DE3889477D1 - Strahlungsempfindliche Halbleiteranordnung. - Google Patents
Strahlungsempfindliche Halbleiteranordnung.Info
- Publication number
- DE3889477D1 DE3889477D1 DE3889477T DE3889477T DE3889477D1 DE 3889477 D1 DE3889477 D1 DE 3889477D1 DE 3889477 T DE3889477 T DE 3889477T DE 3889477 T DE3889477 T DE 3889477T DE 3889477 D1 DE3889477 D1 DE 3889477D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor device
- radiation sensitive
- sensitive semiconductor
- radiation
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005855 radiation Effects 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1443—Devices controlled by radiation with at least one potential jump or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/035281—Shape of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8700370A NL8700370A (nl) | 1987-02-16 | 1987-02-16 | Stralingsgevoelige halfgeleiderinrichting. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3889477D1 true DE3889477D1 (de) | 1994-06-16 |
DE3889477T2 DE3889477T2 (de) | 1994-11-03 |
Family
ID=19849577
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3889477T Expired - Fee Related DE3889477T2 (de) | 1987-02-16 | 1988-02-12 | Strahlungsempfindliche Halbleiteranordnung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4857980A (de) |
EP (1) | EP0279492B1 (de) |
JP (1) | JP2661937B2 (de) |
CA (1) | CA1291554C (de) |
DE (1) | DE3889477T2 (de) |
NL (1) | NL8700370A (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE59008698D1 (de) * | 1989-09-07 | 1995-04-20 | Siemens Ag | Optokoppler. |
FR2666690B1 (fr) * | 1990-09-07 | 1997-01-31 | Thomson Composants Militaires | Detecteur infrarouge a substrat aminci et procede de fabrication. |
JPH0645340A (ja) * | 1991-11-12 | 1994-02-18 | Rohm Co Ltd | 半導体装置及びその製造方法 |
CA2088612C (en) * | 1992-02-03 | 2003-04-15 | Yoshiki Kuhara | Semiconductor light detecting device |
US5923071A (en) * | 1992-06-12 | 1999-07-13 | Seiko Instruments Inc. | Semiconductor device having a semiconductor film of low oxygen concentration |
US5365087A (en) * | 1992-07-15 | 1994-11-15 | Sumitomo Electric Industries, Ltd. | Photodetector and opto-electronic integrated circuit with guard ring |
JPH06196727A (ja) * | 1992-12-08 | 1994-07-15 | Terumo Corp | 光電変換装置 |
JPH08152356A (ja) * | 1994-11-30 | 1996-06-11 | Terumo Corp | 赤外線センサ |
US5852322A (en) * | 1995-05-19 | 1998-12-22 | Dr. Johannes Heidenhain Gmbh | Radiation-sensitive detector element and method for producing it |
FR2742878B1 (fr) * | 1995-12-20 | 1998-01-16 | Commissariat Energie Atomique | Detecteur de rayonnements ionisants ultra-mince et procedes de realisation d'un tel detecteur |
US6259099B1 (en) | 1996-12-18 | 2001-07-10 | Commissariat A L'energie Atomique | Ultra-thin ionizing radiation detector and methods for making same |
JP4131998B2 (ja) * | 1998-04-30 | 2008-08-13 | 佐々木 実 | 透明な半導体受光素子およびその製造方法 |
WO2001082382A1 (en) * | 2000-04-20 | 2001-11-01 | Digirad Corporation | Fabrication of low leakage-current backside illuminated photodiodes |
US6593636B1 (en) * | 2000-12-05 | 2003-07-15 | Udt Sensors, Inc. | High speed silicon photodiodes and method of manufacture |
EP1835539B1 (de) * | 2002-08-09 | 2012-10-31 | Hamamatsu Photonics K.K. | Photodiodenarray sowie Herstellungsverfahren dafür |
KR101029178B1 (ko) * | 2003-03-10 | 2011-04-12 | 하마마츠 포토닉스 가부시키가이샤 | 포토다이오드 어레이 및 그 제조방법 그리고 방사선 검출기 |
US8686529B2 (en) | 2010-01-19 | 2014-04-01 | Osi Optoelectronics, Inc. | Wavelength sensitive sensor photodiodes |
US8120023B2 (en) | 2006-06-05 | 2012-02-21 | Udt Sensors, Inc. | Low crosstalk, front-side illuminated, back-side contact photodiode array |
JP2005045073A (ja) * | 2003-07-23 | 2005-02-17 | Hamamatsu Photonics Kk | 裏面入射型光検出素子 |
JP4499385B2 (ja) | 2003-07-29 | 2010-07-07 | 浜松ホトニクス株式会社 | 裏面入射型光検出素子及び裏面入射型光検出素子の製造方法 |
GB0411926D0 (en) | 2004-05-27 | 2004-06-30 | Isis Innovation | Direct electron detector |
JP4765285B2 (ja) * | 2004-09-13 | 2011-09-07 | ソニー株式会社 | 固体撮像素子及びその製造方法 |
US9178092B2 (en) | 2006-11-01 | 2015-11-03 | Osi Optoelectronics, Inc. | Front-side illuminated, back-side contact double-sided PN-junction photodiode arrays |
BRPI0919221A2 (pt) | 2008-09-15 | 2015-12-08 | Osi Optoelectronics Inc | fotodiodo de espinha de peixe de camada ativa fina com uma camada n+ rasa e método de fabricação do mesmo |
US8399909B2 (en) | 2009-05-12 | 2013-03-19 | Osi Optoelectronics, Inc. | Tetra-lateral position sensing detector |
DE102011102007B4 (de) | 2011-05-19 | 2012-12-27 | Austriamicrosystems Ag | Fotodiode und Herstellungsverfahren |
US8912615B2 (en) | 2013-01-24 | 2014-12-16 | Osi Optoelectronics, Inc. | Shallow junction photodiode for detecting short wavelength light |
JP6529743B2 (ja) * | 2014-11-06 | 2019-06-12 | 株式会社豊田中央研究所 | 光電変換素子 |
US11309412B1 (en) * | 2017-05-17 | 2022-04-19 | Northrop Grumman Systems Corporation | Shifting the pinch-off voltage of an InP high electron mobility transistor with a metal ring |
CN114242802A (zh) * | 2021-12-17 | 2022-03-25 | 江苏尚飞光电科技股份有限公司 | 一种背照式光电探测器及其阵列 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL218102A (de) * | 1956-08-24 | |||
US3296502A (en) * | 1962-11-28 | 1967-01-03 | Gen Instrument Corp | Variable photosensitive semiconductor device having a graduatingly different operable surface area |
US3716429A (en) * | 1970-06-18 | 1973-02-13 | Rca Corp | Method of making semiconductor devices |
JPS5641186B2 (de) * | 1972-03-03 | 1981-09-26 | ||
DE2251325A1 (de) * | 1972-10-19 | 1974-05-02 | Siemens Ag | Messwertumformer fuer teilchen- oder photonenstrahlen mit geringem sperr- und diffusionsstrom |
FR2284989A1 (fr) * | 1974-09-13 | 1976-04-09 | Comp Generale Electricite | Photodetecteur rapide a faible tension d'alimentation |
JPS6032812B2 (ja) * | 1978-02-10 | 1985-07-30 | 日本電気株式会社 | 光検出器 |
NL8003906A (nl) * | 1980-07-07 | 1982-02-01 | Philips Nv | Stralingsgevoelige halfgeleiderinrichting. |
JPS60144982A (ja) * | 1984-01-06 | 1985-07-31 | Nec Corp | ホトダイオ−ド |
JPS60193385A (ja) * | 1984-03-15 | 1985-10-01 | Sanyo Electric Co Ltd | 光起電力素子 |
JPS61229371A (ja) * | 1985-04-04 | 1986-10-13 | Kokusai Denshin Denwa Co Ltd <Kdd> | フオトダイオ−ド |
-
1987
- 1987-02-16 NL NL8700370A patent/NL8700370A/nl not_active Application Discontinuation
-
1988
- 1988-01-26 US US07/148,512 patent/US4857980A/en not_active Expired - Lifetime
- 1988-02-09 CA CA000558473A patent/CA1291554C/en not_active Expired - Lifetime
- 1988-02-12 DE DE3889477T patent/DE3889477T2/de not_active Expired - Fee Related
- 1988-02-12 EP EP88200260A patent/EP0279492B1/de not_active Expired - Lifetime
- 1988-02-15 JP JP63031025A patent/JP2661937B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63204666A (ja) | 1988-08-24 |
JP2661937B2 (ja) | 1997-10-08 |
EP0279492A1 (de) | 1988-08-24 |
CA1291554C (en) | 1991-10-29 |
EP0279492B1 (de) | 1994-05-11 |
NL8700370A (nl) | 1988-09-16 |
US4857980A (en) | 1989-08-15 |
DE3889477T2 (de) | 1994-11-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N |
|
8339 | Ceased/non-payment of the annual fee |