DE3783960D1 - Zweidimensionales piezoelektrisches antriebsystem. - Google Patents
Zweidimensionales piezoelektrisches antriebsystem.Info
- Publication number
- DE3783960D1 DE3783960D1 DE8787110218T DE3783960T DE3783960D1 DE 3783960 D1 DE3783960 D1 DE 3783960D1 DE 8787110218 T DE8787110218 T DE 8787110218T DE 3783960 T DE3783960 T DE 3783960T DE 3783960 D1 DE3783960 D1 DE 3783960D1
- Authority
- DE
- Germany
- Prior art keywords
- drive system
- piezoelectric drive
- dimensional piezoelectric
- dimensional
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61165848A JPH0691635B2 (ja) | 1986-07-15 | 1986-07-15 | 微小変位装置 |
JP62049296A JPH0671321B2 (ja) | 1987-03-04 | 1987-03-04 | 固体撮像素子用微小変位装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3783960D1 true DE3783960D1 (de) | 1993-03-18 |
DE3783960T2 DE3783960T2 (de) | 1993-05-27 |
Family
ID=26389674
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787110218T Expired - Fee Related DE3783960T2 (de) | 1986-07-15 | 1987-07-15 | Zweidimensionales piezoelektrisches antriebsystem. |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0253375B1 (de) |
DE (1) | DE3783960T2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08280185A (ja) * | 1995-04-07 | 1996-10-22 | Nikon Corp | 超音波アクチュエータ |
JPH10105243A (ja) | 1996-09-10 | 1998-04-24 | Hewlett Packard Co <Hp> | 位置決め機構、位置決め装置及び情報記録装置 |
US6252333B1 (en) | 1998-02-20 | 2001-06-26 | Seiko Instruments Inc. | Stage utilizing ultrasonic motor and electronic equipment and printer utilizing the stage |
US6017313A (en) | 1998-03-20 | 2000-01-25 | Hypertension Diagnostics, Inc. | Apparatus and method for blood pressure pulse waveform contour analysis |
DE19927129C1 (de) | 1999-06-15 | 2001-01-04 | Wolf Gmbh Richard | Fokussier- und Brennweiteneinstellvorrichtung für eine Videokamera |
US6331161B1 (en) * | 1999-09-10 | 2001-12-18 | Hypertension Diagnostics, Inc | Method and apparatus for fabricating a pressure-wave sensor with a leveling support element |
GB0203897D0 (en) * | 2002-02-19 | 2002-04-03 | Pbt Ip Ltd | Low cost actuator with 2 dimensional motion |
US7596841B2 (en) | 2004-04-23 | 2009-10-06 | Agency For Science Technology And Research | Micro-electromechanical devices and methods of fabricating thereof |
US7214919B2 (en) * | 2005-02-08 | 2007-05-08 | Micron Technology, Inc. | Microelectronic imaging units and methods of manufacturing microelectronic imaging units |
US7777782B2 (en) | 2005-11-04 | 2010-08-17 | Nokia Corporation | Stabilization of an image produced by optics |
WO2007063360A1 (en) * | 2005-11-30 | 2007-06-07 | Nokia Corporation | Method and system for image stabilization |
US8041201B2 (en) | 2008-04-03 | 2011-10-18 | Nokia Corporation | Camera module having movable lens |
US10516348B2 (en) | 2015-11-05 | 2019-12-24 | Mems Drive Inc. | MEMS actuator package architecture |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4520570A (en) * | 1983-12-30 | 1985-06-04 | International Business Machines Corporation | Piezoelectric x-y-positioner |
-
1987
- 1987-07-15 DE DE8787110218T patent/DE3783960T2/de not_active Expired - Fee Related
- 1987-07-15 EP EP87110218A patent/EP0253375B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3783960T2 (de) | 1993-05-27 |
EP0253375A2 (de) | 1988-01-20 |
EP0253375B1 (de) | 1993-02-03 |
EP0253375A3 (en) | 1989-12-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |