DE3483437D1 - Halbleiter-rom-anordnung und herstellungsverfahren. - Google Patents

Halbleiter-rom-anordnung und herstellungsverfahren.

Info

Publication number
DE3483437D1
DE3483437D1 DE8484104787T DE3483437T DE3483437D1 DE 3483437 D1 DE3483437 D1 DE 3483437D1 DE 8484104787 T DE8484104787 T DE 8484104787T DE 3483437 T DE3483437 T DE 3483437T DE 3483437 D1 DE3483437 D1 DE 3483437D1
Authority
DE
Germany
Prior art keywords
manufacturing
rom array
semiconductor rom
semiconductor
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8484104787T
Other languages
English (en)
Inventor
Shoji C O Patent Devi Ariizumi
Taira C O Patent Devisio Iwase
Fujio C O Patent Devis Masuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3483437D1 publication Critical patent/DE3483437D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/27—ROM only
    • H10B20/30—ROM only having the source region and the drain region on the same level, e.g. lateral transistors
    • H10B20/34—Source electrode or drain electrode programmed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Memories (AREA)
  • Read Only Memory (AREA)
DE8484104787T 1983-04-28 1984-04-27 Halbleiter-rom-anordnung und herstellungsverfahren. Expired - Lifetime DE3483437D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58075026A JPS59201461A (ja) 1983-04-28 1983-04-28 読み出し専用半導体記憶装置およびその製造方法

Publications (1)

Publication Number Publication Date
DE3483437D1 true DE3483437D1 (de) 1990-11-29

Family

ID=13564252

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484104787T Expired - Lifetime DE3483437D1 (de) 1983-04-28 1984-04-27 Halbleiter-rom-anordnung und herstellungsverfahren.

Country Status (4)

Country Link
US (2) US4737835A (de)
EP (1) EP0124115B1 (de)
JP (1) JPS59201461A (de)
DE (1) DE3483437D1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5994454A (ja) * 1982-11-19 1984-05-31 Nec Kyushu Ltd 半導体装置とその製造方法
JPS61150369A (ja) * 1984-12-25 1986-07-09 Toshiba Corp 読み出し専用半導体記憶装置およびその製造方法
JPS61183953A (ja) * 1985-02-08 1986-08-16 Toshiba Corp 読み出し専用半導体記憶装置
JPS61183954A (ja) * 1985-02-08 1986-08-16 Toshiba Corp 読み出し専用半導体記憶装置の製造方法
KR890004962B1 (ko) * 1985-02-08 1989-12-02 가부시끼가이샤 도오시바 반도체장치 및 그 제조방법
JPS6237960A (ja) * 1985-08-13 1987-02-18 Toshiba Corp 読み出し専用半導体記憶装置の製造方法
JPS6237961A (ja) * 1985-08-13 1987-02-18 Toshiba Corp 読み出し専用半導体記憶装置
KR900000065B1 (ko) * 1985-08-13 1990-01-19 가부시끼가이샤 도오시바 독출전용 반도체기억장치와 그 제조방법
JPH06105778B2 (ja) * 1985-08-15 1994-12-21 株式会社東芝 読み出し専用半導体記憶装置およびその製造方法
JPS6240765A (ja) * 1985-08-15 1987-02-21 Toshiba Corp 読み出し専用半導体記憶装置およびその製造方法
JPS62101069A (ja) * 1985-10-28 1987-05-11 Toshiba Corp 半導体装置の製造方法
JPS63128750A (ja) * 1986-11-19 1988-06-01 Toshiba Corp 半導体装置
JPH01129440A (ja) * 1987-11-14 1989-05-22 Fujitsu Ltd 半導体装置
JPH01256125A (ja) * 1988-04-05 1989-10-12 Hitachi Ltd 半導体集積回路装置の製造方法
FR2634318B1 (fr) * 1988-07-13 1992-02-21 Commissariat Energie Atomique Procede de fabrication d'une cellule de memoire integree
US5204276A (en) * 1988-12-06 1993-04-20 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor device
JP2772020B2 (ja) * 1989-02-22 1998-07-02 株式会社東芝 Ｍｏｓ型半導体装置
JPH0831529B2 (ja) * 1989-11-20 1996-03-27 株式会社東芝 半導体集積回路装置の論理プログラム方法
US5128738A (en) * 1991-05-16 1992-07-07 At&T Bell Laboratories Integrated circuit
US5330924A (en) * 1993-11-19 1994-07-19 United Microelectronics Corporation Method of making 0.6 micrometer word line pitch ROM cell by 0.6 micrometer technology
US5578873A (en) * 1994-10-12 1996-11-26 Micron Technology, Inc. Integrated circuitry having a thin film polysilicon layer in ohmic contact with a conductive layer

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5915495B2 (ja) * 1974-10-04 1984-04-10 日本電気株式会社 半導体装置
US4475964A (en) * 1979-02-20 1984-10-09 Tokyo Shibaura Denki Kabushiki Kaisha Method of manufacturing a semiconductor device
US4324238A (en) * 1979-02-28 1982-04-13 Abbott Laboratories Equipment sets having a combined air barrier and liquid sequencing device for the sequential administration of medical liquids at dual flow rates
US4291322A (en) * 1979-07-30 1981-09-22 Bell Telephone Laboratories, Incorporated Structure for shallow junction MOS circuits
GB2070329B (en) * 1980-01-25 1983-10-26 Tokyo Shibaura Electric Co Semiconductor memory device
JPS56111264A (en) * 1980-02-06 1981-09-02 Agency Of Ind Science & Technol Manufacture of semiconductor device
US4372031A (en) * 1980-03-21 1983-02-08 Texas Instruments Incorporated Method of making high density memory cells with improved metal-to-silicon contacts
JPS56134757A (en) * 1980-03-26 1981-10-21 Nec Corp Complementary type mos semiconductor device and its manufacture
US4341009A (en) * 1980-12-05 1982-07-27 International Business Machines Corporation Method for making an electrical contact to a silicon substrate through a relatively thin layer of silicon dioxide on the surface of the substrate
US4403394A (en) * 1980-12-17 1983-09-13 International Business Machines Corporation Formation of bit lines for ram device
JPS5827359A (ja) * 1981-08-11 1983-02-18 Fujitsu Ltd 半導体記憶装置及びその製造方法
JPS60116167A (ja) * 1983-11-29 1985-06-22 Toshiba Corp 半導体記憶装置及びその製造方法
HU194830B (en) * 1984-10-05 1988-03-28 Richter Gedeon Vegyeszet Process for the production of derivatives of piridine

Also Published As

Publication number Publication date
US4855248A (en) 1989-08-08
US4737835A (en) 1988-04-12
EP0124115B1 (de) 1990-10-24
EP0124115A3 (en) 1986-10-08
JPS59201461A (ja) 1984-11-15
EP0124115A2 (de) 1984-11-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee