DE69015458T2 - Elektrodenstruktur für III-V-Verbindungshalbleiterbauelement und deren Herstellungsverfahren. - Google Patents
Elektrodenstruktur für III-V-Verbindungshalbleiterbauelement und deren Herstellungsverfahren.Info
- Publication number
- DE69015458T2 DE69015458T2 DE69015458T DE69015458T DE69015458T2 DE 69015458 T2 DE69015458 T2 DE 69015458T2 DE 69015458 T DE69015458 T DE 69015458T DE 69015458 T DE69015458 T DE 69015458T DE 69015458 T2 DE69015458 T2 DE 69015458T2
- Authority
- DE
- Germany
- Prior art keywords
- iii
- semiconductor device
- manufacturing process
- compound semiconductor
- electrode structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 150000001875 compounds Chemical class 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/452—Ohmic electrodes on AIII-BV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15551689 | 1989-06-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69015458D1 DE69015458D1 (de) | 1995-02-09 |
DE69015458T2 true DE69015458T2 (de) | 1995-08-24 |
Family
ID=15607765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69015458T Expired - Fee Related DE69015458T2 (de) | 1989-06-16 | 1990-06-15 | Elektrodenstruktur für III-V-Verbindungshalbleiterbauelement und deren Herstellungsverfahren. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5077599A (de) |
EP (1) | EP0402936B1 (de) |
JP (1) | JPH0387067A (de) |
KR (1) | KR940006688B1 (de) |
AU (1) | AU636616B2 (de) |
CA (1) | CA2019026C (de) |
DE (1) | DE69015458T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5160793A (en) * | 1991-06-07 | 1992-11-03 | Eastman Kodak Company | Shallow ohmic contacts to n-Alx Ga1-x As |
JP3115148B2 (ja) * | 1993-03-31 | 2000-12-04 | 株式会社東芝 | 半導体装置の製造方法 |
US5523623A (en) * | 1994-03-09 | 1996-06-04 | Matsushita Electric Industrial Co., Ltd. | Ohmic electrode for a p-type compound semiconductor and a bipolar transistor incorporating the ohmic electrode |
US5646069A (en) * | 1995-06-07 | 1997-07-08 | Hughes Aircraft Company | Fabrication process for Alx In1-x As/Gay In1-y As power HFET ohmic contacts |
JP3022765B2 (ja) * | 1996-03-27 | 2000-03-21 | 日本電気株式会社 | 半導体装置及び半導体素子の実装方法 |
DE60038524D1 (de) * | 1999-02-18 | 2008-05-21 | Furukawa Electric Co Ltd | Elektrode für halbleiteranordnung und verfahren zum herstellen |
KR100376424B1 (ko) * | 1999-08-05 | 2003-03-15 | 청인산업개발(주) | 폐유리를 이용한 보도블럭 시공방법 |
DE10329364B4 (de) * | 2003-06-30 | 2007-10-11 | Osram Opto Semiconductors Gmbh | Elektrischer Kontakt für ein optoelekronisches Bauelement und Verfahren zu dessen Herstellung |
CN101636820B (zh) * | 2007-03-28 | 2011-09-07 | 松下电器产业株式会社 | 欧姆电极结构体及半导体元件 |
JP5237628B2 (ja) * | 2007-12-28 | 2013-07-17 | スタンレー電気株式会社 | 半導体素子の製造方法 |
JP2009224499A (ja) * | 2008-03-14 | 2009-10-01 | Sumitomo Electric Ind Ltd | 電極構造および半導体装置 |
CN102687247B (zh) * | 2009-12-22 | 2015-01-07 | 株式会社德山 | Ⅲ族氮化物半导体的n型接触电极及其形成方法 |
US8829567B2 (en) * | 2012-12-28 | 2014-09-09 | Sematech, Inc. | Metal alloy with an abrupt interface to III-V semiconductor |
EP3740966A4 (de) * | 2018-01-16 | 2021-10-27 | Princeton Optronics, Inc. | Ohmsche kontakte und verfahren zu ihrer herstellung |
DE102019006099B4 (de) * | 2019-08-29 | 2022-03-17 | Azur Space Solar Power Gmbh | Stapelförmige Mehrfachsolarzelle mit einer ein Mehrschichtsystem umfassenden Metallisierung |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5654047A (en) * | 1979-10-08 | 1981-05-13 | Nec Corp | Compound semiconductor device |
JPS5713756A (en) * | 1980-06-27 | 1982-01-23 | Nec Corp | Electrode for semiconductor device |
JPS5890773A (ja) * | 1982-11-01 | 1983-05-30 | Toshiba Corp | 化合物半導体の電極 |
JPS605559A (ja) * | 1983-06-23 | 1985-01-12 | Nec Corp | 半導体素子の電極構造 |
JPS60242619A (ja) * | 1984-05-16 | 1985-12-02 | Nippon Telegr & Teleph Corp <Ntt> | 半導体オ−ム性電極の形成方法 |
JPH0658896B2 (ja) * | 1984-06-15 | 1994-08-03 | 株式会社日立製作所 | 半導体装置の製造方法 |
JPS6360526A (ja) * | 1986-08-30 | 1988-03-16 | Sharp Corp | 半導体装置の製造方法 |
JPS63252471A (ja) * | 1987-04-09 | 1988-10-19 | Toshiba Corp | 化合物半導体電極構体 |
-
1990
- 1990-05-29 JP JP2141140A patent/JPH0387067A/ja active Pending
- 1990-06-11 US US07/535,480 patent/US5077599A/en not_active Expired - Lifetime
- 1990-06-14 AU AU57134/90A patent/AU636616B2/en not_active Ceased
- 1990-06-14 CA CA002019026A patent/CA2019026C/en not_active Expired - Fee Related
- 1990-06-15 DE DE69015458T patent/DE69015458T2/de not_active Expired - Fee Related
- 1990-06-15 EP EP90111333A patent/EP0402936B1/de not_active Expired - Lifetime
- 1990-06-16 KR KR1019900008874A patent/KR940006688B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR940006688B1 (ko) | 1994-07-25 |
AU636616B2 (en) | 1993-05-06 |
EP0402936A3 (de) | 1991-05-02 |
EP0402936A2 (de) | 1990-12-19 |
CA2019026A1 (en) | 1990-12-16 |
JPH0387067A (ja) | 1991-04-11 |
EP0402936B1 (de) | 1994-12-28 |
CA2019026C (en) | 1998-01-06 |
US5077599A (en) | 1991-12-31 |
KR910002000A (ko) | 1991-01-31 |
DE69015458D1 (de) | 1995-02-09 |
AU5713490A (en) | 1990-12-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication of lapse of patent is to be deleted | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |