DE3751183D1 - Piezoelektrischer Antrieb. - Google Patents

Piezoelektrischer Antrieb.

Info

Publication number
DE3751183D1
DE3751183D1 DE3751183T DE3751183T DE3751183D1 DE 3751183 D1 DE3751183 D1 DE 3751183D1 DE 3751183 T DE3751183 T DE 3751183T DE 3751183 T DE3751183 T DE 3751183T DE 3751183 D1 DE3751183 D1 DE 3751183D1
Authority
DE
Germany
Prior art keywords
piezoelectric drive
piezoelectric
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3751183T
Other languages
English (en)
Other versions
DE3751183T2 (de
Inventor
Yukio Mitsubishi Chemica Chida
Tetsuhiko C O Mitsub Nishimura
Yasuo C L Mitsubishi Che Oguri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27331402&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3751183(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP61228426A external-priority patent/JP2533861B2/ja
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Application granted granted Critical
Publication of DE3751183D1 publication Critical patent/DE3751183D1/de
Publication of DE3751183T2 publication Critical patent/DE3751183T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
DE3751183T 1986-09-29 1987-09-28 Piezoelektrischer Antrieb. Expired - Fee Related DE3751183T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61228426A JP2533861B2 (ja) 1986-09-29 1986-09-29 圧電アクチユエ−タ
JP30918986 1986-12-27
JP30919086 1986-12-27

Publications (2)

Publication Number Publication Date
DE3751183D1 true DE3751183D1 (de) 1995-04-27
DE3751183T2 DE3751183T2 (de) 1995-11-16

Family

ID=27331402

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3751183T Expired - Fee Related DE3751183T2 (de) 1986-09-29 1987-09-28 Piezoelektrischer Antrieb.

Country Status (3)

Country Link
US (2) US4812698A (de)
EP (1) EP0262637B1 (de)
DE (1) DE3751183T2 (de)

Families Citing this family (86)

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EP0262637B1 (de) * 1986-09-29 1995-03-22 Mitsubishi Chemical Corporation Piezoelektrischer Antrieb
US4928030A (en) * 1988-09-30 1990-05-22 Rockwell International Corporation Piezoelectric actuator
JPH02138501A (ja) * 1988-11-17 1990-05-28 Smc Corp ノズルフラッパ機構
JPH0733087B2 (ja) * 1989-06-09 1995-04-12 シャープ株式会社 インクジェットプリンタ
JP2886588B2 (ja) * 1989-07-11 1999-04-26 日本碍子株式会社 圧電／電歪アクチュエータ
SG83626A1 (en) 1989-07-11 2001-10-16 Seiko Epson Corp Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
JP2867437B2 (ja) * 1989-07-19 1999-03-08 ブラザー工業株式会社 圧電式インクジェットプリンタヘッド
JP3041952B2 (ja) * 1990-02-23 2000-05-15 セイコーエプソン株式会社 インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法
US6186619B1 (en) 1990-02-23 2001-02-13 Seiko Epson Corporation Drop-on-demand ink-jet printing head
US5402159A (en) * 1990-03-26 1995-03-28 Brother Kogyo Kabushiki Kaisha Piezoelectric ink jet printer using laminated piezoelectric actuator
JP2891510B2 (ja) * 1990-05-09 1999-05-17 日本電子株式会社 圧電素子駆動体
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
US5363131A (en) * 1990-10-05 1994-11-08 Seiko Epson Corporation Ink jet recording head
JP3185226B2 (ja) * 1991-01-30 2001-07-09 株式会社村田製作所 圧電バイモルフ素子の駆動方法及び圧電バイモルフ素子
JP3198355B2 (ja) * 1991-05-28 2001-08-13 キヤノン株式会社 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
DE69223096T2 (de) * 1991-07-18 1998-05-28 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
US5350966A (en) * 1991-11-12 1994-09-27 Rockwell International Corporation Piezocellular propulsion
JPH05218517A (ja) * 1992-02-06 1993-08-27 Murata Mfg Co Ltd 圧電バイモルフ型アクチュエータ
US5268611A (en) * 1992-03-16 1993-12-07 Rockwell International Corporation Anisotropic transducer
US6050679A (en) * 1992-08-27 2000-04-18 Hitachi Koki Imaging Solutions, Inc. Ink jet printer transducer array with stacked or single flat plate element
US5493615A (en) * 1993-05-26 1996-02-20 Noise Cancellation Technologies Piezoelectric driven flow modulator
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FR2710877B1 (fr) * 1993-10-07 1997-05-09 Seiko Epson Corp Organe piézoélectrique de tête d'enregistrement à jets d'encre, et son procédé de fabrication.
DE4337265C1 (de) * 1993-11-02 1995-03-09 Mayer Textilmaschf Kettenwirkmaschine mit mindestens einer Legebarre
US5378382A (en) * 1993-12-09 1995-01-03 Mitsubishi Kasei Corporation Piezoelectric ceramic composition for actuator
US6781285B1 (en) * 1994-01-27 2004-08-24 Cymer, Inc. Packaged strain actuator
US5626312A (en) * 1994-07-06 1997-05-06 Mcdonnell Douglas Corporation Piezoelectric actuator
JPH09205781A (ja) * 1995-02-01 1997-08-05 Seiko Epson Corp 圧電体発電装置及びこれを備えた携帯型電力供給装置、携帯型電子機器
EP0768532B1 (de) * 1995-10-09 2003-04-23 Matsushita Electric Industrial Co., Ltd Beschleunigungssensor und Herstellungsverfahren hierfür, sowie Schockdetektor, der einen solchen Sensor verwendet
JP3432974B2 (ja) * 1995-10-13 2003-08-04 日本碍子株式会社 圧電／電歪膜型素子
JPH09261978A (ja) * 1996-03-25 1997-10-03 Nippon Cement Co Ltd 積層体素子および振動駆動装置
DE69735411T2 (de) * 1996-10-09 2006-09-07 Symyx Technologies, Inc., Santa Clara Infrarot-spektroskopie und abbildung von bibliotheken
WO1998024296A2 (en) * 1996-11-20 1998-06-11 The Regents Of The University Of California Multilaminate piezoelectric high voltage stack
DE19704389C2 (de) * 1997-02-06 1999-02-04 Fraunhofer Ges Forschung Aktor aus Einzelelementen
US5992032A (en) * 1997-02-24 1999-11-30 Chung-Shan Institute Of Science & Technology Method and apparatus for inclination measurement using piezoelectric effect
GB9704769D0 (en) * 1997-03-07 1997-04-23 Powerbreaker Plc Low component count release mechanism
DE19712034A1 (de) * 1997-03-21 1998-09-24 Deutsch Zentr Luft & Raumfahrt Profilkante eines aerodynamischen Profils
JP3456380B2 (ja) * 1997-09-02 2003-10-14 株式会社村田製作所 圧電アクチュエータ
JPH11168246A (ja) * 1997-09-30 1999-06-22 Matsushita Electric Ind Co Ltd 圧電アクチュエータ、赤外線センサおよび圧電光偏向器
US6494079B1 (en) 2001-03-07 2002-12-17 Symyx Technologies, Inc. Method and apparatus for characterizing materials by using a mechanical resonator
US6393895B1 (en) 1997-10-08 2002-05-28 Symyx Technologies, Inc. Method and apparatus for characterizing materials by using a mechanical resonator
DE19745468C1 (de) * 1997-10-15 1999-04-15 Daimler Chrysler Ag Piezoelektrischer Aktuator
JP4578596B2 (ja) 1998-09-18 2010-11-10 セイコーインスツル株式会社 振動子、圧電アクチュエータおよびこれらを用いた電子機器
US6135713A (en) * 1999-01-19 2000-10-24 The Mcdonnell Douglas Helicopter Company Helicopter rotor blade flap actuator government interest
US6329741B1 (en) * 1999-04-30 2001-12-11 The Trustees Of Princeton University Multilayer ceramic piezoelectric laminates with zinc oxide conductors
JP2000332313A (ja) * 1999-05-21 2000-11-30 Matsushita Electric Ind Co Ltd 薄膜圧電型バイモルフ素子及びその応用
US6512323B2 (en) * 2000-03-22 2003-01-28 Caterpillar Inc. Piezoelectric actuator device
DE10031877C1 (de) * 2000-06-30 2001-12-20 Fraunhofer Ges Forschung Vorrichtung zur Ablenkung von optischen Strahlen
US7248444B1 (en) * 2000-07-21 2007-07-24 Lauer Mark A Electromagnetic heads, flexures, gimbals and actuators formed on and from a wafer substrate
WO2002099414A1 (en) 2001-06-06 2002-12-12 Symyx Technologies, Inc. Flow detectors having mechanical oscillators, and use thereof in flow characterization systems
DE10329028A1 (de) * 2002-07-11 2004-01-29 Ceram Tec Ag Innovative Ceramic Engineering Isolierung für piezokeramische Vielschichtaktoren
DE10234987A1 (de) * 2002-07-31 2004-02-19 Siemens Ag Piezoelektrischer Biegewandler
EP1554570A2 (de) 2002-10-18 2005-07-20 Symyx Technologies, Inc. Umweltsteuersystemfluidmesssystem und verfahren mit einem sensor mit mechanischem resonator
US7043969B2 (en) * 2002-10-18 2006-05-16 Symyx Technologies, Inc. Machine fluid sensor and method
US6895645B2 (en) * 2003-02-25 2005-05-24 Palo Alto Research Center Incorporated Methods to make bimorph MEMS devices
US7089635B2 (en) * 2003-02-25 2006-08-15 Palo Alto Research Center, Incorporated Methods to make piezoelectric ceramic thick film arrays and elements
US7721590B2 (en) * 2003-03-21 2010-05-25 MEAS France Resonator sensor assembly
US20040250622A1 (en) * 2003-03-21 2004-12-16 Symyx Technologies, Inc. Resonator sensor assembly
EP1644717A2 (de) * 2003-03-21 2006-04-12 Symyx Technologies, Inc. Mechanischer resonator
DE102004025603A1 (de) * 2004-05-25 2005-12-22 Forschungszentrum Karlsruhe Gmbh Aktor auf der Basis geometrisch anisotroper Nanopartikel
DE202005014561U1 (de) * 2005-09-15 2005-12-15 Festo Ag & Co. Piezo-Biegewandler
DE102005060779B4 (de) * 2005-12-16 2008-07-10 Eads Deutschland Gmbh Kraftgenerator
DE102005061751B4 (de) 2005-12-21 2013-09-19 Eurocopter Deutschland Gmbh Rotorblatt für ein Drehflügelflugzeug
WO2007111909A2 (en) 2006-03-24 2007-10-04 Northwestern University Haptic device with indirect haptic feedback
US8525778B2 (en) 2007-03-21 2013-09-03 Northwestern University Haptic device with controlled traction forces
US8780053B2 (en) * 2007-03-21 2014-07-15 Northwestern University Vibrating substrate for haptic interface
WO2007112741A1 (en) * 2006-03-30 2007-10-11 Noliac A/S A multilayer piezoelectric bender
US20080211353A1 (en) * 2007-03-02 2008-09-04 Charles Erklin Seeley High temperature bimorph actuator
US8217553B2 (en) * 2008-08-18 2012-07-10 New Scale Technologies Reduced-voltage, linear motor systems and methods thereof
US8189851B2 (en) 2009-03-06 2012-05-29 Emo Labs, Inc. Optically clear diaphragm for an acoustic transducer and method for making same
JPWO2011065235A1 (ja) * 2009-11-25 2013-04-11 株式会社村田製作所 電気機械変換素子及びアクチュエータ
KR20110077637A (ko) * 2009-12-30 2011-07-07 삼성전기주식회사 햅틱 디바이스 구동용 압전 액추에이터
KR101161943B1 (ko) * 2010-03-04 2012-07-04 삼성전기주식회사 햅틱 피드백 디바이스 및 전자 장치
WO2011121882A1 (ja) * 2010-03-31 2011-10-06 コニカミノルタエムジー株式会社 積層型圧電体および積層型圧電体の製造方法ならびに前記積層型圧電体を用いた超音波トランスデューサおよび超音波診断装置
DE102010021867A1 (de) * 2010-05-28 2011-12-01 Eurocopter Deutschland Gmbh Kraftgenerator zur Anbringung an einer Struktur
JP5959807B2 (ja) * 2010-08-05 2016-08-02 キヤノン株式会社 アクチュエータおよびアクチュエータ構造体
US8543168B2 (en) 2010-12-14 2013-09-24 Motorola Mobility Llc Portable electronic device
JP5708167B2 (ja) * 2011-04-06 2015-04-30 コニカミノルタ株式会社 超音波探触子及び超音波診断装置
JP5644729B2 (ja) * 2011-09-30 2014-12-24 コニカミノルタ株式会社 超音波振動子、超音波探触子及び超音波画像診断装置
US9094743B2 (en) * 2013-03-15 2015-07-28 Emo Labs, Inc. Acoustic transducers
US9613544B2 (en) * 2013-07-31 2017-04-04 North Carolina State University Electroactive, actuated dot structures and associated methods
USD741835S1 (en) 2013-12-27 2015-10-27 Emo Labs, Inc. Speaker
DE102015226233A1 (de) * 2015-12-21 2017-01-19 Johnson Matthey Piezo Products Gmbh Biegewandler sowie Verfahren zu dessen Herstellung sowie zu dessen Betrieb
CN111551944A (zh) * 2020-06-01 2020-08-18 中国第一汽车股份有限公司 一种隐藏式雷达总成及车辆
CN114569199B (zh) * 2022-03-04 2023-08-25 悦兴（厦门）生物科技有限公司 高韧性陶瓷手术刀及其操作方法

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Also Published As

Publication number Publication date
US5034649A (en) 1991-07-23
EP0262637B1 (de) 1995-03-22
DE3751183T2 (de) 1995-11-16
EP0262637A3 (en) 1990-01-03
EP0262637A2 (de) 1988-04-06
US4812698A (en) 1989-03-14

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: MITSUBISHI CHEMICAL CORP., TOKIO/TOKYO, JP

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee