DE3852258D1 - Piezoelektrischer Motor. - Google Patents

Piezoelektrischer Motor.

Info

Publication number
DE3852258D1
DE3852258D1 DE3852258T DE3852258T DE3852258D1 DE 3852258 D1 DE3852258 D1 DE 3852258D1 DE 3852258 T DE3852258 T DE 3852258T DE 3852258 T DE3852258 T DE 3852258T DE 3852258 D1 DE3852258 D1 DE 3852258D1
Authority
DE
Germany
Prior art keywords
piezoelectric motor
piezoelectric
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3852258T
Other languages
English (en)
Other versions
DE3852258T2 (de
Inventor
Keiji Takata
Shigeyuki Hosoki
Sumio Hosaka
Tsutomu Komoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3852258D1 publication Critical patent/DE3852258D1/de
Publication of DE3852258T2 publication Critical patent/DE3852258T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0045—Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H02N2/0025—Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
DE3852258T 1987-09-25 1988-09-23 Piezoelektrischer Motor. Expired - Fee Related DE3852258T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62238723A JP2690907B2 (ja) 1987-09-25 1987-09-25 複合型圧電モータ

Publications (2)

Publication Number Publication Date
DE3852258D1 true DE3852258D1 (de) 1995-01-12
DE3852258T2 DE3852258T2 (de) 1995-04-06

Family

ID=17034302

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3852258T Expired - Fee Related DE3852258T2 (de) 1987-09-25 1988-09-23 Piezoelektrischer Motor.

Country Status (5)

Country Link
US (1) US4912351A (de)
EP (1) EP0308970B1 (de)
JP (1) JP2690907B2 (de)
CN (1) CN1018126B (de)
DE (1) DE3852258T2 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5140215A (en) * 1988-09-19 1992-08-18 Brother Kogyo Kabushiki Kaisha Vibrator and ultrasonic motor employing the same
US5062622A (en) * 1989-01-19 1991-11-05 Canon Kabushiki Kaisha Vibratory sheet feeder which uses phase adjustment to control the sheet feeding speed
JP2687233B2 (ja) * 1989-02-10 1997-12-08 キヤノン株式会社 シート送り装置
US5032753A (en) * 1989-02-28 1991-07-16 Brother Kogyo Kabushiki Kaisha Piezoelectric transducer and an ultrasonic motor using the piezoelectric transducer
GB2229045A (en) * 1989-03-08 1990-09-12 Alps Electric Co Ltd Ultrasonic linear motor with U-shaped vibrating body
US5087851A (en) * 1989-06-21 1992-02-11 Alps Electric Co., Ltd. Device for driving a part on a vehicle
JPH072029B2 (ja) * 1989-06-26 1995-01-11 セイコー電子工業株式会社 超音波モータ
US5191688A (en) * 1989-07-27 1993-03-09 Olympus Optical Co., Ltd. Method for producing a superior longitudinal vibrator
US5136200A (en) * 1989-07-27 1992-08-04 Olympus Optical Co., Ltd. Ultransonic motor
JPH0389875A (ja) * 1989-08-31 1991-04-15 Brother Ind Ltd リニア超音波モータ
WO1991004584A1 (en) * 1989-09-08 1991-04-04 Massachusetts Institute Of Technology Miniature actuator
US5105117A (en) * 1989-10-31 1992-04-14 Brother Kogyo Kabushiki Kaisha Ultrasonic motor
JP3135605B2 (ja) * 1991-06-10 2001-02-19 株式会社東芝 撹拌子
US5332941A (en) * 1992-02-21 1994-07-26 Honda Electronics Co., Ltd. Ultrasonic driving motor
JP3823340B2 (ja) * 1994-08-01 2006-09-20 株式会社ニコン 振動モータ
US6327120B1 (en) * 1997-04-17 2001-12-04 Fujitsu Limited Actuator using piezoelectric element and head-positioning mechanism using the actuator
FR2763627B1 (fr) * 1997-05-20 1999-07-16 Valeo Systemes De Fermetures Serrure electrique de portiere de vehicule automobile comportant un moteur piezo-electrique
JP4017237B2 (ja) * 1998-03-12 2007-12-05 富士通株式会社 磁気ヘッドスライダ
US6564034B1 (en) 1998-12-08 2003-05-13 Canon Kabushiki Kaisha Image forming device having a cleaning member for removing toner in variable amounts from an image bearing member
JP3498652B2 (ja) * 1999-11-12 2004-02-16 日本碍子株式会社 絶対値化素子
US6373170B1 (en) 2000-03-10 2002-04-16 Edo Electro-Ceramic Products Piezo-electric motor
US20030095739A1 (en) * 2001-08-09 2003-05-22 Bainbridge Networks, Inc. Fiber optic switch
JP3832338B2 (ja) * 2001-12-25 2006-10-11 松下電工株式会社 電歪ポリマーアクチュエータ
US6747394B2 (en) * 2002-06-19 2004-06-08 Piezomotor Uppsala Ab Near-resonance electromechanical motor
US7095160B2 (en) * 2003-05-27 2006-08-22 The Penn State Research Foundation Piezoelectric motor and method of exciting an ultrasonic traveling wave to drive the motor
US7545076B1 (en) 2005-07-11 2009-06-09 Itt Manufacturing Enterprises, Inc. System and method for tracking drive frequency of piezoelectric motor
US7883479B1 (en) * 2005-08-05 2011-02-08 The United States Of America As Represented By The Secretary Of The Air Force Stability augmentation system
US7301257B2 (en) * 2005-10-14 2007-11-27 Academia Sinica Motion actuator
CN100438307C (zh) * 2005-11-18 2008-11-26 清华大学 螺纹驱动多面体超声电机
US7501743B2 (en) * 2006-04-28 2009-03-10 The Penn State Research Foundation Piezoelectric ultrasonic motor for 2-dimensional positioning
DE102009017637A1 (de) * 2009-04-16 2010-10-28 Physik Instrumente (Pi) Gmbh & Co. Kg Betriebsverfahren und Ansteuereinrichtung eines Piezolinearantriebes
JP2010283614A (ja) * 2009-06-04 2010-12-16 Sekyurion Nijuyon Kk カメラ制御装置、撮影方向制御方法、カメラ装置
US9870053B2 (en) * 2010-02-08 2018-01-16 Immersion Corporation Systems and methods for haptic feedback using laterally driven piezoelectric actuators
JP6414596B2 (ja) * 2014-08-22 2018-10-31 株式会社村田製作所 圧電センサ及び検出装置
CN104883090B (zh) * 2015-06-02 2017-03-22 北京大学 融合切变压电致动器复合驱动模式的压电直线马达
JP2019030091A (ja) * 2017-07-28 2019-02-21 セイコーエプソン株式会社 圧電駆動装置、圧電駆動装置の駆動方法、ロボット、電子部品搬送装置、プリンター、及び、プロジェクター
EP3611770A1 (de) * 2018-08-16 2020-02-19 ASML Netherlands B.V. Piezoelektrischer aktuator sowie aktuatorsystem, substratträger und lithographievorrichtung mit dem aktuator

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU573828A1 (ru) * 1976-06-08 1977-09-25 Киевский Ордена Ленина Политехнический Институт Имени 50-Летия Великой Октябрьской Социалистической Революции Пьезоэлектрический двигатель
SU595813A1 (ru) * 1976-11-26 1978-02-28 Каунасский Политехнический Институт Им.Антанаса Снечкуса Волновой вибродвигатель
SU621397A1 (ru) * 1977-02-22 1978-08-30 Каунасский Политехнический Институт Имени Антанаса Снечкуса Волновой вибродвигатель
SU646395A1 (ru) * 1978-01-26 1979-02-05 Каунасский Политехнический Институт Им. Антанаса Снечкуса Синхронный вибропроивод
SU845198A1 (ru) * 1979-05-14 1981-07-07 Каунасский Политехнический Институт Им.Ahtahaca Снечкуса Вибродвигатель
SU851561A1 (ru) * 1979-07-24 1981-07-30 Каунасский Политехнический Институтим. Ahtahaca Снечкуса Вибродвигатель
SU853711A1 (ru) * 1979-11-27 1981-08-07 Каунасский Политехнический Институтим. Ahtahaca Снечкуса Вибродвигатель
AT384912B (de) * 1982-04-16 1988-01-25 Ki Polt I Piezoelektrischer motor
AT382262B (de) * 1982-04-16 1987-02-10 Ki Polt I Piezoelektrischer motor
JPS6059980A (ja) * 1983-09-07 1985-04-06 Rion Co Ltd 圧電駆動装置
US4562373A (en) * 1983-10-21 1985-12-31 Matsushita Electric Industrial Co., Ltd. Piezoelectric motor
JPS6091879A (ja) * 1983-10-24 1985-05-23 Nippon Telegr & Teleph Corp <Ntt> 超音波駆動方法
US4786836A (en) * 1984-03-01 1988-11-22 Matsushita Electric Industrail Co., Ltd. Piezoelectric motor
US4613782A (en) * 1984-03-23 1986-09-23 Hitachi, Ltd. Actuator
JPS60210172A (ja) * 1984-04-02 1985-10-22 Canon Inc 振動波モ−タ
JPS61102177A (ja) * 1984-10-25 1986-05-20 Shinsei Kogyo:Kk 表面波駆動モ−タ−
JPH0828985B2 (ja) * 1985-03-01 1996-03-21 株式会社新生工業 超音波モータの回転子／移動子
US4742260A (en) * 1986-02-06 1988-05-03 Hiroshi Shimizu Piezoelectrically driving device

Also Published As

Publication number Publication date
EP0308970A3 (en) 1990-02-14
CN1018126B (zh) 1992-09-02
EP0308970B1 (de) 1994-11-30
DE3852258T2 (de) 1995-04-06
JP2690907B2 (ja) 1997-12-17
JPS6485584A (en) 1989-03-30
EP0308970A2 (de) 1989-03-29
US4912351A (en) 1990-03-27
CN1032272A (zh) 1989-04-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee