DE60312014D1 - Verfahren zur herstellung einer ferroelektrischen speicherzelle in einem ferroelektrischen speicherbaustein und ferroelektrischer speicherbaustein - Google Patents
Verfahren zur herstellung einer ferroelektrischen speicherzelle in einem ferroelektrischen speicherbaustein und ferroelektrischer speicherbausteinInfo
- Publication number
- DE60312014D1 DE60312014D1 DE60312014T DE60312014T DE60312014D1 DE 60312014 D1 DE60312014 D1 DE 60312014D1 DE 60312014 T DE60312014 T DE 60312014T DE 60312014 T DE60312014 T DE 60312014T DE 60312014 D1 DE60312014 D1 DE 60312014D1
- Authority
- DE
- Germany
- Prior art keywords
- ferroelectric
- layer
- electrode
- ferroelectric storage
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 210000000352 storage cell Anatomy 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract 2
- 150000004706 metal oxides Chemical class 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000002207 thermal evaporation Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/32051—Deposition of metallic or metal-silicide layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO20022910A NO322192B1 (no) | 2002-06-18 | 2002-06-18 | Fremgangsmate til fremstilling av elektrodelag av ferroelektriske minneceller i en ferroelektrisk minneinnretning, samt ferroelektrisk minneinnretning |
| PCT/NO2003/000198 WO2003107351A1 (en) | 2002-06-18 | 2003-06-16 | A method for making a ferroelectric memory cell in a ferroelectric memory device, and a ferroelectric memory device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE60312014D1 true DE60312014D1 (de) | 2007-04-05 |
Family
ID=19913735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60312014T Expired - Lifetime DE60312014D1 (de) | 2002-06-18 | 2003-06-16 | Verfahren zur herstellung einer ferroelektrischen speicherzelle in einem ferroelektrischen speicherbaustein und ferroelektrischer speicherbaustein |
Country Status (11)
| Country | Link |
|---|---|
| US (2) | US20040209420A1 (de) |
| EP (1) | EP1550133B1 (de) |
| JP (1) | JP2006510193A (de) |
| CN (1) | CN1662994A (de) |
| AT (1) | ATE354851T1 (de) |
| AU (1) | AU2003263671A1 (de) |
| CA (1) | CA2488829A1 (de) |
| DE (1) | DE60312014D1 (de) |
| NO (1) | NO322192B1 (de) |
| RU (1) | RU2281567C2 (de) |
| WO (1) | WO2003107351A1 (de) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7278083B2 (en) * | 2003-06-27 | 2007-10-02 | International Business Machines Corporation | Method and system for optimized instruction fetch to protect against soft and hard errors |
| US7170122B2 (en) * | 2003-09-30 | 2007-01-30 | Intel Corporation | Ferroelectric polymer memory with a thick interface layer |
| JP2005136071A (ja) * | 2003-10-29 | 2005-05-26 | Seiko Epson Corp | クロスポイント型強誘電体メモリ |
| US20050139879A1 (en) * | 2003-12-24 | 2005-06-30 | Diana Daniel C. | Ion implanting conductive electrodes of polymer memories |
| US6974984B2 (en) * | 2003-12-31 | 2005-12-13 | Intel Corporation | Method to sputter deposit metal on a ferroelectric polymer |
| US7205595B2 (en) * | 2004-03-31 | 2007-04-17 | Intel Corporation | Polymer memory device with electron traps |
| KR100626912B1 (ko) * | 2004-04-23 | 2006-09-20 | 주식회사 하이닉스반도체 | 불휘발성 강유전체 수직 전극 셀과 수직 전극 셀을 이용한불휘발성 강유전체 메모리 장치 및 그 수직 전극 셀 제조방법 |
| NO20041733L (no) * | 2004-04-28 | 2005-10-31 | Thin Film Electronics Asa | Organisk elektronisk krets med funksjonelt mellomsjikt og fremgangsmate til dens fremstilling. |
| KR100612867B1 (ko) * | 2004-11-02 | 2006-08-14 | 삼성전자주식회사 | 탐침 어레이를 가지는 저항성 메모리 소자 및 그 제조 방법 |
| US7344897B2 (en) * | 2005-05-04 | 2008-03-18 | Intel Corporation | Ferroelectric polymer memory structure and method therefor |
| NO324539B1 (no) * | 2005-06-14 | 2007-11-19 | Thin Film Electronics Asa | Fremgangsmate i fabrikasjonen av en ferroelektrisk minneinnretning |
| US7706165B2 (en) * | 2005-12-20 | 2010-04-27 | Agfa-Gevaert Nv | Ferroelectric passive memory cell, device and method of manufacture thereof |
| US7562285B2 (en) | 2006-01-11 | 2009-07-14 | Rambus Inc. | Unidirectional error code transfer for a bidirectional data link |
| SG135079A1 (en) * | 2006-03-02 | 2007-09-28 | Sony Corp | Memory device which comprises a multi-layer capacitor |
| GB2436893A (en) * | 2006-03-31 | 2007-10-10 | Seiko Epson Corp | Inkjet printing of cross point passive matrix devices |
| US8352805B2 (en) | 2006-05-18 | 2013-01-08 | Rambus Inc. | Memory error detection |
| US20070271495A1 (en) * | 2006-05-18 | 2007-11-22 | Ian Shaeffer | System to detect and identify errors in control information, read data and/or write data |
| US8634231B2 (en) | 2009-08-24 | 2014-01-21 | Qualcomm Incorporated | Magnetic tunnel junction structure |
| US7579197B1 (en) * | 2008-03-04 | 2009-08-25 | Qualcomm Incorporated | Method of forming a magnetic tunnel junction structure |
| EP2194055B1 (de) | 2008-12-03 | 2012-04-04 | Novaled AG | Verbrückte Pyridochinazolin- oder Phenathronlin-Verbindungen und organisches Halbleitermaterial mit dieser Verbindung |
| US8284601B2 (en) * | 2009-04-01 | 2012-10-09 | Samsung Electronics Co., Ltd. | Semiconductor memory device comprising three-dimensional memory cell array |
| EP2246862A1 (de) | 2009-04-27 | 2010-11-03 | Novaled AG | Organische elektronische Vorrichtung mit einem organischen Halbleitermaterial |
| EP2504871B1 (de) | 2009-11-24 | 2017-03-22 | Novaled GmbH | Elektronisches bauteil mit einem organischen halbleitermaterial |
| JP6048526B2 (ja) * | 2015-03-26 | 2016-12-21 | Tdk株式会社 | 透明導電体及びタッチパネル |
| US9460770B1 (en) | 2015-09-01 | 2016-10-04 | Micron Technology, Inc. | Methods of operating ferroelectric memory cells, and related ferroelectric memory cells |
| JP6601199B2 (ja) | 2015-12-11 | 2019-11-06 | Ｔｄｋ株式会社 | 透明導電体 |
| KR20190008050A (ko) * | 2017-07-14 | 2019-01-23 | 에스케이하이닉스 주식회사 | 강유전성 메모리 소자 |
| EP3776207B1 (de) | 2018-03-26 | 2023-08-09 | Rambus Inc. | Fehlerdetektion bei befehls-/adresskanal |
| CN117241589A (zh) * | 2022-06-02 | 2023-12-15 | 华为技术有限公司 | 铁电存储器及其制备方法、电子设备 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5167984A (en) * | 1990-12-06 | 1992-12-01 | Xerox Corporation | Vacuum deposition process |
| JPH06243519A (ja) * | 1993-02-19 | 1994-09-02 | Shigeru Sakai | 強誘電性高分子膜による３次元光メモリー |
| US6030453A (en) * | 1997-03-04 | 2000-02-29 | Motorola, Inc. | III-V epitaxial wafer production |
| JPH11195768A (ja) * | 1997-10-22 | 1999-07-21 | Fujitsu Ltd | ペロブスカイト型酸化物膜を含む電子装置とその製造方法及び強誘電体キャパシタ |
| US6541375B1 (en) * | 1998-06-30 | 2003-04-01 | Matsushita Electric Industrial Co., Ltd. | DC sputtering process for making smooth electrodes and thin film ferroelectric capacitors having improved memory retention |
| KR100343287B1 (ko) * | 1999-09-21 | 2002-07-15 | 윤종용 | 고집적 강유전체 메모리 소자의 형성 방법 |
| US6359289B1 (en) * | 2000-04-19 | 2002-03-19 | International Business Machines Corporation | Magnetic tunnel junction device with improved insulating tunnel barrier |
| KR100382719B1 (ko) * | 2000-08-25 | 2003-05-09 | 삼성전자주식회사 | 강유전체 커패시터를 포함하는 반도체 장치 및 그 제조방법 |
| NO20005980L (no) * | 2000-11-27 | 2002-05-28 | Thin Film Electronics Ab | Ferroelektrisk minnekrets og fremgangsmåte ved dens fremstilling |
| US6489645B1 (en) * | 2001-07-03 | 2002-12-03 | Matsushita Electric Industrial Co., Ltd. | Integrated circuit device including a layered superlattice material with an interface buffer layer |
| KR20030039893A (ko) * | 2001-11-16 | 2003-05-22 | 주식회사 하이닉스반도체 | 반도체 소자의 캐패시터 및 그 제조방법 |
-
2002
- 2002-06-18 NO NO20022910A patent/NO322192B1/no unknown
-
2003
- 2003-06-16 CN CN038141752A patent/CN1662994A/zh active Pending
- 2003-06-16 WO PCT/NO2003/000198 patent/WO2003107351A1/en active IP Right Grant
- 2003-06-16 JP JP2004514081A patent/JP2006510193A/ja not_active Abandoned
- 2003-06-16 RU RU2005100834/09A patent/RU2281567C2/ru not_active IP Right Cessation
- 2003-06-16 EP EP03760179A patent/EP1550133B1/de not_active Expired - Lifetime
- 2003-06-16 AU AU2003263671A patent/AU2003263671A1/en not_active Abandoned
- 2003-06-16 AT AT03760179T patent/ATE354851T1/de not_active IP Right Cessation
- 2003-06-16 DE DE60312014T patent/DE60312014D1/de not_active Expired - Lifetime
- 2003-06-16 CA CA002488829A patent/CA2488829A1/en not_active Abandoned
- 2003-06-18 US US10/463,427 patent/US20040209420A1/en not_active Abandoned
-
2005
- 2005-12-06 US US11/294,392 patent/US20060073658A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| ATE354851T1 (de) | 2007-03-15 |
| RU2005100834A (ru) | 2005-07-10 |
| EP1550133B1 (de) | 2007-02-21 |
| NO20022910D0 (no) | 2002-06-18 |
| RU2281567C2 (ru) | 2006-08-10 |
| JP2006510193A (ja) | 2006-03-23 |
| AU2003263671A1 (en) | 2003-12-31 |
| NO322192B1 (no) | 2006-08-28 |
| EP1550133A1 (de) | 2005-07-06 |
| WO2003107351A1 (en) | 2003-12-24 |
| NO20022910L (no) | 2003-12-19 |
| CN1662994A (zh) | 2005-08-31 |
| US20040209420A1 (en) | 2004-10-21 |
| CA2488829A1 (en) | 2003-12-24 |
| US20060073658A1 (en) | 2006-04-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8332 | No legal effect for de |