DE3516587A1 - Poroeser siliciumcarbidsinter und verfahren zu seiner herstellung - Google Patents
Poroeser siliciumcarbidsinter und verfahren zu seiner herstellungInfo
- Publication number
- DE3516587A1 DE3516587A1 DE19853516587 DE3516587A DE3516587A1 DE 3516587 A1 DE3516587 A1 DE 3516587A1 DE 19853516587 DE19853516587 DE 19853516587 DE 3516587 A DE3516587 A DE 3516587A DE 3516587 A1 DE3516587 A1 DE 3516587A1
- Authority
- DE
- Germany
- Prior art keywords
- silicon carbide
- sinter
- weight
- oxide
- crystals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 122
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 80
- 238000000034 method Methods 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000013078 crystal Substances 0.000 claims description 85
- 239000011148 porous material Substances 0.000 claims description 58
- 239000002245 particle Substances 0.000 claims description 40
- 238000005245 sintering Methods 0.000 claims description 38
- 229910021426 porous silicon Inorganic materials 0.000 claims description 25
- 239000000126 substance Substances 0.000 claims description 17
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 12
- 238000001704 evaporation Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 8
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 8
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 239000011651 chromium Substances 0.000 claims description 8
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 7
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- 229910052580 B4C Inorganic materials 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 5
- 239000005997 Calcium carbide Substances 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 4
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 claims description 4
- 229910052810 boron oxide Inorganic materials 0.000 claims description 4
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 4
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 4
- 239000000292 calcium oxide Substances 0.000 claims description 4
- 229910001567 cementite Inorganic materials 0.000 claims description 4
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 4
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 4
- DEIVNMVWRDMSMJ-UHFFFAOYSA-N hydrogen peroxide;oxotitanium Chemical compound OO.[Ti]=O DEIVNMVWRDMSMJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052746 lanthanum Inorganic materials 0.000 claims description 4
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 4
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 4
- 229910001947 lithium oxide Inorganic materials 0.000 claims description 4
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- CLZWAWBPWVRRGI-UHFFFAOYSA-N tert-butyl 2-[2-[2-[2-[bis[2-[(2-methylpropan-2-yl)oxy]-2-oxoethyl]amino]-5-bromophenoxy]ethoxy]-4-methyl-n-[2-[(2-methylpropan-2-yl)oxy]-2-oxoethyl]anilino]acetate Chemical compound CC1=CC=C(N(CC(=O)OC(C)(C)C)CC(=O)OC(C)(C)C)C(OCCOC=2C(=CC=C(Br)C=2)N(CC(=O)OC(C)(C)C)CC(=O)OC(C)(C)C)=C1 CLZWAWBPWVRRGI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 239000004408 titanium dioxide Substances 0.000 claims description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 4
- 150000001247 metal acetylides Chemical class 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 27
- 238000000465 moulding Methods 0.000 description 17
- 229910052799 carbon Inorganic materials 0.000 description 16
- 239000012530 fluid Substances 0.000 description 15
- 239000007858 starting material Substances 0.000 description 13
- 230000007423 decrease Effects 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 239000003054 catalyst Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 229910002804 graphite Inorganic materials 0.000 description 8
- 239000010439 graphite Substances 0.000 description 8
- 239000011230 binding agent Substances 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 6
- 239000006260 foam Substances 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 229910039444 MoC Inorganic materials 0.000 description 4
- CAVCGVPGBKGDTG-UHFFFAOYSA-N alumanylidynemethyl(alumanylidynemethylalumanylidenemethylidene)alumane Chemical compound [Al]#C[Al]=C=[Al]C#[Al] CAVCGVPGBKGDTG-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 4
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004566 building material Substances 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 239000011233 carbonaceous binding agent Substances 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000004927 clay Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011363 dried mixture Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000006261 foam material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000011856 silicon-based particle Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000004438 BET method Methods 0.000 description 1
- 229920002261 Corn starch Polymers 0.000 description 1
- 229920001732 Lignosulfonate Polymers 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 229910026551 ZrC Inorganic materials 0.000 description 1
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000006230 acetylene black Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 210000002421 cell wall Anatomy 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011294 coal tar pitch Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009770 conventional sintering Methods 0.000 description 1
- 239000008120 corn starch Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 1
- 235000013379 molasses Nutrition 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000011236 particulate material Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 229910003468 tantalcarbide Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2068—Other inorganic materials, e.g. ceramics
- B01D39/2072—Other inorganic materials, e.g. ceramics the material being particulate or granular
- B01D39/2075—Other inorganic materials, e.g. ceramics the material being particulate or granular sintered or bonded by inorganic agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J27/00—Catalysts comprising the elements or compounds of halogens, sulfur, selenium, tellurium, phosphorus or nitrogen; Catalysts comprising carbon compounds
- B01J27/20—Carbon compounds
- B01J27/22—Carbides
- B01J27/224—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Ceramic Products (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59109908A JPS60255671A (ja) | 1984-05-29 | 1984-05-29 | 高強度多孔質炭化ケイ素焼結体とその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3516587A1 true DE3516587A1 (de) | 1985-12-05 |
| DE3516587C2 DE3516587C2 (en, 2012) | 1988-07-28 |
Family
ID=14522197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853516587 Granted DE3516587A1 (de) | 1984-05-29 | 1985-05-08 | Poroeser siliciumcarbidsinter und verfahren zu seiner herstellung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4777152A (en, 2012) |
| JP (1) | JPS60255671A (en, 2012) |
| DE (1) | DE3516587A1 (en, 2012) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4818732A (en) * | 1987-03-19 | 1989-04-04 | The Standard Oil Company | High surface area ceramics prepared from organosilane gels |
| BE1000795A4 (nl) * | 1987-07-30 | 1989-04-04 | Schelde Delta Bv Met Beperkte | Drager voor katalysatoren, reaktiekomponenten en dergelijke; en inrichting die zulke drager toepast. |
| US4829027A (en) * | 1987-01-12 | 1989-05-09 | Ceramatec, Inc. | Liquid phase sintering of silicon carbide |
| DE3736660A1 (de) * | 1987-10-29 | 1989-05-11 | Mtu Muenchen Gmbh | Verfahren zur herstellung eines poroesen formkoerpers |
| US5093289A (en) * | 1988-04-12 | 1992-03-03 | Heliotronic Forschungs- Und Entwicklungsgesellschaft Fur Solarzellen-Grundstoffe Mbh | Ceramic material permitting the passage of fluids and based on silicon powder reaction-bonded in the presence of carbon |
| US5356578A (en) * | 1988-08-08 | 1994-10-18 | Kawasaki Steel Corporation | Mold for slip casting and method of slip casting |
| US5387334A (en) * | 1991-02-15 | 1995-02-07 | Toa Medical Electronics Co., Ltd. | Apparatus for regulating liquid temperature |
| EP0757024A1 (en) * | 1995-07-26 | 1997-02-05 | Sumitomo Electric Industries, Ltd. | Silicon nitride porous body and method of preparing the same |
| EP0796830A1 (de) * | 1996-03-23 | 1997-09-24 | Thomas Josef Heimbach GmbH & Co. | Poröser durchströmbarer Formkörper sowie Verfahren zu seiner Herstellung |
| DE19727115A1 (de) * | 1996-07-01 | 1998-01-08 | Fraunhofer Ges Forschung | Poröse Siliciumcarbidkeramik und Verfahren zu ihrer Herstellung |
| US5750449A (en) * | 1993-06-14 | 1998-05-12 | Sumitomo Electric Industries, Ltd. | Ceramic porous bodies and method of producing the same |
| WO1998030328A1 (fr) * | 1997-01-13 | 1998-07-16 | Pechiney Recherche | Support de catalyseur a base de carbure de silicium a surface specifique elevee sous forme de granule ayant des caracteristiques mecaniques ameriorees |
| FR2766389A1 (fr) * | 1997-07-25 | 1999-01-29 | Pechiney Recherche | Mousse de carbure de silicium a surface specifique elevee et a caracteristiques mecaniques ameliorees |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6183689A (ja) * | 1984-09-27 | 1986-04-28 | イビデン株式会社 | 炭化ケイ素質ハニカム構造体 |
| JPS6191076A (ja) * | 1984-10-12 | 1986-05-09 | イビデン株式会社 | 多孔質炭化ケイ素焼結体とその製造方法 |
| JPS61191575A (ja) * | 1985-02-19 | 1986-08-26 | イビデン株式会社 | 多孔質炭化珪素焼結体とその製造方法 |
| JPH0798695B2 (ja) * | 1986-05-29 | 1995-10-25 | イビデン株式会社 | 半導体製造設備用の断熱材 |
| JPS637814A (ja) * | 1986-06-30 | 1988-01-13 | Ibiden Co Ltd | セラミツクフイルタ− |
| US5002905A (en) * | 1986-08-22 | 1991-03-26 | Stemcor Corporation | Hexagonal silicon carbide platelets and preforms and methods for making and using same |
| US4981665A (en) * | 1986-08-22 | 1991-01-01 | Stemcor Corporation | Hexagonal silicon carbide platelets and preforms and methods for making and using same |
| JPH0255273A (ja) * | 1988-08-18 | 1990-02-23 | Showa Denko Kk | メカニカルシール用炭化珪素焼結体およびそれを用いたメカニカルシール |
| FR2668145B1 (fr) * | 1990-10-17 | 1993-01-22 | Ceramiques Composites | Corps fritte en carbure de silicium notamment pour garniture mecanique et garniture comportant un tel corps fritte. |
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Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4829027A (en) * | 1987-01-12 | 1989-05-09 | Ceramatec, Inc. | Liquid phase sintering of silicon carbide |
| US4818732A (en) * | 1987-03-19 | 1989-04-04 | The Standard Oil Company | High surface area ceramics prepared from organosilane gels |
| BE1000795A4 (nl) * | 1987-07-30 | 1989-04-04 | Schelde Delta Bv Met Beperkte | Drager voor katalysatoren, reaktiekomponenten en dergelijke; en inrichting die zulke drager toepast. |
| DE3736660A1 (de) * | 1987-10-29 | 1989-05-11 | Mtu Muenchen Gmbh | Verfahren zur herstellung eines poroesen formkoerpers |
| EP0314142A3 (en) * | 1987-10-29 | 1990-01-10 | Mtu Muenchen Gmbh | Process for the fabrication of a porous shaped body |
| US5093289A (en) * | 1988-04-12 | 1992-03-03 | Heliotronic Forschungs- Und Entwicklungsgesellschaft Fur Solarzellen-Grundstoffe Mbh | Ceramic material permitting the passage of fluids and based on silicon powder reaction-bonded in the presence of carbon |
| US5356578A (en) * | 1988-08-08 | 1994-10-18 | Kawasaki Steel Corporation | Mold for slip casting and method of slip casting |
| US5387334A (en) * | 1991-02-15 | 1995-02-07 | Toa Medical Electronics Co., Ltd. | Apparatus for regulating liquid temperature |
| US5750449A (en) * | 1993-06-14 | 1998-05-12 | Sumitomo Electric Industries, Ltd. | Ceramic porous bodies and method of producing the same |
| EP0757024A1 (en) * | 1995-07-26 | 1997-02-05 | Sumitomo Electric Industries, Ltd. | Silicon nitride porous body and method of preparing the same |
| US5846460A (en) * | 1995-07-26 | 1998-12-08 | Sumitomo Electric Industries, Ltd. | Method of preparing silicon nitride porous body |
| EP0796830A1 (de) * | 1996-03-23 | 1997-09-24 | Thomas Josef Heimbach GmbH & Co. | Poröser durchströmbarer Formkörper sowie Verfahren zu seiner Herstellung |
| US6017473A (en) * | 1996-03-23 | 2000-01-25 | Verein Zur Forederung Des Instituts Fur Prozess-Und Anwendungstechnik Keramik An Der Rwth Aachen E.V. | Method for producing porous permeable molded body |
| DE19727115A1 (de) * | 1996-07-01 | 1998-01-08 | Fraunhofer Ges Forschung | Poröse Siliciumcarbidkeramik und Verfahren zu ihrer Herstellung |
| DE19727115C2 (de) * | 1996-07-01 | 2001-08-02 | Fraunhofer Ges Forschung | Poröse Siliciumcarbidkeramik und Verfahren zu ihrer Herstellung |
| FR2758279A1 (fr) * | 1997-01-13 | 1998-07-17 | Pechiney Recherche | Support de catalyseur a base de carbure de silicium a surface specifique elevee sous forme de granule ayant des caracteristiques mecaniques ameliorees |
| WO1998030328A1 (fr) * | 1997-01-13 | 1998-07-16 | Pechiney Recherche | Support de catalyseur a base de carbure de silicium a surface specifique elevee sous forme de granule ayant des caracteristiques mecaniques ameriorees |
| US6184178B1 (en) * | 1997-01-13 | 2001-02-06 | Pechiney Recherche | Catalyst support with base of silicon carbide with high specific surface area in granulated form having improved mechanical characteristics |
| FR2766389A1 (fr) * | 1997-07-25 | 1999-01-29 | Pechiney Recherche | Mousse de carbure de silicium a surface specifique elevee et a caracteristiques mecaniques ameliorees |
| WO1999004900A1 (fr) * | 1997-07-25 | 1999-02-04 | Pechiney Recherche | Mousse de carbure de silicium a surface specifique elevee et a caracteristiques mecaniques ameliorees |
Also Published As
| Publication number | Publication date |
|---|---|
| US4777152A (en) | 1988-10-11 |
| JPS60255671A (ja) | 1985-12-17 |
| DE3516587C2 (en, 2012) | 1988-07-28 |
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