DE60300022D1 - Feldemissionsanzeigevorrichtung mit Triodenstruktur mit Kohlenstoffnanoröhren und Verfahren zur deren Herstellung - Google Patents

Feldemissionsanzeigevorrichtung mit Triodenstruktur mit Kohlenstoffnanoröhren und Verfahren zur deren Herstellung

Info

Publication number
DE60300022D1
DE60300022D1 DE60300022T DE60300022T DE60300022D1 DE 60300022 D1 DE60300022 D1 DE 60300022D1 DE 60300022 T DE60300022 T DE 60300022T DE 60300022 T DE60300022 T DE 60300022T DE 60300022 D1 DE60300022 D1 DE 60300022D1
Authority
DE
Germany
Prior art keywords
production
display device
carbon nanotubes
field emission
emission display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60300022T
Other languages
English (en)
Other versions
DE60300022T2 (de
Inventor
Hang-Woo Lee
Sang-Jin Lee
Shang-Hyeun Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung SDI Co Ltd
Original Assignee
Samsung SDI Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung SDI Co Ltd filed Critical Samsung SDI Co Ltd
Publication of DE60300022D1 publication Critical patent/DE60300022D1/de
Application granted granted Critical
Publication of DE60300022T2 publication Critical patent/DE60300022T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/05Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30403Field emission cathodes characterised by the emitter shape
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/902Specified use of nanostructure
    • Y10S977/932Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/952Display

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE60300022T 2002-01-22 2003-01-22 Feldemissionsanzeigevorrichtung mit Triodenstruktur mit Kohlenstoffnanoröhren und Verfahren zur deren Herstellung Expired - Lifetime DE60300022T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2002-0003687A KR100413815B1 (ko) 2002-01-22 2002-01-22 삼극구조를 가지는 탄소나노튜브 전계방출소자 및 그제조방법
KR2002003687 2002-01-22

Publications (2)

Publication Number Publication Date
DE60300022D1 true DE60300022D1 (de) 2004-09-23
DE60300022T2 DE60300022T2 (de) 2005-08-18

Family

ID=19718735

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60300022T Expired - Lifetime DE60300022T2 (de) 2002-01-22 2003-01-22 Feldemissionsanzeigevorrichtung mit Triodenstruktur mit Kohlenstoffnanoröhren und Verfahren zur deren Herstellung

Country Status (5)

Country Link
US (2) US6812480B2 (de)
EP (1) EP1329929B1 (de)
JP (2) JP4307856B2 (de)
KR (1) KR100413815B1 (de)
DE (1) DE60300022T2 (de)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100413815B1 (ko) * 2002-01-22 2004-01-03 삼성에스디아이 주식회사 삼극구조를 가지는 탄소나노튜브 전계방출소자 및 그제조방법
JP3465705B2 (ja) * 2002-04-02 2003-11-10 ソニー株式会社 冷陰極電界電子放出素子の製造方法、及び、冷陰極電界電子放出表示装置の製造方法
US6777869B2 (en) * 2002-04-10 2004-08-17 Si Diamond Technology, Inc. Transparent emissive display
US20070003472A1 (en) * 2003-03-24 2007-01-04 Tolt Zhidan L Electron emitting composite based on regulated nano-structures and a cold electron source using the composite
CN1287413C (zh) * 2003-03-26 2006-11-29 清华大学 一种场发射显示器
TW591716B (en) * 2003-05-26 2004-06-11 Prime View Int Co Ltd A structure of a structure release and manufacturing the same
KR100862655B1 (ko) * 2003-08-12 2008-10-10 삼성에스디아이 주식회사 탄소나노튜브 에미터를 구비하는 전계 방출 디스플레이 및그 제조 방법
US7459839B2 (en) * 2003-12-05 2008-12-02 Zhidan Li Tolt Low voltage electron source with self aligned gate apertures, and luminous display using the electron source
KR20050062742A (ko) * 2003-12-22 2005-06-27 삼성에스디아이 주식회사 전계방출소자와, 이를 적용한 표시소자 및 그 제조방법
KR101018344B1 (ko) * 2004-01-08 2011-03-04 삼성에스디아이 주식회사 전계방출형 백라이트 유니트 및 그 구동 방법과 하부패널의 제조 방법
KR20050078327A (ko) * 2004-01-29 2005-08-05 삼성에스디아이 주식회사 전계 방출 표시 소자와 이의 제조 방법
KR20050082805A (ko) * 2004-02-20 2005-08-24 삼성에스디아이 주식회사 전계 방출 표시 소자와 이의 제조 방법
KR101009983B1 (ko) * 2004-02-25 2011-01-21 삼성에스디아이 주식회사 전자 방출 표시 소자
KR20050096478A (ko) 2004-03-30 2005-10-06 삼성에스디아이 주식회사 전자 방출 표시 장치 및 그 제조 방법
KR20050096534A (ko) 2004-03-31 2005-10-06 삼성에스디아이 주식회사 전자 방출 표시 장치의 캐소드 기판 및 그 제조 방법
KR101022654B1 (ko) * 2004-04-29 2011-03-22 삼성에스디아이 주식회사 전자 방출 소자 및 이의 제조 방법
KR101022656B1 (ko) * 2004-05-25 2011-03-22 삼성에스디아이 주식회사 전자 방출 표시 장치와, 이의 제조 방법
CN1707724A (zh) * 2004-06-07 2005-12-14 清华大学 场发射装置及其制造方法
KR20060009681A (ko) * 2004-07-26 2006-02-01 삼성에스디아이 주식회사 탄소나노튜브 에미터를 구비하는 전계 방출 디스플레이 및그 제조 방법
JP4886184B2 (ja) * 2004-10-26 2012-02-29 キヤノン株式会社 画像表示装置
JP4817641B2 (ja) * 2004-10-26 2011-11-16 キヤノン株式会社 画像形成装置
TWI271766B (en) * 2004-12-10 2007-01-21 Ind Tech Res Inst Composite substrate able to emit light from both sides
KR100638668B1 (ko) * 2005-01-07 2006-10-30 삼성전기주식회사 전계방출 에미터 어레이 및 그 제조 방법
KR100590579B1 (ko) * 2005-02-01 2006-06-19 삼성에스디아이 주식회사 탄소나노튜브 에미터를 구비한 전계방출소자의 제조방법
KR20060089841A (ko) * 2005-02-04 2006-08-09 삼성에스디아이 주식회사 전계방출소자 및 그 제조방법
KR20060104655A (ko) * 2005-03-31 2006-10-09 삼성에스디아이 주식회사 전자 방출 소자
TWI435358B (zh) * 2005-08-10 2014-04-21 Pureron Japan Co Ltd A carbon film having a shape suitable for the emission of electric field, a carbon film structure, and an electron emitter
JP2007087934A (ja) * 2005-08-24 2007-04-05 Canon Inc 電子源及び画像表示装置
US20070120462A1 (en) * 2005-09-30 2007-05-31 Kim Il-Hwan Electron emission device, method of manufacturing the electron emission device, and electron emission display having the electron emission device
KR100724369B1 (ko) * 2005-10-19 2007-06-04 엘지전자 주식회사 자외선 차폐층을 구비한 전계방출소자 및 그 제조 방법
US7413924B2 (en) 2005-10-31 2008-08-19 Motorola, Inc. Plasma etch process for defining catalyst pads on nanoemissive displays
KR20070046670A (ko) * 2005-10-31 2007-05-03 삼성에스디아이 주식회사 전자 방출 디바이스 및 이를 구비한 전자 방출 표시디바이스
JP4947336B2 (ja) * 2005-11-04 2012-06-06 双葉電子工業株式会社 電界放出素子
KR100759399B1 (ko) * 2006-06-16 2007-09-19 삼성에스디아이 주식회사 발광 장치 및 이 발광 장치를 백 라이트 유닛으로 사용하는액정 표시 장치
TWI334154B (en) 2006-05-19 2010-12-01 Samsung Sdi Co Ltd Light emission device and display device
KR100759400B1 (ko) * 2006-06-15 2007-09-19 삼성에스디아이 주식회사 발광 장치 및 이 발광 장치를 백 라이트 유닛으로 사용하는액정 표시 장치
CN101110308B (zh) * 2006-07-19 2011-05-04 清华大学 场发射阴极的制造方法
KR100785028B1 (ko) * 2006-11-06 2007-12-12 삼성전자주식회사 전계방출소자의 제조방법
KR100787239B1 (ko) * 2007-01-30 2007-12-21 한국기계연구원 탄소나노튜브 투명 전도체
KR20100100904A (ko) 2007-11-26 2010-09-15 이 아이 듀폰 디 네모아 앤드 캄파니 자외선 광 차단 유전체 층을 포함하는 캐소드 어셈블리
US8018675B2 (en) * 2008-03-06 2011-09-13 Tdk Corporation Thin film magnetic head
KR101301080B1 (ko) * 2008-03-17 2013-09-03 삼성전자주식회사 삼극 전계방출소자의 제조방법
JP5151667B2 (ja) * 2008-05-12 2013-02-27 パナソニック株式会社 マトリックス型冷陰極電子源装置
KR100943971B1 (ko) * 2008-06-30 2010-02-26 한국과학기술원 탄소 미세 구조물을 갖는 전계방출 어레이 및 그 제조방법
TW201019370A (en) * 2008-11-14 2010-05-16 Tatung Co Field emission cathode plate and method for manufacturing the same
FR2946456A1 (fr) * 2009-06-05 2010-12-10 Thales Sa Source de faisceau electronique collimate a cathode froide
CN102097272B (zh) * 2011-01-10 2012-06-27 福州大学 阳栅同基板的三极结构场致发射显示器
US9053890B2 (en) 2013-08-02 2015-06-09 University Health Network Nanostructure field emission cathode structure and method for making
CN109767961B (zh) * 2018-12-28 2022-09-23 中国电子科技集团公司第十二研究所 带屏蔽结构的尖锥阵列型场发射电子源及其制作方法
CN114512380B (zh) * 2022-01-28 2023-03-28 电子科技大学 一种栅极自对准的垂直纳米空气沟道三极管制备方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5384509A (en) * 1991-07-18 1995-01-24 Motorola, Inc. Field emission device with horizontal emitter
US5442193A (en) * 1994-02-22 1995-08-15 Motorola Microelectronic field emission device with breakdown inhibiting insulated gate electrode
JPH0992130A (ja) * 1995-09-25 1997-04-04 Olympus Optical Co Ltd 電荷発生器及びその製造方法
US5720640A (en) * 1996-02-15 1998-02-24 Industrial Technology Research Institute Invisible spacers for field emission displays
JP3836539B2 (ja) * 1996-07-12 2006-10-25 双葉電子工業株式会社 電界放出素子およびその製造方法
JP3323750B2 (ja) * 1996-08-08 2002-09-09 キヤノン株式会社 電子放出素子及びそれを備えた電子源並びに画像形成装置
JP3843154B2 (ja) * 1996-09-25 2006-11-08 関西ペイント株式会社 光重合性組成物
JP3569135B2 (ja) * 1998-09-09 2004-09-22 株式会社東芝 電界放出陰極の製造方法
JP2000215792A (ja) * 1999-01-20 2000-08-04 Sony Corp 平面型表示装置の製造方法
JP2000251614A (ja) * 1999-02-24 2000-09-14 Futaba Corp 電界放出素子及びその製造方法
JP2000353467A (ja) 1999-04-09 2000-12-19 Nec Corp 冷陰極装置の製造方法
JP3585396B2 (ja) 1999-06-02 2004-11-04 シャープ株式会社 冷陰極の製造方法
JP2000353466A (ja) 1999-06-09 2000-12-19 Sony Corp 電子放出素子およびその製造方法、並びに表示装置およびその製造方法
JP2001167690A (ja) 1999-12-09 2001-06-22 Sony Corp 冷陰極電界電子放出素子及びその製造方法、並びに、冷陰極電界電子放出表示装置の製造方法
US20020036452A1 (en) 1999-12-21 2002-03-28 Masakazu Muroyama Electron emission device, cold cathode field emission device and method for the production thereof, and cold cathode field emission display and method for the production thereof
JP2001185019A (ja) * 1999-12-27 2001-07-06 Hitachi Powdered Metals Co Ltd 電界放出型カソード、電子放出装置、及び電子放出装置の製造方法
JP2001234163A (ja) * 2000-02-25 2001-08-28 Sony Corp 発光性結晶粒子、発光性結晶粒子組成物、表示用パネル及び平面型表示装置
US6682383B2 (en) * 2000-05-17 2004-01-27 Electronics And Telecommunications Research Institute Cathode structure for field emission device and method of fabricating the same
US7449081B2 (en) * 2000-06-21 2008-11-11 E. I. Du Pont De Nemours And Company Process for improving the emission of electron field emitters
EP1221710B1 (de) 2001-01-05 2004-10-27 Samsung SDI Co. Ltd. Verfahren zur Herstellung einer Kohlenstoffnanoröhren-Feldemissionsanordnung mit Triodenstruktur
US6448701B1 (en) * 2001-03-09 2002-09-10 The United States Of America As Represented By The Secretary Of The Navy Self-aligned integrally gated nanofilament field emitter cell and array
KR100413815B1 (ko) * 2002-01-22 2004-01-03 삼성에스디아이 주식회사 삼극구조를 가지는 탄소나노튜브 전계방출소자 및 그제조방법
US6670629B1 (en) * 2002-09-06 2003-12-30 Ge Medical Systems Global Technology Company, Llc Insulated gate field emitter array

Also Published As

Publication number Publication date
US7527988B2 (en) 2009-05-05
EP1329929A1 (de) 2003-07-23
JP4307856B2 (ja) 2009-08-05
JP2003234062A (ja) 2003-08-22
JP4512156B2 (ja) 2010-07-28
EP1329929B1 (de) 2004-08-18
US20030141495A1 (en) 2003-07-31
KR20030063529A (ko) 2003-07-31
JP2009049019A (ja) 2009-03-05
US20050040752A1 (en) 2005-02-24
US6812480B2 (en) 2004-11-02
DE60300022T2 (de) 2005-08-18
KR100413815B1 (ko) 2004-01-03

Similar Documents

Publication Publication Date Title
DE60300022D1 (de) Feldemissionsanzeigevorrichtung mit Triodenstruktur mit Kohlenstoffnanoröhren und Verfahren zur deren Herstellung
DE60035955D1 (de) Kohlenstoffnanoröhren-Feldemissionsanzeige mit Triodenstruktur und Verfahren zu deren Herstellung
DE602005021429D1 (de) Elektronen-emittierende Vorrichtung, Elektronenquelle, Bildanzeigegerät und Verfahren zur deren Herstellung
DE60301582D1 (de) Speicheranordnung mit kohlenstoffnanoröhre und Verfahren zur Herstellung der Speicheranordnung
DE602004007440D1 (de) Kohlenstoffnanoröhren Anordnung, Verfahren zur Herstellung, Feldemissionsanordnung und Feldemissionsanzeige
DE60201689D1 (de) Verfahren zur Herstellung einer Kohlenstoffnanoröhren-Feldemissionsanordnung mit Triodenstruktur
DE60322537D1 (de) Verfahren zur herstellung von kohlenstoffnanoröhren
DE602005026032D1 (de) Klebende gegenstände mit verbessertem luftaustritt und verfahren zu deren herstellung
ATE499150T1 (de) Membranen mit gemischter matrix und pyrolisierten kohlenstoffsiebteilchen und verfahren zur herstellung derselben
DE60104907D1 (de) Verfahren zur Herstellung einer Kohlenstoffnanoröhren-Feldemissionsanordnung mit Triodenstruktur
DE60333426D1 (de) Verfahren zur Herstellung mehrwandiger Kohlenstoff-Nanoröhren
GB2361805B (en) Field emission array with carbon nanotubes and method for fabricating the field emission array
EP1946627A4 (de) Mit kohlenstoffnanoröhren beschichtete kühleinrichtung und herstellungsverfahren dafür
AU2003223807A1 (en) Method and apparatus for producing single-wall carbon nanotubes
AU2003290438A1 (en) Low-temperature formation method for emitter tip including copper oxide nanowire or copper oxide nanowire or copper nanowire and display device or light source having emitter tip manufactured using the same
DE10360454A8 (de) Organische Elektrolumineszenz-Anzeigevorrichtung mit aktiver Matrix und Verfahren zu deren Herstellung
DE60304841D1 (de) Lichtstrahl-ablenkvorrichtung und verfahren zu deren herstellung
DE60140784D1 (de) Organische elektrolumineszente vorrichtung und verfahren zu dessen herstellung
DE60021778D1 (de) Kohlenstofftinte, elektronenemittierendes Element, Verfahren zur Herstellung eines elektronenemittierenden Elements und Bildanzeigevorrichtung
EP1810950A4 (de) Kohlenstoffnanoröhrenaggregat und herstellungsverfahren dafür
DE69910573D1 (de) Plasma-anzeigevorrichtung mit guten licht-emissionseigenschaften, und verfahren und vorrichtung zu deren herstellung
ATE526307T1 (de) Hydroxybiphenyl-carbonsäuren und derivate, verfahren zu deren herstellung und deren verwendung
DE60334635D1 (de) Luftreifen mit folienartigem elektronischem bauelement und verfahren zum anordnen des folienartigen elektronischen bauelements
DE602004022119D1 (de) Geräte und Verfahren zur Linearisierung mit digitaler Rückkopplung
DE60221951D1 (de) Zusammensetzung für Paste mit Kohlenstoffnanoröhren, diese Zusammensetzung verwendende Elektronen-emittierende Vorrichtung und deren Herstellungsverfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition