DE69112713T2 - Halbleiteranordnung mit verbessertem Transistor vom isolierten Gatetyp. - Google Patents
Halbleiteranordnung mit verbessertem Transistor vom isolierten Gatetyp.Info
- Publication number
- DE69112713T2 DE69112713T2 DE69112713T DE69112713T DE69112713T2 DE 69112713 T2 DE69112713 T2 DE 69112713T2 DE 69112713 T DE69112713 T DE 69112713T DE 69112713 T DE69112713 T DE 69112713T DE 69112713 T2 DE69112713 T2 DE 69112713T2
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor device
- type transistor
- insulated gate
- gate type
- improved insulated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000009413 insulation Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66666—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Junction Field-Effect Transistors (AREA)
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2144544A JP2790362B2 (ja) | 1990-06-04 | 1990-06-04 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69112713D1 DE69112713D1 (de) | 1995-10-12 |
DE69112713T2 true DE69112713T2 (de) | 1996-02-22 |
Family
ID=15364769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69112713T Expired - Fee Related DE69112713T2 (de) | 1990-06-04 | 1991-06-04 | Halbleiteranordnung mit verbessertem Transistor vom isolierten Gatetyp. |
Country Status (9)
Country | Link |
---|---|
US (1) | US5302846A (de) |
EP (1) | EP0460918B1 (de) |
JP (1) | JP2790362B2 (de) |
KR (1) | KR950006482B1 (de) |
CN (1) | CN1032173C (de) |
AT (1) | ATE127618T1 (de) |
DE (1) | DE69112713T2 (de) |
ES (1) | ES2076468T3 (de) |
MY (1) | MY107193A (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5512517A (en) * | 1995-04-25 | 1996-04-30 | International Business Machines Corporation | Self-aligned gate sidewall spacer in a corrugated FET and method of making same |
US5879971A (en) * | 1995-09-28 | 1999-03-09 | Motorola Inc. | Trench random access memory cell and method of formation |
US5705409A (en) * | 1995-09-28 | 1998-01-06 | Motorola Inc. | Method for forming trench transistor structure |
US5929476A (en) | 1996-06-21 | 1999-07-27 | Prall; Kirk | Semiconductor-on-insulator transistor and memory circuitry employing semiconductor-on-insulator transistors |
US5838176A (en) * | 1996-07-11 | 1998-11-17 | Foveonics, Inc. | Correlated double sampling circuit |
DE19720193C2 (de) * | 1997-05-14 | 2002-10-17 | Infineon Technologies Ag | Integrierte Schaltungsanordnung mit mindestens zwei vertikalen MOS-Transistoren und Verfahren zu deren Herstellung |
US5886382A (en) * | 1997-07-18 | 1999-03-23 | Motorola, Inc. | Trench transistor structure comprising at least two vertical transistors |
US6500744B2 (en) | 1999-09-02 | 2002-12-31 | Micron Technology, Inc. | Methods of forming DRAM assemblies, transistor devices, and openings in substrates |
EP2267439B8 (de) | 1999-11-15 | 2015-05-27 | Panasonic Healthcare Holdings Co., Ltd. | Biosensor zur Quantifizierung eines Substrats |
US7745289B2 (en) * | 2000-08-16 | 2010-06-29 | Fairchild Semiconductor Corporation | Method of forming a FET having ultra-low on-resistance and low gate charge |
US9590065B2 (en) | 2013-12-04 | 2017-03-07 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor device with metal gate structure comprising work-function metal layer and work-fuction adjustment layer |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5423478A (en) * | 1977-07-25 | 1979-02-22 | Toshiba Corp | Semiconductor device of field effect type |
JPS57192080A (en) * | 1981-05-21 | 1982-11-26 | Fujitsu Ltd | Semiconductor device |
JPS59129472A (ja) * | 1983-01-14 | 1984-07-25 | Sanyo Electric Co Ltd | Mos型トランジスタ |
JPS59228762A (ja) * | 1983-06-10 | 1984-12-22 | Hitachi Ltd | マルチゲ−トトランジスタ |
US4786953A (en) * | 1984-07-16 | 1988-11-22 | Nippon Telegraph & Telephone | Vertical MOSFET and method of manufacturing the same |
US4835585A (en) * | 1984-11-26 | 1989-05-30 | American Telephone And Telegraph Company, At&T Bell Laboratories | Trench gate structures |
JPH0626251B2 (ja) * | 1984-11-27 | 1994-04-06 | アメリカン テレフオン アンド テレグラフ カムパニ− | 溝トランジスタ |
JPS62136877A (ja) * | 1985-12-11 | 1987-06-19 | Toshiba Corp | 絶縁ゲ−ト型電界効果トランジスタ |
GB2195663B (en) * | 1986-08-15 | 1990-08-22 | Nippon Telegraph & Telephone | Chemical vapour deposition method and apparatus therefor |
US4835584A (en) * | 1986-11-27 | 1989-05-30 | American Telephone And Telegraph Company, At&T Bell Laboratories | Trench transistor |
US4910564A (en) * | 1987-07-01 | 1990-03-20 | Mitsubishi Denki Kabushiki Kaisha | Highly integrated field effect transistor and method for manufacturing the same |
JPS6421968A (en) * | 1987-07-17 | 1989-01-25 | Oki Electric Ind Co Ltd | Vertical type mosfet device and manufacture thereof |
JPH01183855A (ja) * | 1988-01-18 | 1989-07-21 | Mitsubishi Electric Corp | Mos形トランジスタ |
JPH0214578A (ja) * | 1988-07-01 | 1990-01-18 | Fujitsu Ltd | 半導体装置 |
US5047812A (en) * | 1989-02-27 | 1991-09-10 | Motorola, Inc. | Insulated gate field effect device |
US4964080A (en) * | 1990-03-09 | 1990-10-16 | Intel Corporation | Three-dimensional memory cell with integral select transistor |
-
1990
- 1990-06-04 JP JP2144544A patent/JP2790362B2/ja not_active Expired - Fee Related
-
1991
- 1991-05-28 KR KR1019910008738A patent/KR950006482B1/ko not_active IP Right Cessation
- 1991-05-31 MY MYPI91000958A patent/MY107193A/en unknown
- 1991-06-03 CN CN91103681A patent/CN1032173C/zh not_active Expired - Fee Related
- 1991-06-04 AT AT91305045T patent/ATE127618T1/de not_active IP Right Cessation
- 1991-06-04 EP EP91305045A patent/EP0460918B1/de not_active Expired - Lifetime
- 1991-06-04 ES ES91305045T patent/ES2076468T3/es not_active Expired - Lifetime
- 1991-06-04 DE DE69112713T patent/DE69112713T2/de not_active Expired - Fee Related
-
1992
- 1992-12-08 US US07/986,890 patent/US5302846A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR950006482B1 (ko) | 1995-06-15 |
ATE127618T1 (de) | 1995-09-15 |
KR920001749A (ko) | 1992-01-30 |
EP0460918A3 (en) | 1992-05-06 |
JPH0438877A (ja) | 1992-02-10 |
US5302846A (en) | 1994-04-12 |
EP0460918A2 (de) | 1991-12-11 |
MY107193A (en) | 1995-09-30 |
DE69112713D1 (de) | 1995-10-12 |
EP0460918B1 (de) | 1995-09-06 |
ES2076468T3 (es) | 1995-11-01 |
CN1032173C (zh) | 1996-06-26 |
JP2790362B2 (ja) | 1998-08-27 |
CN1057131A (zh) | 1991-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |