DE602004015005D1 - Kontaktmessvorrichtung - Google Patents

Kontaktmessvorrichtung

Info

Publication number
DE602004015005D1
DE602004015005D1 DE602004015005T DE602004015005T DE602004015005D1 DE 602004015005 D1 DE602004015005 D1 DE 602004015005D1 DE 602004015005 T DE602004015005 T DE 602004015005T DE 602004015005 T DE602004015005 T DE 602004015005T DE 602004015005 D1 DE602004015005 D1 DE 602004015005D1
Authority
DE
Germany
Prior art keywords
measuring device
contact measuring
contact
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004015005T
Other languages
English (en)
Inventor
Nobuyuki Hama
Ichirou Okamoto
Hideo Tanada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602004015005D1 publication Critical patent/DE602004015005D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
DE602004015005T 2003-02-27 2004-02-26 Kontaktmessvorrichtung Expired - Lifetime DE602004015005D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003051141A JP3967274B2 (ja) 2003-02-27 2003-02-27 測定装置

Publications (1)

Publication Number Publication Date
DE602004015005D1 true DE602004015005D1 (de) 2008-08-28

Family

ID=32767797

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004015005T Expired - Lifetime DE602004015005D1 (de) 2003-02-27 2004-02-26 Kontaktmessvorrichtung

Country Status (5)

Country Link
US (1) US6874243B2 (de)
EP (1) EP1452826B1 (de)
JP (1) JP3967274B2 (de)
CN (1) CN100410618C (de)
DE (1) DE602004015005D1 (de)

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WO2003073038A1 (de) * 2002-02-28 2003-09-04 Carl Zeiss Industrielle Messtechnik Gmbh Tastkopf für koordinaten-messgeräte
JP3834817B2 (ja) * 2003-05-30 2006-10-18 株式会社東京精密 測定ヘッド
JP4436665B2 (ja) * 2003-12-24 2010-03-24 パナソニック株式会社 測定用プローブ及び形状測定方法
US7140119B2 (en) * 2004-04-23 2006-11-28 Corning Incorporated Measurement of form of spherical and near-spherical optical surfaces
US7185440B2 (en) * 2005-07-18 2007-03-06 Seagate Technology Llc Sensing contact probe
CN101270977B (zh) * 2008-04-29 2011-11-16 孙宁 用于测量三维物体轮廓和/或转动惯量的设备和方法
JP5301412B2 (ja) * 2009-10-21 2013-09-25 株式会社ミツトヨ 測定力制御装置
JP5838165B2 (ja) * 2010-11-18 2015-12-24 国際計測器株式会社 材料試験機
JP5639934B2 (ja) * 2011-03-09 2014-12-10 株式会社ミツトヨ 表面性状測定機
FR2972526B1 (fr) * 2011-03-10 2016-05-20 Commissariat Energie Atomique Dispositif de mesure de l'etat de surface d'une surface
CN102183217B (zh) * 2011-03-17 2012-09-05 西安交通大学 一种圆弧式轮廓仪测头及其测量方法
US8701301B2 (en) * 2011-04-19 2014-04-22 Mitutoyo Corporation Surface texture measuring instrument
JP2012237703A (ja) * 2011-05-13 2012-12-06 Sony Corp 計測装置、計測方法、プログラム、および、記録媒体
JP5782863B2 (ja) * 2011-06-24 2015-09-24 株式会社アルバック 表面形状測定用触針式段差計の性能改善方法及び該方法を実施した表面形状測定用触針式段差計
EP2729763A1 (de) * 2011-07-08 2014-05-14 Carl Zeiss Industrielle Messtechnik GmbH Korrektur und/oder vermeidung von fehlern bei der messung von koordinaten eines werkstücks
CN103028617B (zh) * 2011-09-30 2014-11-05 鞍钢股份有限公司 一种热轧带钢浪形缺陷在线检测方法及其测量装置
JP5823266B2 (ja) * 2011-11-29 2015-11-25 株式会社ミツトヨ 表面性状測定機
CN102677618B (zh) * 2012-05-17 2014-08-13 南通弗士特环保机械有限责任公司 小型电动清扫车滚刷的位置检测装置
JP6047045B2 (ja) * 2013-03-25 2016-12-21 株式会社ミツトヨ 輪郭測定機
JP5745664B1 (ja) * 2014-03-14 2015-07-08 株式会社東京精密 双方向変位検出器
JP6282517B2 (ja) * 2014-04-09 2018-02-21 株式会社ミツトヨ 形状測定機
CN104197876B (zh) * 2014-08-26 2017-12-15 北京海普瑞森科技发展有限公司 一种接触式气浮测头
JP6518421B2 (ja) * 2014-09-24 2019-05-22 株式会社ミツトヨ 真円度測定機およびその制御方法
EP3317608A4 (de) * 2014-10-06 2019-03-06 US Synthetic Corporation Sonden, taster, systeme damit und verfahren zur herstellung
JP5846462B1 (ja) * 2014-10-28 2016-01-20 株式会社東京精密 形状測定装置
JP6679215B2 (ja) * 2015-03-31 2020-04-15 株式会社東京精密 形状測定機、及びその制御方法
CN108426514A (zh) * 2016-02-02 2018-08-21 福建省马尾造船股份有限公司 一种性能可靠的确定舵系转舵角度的设备
JP6769764B2 (ja) * 2016-07-19 2020-10-14 株式会社ミツトヨ 測定プローブ及び測定装置
JP6368986B1 (ja) * 2017-03-27 2018-08-08 株式会社東京精密 検出器、表面性状測定機、及び真円度測定機
US11175121B2 (en) * 2017-12-28 2021-11-16 GUILIN JINGZHUN Meas. and Control Tech. Co., Ltd. Lever indicator
US11806867B2 (en) * 2018-02-09 2023-11-07 Konica Minolta, Inc. Profiling apparatus
KR101888466B1 (ko) * 2018-02-12 2018-08-16 황재은 형상측정기
JP7121895B2 (ja) * 2018-03-29 2022-08-19 株式会社東京精密 形状測定機
GB201806828D0 (en) * 2018-04-26 2018-06-13 Renishaw Plc Surface finish stylus
GB201806830D0 (en) * 2018-04-26 2018-06-13 Renishaw Plc Surface finish stylus
JP7073211B2 (ja) * 2018-06-30 2022-05-23 株式会社ミツトヨ 表面性状測定装置の制御方法
CN109141334A (zh) * 2018-08-31 2019-01-04 北京万高众业科技股份有限公司 一种弧度检测装置
CN109141328B (zh) * 2018-09-04 2024-09-13 南京泰普森自动化设备有限公司 测量触头、测量组件和测量装置
JP7261560B2 (ja) * 2018-10-31 2023-04-20 株式会社ミツトヨ 表面性状測定方法および表面性状測定装置
DE102020108182A1 (de) * 2019-05-07 2020-11-12 Jenoptik Industrial Metrology Germany Gmbh Oberflächenmessgerät
JP7448323B2 (ja) * 2019-09-06 2024-03-12 株式会社ミツトヨ 粗さ測定機
CN115461593B (zh) * 2020-04-30 2023-08-29 株式会社东京精密 测量装置

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US2733598A (en) * 1956-02-07 miner
GB1057078A (en) * 1964-09-10 1967-02-01 Sigma Instr Co Ltd Improvements in or relating to transducers for use in instruments for measuring surface roughness
JPS5822084Y2 (ja) * 1978-02-22 1983-05-11 株式会社三豊製作所 形状測定器
JPH05340706A (ja) 1992-06-08 1993-12-21 Tokyo Seimitsu Co Ltd 変位検出器
JP2556550Y2 (ja) 1993-06-10 1997-12-03 株式会社東京精密 表面形状測定機
WO1995025940A2 (en) * 1994-03-18 1995-09-28 Rank Taylor Hobson Limited Metrological stylus assembly
US5705741A (en) * 1994-12-22 1998-01-06 Tencor Instruments Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation
JP3130289B2 (ja) * 1998-08-04 2001-01-31 株式会社ミツトヨ タッチ信号プローブ
JP3273026B2 (ja) * 1998-09-02 2002-04-08 株式会社ミツトヨ 表面追従型測定機
JP3992853B2 (ja) 1998-09-30 2007-10-17 株式会社ミツトヨ 表面追従型測定機
JP2000199710A (ja) * 1999-01-06 2000-07-18 Mitsutoyo Corp タッチ信号プロ―ブの接触部位検出構造
DE10035714B4 (de) * 1999-07-23 2011-06-09 Mitutoyo Corp. Oberflächengestalt-Messverfahren
DE10006753A1 (de) * 2000-02-15 2001-08-16 Zeiss Carl Dreh-Schwenkeinrichtung für den Tastkopf eines Koordinatenmeßgerätes
JP2001264050A (ja) * 2000-03-14 2001-09-26 Mitsutoyo Corp 微細形状測定装置
US6290217B1 (en) * 2000-03-29 2001-09-18 Enidine Incorporated Asymmetric wire rope isolator
JP2004223647A (ja) * 2003-01-22 2004-08-12 Nsk Ltd 位置決め装置

Also Published As

Publication number Publication date
US20040168332A1 (en) 2004-09-02
JP3967274B2 (ja) 2007-08-29
EP1452826B1 (de) 2008-07-16
EP1452826A2 (de) 2004-09-01
EP1452826A3 (de) 2006-06-07
JP2004257958A (ja) 2004-09-16
US6874243B2 (en) 2005-04-05
CN100410618C (zh) 2008-08-13
CN1525137A (zh) 2004-09-01

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Legal Events

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