of force applied on bar 10 may be controlled by a weight or another actuator (not shown). As shown in FIG. 8, lapping system 198 provides a closed loop in which the output from the ELG sensors are used as feedback by controller 278 to control actuators 220-232 and 264. Lapping surface 208 may comprise, for example, a rotating disc, the lapping system of FIG. 8 is provided as an example only and the carrier of the present invention may be employed with lapping systems of any appropriate design.

FIG. 9 is a plan view of a carrier 300 in accordance with another embodiment. Carrier 300 provides control points 302, 304, 306, 308, 310, 312, 314, 316 and 318 along profile 320. Carrier 300 is an example of a carrier in accordance with the present invention in which end points 302 and 318 are fixed while control points 304-316 are all individually actuated. Note that this also uses a single cutout 322 to provide the parallel spring mechanism.

It will be understood that any appropriate orientation of cutouts or other mechanisms to allow relative movement of the control points is within the scope of the present invention. FIG. 10 shows a plan view of a carrier 340 which illustrates another technique for selecting the shape of cutouts in the carrier body. The cutouts in carrier 340 are designed to reduce deflection of the carrier profile due to lapping pressure. Carrier 340 accomplishes this goal by contouring the beam of the cutout. Additionally, the thickness of carrier 340 can be increased to further reduce lapping induced deflection.

The present invention provides a lapping system having a carrier which allows improved control of the bending of a bar during a lapping process. The present invention includes numerous features including an increased number of actuators and closer spacing between actuators. Further, in contrast to prior art designs, in the present invention actuators are placed adjacent one another without an intermediate fixed region. Further, in the present invention, the actuator mechanism is placed on the arm of the lapping machine such that the mechanism need not be placed on each bar. Attachment of the bar to the carrier may be through any appropriate technique. In one embodiment, the bar may be slid into a slot carried on the profile of the carrier. Further, the actuators of the present invention may be used to either push or pull the bar and thereby allow deformations in either direction. Preferably, bending of the bar is centered around the normal profile of the bar. This reduces any extra bending stress placed on the bar during lapping. In one preferred embodiment, the lapping of a 2 inch long bar is controlled to within a standard deviation of less than 1 μinch using a minimum of nine separate control points, seven for bending and two for balancing the lapping force. This number may be increased or decreased as appropriate based upon the length of the bar and the desired minimum standard deviation. Clamping of the carrier may be through any appropriate technique and is not limited to the specific clamps described herein. Further, the actuators may be coupled too the carrier using other techniques. As used herein, the term “control point” may be either a fixed control point (shown as a fulcrum in the schematic drawings) or an actuated control point.

Although the present invention has been described with reference to preferred embodiments, workers skilled in the art will recognize that changes may be made in form and detail without departing from the spirit and scope of the invention. For example, any number of control points, formed by any appropriate technique, in any type of carrier, actuated or fixed by any means may be used. Further, any type of lapping may be used, and the arm can be integral with the carrier. The control points could also be formed integral with the bar itself. This might require additional connections to the bar.

Claims (48)

What is claimed is:
1. A device for lapping a bar carrying a plurality of sliders, comprising:
a first actuator adapted to couple to the bar and impart a first controllable force in response to a first control signal;
a second actuator adapted to couple to the bar and impart a second controllable force in response to a second control signal;
a lapping surface;
an arm coupled to the first and second actuators which provides a lapping force to the bar against the lapping surface; and
a controller providing the first and second control signals to the first and second actuators, respectively, to impart a plurality of forces on the first and second controllable forces on the bar selected to obtain a desired profile of the bar and to obtain a desired distribution of the lapping force across the profile of the bar, wherein bending caused by the first actuator interferes with bending caused by the second actuator and the controller determines the first and second control signals for the first and second actuators based upon the desired profile of the control points bar and an interrelationship between the bending caused by the first and second control points actuators.
2. The device of claim 1 wherein the first actuator couples to a first control point and the second actuator couples to a second control point adjacent the first control point.
3. The device of claim 1 wherein the controller includes memory which contains a sensitivity matrix describing a relationship between the interrelationship between the bending caused by the first and second actuators and the first and second control signals is are selected as a further function of the sensitivity matrix.
4. The device of claim 1 including a carrier coupling the arm to the bar and including a first control point coupled to the first actuator and a second control point coupled to the second actuator.
5. The device of claim 4 including a balancing actuator coupled to the controller and wherein the carrier includes at least two fixed control points coupled to the balancing actuator to apply a balancing force to the bar.
6. The device of claim 5 wherein the carrier has first and second opposing ends and the two fixed control points are on the opposing ends of the carrier.
7. The device of claim 5 wherein the carrier includes a third control point coupled to a third actuator and a fourth control point coupled to a second fourth actuator and wherein the at least two fixed control points are separated by at least two of the first, second, third and fourth control points.
8. The device of clam 4 wherein the carrier includes a detent and the arm includes a clamp adapted to clamp onto the detent.
9. The device of claim 4 wherein the carrier includes a first control area for coupling to the first actuator and transferring the first controllable force to the first control point, the first control area defined by a region of reduced strength in the carrier.
10. The device of claim 9 wherein the region of reduced strength comprises a cutout in the carrier.
11. The device of claim 4 wherein the carrier includes a parallel spring mechanism adapted to reduce deformation of the bar due to movement of the lapping surface.
12. The device of claim 1 wherein the first and second actuators are pneumatic.
13. The device of claim 4 wherein the carrier includes a third control point and a spacing between any pair of adjacent control points is non-uniform.
14. A device for lapping a bar carrying a plurality of sliders comprising:
an arm;
a lapping surface;
a first actuator coupled to the arm;
a second actuator coupled to the arm;
a carrier comprising:
a work surface adapted to couple to the bar and press the bar against the lapping surface;
a first control point on the work surface coupled to the first actuator and positioned to apply a first force to the bar; and
a second control point on the work surface adjacent the first control point coupled to the second actuator and positioned to apply a second force to the bar;
wherein the first and second control points are positioned in relatively close proximity such that displacement of the first control point causes significant displacement of the second control point.
15. The device of claim 14 including a controller coupled to the first and second actuators providing control signals to the first and second actuators as a function of a sensitivity matrix which describes a relationship between movement of the first actuator and a resulting movement of the second control point.
16. The device of claim 14 wherein the carrier further comprises first and second fixed control points which control balancing of the bar relative to the lapping surface.
17. The device of claim 16 wherein the fixed control points are on opposing ends of the work surface.
18. The device of claim 16 wherein the carrier further includes third and fourth control points on the work surface and wherein the two fixed control points are separated by at least two of the first, second, third or fourth control points.
19. The device of claim 14 wherein the carrier includes a detent and the arm includes a clamp adapted for coupling to the detent.
20. The device of claim 14 wherein the carrier includes a first control area coupling to the first actuator and transferring movement to the first control point, the first control area defined by a region of reduced strength in the carrier.
21. The device of claim 20 wherein the region of reduced strength comprises a cutout region in the carrier.
22. The device of claim 14 wherein the carrier includes a parallel spring mechanism adapted to reduce deformation of the work surface due to movement of the lapping surface.
23. The device of claim 14 wherein the carrier includes a third control point and a spacing between any pair of adjacent control points is non-uniform.
24. A device for lapping a bar carrying a plurality of sliders, comprising:
an arm;
a lapping surface;
a carrier comprising:
a work surface adapted to couple to the bar and press the bar against the lapping surface; and
first, second, third and fourth adjacent control points coupled to the arm and to the work surface;
wherein the first control point is coupled to a first actuator, the second control point is coupled to a second actuator, the third control point is coupled to a third actuator and the fourth control point is coupled to a fourth actuator.
25. The device of claim 24, the carrier further comprises a fourth control point and wherein the first and fourth control points are fixed control points and are separated by the second and third control points.
26. The device of claim 24 wherein the first carrier further includes a detent and the arm is adapted to clamp to the detent.
27. The device of claim 24 including a first control area adapted to transfer movement to the first control point, the first control area defined by a region of reduced strength in the carrier.
28. The device of claim 14 or 24 wherein the carrier includes 7 actuated control points and 2 fixed control points.
29. A device for lapping a bar carrying a plurality of sliders, comprising:
a first actuator adapted to couple to the bar and impart a first controllable force to the bar proximate to a first control point in response to a first control signal;
a second actuator adapted to couple to the bar and impart a second controllable force to the bar proximate to a second control point in response to a second control signal;
a lapping surface;
an arm adapted to support the bar relative to the lapping surface; and
a controller providing the first and second control signals to the first and second actuators, respectively, to impart the first and second controllable forces to bend the bar to obtain a desired profile of the bar and a desired distribution of lapping force across a profile of the bar, wherein the first actuator introduces a first bending profile to the bar and the second actuator introduces a second bending profile to the bar and the first and second control signals are selected as a function of an interrelationship of the first bending profile imparted by the first actuator and the second bending profile imparted by the second actuator at the first and second control points.
30. The device of claim 29 wherein the controller includes memory which contains a sensitivity matrix describing the interrelationship of the first and second bending profiles imparted by the first and second actuators and the first and second control signals are selected as a further function of the sensitivity matrix.
31. The device of claim 29 including a carrier coupling the bar to the arm to support the bar relative to the lapping surface and the first and second actuators are coupled to the carrier.
32. The device of claim 29 including a balancing actuator coupled to the controller and the arm.
33. The device of claim 29 including a third actuator and a fourth actuator adapted to couple to the bar and adapted to impart third and fourth controllable forces to the bar proximate to third and fourth control points in response to third and fourth control signals and the controller determines the third and fourth control signals based upon the desired profile of the bar and the desired distribution of lapping force across the profile of the bar and the interrelationship of third and fourth bending profiles imparted to the bar by the third and fourth actuators.
34. The device of claim 31 wherein the carrier includes a plurality of flexible control areas of reduced strength spaced along a length of the carrier.
35. The device of claim 34 wherein the flexible control areas comprise a cutout in the carrier.
36. The device of claim 31 wherein the carrier includes a third actuator coupled to the carrier and the first, second and third actuators are non-uniformly spaced along a length of the carrier.
37. A device for lapping a bar carrying a plurality of sliders comprising:
an arm;
a lapping surface;
a carrier coupled to the arm and adapted to support the bar relative to the lapping surface; and
a plurality of actuators coupled to the carrier proximate to control points 1 -n spaced along a length of the carrier and the plurality of actuators adapted to supply a plurality of controllable forces to the bar in response to a plurality of control signals supplied to the plurality of actuators to bend the bar, and the plurality of the control signals being determined to provide a desired profile of the bar and a desired distribution of lapping force along a length of the bar based upon [ K 11 K 1 n K n1 K nn ] · [ F 1 F n ] = [ U 1 U n ]
Figure USRE038340-20031202-M00003
where [ K 11 K 1 n K n1 K nn ]
Figure USRE038340-20031202-M00004
is a sensitivity matrix for the controllable force vs. displacement for control points 1 -n where K 11 to K nn are not equal to zero; [ F 1 F n ]
Figure USRE038340-20031202-M00005
are the controllable forces proximate to the control points 1 -n; and [ U 1 U n ]
Figure USRE038340-20031202-M00006
is the displacement proximate to the control points 1 -n.
38. The device of claim 37 wherein the carrier includes a plurality of areas of reduced strength spaced along the length of the carrier.
39. The device of claim 37 wherein the sensitivity matrix is derived experimentally based upon application of known controllable forces.
40. The device of claim 37 wherein the device includes at least seven actuators coupled to the carrier.
41. The device of claim 37 wherein the sensitivity matrix includes at least three control points spaced along the length of the carrier and the controllable force F proximate to at least one of the three control points equals zero.
42. The device of claim 37 wherein the sensitivity matrix includes at least nine control points spaced along the length of the carrier and the controllable force F proximate to at least two of the nine control points equals zero.
43. The device of claim 37 wherein the sensitivity matrix includes at least two control points spaced along the length of the carrier where the controllable force F proximate to the at least two control points equals zero to define fulcrum points along the length of the carrier.
44. The device of claim 37 wherein the sensitivity matrix is derived using mathematical modeling techniques.
45. The device of claim 24 wherein the means for actuating the plurality of actuators based upon the cumulations of the bending profiles of each of the plurality of actuators includes a controller which determines an actuation force for each of the plurality of actuators based upon a sensitivity matrix describing an interrelationship between the bending profiles of each of the plurality of actuators.
46. The device of claim 24 wherein the means for actuating the plurality of actuators calculates an actuation force for each of the plurality of actuators based on: [ K 11 K 1 n K n1 K nn ] · [ F 1 F n ] = [ U 1 U n ]
Figure USRE038340-20031202-M00007
where [ K 11 K 1 n K n1 K nn ]
Figure USRE038340-20031202-M00008
is a sensitivity matrix for the actuation force vs. displacement for control points 1 -n along a length of the carrier where K 11 to K nn are not equal to zero; [ F 1 F n ]
Figure USRE038340-20031202-M00009
are the actuation forces proximate to the control points 1 -n; and [ U 1 U n ]
Figure USRE038340-20031202-M00010
is the displacement proximate to the control points 1 -n.
47. A device for lapping a bar carrying a plurality of sliders, comprising:
an arm;
a lapping surface;
a carrier coupled to the arm and adapted to support the bar relative to the lapping surface;
a plurality of actuators coupled to the carrier and each of the plurality of actuators adapted to impart a bending profile to the carrier; and
means for actuating the plurality of actuators to impart a desired bending profile to a plurality of control points along the carrier based upon a cumulation of the bending profiles of each of the plurality of actuators.
48. The device of claim 47 wherein at least seven actuators are coupled to the carrier.
US09951165 1996-11-04 1996-12-13 Multi-point bending of bars during fabrication of magnetic recording heads Expired - Fee Related USRE38340E1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US3027696 true 1996-11-04 1996-11-04
US09951165 USRE38340E1 (en) 1996-11-04 1996-12-13 Multi-point bending of bars during fabrication of magnetic recording heads
US08765139 US5951371A (en) 1996-11-04 1996-12-13 Multi-point bending of bars during fabrication of magnetic recording heads
PCT/US1996/020088 WO1998019828A1 (en) 1996-11-04 1996-12-13 Multi-point bending of bars during fabrication of magnetic recording heads

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09951165 USRE38340E1 (en) 1996-11-04 1996-12-13 Multi-point bending of bars during fabrication of magnetic recording heads

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US08765139 Reissue US5951371A (en) 1996-11-04 1996-12-13 Multi-point bending of bars during fabrication of magnetic recording heads

Publications (1)

Publication Number Publication Date
USRE38340E1 true USRE38340E1 (en) 2003-12-02

Family

ID=21853422

Family Applications (2)

Application Number Title Priority Date Filing Date
US09951165 Expired - Fee Related USRE38340E1 (en) 1996-11-04 1996-12-13 Multi-point bending of bars during fabrication of magnetic recording heads
US08836466 Expired - Lifetime US6069771A (en) 1996-11-04 1997-05-06 Gimbal micropositioning device

Family Applications After (1)

Application Number Title Priority Date Filing Date
US08836466 Expired - Lifetime US6069771A (en) 1996-11-04 1997-05-06 Gimbal micropositioning device

Country Status (6)

Country Link
US (2) USRE38340E1 (en)
JP (1) JP2001503902A (en)
KR (1) KR100407844B1 (en)
DE (1) DE19782101T1 (en)
GB (1) GB2333640B (en)
WO (1) WO1998020487A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6736704B2 (en) * 2002-04-18 2004-05-18 Saint-Gobain Ceramics & Plastics, Inc. Lapping carrier for use in fabricating sliders
US20130047416A1 (en) * 2011-08-22 2013-02-28 Wei-Ming Sim Method of manufacturing an elongate component

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001517349A (en) 1997-03-31 2001-10-02 シーゲイト テクノロジー エルエルシー Flexible microactuator
US5898544A (en) * 1997-06-13 1999-04-27 Hutchinson Technology Incorporated Base plate-mounted microactuator for a suspension
US6295185B1 (en) * 1998-04-07 2001-09-25 Seagate Technology Llc Disc drive suspension having a moving coil or moving magnet microactuator
US6359758B1 (en) * 1998-06-11 2002-03-19 Seagate Technology, Llc Rigid body microactuator having elastic joint attachment
JP2002518780A (en) * 1998-06-15 2002-06-25 シーゲイト テクノロジー エルエルシー A disk drive having a charge feedback driving microactuator
DE69828962D1 (en) * 1998-07-30 2005-03-17 St Microelectronics Srl A process for producing an actuator for a hard disk device, with a read / write head, a Microaktuator and a suspension and the actuator device thus obtained
JP3002984B1 (en) * 1998-09-24 2000-01-24 セイコーインスツルメンツ株式会社 Micro drive and micropositioning device and a storage device
US6233124B1 (en) * 1998-11-18 2001-05-15 Seagate Technology Llc Piezoelectric microactuator suspension assembly with improved stroke length
US6597539B1 (en) * 1999-03-31 2003-07-22 Maxtor Corporation Suspension assembly for supporting a read/write head over a rotating storage disk with dynamically adjustable fly height
US6351354B1 (en) * 1999-05-07 2002-02-26 Seagate Technology Llc Head to flexure interconnection for disc drive microactuator
US6952330B1 (en) * 1999-06-11 2005-10-04 Seagate Technology Llc Dynamic flying attitude control using augmented gimbal
US6507463B1 (en) * 1999-06-11 2003-01-14 Seagate Technology, Inc. Micro disc drive employing arm level microactuator
US6751047B2 (en) * 2000-03-24 2004-06-15 Seagate Technology Llc Stepped disc drive voice coil actuator acceleration for reducing resonance of head level micro-actuators
US6744589B2 (en) 2000-05-10 2004-06-01 Seagate Technology Llc Single-sided unipolar device driver for a piezoelectric transducer in a disc drive
US6791786B2 (en) 2000-05-22 2004-09-14 Seagate Technology Llc Active damping of two-stage actuator system in a disc drive
US6618220B2 (en) 2000-07-04 2003-09-09 Matsushita Electric Industrial Co., Ltd. Head actuator and hard disc drive including the same
US7248444B1 (en) * 2000-07-21 2007-07-24 Lauer Mark A Electromagnetic heads, flexures, gimbals and actuators formed on and from a wafer substrate
US6721125B2 (en) 2000-08-15 2004-04-13 Seagate Technology Llc Position sensing system for disc drive magnetic microactuators
US7256968B1 (en) 2000-09-11 2007-08-14 Hutchinson Technology Incorporated Microactuated dimple for head suspensions
CN1188849C (en) * 2000-11-23 2005-02-09 新科实业有限公司 Rotary piezoelectric jogging arm mechanism with optimum suspension arrangement
US7532440B2 (en) * 2001-01-23 2009-05-12 Seagate Technology Llc Dual stage, head stack assembly for a disk drive
JP2002329377A (en) * 2001-04-23 2002-11-15 Shinka Jitsugyo Kk Head gimbals assembly having actuator for micropositioning of head element
US6747837B1 (en) 2001-08-31 2004-06-08 Western Digital Technologies, Inc. Disk drive comprising an integrator for controlling a VCM actuator and transformer for controlling a piezoelectric actuator
JP2003091953A (en) * 2001-09-18 2003-03-28 Data Strage Inst Slider assembly
US8064172B2 (en) * 2003-11-13 2011-11-22 Samsung Electronics Co., Ltd. Method and apparatus coupling to a slider in a hard disk drive for microactuation
US7612967B2 (en) * 2001-12-05 2009-11-03 Samsung Electronics Co., Ltd. Method and apparatus coupling at least one piezoelectric device to a slider in a hard disk drive for microactuation
US6760196B1 (en) * 2001-12-12 2004-07-06 Western Digital, Inc. Microactuator with offsetting hinges and method for high-resolution positioning of magnetic read/write head
US6807030B1 (en) 2001-12-18 2004-10-19 Western Digital (Fremont), Inc. Enclosed piezoelectric microactuators coupled between head and suspension
US6961221B1 (en) 2001-12-18 2005-11-01 Western Digital (Fremont), Inc. Piezoelectric microactuators with substantially fixed axis of rotation and magnified stroke
US7057858B2 (en) 2002-04-24 2006-06-06 International Business Machines Corporation Slide microactuator using C-shaped piezoelectric element
JP4144867B2 (en) 2002-08-09 2008-09-03 株式会社日立グローバルストレージテクノロジーズ The magnetic disk device
US7023667B2 (en) 2002-10-07 2006-04-04 Hitachi Global Storage Technologies Netherlands B.V. Dual stage suspension with PZT actuators arranged to improve actuation in suspensions of short length
US6952322B1 (en) 2002-11-27 2005-10-04 Western Digital Technologies, Inc. Disk drive reading servo sectors recorded at a relative offset on multiple disk surfaces to increase the servo sample rate
US7375930B2 (en) * 2002-12-27 2008-05-20 Magnecomp Corporation Apparatus for PZT actuation device for hard disk drives
US20040125508A1 (en) * 2002-12-27 2004-07-01 Kr Precision Public Company Limited Method and apparatus for forming a plurality of actuation devices on suspension structures for hard disk drive suspension
US7230800B2 (en) * 2003-07-24 2007-06-12 Hitachi Global Storage Technologies Netherlands B.V. Microactuator for a hard disk drive with an integrated gimbal function
KR100660911B1 (en) 2006-01-11 2006-12-18 삼성전자주식회사 Suspension assembly of the actuator for hard disk drive
WO2009150775A1 (en) * 2008-06-10 2009-12-17 パナソニック株式会社 Semiconductor integrated circuit
US8801497B2 (en) 2009-04-30 2014-08-12 Rdc Holdings, Llc Array of abrasive members with resilient support
US9221148B2 (en) 2009-04-30 2015-12-29 Rdc Holdings, Llc Method and apparatus for processing sliders for disk drives, and to various processing media for the same
US20110104989A1 (en) * 2009-04-30 2011-05-05 First Principles LLC Dressing bar for embedding abrasive particles into substrates
US20100330890A1 (en) 2009-06-30 2010-12-30 Zine-Eddine Boutaghou Polishing pad with array of fluidized gimballed abrasive members
US8947831B1 (en) 2011-11-30 2015-02-03 Magnecomp Corporation GSA suspension with microactuators extending to gimbal through flexible connectors
US9190086B1 (en) 2011-11-30 2015-11-17 Magnecomp Corporation GSA suspension having slider clearance for shock performance
US8879210B1 (en) 2011-11-30 2014-11-04 Magnecomp Corporation DSA suspension with microactuators extending to gimbal through flexible connectors
JP5634440B2 (en) * 2012-06-01 2014-12-03 サンコール株式会社 The magnetic head suspension
US9053729B1 (en) 2014-07-23 2015-06-09 Seagate Technology Llc Nonlinearity-based contact prediction
JP5766860B2 (en) * 2014-09-10 2015-08-19 サンコール株式会社 The magnetic head suspension
US9792936B1 (en) 2016-04-27 2017-10-17 Seagate Technology Llc Gimbal assembly with linear actuators that cause rotation of a slider

Citations (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3821815A (en) * 1972-10-11 1974-06-28 Ibm Apparatus for batch fabricating magnetic film heads and method therefor
US4457114A (en) * 1982-09-30 1984-07-03 Magnetic Peripherals Inc. Workpiece carrier
US4471579A (en) * 1981-07-22 1984-09-18 Peter Wolters Lapping or polishing machine
US4477968A (en) * 1982-09-30 1984-10-23 Magnetic Peripherals Inc. Method for using a machining sensor
US4517041A (en) * 1982-09-30 1985-05-14 Magnetic Peripherals Inc. Method for attaching a workpiece to a workpiece carrier
US4536992A (en) * 1983-11-04 1985-08-27 Magnetic Peripherals Precision lapping system
US4559743A (en) * 1982-09-30 1985-12-24 Magnetic Peripherals, Inc. Method for calibrating a machining sensor
US4675986A (en) * 1985-07-29 1987-06-30 International Business Machines Electrical lapping guide for controlling the batch fabrication of thin film magnetic transducers
US4689877A (en) * 1985-08-29 1987-09-01 International Business Machines Corp. Method and apparatus for controlling the throat height of batch fabricated thin film magnetic transducers
US4850157A (en) * 1987-11-23 1989-07-25 Magnetic Peripherals Inc. Apparatus for guiding the flow of abrasive slurry over a lapping surface
US4891914A (en) 1988-04-04 1990-01-09 Pierrat Michel A Computer controlled universal grinder and method for grinding trochoidal and circular bearing races
US4912883A (en) * 1989-02-13 1990-04-03 International Business Machines Corporation Lapping control system for magnetic transducers
US4914868A (en) * 1988-09-28 1990-04-10 International Business Machines Corporation Lapping control system for magnetic transducers
US5023991A (en) * 1988-08-31 1991-06-18 Digital Equipment Corporation Electrical guide for tight tolerance machining
US5095613A (en) * 1990-06-29 1992-03-17 Digital Equipment Corporation Thin film head slider fabrication process
US5117589A (en) * 1990-03-19 1992-06-02 Read-Rite Corporation Adjustable transfer tool for lapping magnetic head sliders
US5175938A (en) * 1988-08-31 1993-01-05 Digital Equipment Corporation Electrical guide for tight tolerance machining
US5203119A (en) * 1991-03-22 1993-04-20 Read-Rite Corporation Automated system for lapping air bearing surface of magnetic heads
US5317837A (en) * 1988-04-07 1994-06-07 Staehli Arthur W Device on a double disk lapping machine
US5333314A (en) 1987-04-20 1994-07-26 Hitachi, Ltd. Distributed data base system of composite subsystem type, and method of fault recovery for the system
US5333413A (en) * 1991-12-18 1994-08-02 Shin-Etsu Handotai Co., Ltd. Automatic wafer lapping apparatus
US5335458A (en) * 1991-09-23 1994-08-09 Read-Rite Corporation Processing of magnetic head flexures with slider elements
US5361547A (en) * 1992-08-28 1994-11-08 International Business Machines Corporation Ultimate inductive head integrated lapping system
US5386666A (en) * 1993-02-11 1995-02-07 Read-Rite Corporation Automated system for controlling taper length during the lapping of air bearing surface of magnetic heads
US5452166A (en) * 1993-10-01 1995-09-19 Applied Magnetics Corporation Thin film magnetic recording head for minimizing undershoots and a method for manufacturing the same
US5463805A (en) * 1994-02-07 1995-11-07 Seagate Technology, Inc. Method of lapping MR. sensors
US5478270A (en) 1994-01-25 1995-12-26 International Business Machines Corporation Ultrasonic micro machining slider air bearings with diamond faced patterned die
US5494473A (en) * 1993-07-07 1996-02-27 Quantum Corporation Electrical access for electrical lapping guides
US5525091A (en) * 1994-06-24 1996-06-11 International Business Machines Corporation Multi-adjustable row transfer tool
US5607340A (en) * 1995-06-06 1997-03-04 Lackey; Stanley A. Row tool
US5620356A (en) 1995-01-27 1997-04-15 Lackey; Stanley Row tool balance and bow correction apparatus
US5695387A (en) * 1992-08-19 1997-12-09 Komag, Inc. CSS magnetic recording head slider and method of making same
US5713123A (en) * 1994-06-03 1998-02-03 Yamaha Corporation Method of lapping for producing one-side curved surface adapted for floating magnetic head
US5720845A (en) * 1996-01-17 1998-02-24 Liu; Keh-Shium Wafer polisher head used for chemical-mechanical polishing and endpoint detection
US5722155A (en) * 1996-01-11 1998-03-03 Seagate Technology, Inc. Machining guide method for magnetic recording reproduce heads
US5738568A (en) * 1996-10-04 1998-04-14 International Business Machines Corporation Flexible tilted wafer carrier
US5749769A (en) * 1994-12-16 1998-05-12 International Business Machines Corporation Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678482A (en) * 1970-08-26 1972-07-18 Burroughs Corp Multiple surface fluid film bearing
US3924268A (en) * 1974-08-05 1975-12-02 Ibm High density track follower control system for magnetic disk file
US4374402A (en) * 1980-06-27 1983-02-15 Burroughs Corporation Piezoelectric transducer mounting structure and associated techniques
US4620251A (en) * 1983-05-13 1986-10-28 Magnetic Peripherals Inc. Magnetic transducer support structure
US4605977A (en) * 1983-12-14 1986-08-12 Sperry Corporation Air bearing head displacement sensor and positioner
JPS60136073A (en) * 1983-12-23 1985-07-19 Hitachi Ltd Magnetic disk device
EP0227845B1 (en) * 1985-11-19 1990-05-30 International Business Machines Corporation Method and apparatus for controlling the flying height of the head in a magnetic storage unit
JPS63122069A (en) * 1986-11-12 1988-05-26 Oki Electric Ind Co Ltd Head positioning system for magnetic disk storage device
US5105408A (en) * 1988-05-12 1992-04-14 Digital Equipment Corporation Optical head with flying lens
JPH02263369A (en) * 1989-04-03 1990-10-26 Hitachi Ltd Data head arm and head positioning device for magnetic disk device
JP2777630B2 (en) * 1989-04-07 1998-07-23 株式会社日立製作所 The magnetic disk device
US5034828A (en) * 1989-04-07 1991-07-23 Unisys Corp. Slider with piezo-boss
JP3064336B2 (en) * 1989-06-28 2000-07-12 株式会社日立製作所 Information handling apparatus and a disk device
US4914725A (en) * 1989-07-10 1990-04-03 International Business Machines Corporation Transducer positioning servo mechanisms employing digital and analog circuits
JP2657105B2 (en) * 1989-08-07 1997-09-24 シーゲイト テクノロジー インターナショナル Apparatus for centering a transducer on a track of the magnetic disk
US5255016A (en) * 1989-09-05 1993-10-19 Seiko Epson Corporation Ink jet printer recording head
US5021906A (en) * 1989-10-31 1991-06-04 International Business Machines Corporation Programmable air bearing slider including magnetic read/write element
US5065268A (en) * 1989-12-22 1991-11-12 Seagate Technology, Inc. Load beam having an additional bend in a head-gimbal assembly
US5079659A (en) * 1990-07-06 1992-01-07 Seagate Technology, Inc. Gimbal for supporting a hydrodynamic air bearing slider
JPH04134681A (en) * 1990-09-25 1992-05-08 Fujitsu Ltd Head positioning mechanism
JP2884774B2 (en) * 1990-12-01 1999-04-19 株式会社日立製作所 Information memory device and method
JP3089709B2 (en) * 1991-06-17 2000-09-18 株式会社日立製作所 A magnetic disk drive access servomechanism
US5764444A (en) * 1991-07-23 1998-06-09 Fujitsu Limited Mechanism for minute movement of a head
JPH0594682A (en) * 1991-08-09 1993-04-16 Alps Electric Co Ltd Floating magnetic head
JP3128670B2 (en) * 1992-07-02 2001-01-29 富士通株式会社 Sector servo control system
US5745319A (en) * 1992-08-12 1998-04-28 Kabushiki Kaisha Toshiba Recording/reproducing apparatus with coarse and fine head positioning actuators and an elastic head gimbal
JP3292223B2 (en) * 1993-01-25 2002-06-17 セイコーエプソン株式会社 The driving method of the ink jet recording head, and the apparatus
JPH0785621A (en) * 1993-09-13 1995-03-31 Hitachi Ltd Structure for supporting magnetic head slider
US5521778A (en) * 1994-08-30 1996-05-28 International Business Machines Corporation Disk drive with primary and secondary actuator drives
JP2655109B2 (en) * 1994-12-15 1997-09-17 日本電気株式会社 Optical disk device
US5657188A (en) * 1995-06-01 1997-08-12 Hutchinson Technology Incorporated Head suspension with tracking microactuator
JP3333367B2 (en) * 1995-12-04 2002-10-15 富士通株式会社 Head actuator
US5711063A (en) * 1996-06-11 1998-01-27 Seagate Technology, Inc. Method of forming a suspension fabricated from silicon
US5805382A (en) * 1996-06-21 1998-09-08 International Business Machines Corporation Integrated conductor magnetic recording head and suspension having cross-over integrated circuits for noise reduction
US5898541A (en) * 1996-12-04 1999-04-27 Seagate Technology, Inc. Leading surface slider microactuator
US5796558A (en) * 1997-05-15 1998-08-18 Read-Rite Corporation Adaptive micro-actuated head gimbal assembly
US5867347A (en) * 1997-06-13 1999-02-02 Hutchinson Technology Incorporated Head suspension with stacked coil microactuator for tracking axis adjustment of a read/write head
US5898544A (en) * 1997-06-13 1999-04-27 Hutchinson Technology Incorporated Base plate-mounted microactuator for a suspension

Patent Citations (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3821815A (en) * 1972-10-11 1974-06-28 Ibm Apparatus for batch fabricating magnetic film heads and method therefor
US4471579A (en) * 1981-07-22 1984-09-18 Peter Wolters Lapping or polishing machine
US4457114A (en) * 1982-09-30 1984-07-03 Magnetic Peripherals Inc. Workpiece carrier
US4477968A (en) * 1982-09-30 1984-10-23 Magnetic Peripherals Inc. Method for using a machining sensor
US4517041A (en) * 1982-09-30 1985-05-14 Magnetic Peripherals Inc. Method for attaching a workpiece to a workpiece carrier
US4559743A (en) * 1982-09-30 1985-12-24 Magnetic Peripherals, Inc. Method for calibrating a machining sensor
US4536992A (en) * 1983-11-04 1985-08-27 Magnetic Peripherals Precision lapping system
US4675986A (en) * 1985-07-29 1987-06-30 International Business Machines Electrical lapping guide for controlling the batch fabrication of thin film magnetic transducers
US4689877A (en) * 1985-08-29 1987-09-01 International Business Machines Corp. Method and apparatus for controlling the throat height of batch fabricated thin film magnetic transducers
US5333314A (en) 1987-04-20 1994-07-26 Hitachi, Ltd. Distributed data base system of composite subsystem type, and method of fault recovery for the system
US4850157A (en) * 1987-11-23 1989-07-25 Magnetic Peripherals Inc. Apparatus for guiding the flow of abrasive slurry over a lapping surface
US4891914A (en) 1988-04-04 1990-01-09 Pierrat Michel A Computer controlled universal grinder and method for grinding trochoidal and circular bearing races
US5317837A (en) * 1988-04-07 1994-06-07 Staehli Arthur W Device on a double disk lapping machine
US5023991A (en) * 1988-08-31 1991-06-18 Digital Equipment Corporation Electrical guide for tight tolerance machining
US5175938A (en) * 1988-08-31 1993-01-05 Digital Equipment Corporation Electrical guide for tight tolerance machining
US4914868A (en) * 1988-09-28 1990-04-10 International Business Machines Corporation Lapping control system for magnetic transducers
US4912883A (en) * 1989-02-13 1990-04-03 International Business Machines Corporation Lapping control system for magnetic transducers
US5117589A (en) * 1990-03-19 1992-06-02 Read-Rite Corporation Adjustable transfer tool for lapping magnetic head sliders
US5095613A (en) * 1990-06-29 1992-03-17 Digital Equipment Corporation Thin film head slider fabrication process
US5203119A (en) * 1991-03-22 1993-04-20 Read-Rite Corporation Automated system for lapping air bearing surface of magnetic heads
US5335458A (en) * 1991-09-23 1994-08-09 Read-Rite Corporation Processing of magnetic head flexures with slider elements
US5333413A (en) * 1991-12-18 1994-08-02 Shin-Etsu Handotai Co., Ltd. Automatic wafer lapping apparatus
US5695387A (en) * 1992-08-19 1997-12-09 Komag, Inc. CSS magnetic recording head slider and method of making same
US5597340A (en) * 1992-08-28 1997-01-28 International Business Machines Corporation Ultimate inductive head integrated lapping system
US5361547A (en) * 1992-08-28 1994-11-08 International Business Machines Corporation Ultimate inductive head integrated lapping system
US5386666A (en) * 1993-02-11 1995-02-07 Read-Rite Corporation Automated system for controlling taper length during the lapping of air bearing surface of magnetic heads
US5494473A (en) * 1993-07-07 1996-02-27 Quantum Corporation Electrical access for electrical lapping guides
US5452166A (en) * 1993-10-01 1995-09-19 Applied Magnetics Corporation Thin film magnetic recording head for minimizing undershoots and a method for manufacturing the same
US5478270A (en) 1994-01-25 1995-12-26 International Business Machines Corporation Ultrasonic micro machining slider air bearings with diamond faced patterned die
US5463805A (en) * 1994-02-07 1995-11-07 Seagate Technology, Inc. Method of lapping MR. sensors
US5713123A (en) * 1994-06-03 1998-02-03 Yamaha Corporation Method of lapping for producing one-side curved surface adapted for floating magnetic head
US5525091A (en) * 1994-06-24 1996-06-11 International Business Machines Corporation Multi-adjustable row transfer tool
US5749769A (en) * 1994-12-16 1998-05-12 International Business Machines Corporation Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface
US5620356A (en) 1995-01-27 1997-04-15 Lackey; Stanley Row tool balance and bow correction apparatus
US5607340A (en) * 1995-06-06 1997-03-04 Lackey; Stanley A. Row tool
US5722155A (en) * 1996-01-11 1998-03-03 Seagate Technology, Inc. Machining guide method for magnetic recording reproduce heads
US5720845A (en) * 1996-01-17 1998-02-24 Liu; Keh-Shium Wafer polisher head used for chemical-mechanical polishing and endpoint detection
US5738568A (en) * 1996-10-04 1998-04-14 International Business Machines Corporation Flexible tilted wafer carrier

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"MSL 315 Multiple Station Lapping System for Thin-Film or MR Recording Heads", Total Automation, Inc. *
"Use of Microelectronic Test Structures to Characterize IC Materials, Processes, and Processing Equipment", by G.P. Carver et al., Electron Devices Division, National Bureau of Standards, Washington, D.C.* *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6736704B2 (en) * 2002-04-18 2004-05-18 Saint-Gobain Ceramics & Plastics, Inc. Lapping carrier for use in fabricating sliders
US20130047416A1 (en) * 2011-08-22 2013-02-28 Wei-Ming Sim Method of manufacturing an elongate component
US9201417B2 (en) * 2011-08-22 2015-12-01 Airbus Operations Limited Method of manufacturing an elongate component

Also Published As

Publication number Publication date Type
KR100407844B1 (en) 2003-12-01 grant
GB9906730D0 (en) 1999-06-02 grant
WO1998020487A1 (en) 1998-05-14 application
KR20000053051A (en) 2000-08-25 application
GB2333640A (en) 1999-07-28 application
JP2001503902A (en) 2001-03-21 application
GB2333640B (en) 2000-09-13 grant
DE19782101T0 (en) grant
DE19782101T1 (en) 1999-10-14 grant
US6069771A (en) 2000-05-30 grant

Similar Documents

Publication Publication Date Title
US6640423B1 (en) Apparatus and method for the placement and bonding of a die on a substrate
US7014530B2 (en) Slider fabrication system for sliders with integrated electrical lapping guides
US7068468B2 (en) Thin-film magnetic head, head gimbal assembly with thin-film magnetic head and magnetic disk apparatus with head gimbal assembly
US5896247A (en) Disk file suspension formed flexure
US6057975A (en) Fly height adjustment in magnetic storage system
US5963400A (en) Thin film tape head including split top pole
US5923500A (en) One-piece flexure for small magnetic heads
US7206172B2 (en) Electrical lapping guide embedded in a shield of a magnetic head
US6624984B2 (en) Fly height control slider with crown and cross curve de-coupling
US5883770A (en) Partial width mass produced linear tape recording head
US5361547A (en) Ultimate inductive head integrated lapping system
US5735036A (en) Lapping process for minimizing shorts and element recession at magnetic head air bearing surface
EP1204096A2 (en) Alignment of tape head
US5862015A (en) Head suspension with resonance feedback transducer
US6690543B2 (en) Magnetic disk drive with air bearing surface pad on movable portion and method of controlling
US5722156A (en) Method for processing ceramic wafers comprising plural magnetic head forming units
US5620356A (en) Row tool balance and bow correction apparatus
US6071007A (en) Thermal asperity detection head
US6884148B1 (en) Independently controlled read and write head stripe height parameters in slider back end process
US6170149B1 (en) Magnetoresistive type magnetic head and method of manufacturing the same and apparatus for polishing the same
US6758722B2 (en) Dual-purpose lapping guide for the production of magneto-resistive heads
US4674670A (en) Manufacturing apparatus
US5663854A (en) Prebent ceramic suspension
US5812407A (en) Apparatus for correcting and holding front surface of sheet
US6346809B1 (en) Method and apparatus for testing disk drive read/write heads by oscillating a recordable medium

Legal Events

Date Code Title Description
AS Assignment

Owner name: JPMORGAN CHASE BANK, AS COLLATERAL AGENT, NEW YORK

Free format text: SECURITY AGREEMENT;ASSIGNOR:SEAGATE TECHNOLOGY LLC;REEL/FRAME:013177/0001

Effective date: 20020513

Owner name: JPMORGAN CHASE BANK, AS COLLATERAL AGENT,NEW YORK

Free format text: SECURITY AGREEMENT;ASSIGNOR:SEAGATE TECHNOLOGY LLC;REEL/FRAME:013177/0001

Effective date: 20020513

Owner name: JPMORGAN CHASE BANK, AS COLLATERAL AGENT, NEW YORK

Free format text: SECURITY AGREEMENT;ASSIGNOR:SEAGATE TECHNOLOGY LLC;REEL/FRAME:013177/0001

Effective date: 20020513

Owner name: JPMORGAN CHASE BANK, AS COLLATERAL AGENT, NEW YORK

Free format text: SECURITY AGREEMENT;ASSIGNOR:SEAGATE TECHNOLOGY LLC;REEL/FRAME:013177/0001

Effective date: 20020513

Owner name: JPMORGAN CHASE BANK, AS COLLATERAL AGENT, NEW YORK

Free format text: SECURITY AGREEMENT;ASSIGNOR:SEAGATE TECHNOLOGY LLC;REEL/FRAME:013177/0001

Effective date: 20020513

AS Assignment

Owner name: SEAGATE TECHNOLOGY LLC, CALIFORNIA

Free format text: RELEASE OF SECURITY INTERESTS IN PATENT RIGHTS;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT (FORMERLY KNOWN AS THE CHASE MANHATTAN BANK AND JPMORGAN CHASE BANK);REEL/FRAME:016926/0342

Effective date: 20051130

Owner name: SEAGATE TECHNOLOGY LLC, CALIFORNIA

Free format text: RELEASE OF SECURITY INTERESTS IN PATENT RIGHTS;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT (FORMERLY KNOWN AS THE CHASE MANHATTAN BANK AND JPMORGAN CHASE BANK);REEL/FRAME:016926/0342

Effective date: 20051130

Owner name: SEAGATE TECHNOLOGY LLC, CALIFORNIA

Free format text: RELEASE OF SECURITY INTERESTS IN PATENT RIGHTS;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT (FORMERLY KNOWN AS THE CHASE MANHATTAN BANK AND JPMORGAN CHASE BANK);REEL/FRAME:016926/0342

Effective date: 20051130

Owner name: SEAGATE TECHNOLOGY LLC, CALIFORNIA

Free format text: RELEASE OF SECURITY INTERESTS IN PATENT RIGHTS;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT (FORMERLY KNOWN AS THE CHASE MANHATTAN BANK AND JPMORGAN CHASE BANK);REEL/FRAME:016926/0342

Effective date: 20051130

Owner name: SEAGATE TECHNOLOGY LLC,CALIFORNIA

Free format text: RELEASE OF SECURITY INTERESTS IN PATENT RIGHTS;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT (FORMERLY KNOWN AS THE CHASE MANHATTAN BANK AND JPMORGAN CHASE BANK);REEL/FRAME:016926/0342

Effective date: 20051130

FPAY Fee payment

Year of fee payment: 8

AS Assignment

Owner name: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATE

Free format text: SECURITY AGREEMENT;ASSIGNORS:MAXTOR CORPORATION;SEAGATE TECHNOLOGY LLC;SEAGATE TECHNOLOGY INTERNATIONAL;REEL/FRAME:022757/0017

Effective date: 20090507

Owner name: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT

Free format text: SECURITY AGREEMENT;ASSIGNORS:MAXTOR CORPORATION;SEAGATE TECHNOLOGY LLC;SEAGATE TECHNOLOGY INTERNATIONAL;REEL/FRAME:022757/0017

Effective date: 20090507

AS Assignment

Owner name: SEAGATE TECHNOLOGY HDD HOLDINGS, CALIFORNIA

Free format text: RELEASE;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:025662/0001

Effective date: 20110114

Owner name: SEAGATE TECHNOLOGY LLC, CALIFORNIA

Free format text: RELEASE;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:025662/0001

Effective date: 20110114

Owner name: MAXTOR CORPORATION, CALIFORNIA

Free format text: RELEASE;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:025662/0001

Effective date: 20110114

Owner name: SEAGATE TECHNOLOGY INTERNATIONAL, CALIFORNIA

Free format text: RELEASE;ASSIGNOR:JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:025662/0001

Effective date: 20110114

AS Assignment

Owner name: THE BANK OF NOVA SCOTIA, AS ADMINISTRATIVE AGENT,

Free format text: SECURITY AGREEMENT;ASSIGNOR:SEAGATE TECHNOLOGY LLC;REEL/FRAME:026010/0350

Effective date: 20110118

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
AS Assignment

Owner name: EVAULT INC. (F/K/A I365 INC.), CALIFORNIA

Free format text: TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS;ASSIGNOR:WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATERAL AGENT AND SECOND PRIORITY REPRESENTATIVE;REEL/FRAME:030833/0001

Effective date: 20130312

Owner name: SEAGATE TECHNOLOGY US HOLDINGS, INC., CALIFORNIA

Free format text: TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS;ASSIGNOR:WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATERAL AGENT AND SECOND PRIORITY REPRESENTATIVE;REEL/FRAME:030833/0001

Effective date: 20130312

Owner name: SEAGATE TECHNOLOGY LLC, CALIFORNIA

Free format text: TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS;ASSIGNOR:WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATERAL AGENT AND SECOND PRIORITY REPRESENTATIVE;REEL/FRAME:030833/0001

Effective date: 20130312

Owner name: SEAGATE TECHNOLOGY INTERNATIONAL, CAYMAN ISLANDS

Free format text: TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS;ASSIGNOR:WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATERAL AGENT AND SECOND PRIORITY REPRESENTATIVE;REEL/FRAME:030833/0001

Effective date: 20130312