FR2666690B1 - Detecteur infrarouge a substrat aminci et procede de fabrication. - Google Patents

Detecteur infrarouge a substrat aminci et procede de fabrication.

Info

Publication number
FR2666690B1
FR2666690B1 FR9011123A FR9011123A FR2666690B1 FR 2666690 B1 FR2666690 B1 FR 2666690B1 FR 9011123 A FR9011123 A FR 9011123A FR 9011123 A FR9011123 A FR 9011123A FR 2666690 B1 FR2666690 B1 FR 2666690B1
Authority
FR
France
Prior art keywords
manufacturing
infrared detector
thinned substrate
thinned
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9011123A
Other languages
English (en)
Other versions
FR2666690A1 (fr
Inventor
Pierre Dautriche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thomson Composants Militaires et Spatiaux
Original Assignee
Thomson Composants Militaires et Spatiaux
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson Composants Militaires et Spatiaux filed Critical Thomson Composants Militaires et Spatiaux
Priority to FR9011123A priority Critical patent/FR2666690B1/fr
Priority to JP3514953A priority patent/JPH05502555A/ja
Priority to PCT/FR1991/000713 priority patent/WO1992004737A1/fr
Priority to EP91916070A priority patent/EP0500878A1/fr
Publication of FR2666690A1 publication Critical patent/FR2666690A1/fr
Application granted granted Critical
Publication of FR2666690B1 publication Critical patent/FR2666690B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/108—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the Schottky type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H01L27/14649—Infrared imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
    • H01L31/035281—Shape of the body

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
FR9011123A 1990-09-07 1990-09-07 Detecteur infrarouge a substrat aminci et procede de fabrication. Expired - Fee Related FR2666690B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9011123A FR2666690B1 (fr) 1990-09-07 1990-09-07 Detecteur infrarouge a substrat aminci et procede de fabrication.
JP3514953A JPH05502555A (ja) 1990-09-07 1991-09-06 薄い基板を有する赤外線検出器及びその製造方法
PCT/FR1991/000713 WO1992004737A1 (fr) 1990-09-07 1991-09-06 Detecteur infrarouge a substrat aminci et procede de fabrication
EP91916070A EP0500878A1 (fr) 1990-09-07 1991-09-06 Detecteur infrarouge a substrat aminci et procede de fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9011123A FR2666690B1 (fr) 1990-09-07 1990-09-07 Detecteur infrarouge a substrat aminci et procede de fabrication.

Publications (2)

Publication Number Publication Date
FR2666690A1 FR2666690A1 (fr) 1992-03-13
FR2666690B1 true FR2666690B1 (fr) 1997-01-31

Family

ID=9400163

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9011123A Expired - Fee Related FR2666690B1 (fr) 1990-09-07 1990-09-07 Detecteur infrarouge a substrat aminci et procede de fabrication.

Country Status (4)

Country Link
EP (1) EP0500878A1 (fr)
JP (1) JPH05502555A (fr)
FR (1) FR2666690B1 (fr)
WO (1) WO1992004737A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4060822A (en) * 1973-06-27 1977-11-29 Siemens Aktiengesellschaft Strip type radiation detector and method of making same
NL8700370A (nl) * 1987-02-16 1988-09-16 Philips Nv Stralingsgevoelige halfgeleiderinrichting.
US4782028A (en) * 1987-08-27 1988-11-01 Santa Barbara Research Center Process methodology for two-sided fabrication of devices on thinned silicon

Also Published As

Publication number Publication date
EP0500878A1 (fr) 1992-09-02
WO1992004737A1 (fr) 1992-03-19
JPH05502555A (ja) 1993-04-28
FR2666690A1 (fr) 1992-03-13

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Legal Events

Date Code Title Description
ST Notification of lapse