DE60239137D1 - Herstellungsverfahren für flüssigkeitstropfenabgabekopf - Google Patents

Herstellungsverfahren für flüssigkeitstropfenabgabekopf

Info

Publication number
DE60239137D1
DE60239137D1 DE60239137T DE60239137T DE60239137D1 DE 60239137 D1 DE60239137 D1 DE 60239137D1 DE 60239137 T DE60239137 T DE 60239137T DE 60239137 T DE60239137 T DE 60239137T DE 60239137 D1 DE60239137 D1 DE 60239137D1
Authority
DE
Germany
Prior art keywords
liquid drop
delivery head
manufacturing liquid
drop delivery
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60239137T
Other languages
English (en)
Inventor
Kenichiroh Hashimoto
Tadashi Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001270165A external-priority patent/JP2003072090A/ja
Priority claimed from JP2002213478A external-priority patent/JP4159317B2/ja
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Application granted granted Critical
Publication of DE60239137D1 publication Critical patent/DE60239137D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14411—Groove in the nozzle plate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60239137T 2001-09-06 2002-09-04 Herstellungsverfahren für flüssigkeitstropfenabgabekopf Expired - Lifetime DE60239137D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001270165A JP2003072090A (ja) 2001-09-06 2001-09-06 液滴吐出ヘッド及びその製造方法、マイクロデバイス、インクカートリッジ並びにインクジェット記録装置
JP2002213478A JP4159317B2 (ja) 2002-07-23 2002-07-23 液滴吐出ヘッドの製造方法、マイクロデバイス、インクジェットヘッド、インクカートリッジ並びにインクジェット記録装置、画像形成装置、液滴を吐出する装置
PCT/JP2002/008995 WO2003022584A1 (en) 2001-09-06 2002-09-04 Liquid drop discharge head and manufacture method thereof, micro device, ink-jet head, ink cartridge, and ink-jet printing device

Publications (1)

Publication Number Publication Date
DE60239137D1 true DE60239137D1 (de) 2011-03-24

Family

ID=26621763

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60239137T Expired - Lifetime DE60239137D1 (de) 2001-09-06 2002-09-04 Herstellungsverfahren für flüssigkeitstropfenabgabekopf

Country Status (6)

Country Link
US (2) US7090325B2 (de)
EP (1) EP1423282B1 (de)
CN (1) CN1289298C (de)
DE (1) DE60239137D1 (de)
HK (1) HK1061828A1 (de)
WO (1) WO2003022584A1 (de)

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JP2005203541A (ja) * 2004-01-15 2005-07-28 Disco Abrasive Syst Ltd ウエーハのレーザー加工方法
US20050193557A1 (en) * 2004-03-03 2005-09-08 Ko Sang-Cheol Method of fabricating an ink-jet print head using a liquid-jet guided laser
US7560039B2 (en) * 2004-09-10 2009-07-14 Lexmark International, Inc. Methods of deep reactive ion etching
JP2006175845A (ja) * 2004-11-29 2006-07-06 Ricoh Co Ltd 液体吐出ヘッド、液体吐出装置及び画像形成装置
US7607227B2 (en) * 2006-02-08 2009-10-27 Eastman Kodak Company Method of forming a printhead
JP4726159B2 (ja) * 2006-03-14 2011-07-20 株式会社リコー 液体吐出ヘッド、液体吐出装置、画像形成装置
US8197048B2 (en) * 2006-04-26 2012-06-12 Ricoh Company, Ltd. Image forming apparatus
JP4717765B2 (ja) 2006-09-13 2011-07-06 Ｎｔｔエレクトロニクス株式会社 アレイ導波路回折格子型光合分波回路の光チップ、導波路基板及びアレイ導波路回折格子型光合分波回路の光チップの製造方法
US7858493B2 (en) * 2007-02-23 2010-12-28 Finisar Corporation Cleaving edge-emitting lasers from a wafer cell
JP5332375B2 (ja) * 2008-07-25 2013-11-06 株式会社リコー 液体吐出ヘッド、液体吐出ヘッドの製造方法、画像形成装置
JP5387096B2 (ja) * 2008-08-27 2014-01-15 株式会社リコー 液体吐出ヘッド及び画像形成装置並びに液体吐出ヘッドの製造方法
EP2373488B1 (de) * 2008-12-02 2013-02-27 OCE-Technologies B.V. Verfahren zur herstellung eines tintenstrahldruckkopfs
US20100187667A1 (en) * 2009-01-28 2010-07-29 Fujifilm Dimatix, Inc. Bonded Microelectromechanical Assemblies
JP2010240869A (ja) * 2009-04-01 2010-10-28 Canon Inc 液体吐出ヘッド用基板の製造方法
JP5487755B2 (ja) * 2009-06-26 2014-05-07 株式会社リコー 液体吐出ヘッドユニット及び画像形成装置
JP5279686B2 (ja) * 2009-11-11 2013-09-04 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6098099B2 (ja) 2011-12-13 2017-03-22 株式会社リコー 液体吐出ヘッド及び画像形成装置
JP5943292B2 (ja) 2012-03-19 2016-07-05 株式会社リコー 液体吐出ヘッド、画像形成装置、液体吐出ヘッドの製造方法
JP5943755B2 (ja) * 2012-07-20 2016-07-05 キヤノン株式会社 液体吐出ヘッドの基板の製造方法
US10421275B2 (en) 2014-10-30 2019-09-24 Hewlett-Packard Development Company, L.P. Fluid ejection device
US9809024B2 (en) 2015-06-11 2017-11-07 Ricoh Company, Ltd. Image forming apparatus
JP6645113B2 (ja) 2015-10-16 2020-02-12 株式会社リコー 接合部材、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置
FR3075773B1 (fr) * 2017-12-22 2020-01-24 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de realisation de dispositifs semi-conducteurs et de chemins de decoupe

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JPS56135942A (en) * 1980-03-27 1981-10-23 Internatl Rectifier Corp Japan Ltd Manufacture of semiconductor device
JPS59220947A (ja) 1983-05-30 1984-12-12 Sharp Corp 半導体装置の製造方法
US4829324A (en) * 1987-12-23 1989-05-09 Xerox Corporation Large array thermal ink jet printhead
JPH0212110A (ja) 1988-06-30 1990-01-17 Nippon Telegr & Teleph Corp <Ntt> 光集積回路製造法
US4967146A (en) * 1989-05-15 1990-10-30 Rockwell International Corporation Semiconductor chip production and testing processes
JP2869898B2 (ja) * 1990-09-20 1999-03-10 アイシン精機株式会社 半導体チップの分離方法
JPH04326550A (ja) * 1991-04-26 1992-11-16 Nec Corp チップ分離の方法
JPH0536825A (ja) 1991-07-31 1993-02-12 Toshiba Corp 半導体チツプの切り出し方法
JPH05285935A (ja) * 1992-04-13 1993-11-02 Sumitomo Electric Ind Ltd 半導体基板の分割方法
JP3141652B2 (ja) 1993-11-09 2001-03-05 セイコーエプソン株式会社 インクジェットヘッドおよびインクジェットヘッドの製造方法
JPH07186388A (ja) * 1993-11-22 1995-07-25 Xerox Corp 大規模配列インク・ジェット・プリントヘッドおよびその製造方法
JP3221474B2 (ja) 1994-04-05 2001-10-22 セイコーエプソン株式会社 インクジェット式印字ヘッド
US5621524A (en) 1994-07-14 1997-04-15 Hitachi Koki Co., Ltd. Method for testing ink-jet recording heads
JP3185845B2 (ja) 1994-09-19 2001-07-11 セイコーエプソン株式会社 インクジェット式印字ヘッド
AUPN623895A0 (en) 1995-10-30 1995-11-23 Eastman Kodak Company A manufacturing process for lift print heads with nozzle rim heaters
JP3365192B2 (ja) 1996-02-22 2003-01-08 セイコーエプソン株式会社 インクジェット式記録ヘッド
DE69710411T2 (de) * 1996-10-18 2002-11-07 Seiko Epson Corp Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
JPH10157149A (ja) 1996-12-05 1998-06-16 Canon Inc 液体噴射記録ヘッドの製造方法
JPH10305420A (ja) 1997-03-04 1998-11-17 Ngk Insulators Ltd 酸化物単結晶からなる母材の加工方法、機能性デバイスの製造方法
JP3755228B2 (ja) * 1997-04-14 2006-03-15 株式会社ニコン 荷電粒子線露光装置
JP2000124163A (ja) 1998-10-16 2000-04-28 Sony Corp 半導体装置及びその製造方法
JP3716669B2 (ja) * 1999-05-18 2005-11-16 カシオ計算機株式会社 インクジェットプリンタヘッドのサンドブラスト加工方法
JP2001010044A (ja) 1999-06-25 2001-01-16 Ricoh Co Ltd インクジェットヘッド
JP2001260366A (ja) 2000-03-21 2001-09-25 Nec Corp インクジェット記録ヘッドおよびその製造方法
AUPR245301A0 (en) * 2001-01-10 2001-02-01 Silverbrook Research Pty Ltd An apparatus (WSM06)

Also Published As

Publication number Publication date
WO2003022584A1 (en) 2003-03-20
EP1423282A1 (de) 2004-06-02
US20060238579A1 (en) 2006-10-26
CN1551832A (zh) 2004-12-01
US20040246292A1 (en) 2004-12-09
US7090325B2 (en) 2006-08-15
US7731861B2 (en) 2010-06-08
EP1423282A4 (de) 2006-06-14
CN1289298C (zh) 2006-12-13
HK1061828A1 (en) 2004-10-08
EP1423282B1 (de) 2011-02-09

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