DE602004011490D1 - Testvorrichtung - Google Patents

Testvorrichtung

Info

Publication number
DE602004011490D1
DE602004011490D1 DE602004011490T DE602004011490T DE602004011490D1 DE 602004011490 D1 DE602004011490 D1 DE 602004011490D1 DE 602004011490 T DE602004011490 T DE 602004011490T DE 602004011490 T DE602004011490 T DE 602004011490T DE 602004011490 D1 DE602004011490 D1 DE 602004011490D1
Authority
DE
Germany
Prior art keywords
test device
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004011490T
Other languages
English (en)
Other versions
DE602004011490T2 (de
Inventor
Atsunori Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of DE602004011490D1 publication Critical patent/DE602004011490D1/de
Application granted granted Critical
Publication of DE602004011490T2 publication Critical patent/DE602004011490T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31903Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31907Modular tester, e.g. controlling and coordinating instruments in a bus based architecture
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the other groups of this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
DE602004011490T 2003-03-27 2004-03-18 Testvorrichtung Expired - Lifetime DE602004011490T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003087049 2003-03-27
JP2003087049 2003-03-27
PCT/JP2004/003651 WO2004086071A1 (ja) 2003-03-27 2004-03-18 試験装置

Publications (2)

Publication Number Publication Date
DE602004011490D1 true DE602004011490D1 (de) 2008-03-13
DE602004011490T2 DE602004011490T2 (de) 2009-01-15

Family

ID=33095088

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004011490T Expired - Lifetime DE602004011490T2 (de) 2003-03-27 2004-03-18 Testvorrichtung

Country Status (9)

Country Link
US (1) US7185255B2 (de)
EP (1) EP1607758B1 (de)
JP (1) JP4110169B2 (de)
KR (1) KR100717480B1 (de)
CN (1) CN100442073C (de)
DE (1) DE602004011490T2 (de)
MY (1) MY135253A (de)
TW (1) TWI261117B (de)
WO (1) WO2004086071A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4110169B2 (ja) 2003-03-27 2008-07-02 株式会社アドバンテスト 試験装置
DE10324080B4 (de) * 2003-05-27 2006-03-23 Infineon Technologies Ag Verfahren zum Testen von zu testenden Schaltungseinheiten in einer Testvorrichtung
JP2006275986A (ja) * 2005-03-30 2006-10-12 Advantest Corp 診断プログラム、切替プログラム、試験装置、および診断方法
JP5021924B2 (ja) * 2005-09-27 2012-09-12 株式会社アドバンテスト パフォーマンスボード、試験装置及び試験方法
US7610538B2 (en) 2007-04-13 2009-10-27 Advantest Corporation Test apparatus and performance board for diagnosis
JP5153670B2 (ja) * 2009-01-30 2013-02-27 株式会社アドバンテスト 診断装置、診断方法および試験装置
KR101281823B1 (ko) * 2012-11-30 2013-07-04 주식회사 아이티엔티 고정형 파워 보드와 교체형 코어 보드를 포함하는 자동 테스트 장치
FR3005745B1 (fr) * 2013-05-16 2016-10-14 Thales Sa Banc de test d'equipements electroniques

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4795977A (en) * 1987-03-19 1989-01-03 Pacific Western Systems, Inc. Interface system for interfacing a device tester to a device under test
JPH06265594A (ja) * 1993-03-15 1994-09-22 Advantest Corp Ic試験装置
GB2282244B (en) * 1993-09-23 1998-01-14 Advanced Risc Mach Ltd Integrated circuit
JP3628789B2 (ja) * 1995-12-28 2005-03-16 株式会社アドバンテスト 半導体テストシステムの自動校正装置
US5705743A (en) * 1996-11-13 1998-01-06 Ford Global Technologies, Inc. Method for identifying parameter identifiers of a motor vehicle
US5938776A (en) * 1997-06-27 1999-08-17 Digital Equipment Corporation Detection of SCSI devices at illegal locations
US6029261A (en) * 1997-10-14 2000-02-22 International Business Machines Corporation Test circuit and system for interconnect testing of high-level packages
JPH11304880A (ja) * 1998-04-20 1999-11-05 Advantest Corp 半導体試験装置
US5999468A (en) * 1998-11-17 1999-12-07 Tanisys Technology, Inc. Method and system for identifying a memory module configuration
US6331770B1 (en) * 2000-04-12 2001-12-18 Advantest Corp. Application specific event based semiconductor test system
WO2003034202A2 (en) * 2001-10-17 2003-04-24 Koninklijke Philips Electronics N.V. On the fly configuration of electronic device with attachable sub-modules
JP4110169B2 (ja) 2003-03-27 2008-07-02 株式会社アドバンテスト 試験装置

Also Published As

Publication number Publication date
JPWO2004086071A1 (ja) 2006-06-29
EP1607758B1 (de) 2008-01-23
JP4110169B2 (ja) 2008-07-02
WO2004086071A1 (ja) 2004-10-07
TW200428006A (en) 2004-12-16
EP1607758A1 (de) 2005-12-21
TWI261117B (en) 2006-09-01
MY135253A (en) 2008-03-31
KR100717480B1 (ko) 2007-05-14
DE602004011490T2 (de) 2009-01-15
CN100442073C (zh) 2008-12-10
US20040221214A1 (en) 2004-11-04
KR20050109600A (ko) 2005-11-21
CN1764846A (zh) 2006-04-26
EP1607758A4 (de) 2006-04-19
US7185255B2 (en) 2007-02-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition