DE3448122C2 - - Google Patents

Info

Publication number
DE3448122C2
DE3448122C2 DE3448122A DE3448122A DE3448122C2 DE 3448122 C2 DE3448122 C2 DE 3448122C2 DE 3448122 A DE3448122 A DE 3448122A DE 3448122 A DE3448122 A DE 3448122A DE 3448122 C2 DE3448122 C2 DE 3448122C2
Authority
DE
Germany
Prior art keywords
gate electrode
region
source
layer
concave region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3448122A
Other languages
German (de)
English (en)
Inventor
Tatsuo Itami Hyogo Jp Okamoto
Kouji Itami Hyogo Jp Eguchi
Saburou Itami Hyogo Jp Oosaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE3448122C2 publication Critical patent/DE3448122C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/025—Manufacture or treatment forming recessed gates, e.g. by using local oxidation
    • H10D64/027—Manufacture or treatment forming recessed gates, e.g. by using local oxidation by etching at gate locations

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
DE3448122A 1983-09-26 1984-07-17 Expired - Fee Related DE3448122C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58179647A JPS6070766A (ja) 1983-09-26 1983-09-26 半導体装置の製造方法

Publications (1)

Publication Number Publication Date
DE3448122C2 true DE3448122C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-09

Family

ID=16069422

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3448122A Expired - Fee Related DE3448122C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1983-09-26 1984-07-17
DE3426306A Granted DE3426306A1 (de) 1983-09-26 1984-07-17 Mos-transistor und verfahren zu seiner herstellung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE3426306A Granted DE3426306A1 (de) 1983-09-26 1984-07-17 Mos-transistor und verfahren zu seiner herstellung

Country Status (3)

Country Link
US (1) US4710790A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS6070766A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (2) DE3448122C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4835584A (en) * 1986-11-27 1989-05-30 American Telephone And Telegraph Company, At&T Bell Laboratories Trench transistor
JPH0640583B2 (ja) * 1987-07-16 1994-05-25 株式会社東芝 半導体装置の製造方法
FR2635411A1 (fr) * 1988-08-11 1990-02-16 Sgs Thomson Microelectronics Memoire de type eprom a haute densite d'integration avec une organisation en damier, un facteur de couplage ameliore et une possibilite de redondance
FR2635409B1 (fr) * 1988-08-11 1991-08-02 Sgs Thomson Microelectronics Memoire de type eprom a haute densite d'integration possedant un facteur de couplage eleve, et son procede de fabrication
FR2635408B1 (fr) * 1988-08-11 1992-04-10 Sgs Thomson Microelectronics Memoire de type eprom a haute densite d'integration
JPH0294477A (ja) * 1988-09-30 1990-04-05 Toshiba Corp 半導体装置及びその製造方法
US5726463A (en) * 1992-08-07 1998-03-10 General Electric Company Silicon carbide MOSFET having self-aligned gate structure
US5929476A (en) 1996-06-21 1999-07-27 Prall; Kirk Semiconductor-on-insulator transistor and memory circuitry employing semiconductor-on-insulator transistors
US5763310A (en) * 1996-10-08 1998-06-09 Advanced Micro Devices, Inc. Integrated circuit employing simultaneously formed isolation and transistor trenches
US6100146A (en) * 1996-10-30 2000-08-08 Advanced Micro Devices, Inc. Method of forming trench transistor with insulative spacers
US6500744B2 (en) * 1999-09-02 2002-12-31 Micron Technology, Inc. Methods of forming DRAM assemblies, transistor devices, and openings in substrates
US6826232B2 (en) 1999-12-20 2004-11-30 Koninklijke Philips Electronics N.V. Fine granular scalable video with embedded DCT coding of the enhancement layer
US6355944B1 (en) * 1999-12-21 2002-03-12 Philips Electronics North America Corporation Silicon carbide LMOSFET with gate reach-through protection
US6838722B2 (en) 2002-03-22 2005-01-04 Siliconix Incorporated Structures of and methods of fabricating trench-gated MIS devices
JP5344477B2 (ja) * 2009-08-28 2013-11-20 独立行政法人産業技術総合研究所 リセスゲート構造を有する絶縁ゲート型炭化珪素ラテラル電界効果トランジスタ
US9425305B2 (en) 2009-10-20 2016-08-23 Vishay-Siliconix Structures of and methods of fabricating split gate MIS devices
KR101728363B1 (ko) 2010-03-02 2017-05-02 비쉐이-실리코닉스 듀얼 게이트 디바이스의 구조 및 제조 방법
CN107482054B (zh) 2011-05-18 2021-07-20 威世硅尼克斯公司 半导体器件
US11217541B2 (en) 2019-05-08 2022-01-04 Vishay-Siliconix, LLC Transistors with electrically active chip seal ring and methods of manufacture
US11218144B2 (en) 2019-09-12 2022-01-04 Vishay-Siliconix, LLC Semiconductor device with multiple independent gates

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5126477A (ja) * 1974-08-29 1976-03-04 Mitsubishi Electric Corp Zetsuengeetogatadenkaikokatoranjisuta
JPS51118383A (en) * 1975-04-10 1976-10-18 Matsushita Electric Ind Co Ltd Manufacturing process for mos type semiconductor unit
US4243997A (en) * 1976-03-25 1981-01-06 Tokyo Shibaura Electric Co., Ltd. Semiconductor device
US4252579A (en) * 1979-05-07 1981-02-24 International Business Machines Corporation Method for making single electrode U-MOSFET random access memory utilizing reactive ion etching and polycrystalline deposition

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP 56-126973 A. In: Patents Abstracts of Japan, Sect. E, Vol. 6, 1982, No. 6 (E-89) *
US-Z.: IEEE Transactions on Electron Devices, Vol. ED-30, No. 6, Juni 1983, S. 681-686 *

Also Published As

Publication number Publication date
US4710790A (en) 1987-12-01
JPH0586673B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-12-13
DE3426306A1 (de) 1985-04-11
DE3426306C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-26
JPS6070766A (ja) 1985-04-22

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