DE602004032323D1 - Verfahren zur Herstellung des Tantalsputtertargets - Google Patents
Verfahren zur Herstellung des TantalsputtertargetsInfo
- Publication number
- DE602004032323D1 DE602004032323D1 DE602004032323T DE602004032323T DE602004032323D1 DE 602004032323 D1 DE602004032323 D1 DE 602004032323D1 DE 602004032323 T DE602004032323 T DE 602004032323T DE 602004032323 T DE602004032323 T DE 602004032323T DE 602004032323 D1 DE602004032323 D1 DE 602004032323D1
- Authority
- DE
- Germany
- Prior art keywords
- making
- sputtering target
- tantalum sputtering
- tantalum
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005477 sputtering target Methods 0.000 title 1
- 229910052715 tantalum Inorganic materials 0.000 title 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21J—FORGING; HAMMERING; PRESSING METAL; RIVETING; FORGE FURNACES
- B21J1/00—Preparing metal stock or similar ancillary operations prior, during or post forging, e.g. heating or cooling
- B21J1/02—Preliminary treatment of metal stock without particular shaping, e.g. salvaging segregated zones, forging or pressing in the rough
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21J—FORGING; HAMMERING; PRESSING METAL; RIVETING; FORGE FURNACES
- B21J5/00—Methods for forging, hammering, or pressing; Special equipment or accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
- C22F1/18—High-melting or refractory metals or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Forging (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003097659 | 2003-04-01 | ||
PCT/JP2004/001915 WO2004090193A1 (ja) | 2003-04-01 | 2004-02-19 | タンタルスパッタリングターゲット及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004032323D1 true DE602004032323D1 (de) | 2011-06-01 |
Family
ID=33156648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004032323T Expired - Lifetime DE602004032323D1 (de) | 2003-04-01 | 2004-02-19 | Verfahren zur Herstellung des Tantalsputtertargets |
Country Status (8)
Country | Link |
---|---|
US (1) | US8172960B2 (de) |
EP (2) | EP2253731B1 (de) |
JP (2) | JP4256388B2 (de) |
KR (1) | KR100698745B1 (de) |
CN (2) | CN1771350A (de) |
DE (1) | DE602004032323D1 (de) |
TW (1) | TWI281507B (de) |
WO (1) | WO2004090193A1 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4109901B2 (ja) | 2001-05-29 | 2008-07-02 | キヤノン株式会社 | 画像表示装置 |
US20040245099A1 (en) * | 2001-11-26 | 2004-12-09 | Atsushi Hukushima | Sputtering target and production method therefor |
JP4883546B2 (ja) * | 2002-09-20 | 2012-02-22 | Jx日鉱日石金属株式会社 | タンタルスパッタリングターゲットの製造方法 |
JP4263900B2 (ja) * | 2002-11-13 | 2009-05-13 | 日鉱金属株式会社 | Taスパッタリングターゲット及びその製造方法 |
US7892367B2 (en) * | 2003-11-06 | 2011-02-22 | Jx Nippon Mining & Metals Corporation | Tantalum sputtering target |
EP1876258A4 (de) * | 2005-04-28 | 2008-08-13 | Nippon Mining Co | Sputtertarget |
US8425696B2 (en) * | 2005-10-04 | 2013-04-23 | Jx Nippon Mining & Metals Corporation | Sputtering target |
JP4974362B2 (ja) * | 2006-04-13 | 2012-07-11 | 株式会社アルバック | Taスパッタリングターゲットおよびその製造方法 |
JP5187713B2 (ja) * | 2006-06-09 | 2013-04-24 | 国立大学法人電気通信大学 | 金属材料の微細化加工方法 |
JP5144760B2 (ja) * | 2009-05-22 | 2013-02-13 | Jx日鉱日石金属株式会社 | タンタルスパッタリングターゲット |
KR101133029B1 (ko) * | 2009-07-09 | 2012-04-04 | 한국생산기술연구원 | 고순도 탄탈륨 판재 및 그 제조방법 |
JP4913261B2 (ja) | 2009-08-11 | 2012-04-11 | Jx日鉱日石金属株式会社 | タンタルスパッタリングターゲット |
KR20120082943A (ko) | 2009-11-17 | 2012-07-24 | 도시바 마테리알 가부시키가이샤 | 탄탈 스퍼터링 타겟 및 탄탈 스퍼터링 타겟의 제조 방법 및 반도체 소자의 제조 방법 |
US9085819B2 (en) | 2010-08-09 | 2015-07-21 | Jx Nippon Mining & Metals Corporation | Tantalum sputtering target |
KR101374281B1 (ko) * | 2011-09-19 | 2014-04-09 | (주)나인디지트 | 스퍼터링 타겟용 탄탈륨 판재 및 그 제조방법 |
US20140242401A1 (en) | 2011-11-30 | 2014-08-28 | Jx Nippon Mining & Metals Corporation | Tantalum Sputtering Target and Method for Manufacturing Same |
CN102517550B (zh) * | 2011-12-20 | 2014-07-09 | 宁波江丰电子材料有限公司 | 高纯钽靶材的制备方法和高纯钽靶材 |
KR101690394B1 (ko) | 2012-03-21 | 2016-12-27 | 제이엑스금속주식회사 | 탄탈 스퍼터링 타깃의 제조 방법 |
CN102658346A (zh) * | 2012-04-06 | 2012-09-12 | 宁夏东方钽业股份有限公司 | 一种大规格钽靶材的锻造方法 |
KR101927574B1 (ko) | 2012-12-19 | 2018-12-10 | 제이엑스금속주식회사 | 탄탈 스퍼터링 타깃 및 그 제조 방법 |
SG11201501175TA (en) | 2012-12-19 | 2015-05-28 | Jx Nippon Mining & Metals Corp | Tantalum sputtering target and method for producing same |
KR20170092706A (ko) | 2013-03-04 | 2017-08-11 | 제이엑스금속주식회사 | 탄탈 스퍼터링 타깃 및 그 제조 방법 |
CN103243285B (zh) * | 2013-05-27 | 2015-08-26 | 宁夏东方钽业股份有限公司 | 一种钽钨材料及其制备方法 |
KR20160052664A (ko) | 2013-10-01 | 2016-05-12 | 제이엑스 킨조쿠 가부시키가이샤 | 탄탈 스퍼터링 타깃 |
KR102112937B1 (ko) | 2014-03-27 | 2020-05-19 | 제이엑스금속주식회사 | 탄탈 스퍼터링 타깃 및 그 제조 방법 |
CN104313600B (zh) * | 2014-09-28 | 2016-08-24 | 燕山大学 | 受损钛合金锻件连续点式锻压激光成形修复方法 |
CN105722355B (zh) * | 2014-12-05 | 2020-01-21 | 宏达国际电子股份有限公司 | 电子装置壳体及其加工方法 |
CN104741872B (zh) * | 2015-01-16 | 2017-06-16 | 宁夏东方钽业股份有限公司 | 一种钽靶材的制备方法 |
SG11201704463VA (en) | 2015-05-22 | 2017-07-28 | Jx Nippon Mining & Metals Corp | Tantalum sputtering target, and production method therefor |
KR102074047B1 (ko) | 2015-05-22 | 2020-02-05 | 제이엑스금속주식회사 | 탄탈 스퍼터링 타깃 및 그 제조 방법 |
US11177119B2 (en) | 2017-03-30 | 2021-11-16 | Jx Nippon Mining & Metals Corporation | Tantalum sputtering target |
CN109338316B (zh) * | 2018-09-12 | 2020-04-28 | 中南大学 | 一种组织及织构可控的超高纯钽及其制备方法和应用 |
KR102078068B1 (ko) * | 2018-10-26 | 2020-02-17 | 한국생산기술연구원 | 탄탈륨 잉곳 및 와이어 제조 방법 |
CN113025972B (zh) * | 2021-03-01 | 2023-09-08 | 宁波江丰电子材料股份有限公司 | 一种铝靶材的制造方法 |
CN113755801B (zh) * | 2021-09-17 | 2023-03-28 | 福州大学 | 一种具有均匀取向的高纯铝靶材的制备方法 |
CN114164406B (zh) * | 2021-11-30 | 2023-10-20 | 西北核技术研究所 | 用于脉冲功率装置的颗粒压结式二极管阳极靶及制备方法 |
CN114892136A (zh) * | 2022-05-25 | 2022-08-12 | 同创(丽水)特种材料有限公司 | 一种钽靶材及其制备方法与应用 |
CN115044876A (zh) * | 2022-06-02 | 2022-09-13 | 有研亿金新材料有限公司 | 一种小尺寸高性能钽靶坯的制备方法 |
CN115572844B (zh) * | 2022-10-27 | 2024-01-19 | 先导薄膜材料(安徽)有限公司 | 从钽残靶中回收钽的方法 |
Family Cites Families (21)
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DE3825634C2 (de) * | 1988-07-28 | 1994-06-30 | Thyssen Stahl Ag | Verfahren zur Erzeugung von Warmbad oder Grobblechen |
JPH06264232A (ja) * | 1993-03-12 | 1994-09-20 | Nikko Kinzoku Kk | Ta製スパッタリングタ−ゲットとその製造方法 |
JP2713198B2 (ja) * | 1995-01-06 | 1998-02-16 | 三菱化学株式会社 | フィルター |
JPH09104972A (ja) | 1995-10-05 | 1997-04-22 | Hitachi Metals Ltd | スパッタリング用チタンターゲットおよびその製造方法 |
JP2877195B2 (ja) * | 1996-03-19 | 1999-03-31 | 日本電気株式会社 | ディジタル携帯無線端末装置及びそのバックライト駆動方法 |
US6197134B1 (en) | 1997-01-08 | 2001-03-06 | Dowa Mining Co., Ltd. | Processes for producing fcc metals |
JPH1180942A (ja) * | 1997-09-10 | 1999-03-26 | Japan Energy Corp | Taスパッタターゲットとその製造方法及び組立体 |
US6323055B1 (en) | 1998-05-27 | 2001-11-27 | The Alta Group, Inc. | Tantalum sputtering target and method of manufacture |
US6348139B1 (en) | 1998-06-17 | 2002-02-19 | Honeywell International Inc. | Tantalum-comprising articles |
US6193821B1 (en) * | 1998-08-19 | 2001-02-27 | Tosoh Smd, Inc. | Fine grain tantalum sputtering target and fabrication process |
US6348113B1 (en) * | 1998-11-25 | 2002-02-19 | Cabot Corporation | High purity tantalum, products containing the same, and methods of making the same |
US6878250B1 (en) * | 1999-12-16 | 2005-04-12 | Honeywell International Inc. | Sputtering targets formed from cast materials |
US6331233B1 (en) | 2000-02-02 | 2001-12-18 | Honeywell International Inc. | Tantalum sputtering target with fine grains and uniform texture and method of manufacture |
JP2001303240A (ja) * | 2000-04-26 | 2001-10-31 | Toshiba Corp | スパッタリングターゲット |
JP3905301B2 (ja) | 2000-10-31 | 2007-04-18 | 日鉱金属株式会社 | タンタル又はタングステンターゲット−銅合金製バッキングプレート組立体及びその製造方法 |
JP2002363662A (ja) * | 2001-06-01 | 2002-12-18 | Nikko Materials Co Ltd | 高純度タンタルの回収方法並びに高純度タンタルスパッタリングターゲット及び該スパッタリングターゲットにより形成された薄膜 |
JP4817536B2 (ja) | 2001-06-06 | 2011-11-16 | 株式会社東芝 | スパッタターゲット |
US6770154B2 (en) | 2001-09-18 | 2004-08-03 | Praxair S.T. Technology, Inc. | Textured-grain-powder metallurgy tantalum sputter target |
JP4883546B2 (ja) | 2002-09-20 | 2012-02-22 | Jx日鉱日石金属株式会社 | タンタルスパッタリングターゲットの製造方法 |
JP4263900B2 (ja) | 2002-11-13 | 2009-05-13 | 日鉱金属株式会社 | Taスパッタリングターゲット及びその製造方法 |
US7892367B2 (en) | 2003-11-06 | 2011-02-22 | Jx Nippon Mining & Metals Corporation | Tantalum sputtering target |
-
2004
- 2004-02-19 KR KR1020057018434A patent/KR100698745B1/ko active IP Right Grant
- 2004-02-19 EP EP10175315.0A patent/EP2253731B1/de not_active Expired - Lifetime
- 2004-02-19 EP EP04712763A patent/EP1609881B1/de not_active Expired - Lifetime
- 2004-02-19 US US10/551,732 patent/US8172960B2/en active Active
- 2004-02-19 JP JP2005505174A patent/JP4256388B2/ja not_active Expired - Lifetime
- 2004-02-19 CN CNA2004800092582A patent/CN1771350A/zh active Pending
- 2004-02-19 WO PCT/JP2004/001915 patent/WO2004090193A1/ja active Application Filing
- 2004-02-19 CN CN201410106657.6A patent/CN103966561A/zh active Pending
- 2004-02-19 DE DE602004032323T patent/DE602004032323D1/de not_active Expired - Lifetime
- 2004-02-23 TW TW093104408A patent/TWI281507B/zh not_active IP Right Cessation
-
2008
- 2008-12-05 JP JP2008311509A patent/JP4754617B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP4754617B2 (ja) | 2011-08-24 |
EP1609881B1 (de) | 2011-04-20 |
US20070102288A1 (en) | 2007-05-10 |
KR20060012577A (ko) | 2006-02-08 |
CN103966561A (zh) | 2014-08-06 |
EP2253731B1 (de) | 2019-07-31 |
EP1609881A4 (de) | 2008-08-13 |
CN1771350A (zh) | 2006-05-10 |
JP2009114540A (ja) | 2009-05-28 |
TW200422414A (en) | 2004-11-01 |
JP4256388B2 (ja) | 2009-04-22 |
JPWO2004090193A1 (ja) | 2006-07-06 |
US8172960B2 (en) | 2012-05-08 |
EP2253731A1 (de) | 2010-11-24 |
WO2004090193A1 (ja) | 2004-10-21 |
EP1609881A1 (de) | 2005-12-28 |
KR100698745B1 (ko) | 2007-03-23 |
TWI281507B (en) | 2007-05-21 |
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