DE602008001299D1 - Versatzkorrektur eines Probenhalters für eine euzentrische Drehung in einem Teilchenstrahlmikroskop - Google Patents
Versatzkorrektur eines Probenhalters für eine euzentrische Drehung in einem TeilchenstrahlmikroskopInfo
- Publication number
- DE602008001299D1 DE602008001299D1 DE602008001299T DE602008001299T DE602008001299D1 DE 602008001299 D1 DE602008001299 D1 DE 602008001299D1 DE 602008001299 T DE602008001299 T DE 602008001299T DE 602008001299 T DE602008001299 T DE 602008001299T DE 602008001299 D1 DE602008001299 D1 DE 602008001299D1
- Authority
- DE
- Germany
- Prior art keywords
- particle beam
- offset correction
- specimen holder
- beam microscope
- eucentric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20207—Tilt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20214—Rotation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20242—Eucentric movement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20278—Motorised movement
- H01J2237/20285—Motorised movement computer-controlled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20292—Means for position and/or orientation registration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2611—Stereoscopic measurements and/or imaging
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/262—Non-scanning techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007279781A JP5268324B2 (ja) | 2007-10-29 | 2007-10-29 | 荷電粒子線顕微装置及び顕微方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602008001299D1 true DE602008001299D1 (de) | 2010-07-01 |
Family
ID=40328852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602008001299T Active DE602008001299D1 (de) | 2007-10-29 | 2008-10-28 | Versatzkorrektur eines Probenhalters für eine euzentrische Drehung in einem Teilchenstrahlmikroskop |
Country Status (4)
Country | Link |
---|---|
US (1) | US7863564B2 (de) |
EP (1) | EP2056332B1 (de) |
JP (1) | JP5268324B2 (de) |
DE (1) | DE602008001299D1 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5268324B2 (ja) * | 2007-10-29 | 2013-08-21 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微装置及び顕微方法 |
WO2010019968A2 (en) * | 2008-08-15 | 2010-02-18 | John Ruffell | Systems and methods for scanning a beam of charged particles |
US9810895B2 (en) * | 2009-05-29 | 2017-11-07 | Olympus Corporation | Biological observation apparatus |
JP5517559B2 (ja) * | 2009-10-26 | 2014-06-11 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法 |
JP5670096B2 (ja) * | 2009-11-17 | 2015-02-18 | 日本電子株式会社 | トモグラフィー法を用いた試料の3次元画像取得方法及び装置 |
JP5260575B2 (ja) * | 2010-02-24 | 2013-08-14 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡、および試料ホルダ |
JP5321918B2 (ja) * | 2010-06-15 | 2013-10-23 | 独立行政法人産業技術総合研究所 | 電子顕微鏡用試料作製方法 |
JP2012042669A (ja) * | 2010-08-18 | 2012-03-01 | Sony Corp | 顕微鏡制御装置及び光学的歪み補正方法 |
JP5403560B2 (ja) | 2010-11-17 | 2014-01-29 | コリア ベイシック サイエンス インスティテュート | 透過電子顕微鏡の、3方向以上から試片を観察し分析するための3軸駆動が可能な試片ホルダー |
JP5537460B2 (ja) | 2011-02-17 | 2014-07-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微鏡及びそれを用いた計測画像の補正方法 |
JP5788719B2 (ja) * | 2011-06-09 | 2015-10-07 | 株式会社日立ハイテクノロジーズ | ステージ装置およびステージ装置の制御方法 |
JP5883658B2 (ja) | 2012-01-20 | 2016-03-15 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法 |
JP6108674B2 (ja) * | 2012-03-16 | 2017-04-05 | 株式会社日立ハイテクサイエンス | 荷電粒子ビーム装置及び試料搬送装置 |
JP5981744B2 (ja) * | 2012-03-21 | 2016-08-31 | 株式会社日立ハイテクサイエンス | 試料観察方法、試料作製方法及び荷電粒子ビーム装置 |
US9322777B2 (en) | 2012-10-29 | 2016-04-26 | Tokitae Llc | Systems, devices, and methods employing angular-resolved scattering and spectrally resolved measurements for classification of objects |
JP6117070B2 (ja) * | 2013-09-26 | 2017-04-19 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡 |
WO2015089113A1 (en) * | 2013-12-09 | 2015-06-18 | North Carolina State University | Methods, systems, and computer readable media for measuring and correcting drift distortion in images obtained using a scanning microscope |
JP6385899B2 (ja) * | 2014-07-21 | 2018-09-05 | エフ・イ−・アイ・カンパニー | Tem試料取付け構造 |
JP6308904B2 (ja) | 2014-07-28 | 2018-04-11 | 株式会社日立製作所 | 試料ホルダ、荷電粒子線装置および観察方法 |
EP3038131A1 (de) * | 2014-12-22 | 2016-06-29 | FEI Company | Verbesserter Probenhalter für Ladungsträgerteilchenmikroskop |
US9627176B2 (en) * | 2015-07-23 | 2017-04-18 | Fei Company | Fiducial formation for TEM/STEM tomography tilt-series acquisition and alignment |
US11353798B2 (en) * | 2017-10-13 | 2022-06-07 | Hitachi High-Technologies Corporation | Pattern measurement device and pattern measurement method |
NL2020235B1 (en) * | 2018-01-05 | 2019-07-12 | Hennyz B V | Vacuum transfer assembly |
CN109709116B (zh) * | 2018-11-23 | 2021-11-02 | 中国石油天然气股份有限公司 | 一种步进旋转样品台、微观颗粒三维表面成像方法及系统 |
JP7059402B2 (ja) | 2019-01-11 | 2022-04-25 | 株式会社日立ハイテク | 荷電粒子線装置及びその制御方法 |
WO2020157860A1 (ja) * | 2019-01-30 | 2020-08-06 | 株式会社日立ハイテク | 荷電粒子線システム及び荷電粒子線撮像方法 |
US11791131B2 (en) * | 2019-05-23 | 2023-10-17 | Hitachi High-Tech Corporation | Charged particle beam apparatus and method for controlling charged particle beam apparatus |
CN111474196B (zh) * | 2020-04-16 | 2024-01-30 | 宸鸿科技(厦门)有限公司 | 透射电子显微镜样品制备所产生形变的控制方法 |
CZ309943B6 (cs) * | 2020-08-07 | 2024-02-21 | Tescan Group, A.S. | Způsob provozu zařízení se svazkem nabitých částic |
US11574794B2 (en) * | 2021-03-23 | 2023-02-07 | Fei Company | Beam trajectory via combination of image shift and hardware alpha tilt |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4242586A (en) * | 1978-08-08 | 1980-12-30 | Commonwealth Scientific And Industrial Research Organization | Specimen holder for electron microscopy and electron diffraction |
JPH08106873A (ja) * | 1994-10-04 | 1996-04-23 | Hitachi Ltd | 電子顕微鏡装置 |
JP3677895B2 (ja) * | 1996-10-04 | 2005-08-03 | 株式会社日立製作所 | 3次元構造観察用試料作製装置、電子顕微鏡及びその方法 |
JP3672728B2 (ja) * | 1998-04-03 | 2005-07-20 | 日本電子株式会社 | 透過型電子顕微鏡における自動試料傾斜装置 |
JP3522121B2 (ja) * | 1998-09-02 | 2004-04-26 | 日本電子株式会社 | 電子顕微鏡 |
JP4275786B2 (ja) * | 1999-01-04 | 2009-06-10 | 株式会社日立製作所 | 電子顕微鏡 |
JP4069545B2 (ja) | 1999-05-19 | 2008-04-02 | 株式会社日立製作所 | 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置 |
JP3859396B2 (ja) * | 1999-07-19 | 2006-12-20 | 日本電子株式会社 | 走査型荷電粒子ビーム装置における試料像観察方法及び走査型荷電粒子ビーム装置 |
JP2001098048A (ja) | 1999-09-30 | 2001-04-10 | Toray Ind Inc | カラーフィルター用熱硬化性樹脂溶液組成物、カラーフィルターおよび液晶表示装置 |
JP2001312989A (ja) | 2000-04-28 | 2001-11-09 | Inst Of Physical & Chemical Res | 電子顕微鏡用試料ステージ |
JP3951590B2 (ja) | 2000-10-27 | 2007-08-01 | 株式会社日立製作所 | 荷電粒子線装置 |
JP2005249745A (ja) * | 2004-03-08 | 2005-09-15 | Ebara Corp | 試料表面検査方法および検査装置 |
US7381968B2 (en) * | 2004-04-16 | 2008-06-03 | Hitachi High-Technologies Corporation | Charged particle beam apparatus and specimen holder |
JP4016970B2 (ja) | 2004-06-07 | 2007-12-05 | 株式会社日立製作所 | 試料作製装置および試料作製方法 |
JP2006040777A (ja) * | 2004-07-29 | 2006-02-09 | Jeol Ltd | 電子顕微鏡 |
JP4587742B2 (ja) * | 2004-08-23 | 2010-11-24 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微方法及び荷電粒子線応用装置 |
JP2006196236A (ja) * | 2005-01-12 | 2006-07-27 | Hitachi High-Technologies Corp | 電子顕微鏡及び観察方法 |
JP4691391B2 (ja) * | 2005-05-12 | 2011-06-01 | 独立行政法人理化学研究所 | 電子顕微鏡 |
JP2006108123A (ja) * | 2006-01-16 | 2006-04-20 | Hitachi Ltd | 荷電粒子線装置 |
JP4870450B2 (ja) * | 2006-02-27 | 2012-02-08 | 株式会社日立ハイテクノロジーズ | 検査装置、および検査方法 |
JP4504946B2 (ja) * | 2006-05-16 | 2010-07-14 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP4920385B2 (ja) * | 2006-11-29 | 2012-04-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置、走査型電子顕微鏡、及び試料観察方法 |
JP2008171774A (ja) * | 2007-01-15 | 2008-07-24 | Hitachi High-Technologies Corp | 電子顕微鏡 |
JP5129509B2 (ja) * | 2007-05-14 | 2013-01-30 | 株式会社日立ハイテクノロジーズ | 透過型電子顕微鏡及び撮影方法 |
EP2051280A1 (de) * | 2007-10-18 | 2009-04-22 | The Regents of the University of California | Motorisierter Manipulator zur Positionierung einer TEM-Probe |
JP5268324B2 (ja) * | 2007-10-29 | 2013-08-21 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微装置及び顕微方法 |
JP5250350B2 (ja) * | 2008-09-12 | 2013-07-31 | 株式会社日立ハイテクノロジーズ | 荷電粒子線応用装置 |
-
2007
- 2007-10-29 JP JP2007279781A patent/JP5268324B2/ja not_active Expired - Fee Related
-
2008
- 2008-10-28 EP EP08018848A patent/EP2056332B1/de not_active Expired - Fee Related
- 2008-10-28 DE DE602008001299T patent/DE602008001299D1/de active Active
- 2008-10-28 US US12/259,771 patent/US7863564B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP2056332B1 (de) | 2010-05-19 |
US20090127474A1 (en) | 2009-05-21 |
US7863564B2 (en) | 2011-01-04 |
JP5268324B2 (ja) | 2013-08-21 |
JP2009110734A (ja) | 2009-05-21 |
EP2056332A1 (de) | 2009-05-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |