DE602004031775D1 - Phasenänderungsinformationsaufzeichnungsmedium, verfahren zu dessen herstellung und sputtertarget. - Google Patents

Phasenänderungsinformationsaufzeichnungsmedium, verfahren zu dessen herstellung und sputtertarget.

Info

Publication number
DE602004031775D1
DE602004031775D1 DE602004031775T DE602004031775T DE602004031775D1 DE 602004031775 D1 DE602004031775 D1 DE 602004031775D1 DE 602004031775 T DE602004031775 T DE 602004031775T DE 602004031775 T DE602004031775 T DE 602004031775T DE 602004031775 D1 DE602004031775 D1 DE 602004031775D1
Authority
DE
Germany
Prior art keywords
manufacture
sputter target
modifying information
phase modifying
information certificate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004031775T
Other languages
English (en)
Inventor
Hiroko Ohkura
Kazunori Ito
Hiroshi Deguchi
Masaki Kato
Mikiko Abe
Hiroyoshi Sekiguchi
Makoto Harigaya
Masaru Shinkai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004029923A external-priority patent/JP4271051B2/ja
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Publication of DE602004031775D1 publication Critical patent/DE602004031775D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00—Duplicating or marking methods; Sheet materials for use therein
    • B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C12/00—Alloys based on antimony or bismuth
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266—Sputtering or spin-coating layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/268—Post-production operations, e.g. initialising phase-change recording layers, checking for defects
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24308—Metals or metalloids transition metal elements of group 11 (Cu, Ag, Au)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/2431—Metals or metalloids group 13 elements (B, Al, Ga, In)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24312—Metals or metalloids group 14 elements (e.g. Si, Ge, Sn)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24314—Metals or metalloids group 15 elements (e.g. Sb, Bi)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24316—Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/259—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
DE602004031775T 2004-02-05 2004-08-04 Phasenänderungsinformationsaufzeichnungsmedium, verfahren zu dessen herstellung und sputtertarget. Active DE602004031775D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004029923A JP4271051B2 (ja) 2003-02-06 2004-02-05 相変化型情報記録媒体及びスパッタリングターゲット
PCT/JP2004/011148 WO2005075212A1 (ja) 2004-02-05 2004-08-04 相変化型情報記録媒体及びその製造方法、スパッタリングターゲット、並びに相変化型情報記録媒体の使用方法及び光記録装置

Publications (1)

Publication Number Publication Date
DE602004031775D1 true DE602004031775D1 (de) 2011-04-21

Family

ID=34835972

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004031775T Active DE602004031775D1 (de) 2004-02-05 2004-08-04 Phasenänderungsinformationsaufzeichnungsmedium, verfahren zu dessen herstellung und sputtertarget.

Country Status (7)

Country Link
US (1) US7438965B2 (de)
EP (1) EP1712367B1 (de)
KR (1) KR100730978B1 (de)
CN (1) CN100513193C (de)
DE (1) DE602004031775D1 (de)
TW (1) TW200527421A (de)
WO (1) WO2005075212A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006028251A1 (en) 2004-09-09 2006-03-16 Ricoh Company, Ltd. Optical recording medium
JP4248486B2 (ja) * 2004-12-15 2009-04-02 株式会社リコー 相変化型光記録媒体
JP2007196523A (ja) * 2006-01-26 2007-08-09 Sony Corp 光記録媒体およびその製造方法
JP4550041B2 (ja) * 2006-03-10 2010-09-22 株式会社リコー 光記録媒体
EP1993847B1 (de) 2006-03-10 2011-10-26 Ricoh Company, Ltd. Optisches aufzeichnungsmedium
US8017208B2 (en) * 2006-11-01 2011-09-13 Panasonic Corporation Information recording medium, target and method for manufacturing of information recording medium using the same
JP2008192281A (ja) * 2007-01-12 2008-08-21 Ricoh Co Ltd パターン及びその形成方法
JP5188328B2 (ja) * 2008-08-29 2013-04-24 株式会社日立製作所 半導体装置
US20100297381A1 (en) * 2009-05-22 2010-11-25 Cmc Magnetics Corporation Method of improving read stability of optical recording medium and optical recording medium manufactured using the method
CN102804269B (zh) * 2009-06-24 2016-03-02 三菱化学媒体股份有限公司 光记录介质
EP3002550B1 (de) 2014-10-03 2017-08-30 Ricoh Company, Ltd. Informationsverarbeitungssystem und informationsverarbeitungsverfahren zur abstandsmessung

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60177446A (ja) * 1984-02-23 1985-09-11 Nippon Telegr & Teleph Corp <Ntt> 光デイスク記録媒体
CN1008845B (zh) 1984-12-05 1990-07-18 富士通株式会社 光学信息记录介质及信息的记录与擦抹的方法
JPS61168145A (ja) * 1985-01-19 1986-07-29 Fujitsu Ltd 光記録媒体
JPS63155437A (ja) * 1986-12-19 1988-06-28 Toshiba Corp 情報記録媒体
JPH05169819A (ja) * 1990-09-06 1993-07-09 Hitachi Maxell Ltd 光情報記録媒体及び情報の記録再生方法並びに情報記録装置
EP0474311A1 (de) 1990-09-06 1992-03-11 Hitachi Maxell Ltd. Optischer Aufzeichnungsträger für Daten, Verfahren zum Schreiben und Lesen von Daten und Vorrichtung zum Aufzeichnen von Daten
US5254382A (en) * 1990-11-29 1993-10-19 Fuji Xerox Co., Ltd. Optical recording medium
JPH05286249A (ja) * 1992-02-10 1993-11-02 Hitachi Ltd 情報記録用媒体
US5709978A (en) * 1993-06-18 1998-01-20 Hitachi, Ltd. Supperresolution readout thin film and information recording medium
JPH09286175A (ja) 1996-04-23 1997-11-04 Mitsubishi Chem Corp 光記録媒体
JPH09286174A (ja) 1996-04-23 1997-11-04 Mitsubishi Chem Corp 光記録媒体
US6231945B1 (en) * 1997-09-09 2001-05-15 Hitachi, Ltd. Information recording medium
JP2000339751A (ja) 1999-06-01 2000-12-08 Ricoh Co Ltd 相変化形光記録媒体
EP1193696B1 (de) 2000-09-28 2007-01-03 Ricoh Company, Ltd. Optisches Aufzeichnungsmedium, Verfahren zu dessen Herstellung und Verfahren und Vorrichtung zum Aufzeichnen auf oder Lesen von diesem Medium
JP2002225437A (ja) 2000-12-01 2002-08-14 Ricoh Co Ltd 光記録媒体
JP2002225433A (ja) * 2001-02-01 2002-08-14 Ricoh Co Ltd 錫系光記録媒体
JP2002264515A (ja) 2001-03-12 2002-09-18 Ricoh Co Ltd 光記録媒体および情報記録再生方法
DE60309232T2 (de) 2002-03-05 2007-09-06 Mitsubishi Kagaku Media Co. Ltd. Phasenwechselaufzeichnungsmaterial für ein Informationsaufzeichnungsmedium und ein Informationsaufzeichnungsmedium dieses verwendend
CN1290106C (zh) * 2002-03-07 2006-12-13 株式会社理光 光记录媒体及其制造方法
US7260053B2 (en) * 2002-04-02 2007-08-21 Ricoh Company, Ltd. Optical recording medium, process for manufacturing the same, sputtering target for manufacturing the same, and optical recording process using the same
US7351516B2 (en) * 2002-11-06 2008-04-01 Ricoh Company, Ltd. Optical information recording medium
EP1439532A3 (de) * 2003-01-17 2005-02-09 Ricoh Company Verfahren zur Initialisierung eines optischen Aufzeichnungsmediums vom Phasenwechsel-Typ
JP2005063586A (ja) * 2003-08-18 2005-03-10 Ricoh Co Ltd 光情報記録方法及び光情報記録装置
EP1669988A1 (de) * 2003-09-25 2006-06-14 Ricoh Company, Ltd. Optisches aufzeichnungsmedium
JP2005153338A (ja) * 2003-11-26 2005-06-16 Ricoh Co Ltd 光記録媒体
TWI260015B (en) * 2003-12-19 2006-08-11 Tsung-Shune Chin Ultra-high density phase-change recording media based on the Ga-Sb-Te system
JP2005251265A (ja) * 2004-03-02 2005-09-15 Ricoh Co Ltd 相変化型光記録媒体
TW200809845A (en) * 2006-03-06 2008-02-16 Ricoh Co Ltd Optical recording medium, and method for initializing the optical recording medium

Also Published As

Publication number Publication date
CN100513193C (zh) 2009-07-15
TW200527421A (en) 2005-08-16
US7438965B2 (en) 2008-10-21
US20060077884A1 (en) 2006-04-13
KR100730978B1 (ko) 2007-06-22
TWI304210B (de) 2008-12-11
CN1767954A (zh) 2006-05-03
EP1712367A1 (de) 2006-10-18
EP1712367B1 (de) 2011-03-09
EP1712367A4 (de) 2008-11-26
WO2005075212A1 (ja) 2005-08-18
KR20060063780A (ko) 2006-06-12

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