DE69113187T2 - Verfahren zur Herstellung einer elektronische Dünnschichtanordnung. - Google Patents

Verfahren zur Herstellung einer elektronische Dünnschichtanordnung.

Info

Publication number
DE69113187T2
DE69113187T2 DE69113187T DE69113187T DE69113187T2 DE 69113187 T2 DE69113187 T2 DE 69113187T2 DE 69113187 T DE69113187 T DE 69113187T DE 69113187 T DE69113187 T DE 69113187T DE 69113187 T2 DE69113187 T2 DE 69113187T2
Authority
DE
Germany
Prior art keywords
manufacturing
thin film
film device
electronic thin
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69113187T
Other languages
English (en)
Other versions
DE69113187D1 (de
Inventor
Joseph G Ameen
Joseph Funari
John A Goldfuss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69113187D1 publication Critical patent/DE69113187D1/de
Application granted granted Critical
Publication of DE69113187T2 publication Critical patent/DE69113187T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H05K1/111—Pads for surface mounting, e.g. lay-out
    • H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5387—Flexible insulating substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
    • H05K3/3431—Leadless components
    • H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/189—Printed circuits structurally associated with non-printed electric components characterised by the use of a flexible or folded printed circuit
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0388—Other aspects of conductors
    • H05K2201/0394—Conductor crossing over a hole in the substrate or a gap between two separate substrate parts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands
    • H05K2201/09472—Recessed pad for surface mounting; Recessed electrode of component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10681—Tape Carrier Package [TCP]; Flexible sheet connector
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08—Treatments involving gases
    • H05K2203/087—Using a reactive gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
    • H05K3/326—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor the printed circuit having integral resilient or deformable parts, e.g. tabs or parts of flexible circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494—Heating methods for reflowing of solder
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
DE69113187T 1990-09-07 1991-07-26 Verfahren zur Herstellung einer elektronische Dünnschichtanordnung. Expired - Fee Related DE69113187T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/578,711 US5057969A (en) 1990-09-07 1990-09-07 Thin film electronic device

Publications (2)

Publication Number Publication Date
DE69113187D1 DE69113187D1 (de) 1995-10-26
DE69113187T2 true DE69113187T2 (de) 1996-05-02

Family

ID=24313978

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69113187T Expired - Fee Related DE69113187T2 (de) 1990-09-07 1991-07-26 Verfahren zur Herstellung einer elektronische Dünnschichtanordnung.

Country Status (4)

Country Link
US (1) US5057969A (de)
EP (1) EP0473929B1 (de)
JP (1) JPH0810716B2 (de)
DE (1) DE69113187T2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2673993B2 (ja) * 1990-07-02 1997-11-05 日本無線株式会社 表面弾性波装置
JPH04170811A (ja) * 1990-11-05 1992-06-18 Fujitsu Ltd 弾性表面波デバイス
JPH04354363A (ja) * 1991-05-31 1992-12-08 Fujitsu Ltd 半導体装置ユニット
US5786985A (en) * 1991-05-31 1998-07-28 Fujitsu Limited Semiconductor device and semiconductor device unit
US5133495A (en) * 1991-08-12 1992-07-28 International Business Machines Corporation Method of bonding flexible circuit to circuitized substrate to provide electrical connection therebetween
DE4129514A1 (de) * 1991-09-05 1993-03-11 Telefunken Electronic Gmbh Gedruckte schaltung mit oberflaechenmontierter steckerleiste
US5600103A (en) * 1993-04-16 1997-02-04 Kabushiki Kaisha Toshiba Circuit devices and fabrication method of the same
US5371326A (en) * 1993-08-31 1994-12-06 Clearwaters-Dreager; Cindy Non-toxic fabric conductors and method for making same
US5367435A (en) * 1993-11-16 1994-11-22 International Business Machines Corporation Electronic package structure and method of making same
JPH07245133A (ja) * 1994-03-06 1995-09-19 Yokogawa Hewlett Packard Ltd 電気接続構造
US5583378A (en) * 1994-05-16 1996-12-10 Amkor Electronics, Inc. Ball grid array integrated circuit package with thermal conductor
US5802699A (en) * 1994-06-07 1998-09-08 Tessera, Inc. Methods of assembling microelectronic assembly with socket for engaging bump leads
US5632631A (en) * 1994-06-07 1997-05-27 Tessera, Inc. Microelectronic contacts with asperities and methods of making same
US5615824A (en) * 1994-06-07 1997-04-01 Tessera, Inc. Soldering with resilient contacts
US5983492A (en) * 1996-11-27 1999-11-16 Tessera, Inc. Low profile socket for microelectronic components and method for making the same
US5593083A (en) * 1995-02-14 1997-01-14 International Business Machines Corporation Castellated nozzle and method of use therof
US5565119A (en) * 1995-04-28 1996-10-15 International Business Machines Corporation Method and apparatus for soldering with a multiple tip and associated optical fiber heating device
US5872051A (en) * 1995-08-02 1999-02-16 International Business Machines Corporation Process for transferring material to semiconductor chip conductive pads using a transfer substrate
US6051982A (en) * 1996-08-02 2000-04-18 International Business Machines Corporation Electronic component test apparatus with rotational probe and conductive spaced apart means
US5804984A (en) * 1996-08-02 1998-09-08 International Business Machines Corporation Electronic component test apparatus with rotational probe
US5818697A (en) 1997-03-21 1998-10-06 International Business Machines Corporation Flexible thin film ball grid array containing solder mask
US6281437B1 (en) 1999-11-10 2001-08-28 International Business Machines Corporation Method of forming an electrical connection between a conductive member having a dual thickness substrate and a conductor and electronic package including said connection
US6202293B1 (en) 2000-01-28 2001-03-20 Visteon Global Technologies, Inc. Work holder assembly
JP3590319B2 (ja) * 2000-03-10 2004-11-17 株式会社ジャパンユニックス ガス噴射式はんだ付け方法及び装置
DE10314172B4 (de) * 2003-03-28 2006-11-30 Infineon Technologies Ag Verfahren zum Betreiben einer Anordnung aus einem elektrischen Bauelement auf einem Substrat und Verfahren zum Herstellen der Anordnung
US7109732B2 (en) * 2003-07-31 2006-09-19 Endicott Interconnect Technologies, Inc. Electronic component test apparatus
KR100971220B1 (ko) * 2009-08-17 2010-07-20 주식회사 에프티랩 Lc공진주파수 변이를 이용한 정전용량방식 터치스크린패널의 검사방법
WO2021011286A1 (en) * 2019-07-12 2021-01-21 Neuralink Corp. Sandwich assembly scheme for thin film electrode array and integrated circuits

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617682A (en) * 1969-06-23 1971-11-02 Gen Electric Semiconductor chip bonder
US3871015A (en) * 1969-08-14 1975-03-11 Ibm Flip chip module with non-uniform connector joints
US3754698A (en) * 1970-10-29 1973-08-28 North American Rockwell Hot gas fusion apparatus
US3722072A (en) * 1971-11-15 1973-03-27 Signetics Corp Alignment and bonding method for semiconductor components
US3868764A (en) * 1973-11-09 1975-03-04 Gen Motors Corp Multiple magnetic alignment of semiconductor devices for bonding
US3868765A (en) * 1973-11-09 1975-03-04 Gen Motors Corp Laminated template for semiconductor device bonding
US3937386A (en) * 1973-11-09 1976-02-10 General Motors Corporation Flip chip cartridge loader
US3887996A (en) * 1974-05-01 1975-06-10 Gen Motors Corp iconductor loading apparatus for bonding
US3912153A (en) * 1974-11-18 1975-10-14 Gen Motors Corp Method and apparatus for bonding semiconductor pill-type components to a circuit board
FR2382101A1 (fr) * 1977-02-28 1978-09-22 Labo Electronique Physique Dispositif a semi-conducteur, comportant des pattes metalliques isolees
JPS5440255A (en) * 1977-09-06 1979-03-29 Matsushita Electric Ind Co Ltd Method and apparatus for soldering
JPS5585037A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Bonding method
US4295596A (en) * 1979-12-19 1981-10-20 Western Electric Company, Inc. Methods and apparatus for bonding an article to a metallized substrate
US4426571A (en) * 1980-06-19 1984-01-17 Sperry Corporation Portable electric hot air rework tool for soldering and desoldering printed circuit assemblies
US4373658A (en) * 1981-02-23 1983-02-15 Western Electric Co., Inc. High pressure condensation soldering, fusing or brazing
US4435740A (en) * 1981-10-30 1984-03-06 International Business Machines Corporation Electric circuit packaging member
US4552300A (en) * 1983-05-09 1985-11-12 Pace, Incorporated Method and apparatus for soldering and desoldering leadless semiconductor modules for printed wiring boards
US4545610A (en) * 1983-11-25 1985-10-08 International Business Machines Corporation Method for forming elongated solder connections between a semiconductor device and a supporting substrate
US4564135A (en) * 1983-12-29 1986-01-14 Rca Corporation Chip carrier soldering tool
US4605152A (en) * 1984-02-24 1986-08-12 Pace, Incorporated Device for attaching modular electronic components to or removing them from an insulative substrate
US4587596A (en) * 1984-04-09 1986-05-06 Amp Incorporated High density mother/daughter circuit board connector
US4604644A (en) * 1985-01-28 1986-08-05 International Business Machines Corporation Solder interconnection structure for joining semiconductor devices to substrates that have improved fatigue life, and process for making
US4648547A (en) * 1985-06-26 1987-03-10 At&T Technologies, Inc. Method and apparatus for achieving reduced component failure during soldering
FR2584236B1 (fr) * 1985-06-26 1988-04-29 Bull Sa Procede de montage d'un circuit integre sur un support, dispositif en resultant et son application a une carte a microcircuits electroniques
US4661192A (en) * 1985-08-22 1987-04-28 Motorola, Inc. Low cost integrated circuit bonding process
US4805827A (en) * 1985-10-23 1989-02-21 Pace Incorporated Method of soldering with heated fluid and device therefor
US4646958A (en) * 1985-10-31 1987-03-03 International Business Machines Corp. Fluxless soldering process using a silane atmosphere
US4890194A (en) * 1985-11-22 1989-12-26 Texas Instruments Incorporated A chip carrier and mounting structure connected to the chip carrier
US4681654A (en) * 1986-05-21 1987-07-21 International Business Machines Corporation Flexible film semiconductor chip carrier
US4720396A (en) * 1986-06-25 1988-01-19 Fairchild Semiconductor Corporation Solder finishing integrated circuit package leads
US4789096A (en) * 1987-05-04 1988-12-06 Unisys Corporation Method of soldering joints by moving them through a target area on which a stream of hot gas is focused
US4752025A (en) * 1987-05-22 1988-06-21 Austin American Technology Surface mount assembly repair terminal
FR2629665B1 (fr) * 1988-03-30 1991-01-11 Bendix Electronics Sa Boitier pour circuit electronique
US4914551A (en) * 1988-07-13 1990-04-03 International Business Machines Corporation Electronic package with heat spreader member
US4849856A (en) * 1988-07-13 1989-07-18 International Business Machines Corp. Electronic package with improved heat sink

Also Published As

Publication number Publication date
US5057969A (en) 1991-10-15
DE69113187D1 (de) 1995-10-26
JPH077038A (ja) 1995-01-10
EP0473929A1 (de) 1992-03-11
EP0473929B1 (de) 1995-09-20
JPH0810716B2 (ja) 1996-01-31

Similar Documents

Publication Publication Date Title
DE69113187D1 (de) Verfahren zur Herstellung einer elektronische Dünnschichtanordnung.
DE69131570T2 (de) Verfahren zur Herstellung einer Dünnfilm-Halbleiteranordnung
DE3882412T2 (de) Verfahren zur Herstellung einer elektronischen Vorrichtung.
DE69126586T2 (de) Verfahren zur Herstellung einer Vorrichtung
DE69331538D1 (de) Verfahren zur Herstellung einer elektrischen Dünnschicht
DE69105571T2 (de) Elektrolumineszente Dünnschichtvorrichtung und Verfahren zur Herstellung derselben.
DE69111963D1 (de) Dünnfilm-Transistor und Verfahren zur Herstellung.
DE69124009T2 (de) Dünnfilmtransistor und Verfahren zur Herstellung
DE69015216D1 (de) Verfahren zur Herstellung einer Halbleitervorrichtung.
DE69004201T2 (de) Verfahren zur Herstellung einer SOI-Halbleiteranordnung.
DE3886684T2 (de) Verfahren zur Herstellung eines selbstausrichtenden Dünnschichttransistors.
DE68924366D1 (de) Verfahren zur Herstellung einer Halbleitervorrichtung.
DE69132385T2 (de) Verfahren zur Herstellung einer flachen Anzeigevorrichtung
DE3751206D1 (de) Dünnschicht-Elektrolumineszentenvorrichtung und Verfahren zur Herstellung derselben.
DE68907507T2 (de) Verfahren zur Herstellung einer Halbleitervorrichtung.
DE69426090D1 (de) Verfahren zur Herstellung einer optische Halbleitervorrichtung
DE68906219D1 (de) Duennfilmkapazitaet und verfahren zur herstellung einer integrierten hybridmikrowellenschaltung.
DE69103338T2 (de) Verfahren zur Herstellung einer elektrolumineszenten Dünnschichtvorrichtung und Apparat für ihre Herstellung.
DE69015879T2 (de) Verfahren zur Herstellung einer oberflächenmontierbaren Leiterplatte.
DE69233225D1 (de) Substrat für Dünnschichtschaltung und Verfahren zur Herstellung desselben
DE69529909T2 (de) Verfahren zur herstellung einer elektronischen schaltung
DE69033515T2 (de) Verfahren zur Herstellung einer integrierten Schaltung
DE69025221T2 (de) Verfahren zur Herstellung elektronischer Vorrichtungen
DE69108957T2 (de) Verfahren zur Herstellung einer Halbleitervorrichtung.
DE69404214D1 (de) Verfahren zur Herstellung einer supraleitenden dünnen Schicht vom Hg-Typ

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee