DE3851147T2 - Heteroübergang-bipolartransistor. - Google Patents

Heteroübergang-bipolartransistor.

Info

Publication number
DE3851147T2
DE3851147T2 DE3851147T DE3851147T DE3851147T2 DE 3851147 T2 DE3851147 T2 DE 3851147T2 DE 3851147 T DE3851147 T DE 3851147T DE 3851147 T DE3851147 T DE 3851147T DE 3851147 T2 DE3851147 T2 DE 3851147T2
Authority
DE
Germany
Prior art keywords
silicon
pct
bipolar transistor
germanium
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3851147T
Other languages
English (en)
Other versions
DE3851147D1 (de
Inventor
Colin Smith
Anthony Welbourn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Telecommunications PLC
Original Assignee
British Telecommunications PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Telecommunications PLC filed Critical British Telecommunications PLC
Application granted granted Critical
Publication of DE3851147D1 publication Critical patent/DE3851147D1/de
Publication of DE3851147T2 publication Critical patent/DE3851147T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73—Bipolar junction transistors
    • H01L29/737—Hetero-junction transistors
    • H01L29/7371—Vertical transistors
    • H01L29/7378—Vertical transistors comprising lattice mismatched active layers, e.g. SiGe strained layer transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
    • H01L29/161—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys
    • H01L29/165—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys in different semiconductor regions, e.g. heterojunctions
DE3851147T 1987-04-14 1988-04-14 Heteroübergang-bipolartransistor. Expired - Lifetime DE3851147T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB878708926A GB8708926D0 (en) 1987-04-14 1987-04-14 Bipolar transistor
PCT/GB1988/000289 WO1988008206A1 (en) 1987-04-14 1988-04-14 Heterojunction bipolar transistor

Publications (2)

Publication Number Publication Date
DE3851147D1 DE3851147D1 (de) 1994-09-22
DE3851147T2 true DE3851147T2 (de) 1995-02-23

Family

ID=10615807

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3851147T Expired - Lifetime DE3851147T2 (de) 1987-04-14 1988-04-14 Heteroübergang-bipolartransistor.

Country Status (8)

Country Link
US (1) US5006912A (de)
EP (1) EP0360804B1 (de)
JP (1) JP2644022B2 (de)
AT (1) ATE110190T1 (de)
DE (1) DE3851147T2 (de)
GB (1) GB8708926D0 (de)
HK (1) HK137296A (de)
WO (1) WO1988008206A1 (de)

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US5198689A (en) * 1988-11-30 1993-03-30 Fujitsu Limited Heterojunction bipolar transistor
JPH02150033A (ja) * 1988-11-30 1990-06-08 Fujitsu Ltd 半導体装置およびその製造方法
US5159424A (en) * 1988-12-10 1992-10-27 Canon Kabushiki Kaisha Semiconductor device having a high current gain and a higher ge amount at the base region than at the emitter and collector region, and photoelectric conversion apparatus using the device
US5241197A (en) * 1989-01-25 1993-08-31 Hitachi, Ltd. Transistor provided with strained germanium layer
EP0380077A3 (de) * 1989-01-25 1990-09-12 Hitachi, Ltd. Transistor, versehen mit einer gedehnten Schicht aus Germanium
DE3930536A1 (de) * 1989-09-13 1991-03-21 Licentia Gmbh Verfahren zur herstellung eines silizium-bipolartransistors
US5102810A (en) * 1990-03-13 1992-04-07 General Instrument Corp. Method for controlling the switching speed of bipolar power devices
DE59010471D1 (de) * 1990-06-07 1996-10-02 Siemens Ag Verfahren zur Herstellung von Bipolartransistoren mit extrem reduzierter Basis-Kollektor-Kapazität
US5105250A (en) * 1990-10-09 1992-04-14 Motorola, Inc. Heterojunction bipolar transistor with a thin silicon emitter
EP0483487B1 (de) * 1990-10-31 1995-03-01 International Business Machines Corporation Transistor mit selbstjustierender epitaxialer Basis und dessen Herstellungsverfahren
US5218213A (en) * 1991-02-22 1993-06-08 Harris Corporation SOI wafer with sige
US5240876A (en) * 1991-02-22 1993-08-31 Harris Corporation Method of fabricating SOI wafer with SiGe as an etchback film in a BESOI process
JP2855908B2 (ja) * 1991-09-05 1999-02-10 日本電気株式会社 半導体装置及びその製造方法
JP3132101B2 (ja) * 1991-11-20 2001-02-05 日本電気株式会社 半導体装置の製造方法
US5266813A (en) * 1992-01-24 1993-11-30 International Business Machines Corporation Isolation technique for silicon germanium devices
JP2971246B2 (ja) * 1992-04-15 1999-11-02 株式会社東芝 ヘテロバイポーラトランジスタの製造方法
JP2582519B2 (ja) * 1992-07-13 1997-02-19 インターナショナル・ビジネス・マシーンズ・コーポレイション バイポーラ・トランジスタおよびその製造方法
US5304816A (en) * 1992-11-25 1994-04-19 At&T Bell Laboratories Article comprising a "ballistic" heterojunction bipolar transistor
US5523243A (en) * 1992-12-21 1996-06-04 International Business Machines Corporation Method of fabricating a triple heterojunction bipolar transistor
US5389803A (en) * 1993-03-29 1995-02-14 International Business Machines Corporation High-gain Si/SiGe MIS heterojunction bipolar transistors
US5685946A (en) * 1993-08-11 1997-11-11 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method of producing buried porous silicon-geramanium layers in monocrystalline silicon lattices
US5422502A (en) * 1993-12-09 1995-06-06 Northern Telecom Limited Lateral bipolar transistor
US5534713A (en) * 1994-05-20 1996-07-09 International Business Machines Corporation Complementary metal-oxide semiconductor transistor logic using strained SI/SIGE heterostructure layers
US5583059A (en) * 1994-06-01 1996-12-10 International Business Machines Corporation Fabrication of vertical SiGe base HBT with lateral collector contact on thin SOI
US5461245A (en) * 1994-08-24 1995-10-24 At&T Corp. Article comprising a bipolar transistor with floating base
DE19824110A1 (de) * 1998-05-29 1999-12-09 Daimler Chrysler Ag Resonanz Phasen Transistor mit Laufzeitverzögerung
US6211562B1 (en) 1999-02-24 2001-04-03 Micron Technology, Inc. Homojunction semiconductor devices with low barrier tunnel oxide contacts
SE516338C2 (sv) * 1999-05-31 2001-12-17 Ericsson Telefon Ab L M RF-effekttransistor med kollektor upp
DE19940278A1 (de) * 1999-08-26 2001-03-08 Inst Halbleiterphysik Gmbh Schichtstruktur für bipolare Transistoren und Verfahren zu deren Herstellung
US6573539B2 (en) * 2000-01-10 2003-06-03 International Business Machines Corporation Heterojunction bipolar transistor with silicon-germanium base
US6437376B1 (en) * 2000-03-01 2002-08-20 Applied Micro Circuits Corporation Heterojunction bipolar transistor (HBT) with three-dimensional base contact
US6365479B1 (en) * 2000-09-22 2002-04-02 Conexant Systems, Inc. Method for independent control of polycrystalline silicon-germanium in a silicon-germanium HBT and related structure
US6552406B1 (en) * 2000-10-03 2003-04-22 International Business Machines Corporation SiGe transistor, varactor and p-i-n velocity saturated ballasting element for BiCMOS peripheral circuits and ESD networks
US6767842B2 (en) * 2002-07-09 2004-07-27 Lsi Logic Corporation Implementation of Si-Ge HBT with CMOS process
US7439558B2 (en) * 2005-11-04 2008-10-21 Atmel Corporation Method and system for controlled oxygen incorporation in compound semiconductor films for device performance enhancement
US7651919B2 (en) * 2005-11-04 2010-01-26 Atmel Corporation Bandgap and recombination engineered emitter layers for SiGe HBT performance optimization
US7300849B2 (en) * 2005-11-04 2007-11-27 Atmel Corporation Bandgap engineered mono-crystalline silicon cap layers for SiGe HBT performance enhancement
US20070102729A1 (en) * 2005-11-04 2007-05-10 Enicks Darwin G Method and system for providing a heterojunction bipolar transistor having SiGe extensions
US7528065B2 (en) * 2006-01-17 2009-05-05 International Business Machines Corporation Structure and method for MOSFET gate electrode landing pad
JP2007250903A (ja) 2006-03-16 2007-09-27 Matsushita Electric Ind Co Ltd ヘテロ接合バイポーラトランジスタおよびその製造方法
EP1837917A1 (de) * 2006-03-21 2007-09-26 Semiconductor Energy Laboratory Co., Ltd. Nichtflüchtige Halbleiterspeichervorrichtung
US7772060B2 (en) * 2006-06-21 2010-08-10 Texas Instruments Deutschland Gmbh Integrated SiGe NMOS and PMOS transistors
WO2008017457A1 (en) * 2006-08-11 2008-02-14 Paul Scherrer Institut Light modulators comprising si-ge quantum well layers
US20080179636A1 (en) * 2007-01-27 2008-07-31 International Business Machines Corporation N-fets with tensilely strained semiconductor channels, and method for fabricating same using buried pseudomorphic layers
US9653639B2 (en) * 2012-02-07 2017-05-16 Apic Corporation Laser using locally strained germanium on silicon for opto-electronic applications
CN108258032B (zh) * 2018-01-19 2021-04-20 重庆邮电大学 一种采用组合发射区的异质结双极晶体管及其制造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275906A (en) * 1962-08-20 1966-09-27 Nippon Electric Co Multiple hetero-layer composite semiconductor device
DE2719464A1 (de) * 1977-04-30 1978-12-21 Erich Dr Kasper Verfahren zur herstellung von bipolaren hochfrequenztransistoren
US4529455A (en) * 1983-10-28 1985-07-16 At&T Bell Laboratories Method for epitaxially growing Gex Si1-x layers on Si utilizing molecular beam epitaxy
JPS63118485A (ja) * 1986-11-05 1988-05-23 ナショナル住宅産業株式会社 壁

Also Published As

Publication number Publication date
US5006912A (en) 1991-04-09
WO1988008206A1 (en) 1988-10-20
JP2644022B2 (ja) 1997-08-25
HK137296A (en) 1996-08-02
EP0360804B1 (de) 1994-08-17
GB8708926D0 (en) 1987-05-20
JPH02504205A (ja) 1990-11-29
EP0360804A1 (de) 1990-04-04
ATE110190T1 (de) 1994-09-15
DE3851147D1 (de) 1994-09-22

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