DE3669234D1 - Methode und geraet zur ionenstrahlbearbeitung. - Google Patents

Methode und geraet zur ionenstrahlbearbeitung.

Info

Publication number
DE3669234D1
DE3669234D1 DE8686302043T DE3669234T DE3669234D1 DE 3669234 D1 DE3669234 D1 DE 3669234D1 DE 8686302043 T DE8686302043 T DE 8686302043T DE 3669234 T DE3669234 T DE 3669234T DE 3669234 D1 DE3669234 D1 DE 3669234D1
Authority
DE
Germany
Prior art keywords
ion beam
beam processing
processing
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686302043T
Other languages
English (en)
Inventor
John A Doherty
Billy W Ward
David C Shaver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
Micrion LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micrion LP filed Critical Micrion LP
Application granted granted Critical
Publication of DE3669234D1 publication Critical patent/DE3669234D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching for microworking, e. g. etching of gratings or trimming of electrical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Drying Of Semiconductors (AREA)
  • Electron Beam Exposure (AREA)
DE8686302043T 1985-04-24 1986-03-19 Methode und geraet zur ionenstrahlbearbeitung. Expired - Lifetime DE3669234D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US90/001320 US4639301B2 (en) 1985-04-24 1985-04-24 Focused ion beam processing

Publications (1)

Publication Number Publication Date
DE3669234D1 true DE3669234D1 (de) 1990-04-05

Family

ID=24919706

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686302043T Expired - Lifetime DE3669234D1 (de) 1985-04-24 1986-03-19 Methode und geraet zur ionenstrahlbearbeitung.

Country Status (6)

Country Link
US (1) US4639301B2 (de)
EP (1) EP0200333B1 (de)
JP (2) JPH063728B2 (de)
KR (1) KR930007369B1 (de)
CA (1) CA1236223A (de)
DE (1) DE3669234D1 (de)

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Also Published As

Publication number Publication date
JPH063728B2 (ja) 1994-01-12
US4639301B1 (en) 1989-06-27
CA1236223A (en) 1988-05-03
US4639301A (en) 1987-01-27
EP0200333B1 (de) 1990-02-28
JPH0547934B2 (de) 1993-07-20
KR860008582A (ko) 1986-11-17
JPS61248346A (ja) 1986-11-05
EP0200333A3 (en) 1987-09-02
KR930007369B1 (ko) 1993-08-09
JPH03138846A (ja) 1991-06-13
EP0200333A2 (de) 1986-11-05
US4639301B2 (en) 1999-05-04

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Legal Events

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8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: FEI CO., HILLSBORO, OREG., US

8328 Change in the person/name/address of the agent

Representative=s name: KRAMER - BARSKE - SCHMIDTCHEN, 81245 MUENCHEN