EP0253375B1 - Zweidimensionales piezoelektrisches Antriebsystem - Google Patents

Zweidimensionales piezoelektrisches Antriebsystem Download PDF

Info

Publication number
EP0253375B1
EP0253375B1 EP87110218A EP87110218A EP0253375B1 EP 0253375 B1 EP0253375 B1 EP 0253375B1 EP 87110218 A EP87110218 A EP 87110218A EP 87110218 A EP87110218 A EP 87110218A EP 0253375 B1 EP0253375 B1 EP 0253375B1
Authority
EP
European Patent Office
Prior art keywords
piezoelectric
bimorphs
micro
displacement unit
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP87110218A
Other languages
English (en)
French (fr)
Other versions
EP0253375A3 (en
EP0253375A2 (de
Inventor
Tetsuji Fukada
Masayuki Wakamiya
Ichiro Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61165848A external-priority patent/JPH0691635B2/ja
Priority claimed from JP62049296A external-priority patent/JPH0671321B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of EP0253375A2 publication Critical patent/EP0253375A2/de
Publication of EP0253375A3 publication Critical patent/EP0253375A3/en
Application granted granted Critical
Publication of EP0253375B1 publication Critical patent/EP0253375B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type

Definitions

  • This invention relates to a two-dimensional piezoelectric micro-displacement unit for accurate positioning in the desired direction on the same surface.
  • This apparatus may find applications for positioning of a color solid-state image sensor for the video camera, a displacer for high-resolution solid-state image sensor, a precision pattern positioning device and the like.
  • a micro displacer using the reverse piezoelectric effect of a piezoelectric element capable of electrical control has a looper-type carriage mechanism as disclosed in the Japanese Patent Publication No. 12497/76.
  • Fig. 10 is a diagram for explaining such a looper-type carriage mechanism having clamps 2, 3 operated by use of electrostatic or electromagnetic force at the ends of a cylindrical piezoelectric element 1.
  • the clamps 2, 3 are clamped on a fixing table 4, and the clamp 3 is set free in Fig. 10(b).
  • Fig. 10(c) a voltage is applied to the piezoelectric element 1 to extend the same.
  • Fig. 10 is a diagram for explaining such a looper-type carriage mechanism having clamps 2, 3 operated by use of electrostatic or electromagnetic force at the ends of a cylindrical piezoelectric element 1.
  • the clamps 2, 3 are clamped on a fixing table 4, and the clamp 3 is set free in Fig. 10(b).
  • Fig. 10(c) a voltage is applied to the
  • a displacer for solid-state image sensor comprising a bending mode vibrator (bi-morph vibrator) with an end or both ends thereof fixed including a strip of piezoelectric elements attached on the upper and lower surfaces of a similarly-shaped thin metal plate, the piezoelectric element having a polarization axis along the thickness thereof, thus displacing the solid-state image sensor to increase the light-receiving area for a higher resolution.
  • Fig. 11 shows a unilateral micro displacer using an example of such a bending mode vibrator.
  • Bending mode vibrators 5, 5' with the ends thereof fixed are arranged in parallel to each other, and a carriage 6 having a solid-state image sensor or the like thereon is disposed at the central position of the bending mode vibrators 5, 5' where the amount of displacement is maximum.
  • a bilateral micro displacer is easily conceivable by mounting the above-mentioned looper-type micro displacer in two directions on the same surface.
  • one of the drive units is required to be clamped by electrostatic or electromagnetic force
  • an apparatus which is portable or used by being inclined is complicated in construction requiring separate means for fixing movable members while not in operation, resulting in a bulky apparatus.
  • the weight of movable objects while moving are concentrated at the part of the apparatus unclamped thereby to make the apparatus unstable.
  • the direction of motion is determined solely by the manner in which the apparatus is mounted, but the motion in the desired direction is impossible once the apparatus is mounted.
  • a displacer (first displacement unit) with the bending mode vibrator described above may be used to displace another displacer (second displacement unit).
  • the effect of the weight of the second displacement unit is required to be reduced by enlarging the bending mode vibrator of the first displacement unit, thereby leading to a bulky apparatus on the one hand and posing the problem of shorter durability on the other.
  • a piezoelectric X-Y-positioner including two pairs of bimorphs located in opposition to one another, of which the bimorphs of the first pair are attached with their longitudinal centers by supports to a rigid frame.
  • a second pair of bimorphs located in opposition to one another support at their longitudinal centers a carriage for attachement of a sample to be positioned in the X-Y-plane.
  • the bimorphs of the second pair are connected to the bimorphs of the first pair by connectors having a square-shaped sectional area so that each two ends of a bimorph of the first and second pair are arranged orthogonally to one another such that, for a displacement in the X and Y directions, each of the bimorphs has to be bent in a double S-form, the lengthwise central part of each bimorph being in a plane parallel to the plane of the ends of the bimorphs.
  • each bimorph carries four independent electrodes on either side of which the electrodes at the ends are connected to voltages inverse to the voltages of the electrodes near the center of the bimorphs, which makes necessary a circuitry for the supplying voltages.
  • the two pairs of bimorphs are arranged in different planes with respect to the direction parallel to the width of the bimorphs.
  • a two-dimensional piezoelectric micro-displacement unit comprising a plurality of piezoelectric bimorphs each including two tabular piezoelectric elements laminated to each other, said tabular piezoelectric elements having a polarization axis along the thickness direction thereof and the polarization axes of each two piezoelectric elements laminated to each other being parallel, and electrodes at the opposed surfaces thereof, a plurality of fixing members for fixedly supporting a pair of opposed located piezoelectric bimorphs at the central parts of the length thereof, and a carriage mounted on another pair of opposed located piezoelectric bimorph members, the bimorphs being connected at their lengthwise ends so that the other pair of bimorphs is supported by the one pair of bimorphs, wherein the tabular piezoelectric elements are laminated to each other on the opposing sides of a thin metal strip bent into a rectangular shape, the bent portions of the metal strip forming the connections of the bimorphs at the lengthwise ends thereof, and the pairs of piezo
  • Figs. 1A, 1B and 1C show an embodiment of the present invention, in which Fig. 1A is a perspective view, 1B an exploded perspective view, and 1C an exploded perspective view of a piezoelectric displacement unit.
  • a rectangular thin metal strip 7 which is arranged in a rectangular form has vertically attached on the respective sides thereof tabular piezoelectric elements 8a, 8b; 9a, 9b; 10a, 10b; 11a, 11b with a polarization axis along the thickness directions and inner and outer electrodes.
  • the tabular piezoelectric elements are so attached that the polarization axes thereof are arranged in the same direction, thereby constituting laminated piezoelectric bending of bimorph elements 8, 9, 10, 11 independent of each other.
  • the central parts of the laminated piezoelectric bimorphs 10, 11 are fixedly supported by bonding or screwing with recessed fixing members 13a, 13b mountable to a base board 12, while the central parts of the piezoelectric bimorphs 8, 9 have mounted thereon a carriage 15 for carrying a movable member such as a solid-state image sensor 14.
  • a carriage 15 for carrying a movable member such as a solid-state image sensor 14.
  • voltage application terminals 16, 17, 18, 19 are provided, and the thin metal strip 7 is used as a common voltage application terminal 20.
  • the laminated piezoelectric bimorphs 8, 9 function as both ends-supported bending elements and are displaced along the normal direction of the electrode surfaces.
  • the amount of this displacement is proportional to the applied electric field and piezoelectric constant d31.
  • the laminated piezoelectric elements 8a, 8b, 9a, 9b have the same thickness, and the polarization axes of the opposed laminated piezoelectric bimorphs 8, 9 are arranged in the same direction.
  • the laminated piezoelectric bimorphs 8, 9 are displaced in the same amount in the same direction, so that it is possible to displace the carriage mounted at the central parts thereof along the direction of displacement of the laminated piezoelectric bimorphs 8, 9, that is, along the normal direction of the electrode surfaces.
  • a voltage is applied to the terminals 20, 18, 19 in such a manner as to cause a displacement of the same amount in the same direction
  • the laminated piezoelectric bimorphs 8, 9 are displaced in the same direction, that is, along the normal direction against the electrode surfaces of the piezoelectric vibrators 10, 11, thus displacing the carriage 15 in the same direction.
  • the carriage 15 is displaceable in two directions on the same surface.
  • the laminated piezoelectric bimorphs 8, 9, 10, 11 are constructed in the same plane, a compact micro-displacement unit capable of independent two-dimensional displacement simple in construction is provided. If conduction is assured with a grounding terminal between the voltage application terminals 16, 17, 18, 19 of the inner and outer electrodes of the laminated piezoelectric bimorphs and the fixing members, on the other hand, the resulting fact is that the thin metal strip 7 provides a common voltage application terminal 20, which reduces intrusion of noises while at the same time shorting by external contact is prevented.
  • FIG. 2 shows an example of such a package.
  • a solid-state image sensor 14 is fixed on a carriage 15 of a two-dimensional micro-displacement unit by conductive adhesive or the like, and the displacement unit is fixedly mounted within a case 21 of ceramics or the like.
  • the assembly is sealed in the case 21 with glass transparent to the light radiated on the light-receiving surface of the solid-state image sensor 14.
  • the electric wiring to the piezoelectric elements required for two dimensional displacement and the solid-state image sensor are led out through electrodes 20 printed on the case 21.
  • Fig. 3A is a perspective view and Fig. 3B an exploded perspective view.
  • the inner and outer electrodes 10a', 10b'; 11a', 11b' of the piezoelectric bimorphs 10, 11 fixedly supported by fixing members at the central parts thereof are isolated at the central parts as shown by hatching in Fig. 3B.
  • the cantilever beam mode bimorphs on the sides of the fixed parts are driven independently.
  • the laminated piezoelectric elements have the same thickness, and the opposed laminated piezoelectric bimorphs 10, 11 have the same direction of polarization axis.
  • the laminated piezoelectric bimorph 8 is displaced, while by applying a voltage of the same phase to the voltage application terminals 20 and 18b, 19b in a similar manner, the laminated piezoelectric bimorph 9 is displaceable. Specifically, the laminated piezoelectric bimorphs 8 and 9 are displaced independently of each other.
  • the amount of displacement of the laminated piezoelectric bimorphs 8, 9 are differentiated thereby to incline the carriage 15 in the horizontal plane.
  • Fig. 4 is an exploded perspective view of laminated piezoelectric bimorphs according to still another embodiment of the present invention.
  • Piezoelectric bimorphs with the central parts thereof fixedly supported by fixing members are constructed of tabular piezoelectric elements 21a, 21b; 22a, 22b; 23a, 23b; 24a, 24b applied vertically on the surfaces of the thin metal strip 7 in such a manner as to be separated at the central parts thereof.
  • the piezoelectric bimorphs on the sides on the fixing members are drivable independently, thereby resulting in the great advantage that an inclination can be corrected or micro positioning is made possible as described above.
  • Fig. 5 is an exploded perspective view of a laminated piezoelectric bimorphs according to a further embodiment of the present invention.
  • a rectangular thin metal strip 7 is formed by bending a metal sheet, and is configured in such a manner that the ends of the thin metal strip 7 are located at the central parts of the piezoelectric elements 10a, 10b to be laminated.
  • the amount of displacement as a piezoelectric bimorph is not affected, and also the fact that the rectangular thin metal strip can be obtained from a sheet of metal simplifies the construction easy to fabricate.
  • Fig. 6 is an exploded perspective view of a laminated piezoelectric unit according to a still further embodiment of the present invention.
  • Rectangular thin metal strips 7a, 7b bent in channel shape or C-shape are opposed to each other thereby to make up a thin metal strip arrangement formed in rectangle with the ends of the strips 7a, 7b at the central parts of the piezoelectric elements 10a, 10b; 11a, 11b to be laminated.
  • the thin metal strips 7a, 7b are fabricated by being bent only in one direction, thereby leading to a high mass production efficiency.
  • Fig. 7 is an exploded view of a micro-displacement unit according to another embodiment of the present invention.
  • Micro-displacement units 25a, 25b with tabular piezoelectric elements attached vertically on the surfaces of rectangular thin metal strips 7a, 7b are bent in channel shape and arranged with the ends thereof opposed to each other.
  • the ends of the micro-displacement units 25a, 25b are fixedly supported by fixing members 13a, 13b. Since this apparatus is constructed of fully independent micro displacement units, the great advantage results that the variations in the characteristics of the piezoelectric cantilever beam mode bimorphs are offset by adjusting the length of the fixed parts of the piezoelectric bimorphs at the time of mounting thereof by the fixing members.
  • Fig. 8 is an exploded perspective view of a piezoelectric micro-displacement unit according to still another embodiment of the present invention.
  • a piezoelectric cantilever beam mode bimorph is coupled with a laminated both ends-supported bimorph thereof by a metal thin plate, they are affected by each other.
  • the modulus of flexural rigidity of the thin metal strips on the sides of the laminated piezoelectric both ends-supported bimorph thereof supported is increased by forming U-shaped recesses 26a, 26b, 26c, 26d as shown in Fig. 7 or narrow parts 26a', 26b', 26c', 26d' as shown in Fig. 8.
  • apertures 27 are formed in the thin metal strip, piezoelectric elements are bonded to each other at these parts thereby to improve the bonding strength between the metal and piezoelectric elements.
  • Figs. 9A and 9B are diagrams showing a micro-displacement unit for a solid-state image sensor according to another embodiment of the present invention.
  • Fig. 9A is a perspective view of the apparatus, and Fig. 9B an exploded perspective view thereof.
  • a solid-state image sensor device 27 is mounted on a carriage 15. Signals of the solid-state image sensor device 27 and signals applied to voltage application terminals 16, 17, 18, 19 of laminated piezoelectric bimorphs 8, 9, 10, 11 are connected to a flexible base board 29 for connection to a printed board 28 mounted on the bottom of the base board 12.
  • This construction provides an apparatus capable of accurate adjustment of mounting positions and color matching for a given solid-state image sensor device.
  • a compact micro-displacement unit which is simple in construction and capable of independent displacement in two directions, comprising laminated piezoelectric bimorphs of cantilever type and laminated piezoelectric bimorphs with the ends thereof supported, both vibrators being configured in the same plane.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Claims (11)

  1. Zweidimensionale piezoelektrische Mikroverschiebungseinheit mit einer Anzahl von jeweils zwei aneinander laminierte tafelförmige piezoelektrische Elemente (8a,8b; 9a,9b;10a,10b;11a,11b) enthaltenden piezoelektrischen Zweikristallelementen (8,9,10,11), wobei die tafelförmigen piezoelektrischen Elemente (8a,8b;9a,9b;10a,10b;11a,11b) eine Polarisationsachse längs der Richtung ihrer Dicke aufweisen und die Polarisationsachsen von jeweils zwei aneinander laminierten piezoelektrischen Elementen parallel sind, sowie mit inneren und äußeren Elektroden (16,17,18,19) an deren gegenüberliegenden Oberflächen, einer Anzahl von Befestigungselementen (13a,13b) zur festen Halterung eines Paars von gegenüberliegend angeordneten piezoelektrischen Zweikristallelementen (10,11) an den mittleren Bereichen von deren Länge, und einem an einem weiteren Paar von gegenüberliegend angeordneten piezoelektrischen Zweikristallelementen (8,9) angeordneten Schlitten (15), wobei die Zweikristallelemente (8,9,10,11) an ihren längsweisen Enden so verbunden sind, daß das weitere Paar von Zweikristallelementen (8,9) von dem einen Paar von Zweikristallelementen (10,11) getragen ist, dadurch gekennzeichnet, daß die tafelförmigen piezoelektrischen Elemente (8a,8b;9a,9b; 10a,10b;11a,11b) an den gegenüberliegenden Seiten eines in eine rechteckige Form gebogenen dünnen Metallstreifens (7) aneinander laminiert sind, wobei die gebogenen Bereiche des Metallstreifens (7) die Verbindungen der Zweikristallelemente an deren längsweisen Enden bilden und die Paare von piezoelektrischen Zweikristallelementen (8,9;10,11) in der gleichen Ebene bezüglich der durch den dünnen Metallstreifen (7) gebildeten rechteckigen Form konfiguriert sind.
  2. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach Anspruch 1, bei der die inneren und äußeren Elektroden (16,17,18,19) der laminierten piezoelektrischen Zweikristallelemente unabhängige Spannungszuführungsanschlüsse (16,17,18,19) bilden, und der dünne Metallstreifen (7) einen gemeinsamen Spannungszuführungsanschluß (20) für alle laminierten piezoelektrischen Zweikristallelemente bildet.
  3. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach Anspruch 1 oder 2, bei der die inneren und äußeren Elektroden der von den Befestigungselementen (13a,13b) fest gehalterten laminierten piezoelektrischen Zweikristallelemente (10,11) für eine unabhängige Spannungszuführung an deren mittleren Bereichen isoliert sind.
  4. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach einem der Ansprüche 1 bis 3, bei der die tafelförmigen piezoelektrischen Elemente (10a,10b;11a,11b) des Paars von durch Befestigungselemente (13a,13b) an deren mittleren Bereichen fest gehalterten piezoelektrischen Zweikristallelementen (10,11) an deren festgelegten Bereichen isoliert sind.
  5. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach einem der Ansprüche 1 bis 4, bei der sich die Enden des dünnen Metallstreifens (7) mit den festgelegten mittleren Bereichen der von den Befestigungselementen (13a,13b) fest gehalterten laminierten piezoelektrischen Zweikristallelemente (10,11) in Übereinstimmung befinden.
  6. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach einem der Ansprüche 1 bis 4, bei der zwei C-förmige Streifen aus dünnem Metall (7a,7b) in eine rechteckige Form gebracht sind, wobei sich die Enden der beiden dünnen Metallstreifen (7a,7b) mit den mittleren festgelegten Bereichen der durch Befestigungselemente (13a,13b) fest gehalterten laminierten piezoelektrischen Zweikristallelemente (8,9) in Übereinstimmung befinden.
  7. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach einem der Ansprüche 1 bis 4, enthaltend zwei jeweils an den inneren und äußeren Oberflächen eines dünnen in eine C-Form gebogenen Metallstreifens befestigte tafelförmige piezoelektrische Zweikristallelemente umfassende Mikroverschiebungsanordnungen (25a,25b), wobei die Mikroverschiebungseinheiten (25a,25b) mit ihren Enden einander gegenüberliegend angeordnet sind, wobei die Enden durch Befestigungselemente (13a,13b) fest gehaltert sind.
  8. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach einem der Ansprüche 1 bis 7, bei der in dem dünnen Metallstreifen eine Anzahl von Öffnungen (27) ausgebildet sind.
  9. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach einem der Ansprüche 1 bis 8, bei der das Biegesteifigkeitsmodul des dünnen Metallstreifens (7) an den Enden der den daran angebrachten Schlitten (15) aufweisenden laminierten piezoelektrischen Schwingelemente (8,9) durch eine U-förmige Gestalt (26a-26d) oder schmale Teile (26a'-26d') erhöht ist.
  10. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach einem der Ansprüche 1 bis 9, bei der der Schlitten (15) einen darauf angebrachten Festkörperbildsensor (14) aufweist.
  11. Zweidimensionale piezoelektrische Mikroverschiebungseinheit nach Anspruch 10, enthaltend eine flexible Basisplatte (12), wobei Signale des auf dem Schlitten (15) angebrachten Festkörperbildsensors (14) extern verarbeitet und die an die laminierten piezoelektrischen Zweikristallelemente (8,9,10,11) angelegten Spannungszuführungssignale extern erzeugt werden.
EP87110218A 1986-07-15 1987-07-15 Zweidimensionales piezoelektrisches Antriebsystem Expired - Lifetime EP0253375B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP61165848A JPH0691635B2 (ja) 1986-07-15 1986-07-15 微小変位装置
JP165848/86 1986-07-15
JP62049296A JPH0671321B2 (ja) 1987-03-04 1987-03-04 固体撮像素子用微小変位装置
JP49296/87 1987-03-04

Publications (3)

Publication Number Publication Date
EP0253375A2 EP0253375A2 (de) 1988-01-20
EP0253375A3 EP0253375A3 (en) 1989-12-06
EP0253375B1 true EP0253375B1 (de) 1993-02-03

Family

ID=26389674

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87110218A Expired - Lifetime EP0253375B1 (de) 1986-07-15 1987-07-15 Zweidimensionales piezoelektrisches Antriebsystem

Country Status (2)

Country Link
EP (1) EP0253375B1 (de)
DE (1) DE3783960T2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005104257A1 (en) * 2004-04-23 2005-11-03 Agency For Science, Technology And Research Micro-electromechanical device
US7777782B2 (en) 2005-11-04 2010-08-17 Nokia Corporation Stabilization of an image produced by optics
US8041201B2 (en) 2008-04-03 2011-10-18 Nokia Corporation Camera module having movable lens

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08280185A (ja) * 1995-04-07 1996-10-22 Nikon Corp 超音波アクチュエータ
JPH10105243A (ja) * 1996-09-10 1998-04-24 Hewlett Packard Co <Hp> 位置決め機構、位置決め装置及び情報記録装置
US6252333B1 (en) * 1998-02-20 2001-06-26 Seiko Instruments Inc. Stage utilizing ultrasonic motor and electronic equipment and printer utilizing the stage
US6017313A (en) 1998-03-20 2000-01-25 Hypertension Diagnostics, Inc. Apparatus and method for blood pressure pulse waveform contour analysis
DE19927129C1 (de) 1999-06-15 2001-01-04 Wolf Gmbh Richard Fokussier- und Brennweiteneinstellvorrichtung für eine Videokamera
US6331161B1 (en) * 1999-09-10 2001-12-18 Hypertension Diagnostics, Inc Method and apparatus for fabricating a pressure-wave sensor with a leveling support element
GB0203897D0 (en) * 2002-02-19 2002-04-03 Pbt Ip Ltd Low cost actuator with 2 dimensional motion
US7214919B2 (en) * 2005-02-08 2007-05-08 Micron Technology, Inc. Microelectronic imaging units and methods of manufacturing microelectronic imaging units
KR20080081003A (ko) * 2005-11-30 2008-09-05 노키아 코포레이션 이미지 안정화를 위한 방법 및 시스템
US10516348B2 (en) 2015-11-05 2019-12-24 Mems Drive Inc. MEMS actuator package architecture

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4520570A (en) * 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005104257A1 (en) * 2004-04-23 2005-11-03 Agency For Science, Technology And Research Micro-electromechanical device
US7596841B2 (en) 2004-04-23 2009-10-06 Agency For Science Technology And Research Micro-electromechanical devices and methods of fabricating thereof
US7777782B2 (en) 2005-11-04 2010-08-17 Nokia Corporation Stabilization of an image produced by optics
US8041201B2 (en) 2008-04-03 2011-10-18 Nokia Corporation Camera module having movable lens

Also Published As

Publication number Publication date
DE3783960D1 (de) 1993-03-18
EP0253375A3 (en) 1989-12-06
DE3783960T2 (de) 1993-05-27
EP0253375A2 (de) 1988-01-20

Similar Documents

Publication Publication Date Title
EP0253375B1 (de) Zweidimensionales piezoelektrisches Antriebsystem
EP0149017B1 (de) Piezoelektrische X-Y Verstellung
US5543956A (en) Torsional vibrators and light deflectors using the torsional vibrator
US7187104B2 (en) Vibration-type driving device, control apparatus for controlling the driving of the vibration-type driving device, and electronic equipment having the vibration-type driving device and the control apparatus
CN101284642B (zh) 具有倾斜电极的微机械器件
JP2839543B2 (ja) 変位発生装置
US7649301B2 (en) Actuator capable of driving with large rotational angle or large deflection angle
JP4511120B2 (ja) 超音波リニアモータ
US7508114B2 (en) Ultrasonic motor
US20060061235A1 (en) Ultrasonic motor and method for operating the same
KR20220055488A (ko) 카메라 모듈 및 이동 단말기
JPS62152379A (ja) ２方向微小変位装置
JP3348777B2 (ja) 差動型圧電アクチュエータ
CN111077628A (zh) 压电式透镜驱动装置、相机装置及电子设备
JPH0646207A (ja) 圧電駆動マイクロスキャナ
JPH0691635B2 (ja) 微小変位装置
JP2009044861A (ja) 駆動装置
KR20090012046A (ko) 압전 액추에이터의 구동 방법
JPS62152380A (ja) ２方向微小変位装置
KR20080093882A (ko) 구동 장치
JP3605899B2 (ja) 光スキャナ装置
JPH0455355B2 (de)
JPS62107685A (ja) ２方向微小変位装置
JPH0671321B2 (ja) 固体撮像素子用微小変位装置
JPS61285424A (ja) 光ビ−ム偏向器

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): DE FR GB

RIN1 Information on inventor provided before grant (corrected)

Inventor name: YAMASHITA, ICHIRO

Inventor name: WAKAMIYA, MASAYUKI

Inventor name: FUKADA, TETSUJI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): DE FR GB

17P Request for examination filed

Effective date: 19900110

17Q First examination report despatched

Effective date: 19910902

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB

REF Corresponds to:

Ref document number: 3783960

Country of ref document: DE

Date of ref document: 19930318

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: 746

Effective date: 19960628

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 19990709

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19990714

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19990716

Year of fee payment: 13

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20000715

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20000715

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20010330

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20010501