DE3347862A1 - - Google Patents

Info

Publication number
DE3347862A1
DE3347862A1 DE19833347862 DE3347862A DE3347862A1 DE 3347862 A1 DE3347862 A1 DE 3347862A1 DE 19833347862 DE19833347862 DE 19833347862 DE 3347862 A DE3347862 A DE 3347862A DE 3347862 A1 DE3347862 A1 DE 3347862A1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19833347862
Other languages
German (de)
Other versions
DE3347862C2 (US20100223739A1-20100909-C00005.png
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP57160782A external-priority patent/JPS5950008A/ja
Priority claimed from JP57160783A external-priority patent/JPS5950078A/ja
Priority claimed from JP58082536A external-priority patent/JPS59207814A/ja
Application filed filed Critical
Priority to DE3348407A priority Critical patent/DE3348407C2/de
Publication of DE3347862A1 publication Critical patent/DE3347862A1/de
Application granted granted Critical
Publication of DE3347862C2 publication Critical patent/DE3347862C2/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0726—Preparation by carboreductive nitridation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/03—Particle morphology depicted by an image obtained by SEM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/10—Solid density
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/32—Thermal properties
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
DE3347862A 1982-09-17 1983-09-15 Expired DE3347862C2 (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3348407A DE3348407C2 (de) 1982-09-17 1983-09-15 Lichtdurchlässiger, gesinterter Körper aus Aluminiumnitrid und Verfahren zu seiner Herstellung

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP57160782A JPS5950008A (ja) 1982-09-17 1982-09-17 窒化アルミニウム粉末及びその製造方法
JP57160783A JPS5950078A (ja) 1982-09-17 1982-09-17 窒化アルミニウム焼結体およびその製造方法
JP58082536A JPS59207814A (ja) 1983-05-13 1983-05-13 窒化アルミニウム粉末

Publications (2)

Publication Number Publication Date
DE3347862A1 true DE3347862A1 (US20100223739A1-20100909-C00005.png) 1985-03-14
DE3347862C2 DE3347862C2 (US20100223739A1-20100909-C00005.png) 1988-05-11

Family

ID=27303948

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3347862A Expired DE3347862C2 (US20100223739A1-20100909-C00005.png) 1982-09-17 1983-09-15
DE19833333406 Granted DE3333406A1 (de) 1982-09-17 1983-09-15 Feines aluminiumnitridpulver, verfahren zu seiner herstellung und es enthaltendes mittel

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19833333406 Granted DE3333406A1 (de) 1982-09-17 1983-09-15 Feines aluminiumnitridpulver, verfahren zu seiner herstellung und es enthaltendes mittel

Country Status (3)

Country Link
US (1) US4618592A (US20100223739A1-20100909-C00005.png)
DE (2) DE3347862C2 (US20100223739A1-20100909-C00005.png)
GB (1) GB2127390B (US20100223739A1-20100909-C00005.png)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3313836C2 (de) * 1983-04-16 1985-08-29 W.C. Heraeus Gmbh, 6450 Hanau Verwendung von Aluminiumnitrid für Laserröhrenbauteile
JPS60127267A (ja) * 1983-12-12 1985-07-06 株式会社東芝 高熱伝導性窒化アルミニウム焼結体の製造方法
JPS60195059A (ja) * 1984-03-15 1985-10-03 株式会社トクヤマ 複合焼結体
DE3572155D1 (en) * 1984-09-28 1989-09-14 Toshiba Kk Process for production of readily sinterable aluminum nitride powder
US4578234A (en) * 1984-10-01 1986-03-25 General Electric Company Process of pressureless sintering to produce dense high thermal conductivity ceramic body of deoxidized aluminum nitride
FR2571041A1 (fr) * 1984-10-02 1986-04-04 Centre Nat Rech Scient Procede de nitruration d'oxydes refractaires
US4578233A (en) * 1984-11-01 1986-03-25 General Electric Company Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride
US4578365A (en) * 1984-11-26 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride
US4578364A (en) * 1984-12-07 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride
US4578232A (en) * 1984-12-17 1986-03-25 General Electric Company Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
DE3684821D1 (de) * 1985-06-28 1992-05-21 Toshiba Kawasaki Kk Aluminiumnitridsinterkoerper und verfahren zu seiner herstellung.
GB2213500B (en) * 1985-08-13 1990-05-30 Tokuyama Soda Kk Sinterable aluminum nitride composition
DE3627317A1 (de) * 1985-08-13 1987-02-19 Tokuyama Soda Kk Sinterbare aluminiumnitridzusammensetzung, sinterkoerper aus dieser zusammensetzung und verfahren zu seiner herstellung
JPS6253417A (ja) * 1985-09-03 1987-03-09 Mitsubishi Chem Ind Ltd 窒化アルミニウム繊維およびその製法
US4897372A (en) * 1985-12-18 1990-01-30 General Electric Company High thermal conductivity ceramic body
DE3602420A1 (de) * 1986-01-28 1987-07-30 Kempten Elektroschmelz Gmbh Stabile schlickergussmasse auf basis von feinteiligen aluminiumnitrid-enthaltenden pulvern
DE3608326A1 (de) * 1986-03-13 1987-09-17 Kempten Elektroschmelz Gmbh Praktisch porenfreie formkoerper aus polykristallinem aluminiumnitrid und verfahren zu ihrer herstellung ohne mitverwendung von sinterhilfsmitteln
US4764321A (en) * 1986-03-28 1988-08-16 General Electric Company High thermal conductivity ceramic body
US4800183A (en) * 1986-04-09 1989-01-24 The United States Of America As Represented By The United States Department Of Energy Method for producing refractory nitrides
US4818455A (en) * 1986-05-30 1989-04-04 General Electric Company High thermal conductivity ceramic body
DE3787968T2 (de) * 1986-08-13 1994-02-17 Hitachi Metals Ltd Aluminiumnitridsinter und halbleitersubstrat, das daraus hergestellt ist.
US4820498A (en) * 1986-09-16 1989-04-11 Lanxide Technology Company, Lp Method for producing substantially pure alumina material
DE3777564D1 (de) * 1986-12-11 1992-04-23 Asahi Chemical Ind Aluminiumnitridprodukte und verfahren zu ihrer herstellung.
CA1276775C (en) * 1986-12-16 1990-11-27 Hachiro Ichikawa Process for producing an aluminum nitride powder
US4847221A (en) * 1987-01-13 1989-07-11 Kabushiki Kaisha Toshiba AlN sintered body having high thermal conductivity and a method of fabricating the same
JPS63260868A (ja) * 1987-01-20 1988-10-27 ケラモント、アドバンスド、セラミック、プロダクツ、コーポレーション 窒化アリミニウムの焼結体およびその製法
CA1329461C (en) * 1987-04-14 1994-05-17 Alcan International Limited Process of producing aluminum and titanium nitrides
US4778778A (en) * 1987-06-03 1988-10-18 Keramont Advanced Ceramic Products Corporation Process for the production of sintered aluminum nitrides
CA1318691C (en) * 1987-08-28 1993-06-01 Akira Yamakawa Sintered body of aluminum nitride and method for producing the same
US4866012A (en) * 1987-10-05 1989-09-12 Engelhard Corporation Carbothermally reduced ceramic materials and method of making same
US4929433A (en) * 1987-10-22 1990-05-29 Alfred University Method for the preparation of sinterable nitrides
CN1037321A (zh) * 1988-03-15 1989-11-22 唐化学原料公司 装甲材料
US5283214A (en) * 1988-09-02 1994-02-01 The Dow Chemical Company Increasing AlN thermal conductivity via pre-densification treatment
US5049367A (en) * 1988-10-05 1991-09-17 Sumitomo Chemical Co., Limited Aluminum nitride powder and process for preparation of the same
US5080879A (en) * 1988-12-01 1992-01-14 Alcan International Limited Process for producing silicon carbide platelets and the platelets so produced
EP0393524A3 (en) * 1989-04-17 1993-02-10 Kawasaki Steel Corporation Method of making a sintered body of aluminium nitride
US4977113A (en) * 1989-05-15 1990-12-11 Aluminum Company Of America Process for producing silicon aluminum oxynitride by carbothermic reaction
US5112579A (en) * 1989-12-07 1992-05-12 The Dow Chemical Company Continuous carbothermal reactor
US4983553A (en) * 1989-12-07 1991-01-08 The Dow Chemical Company Continuous carbothermal reactor
JP2786283B2 (ja) * 1989-12-22 1998-08-13 株式会社日立製作所 表面改質方法およびその装置並びに表面改質基材
US5096860A (en) * 1990-05-25 1992-03-17 Alcan International Limited Process for producing unagglomerated single crystals of aluminum nitride
DE4020905A1 (de) * 1990-06-30 1992-03-05 Hoechst Ag Verfahren zur herstellung von aluminiumnitrid
US5232970A (en) * 1990-08-31 1993-08-03 The Dow Chemical Company Ceramic-filled thermally-conductive-composites containing fusible semi-crystalline polyamide and/or polybenzocyclobutenes for use in microelectronic applications
US5100846A (en) * 1990-09-13 1992-03-31 The Dow Chemical Company Purification of carbothermally produced aluminum nitride
EP0576540B1 (en) * 1991-03-22 1995-09-20 The Dow Chemical Company Moving bed process for carbothermally synthesizing nonoxide ceramic powders
US5190738A (en) * 1991-06-17 1993-03-02 Alcan International Limited Process for producing unagglomerated single crystals of aluminum nitride
DE69218300T2 (de) * 1991-06-19 1997-10-09 Atochem Elf Sa Kontinuierliches Verfahren zur Herstellung von Aluminiumnitrid durch Karbonitrieren von Aluminium
US5246683A (en) * 1991-07-03 1993-09-21 Alcan Internatonal Limited Process for producing small particles of aluminum nitride and particles so-produced
US5540884A (en) * 1991-09-12 1996-07-30 The Dow Chemical Company Method of making co-fired, multilayer substrates
JPH05148026A (ja) * 1991-11-25 1993-06-15 Sumitomo Electric Ind Ltd 窒化ケイ素系焼結体
JP2623188B2 (ja) * 1992-01-29 1997-06-25 ソマール株式会社 バリスタ及びその製造方法
DE4232074A1 (de) * 1992-09-25 1994-03-31 Freiberg Bergakademie Verfahren zur Herstellung einer stabilen ethanolischen Aluminiumnitridsuspension für die nasse Formgebung
US5424261A (en) * 1993-12-22 1995-06-13 The Carborundum Company Low temperature sintering route for aluminum nitride ceramics
US5773377A (en) * 1993-12-22 1998-06-30 Crystalline Materials Corporation Low temperature sintered, resistive aluminum nitride ceramics
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
EP0743290B1 (en) * 1994-02-03 2003-05-07 Ngk Insulators, Ltd. Aluminum nitride sinter and production method therefor
FR2722492B1 (fr) * 1994-07-12 1997-03-14 Sumitomo Chemical Co Poudre de nitrure d'aluminium et corps fritte et composition de resine la contenant
JPH08271880A (ja) * 1995-04-03 1996-10-18 Toshiba Corp 遮光膜，液晶表示装置および遮光膜形成用材料
US6017485A (en) * 1996-03-28 2000-01-25 Carborundum Corporation Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck
JP3457495B2 (ja) * 1996-03-29 2003-10-20 日本碍子株式会社 窒化アルミニウム焼結体、金属埋設品、電子機能材料および静電チャック
US5932043A (en) * 1997-03-18 1999-08-03 International Business Machines Corporation Method for flat firing aluminum nitride/tungsten electronic modules
KR100381589B1 (ko) * 1999-09-30 2003-04-26 니뽄 가이시 가부시키가이샤 질화알루미늄 소결체 및 반도체 제조용 부재
JP4447750B2 (ja) * 1999-09-30 2010-04-07 日本碍子株式会社 窒化アルミニウム焼結体および半導体製造用部材
US7503825B2 (en) * 2004-05-21 2009-03-17 Osram Sylvania Inc. Aluminum nitride arc discharge vessel having high total transmittance and method of making same
US7799269B2 (en) * 2007-09-25 2010-09-21 Osram Sylvania Inc. Method of sintering AIN under a methane-containing nitrogen atmosphere
WO2010109960A1 (ja) * 2009-03-26 2010-09-30 株式会社東芝 窒化アルミニウム基板、窒化アルミニウム回路基板、半導体装置および窒化アルミニウム基板の製造方法
EP2749676A4 (en) * 2011-08-25 2015-03-11 Mitsubishi Materials Techno Co VACUUM STORAGE PROCESS AND DEVICE FOR CRYSTALLINE MATERIAL
CN104040675A (zh) 2011-09-29 2014-09-10 氮化物处理股份有限公司 无机材料、制作其的方法和装置、及其使用
EP2955156A4 (en) * 2013-02-08 2016-09-21 Tokuyama Corp ALUMINUM NITRIDE POWDER
JP6257362B2 (ja) * 2014-02-06 2018-01-10 株式会社神戸製鋼所 鉄鋼精錬用副資材
WO2018168666A1 (ja) * 2017-03-13 2018-09-20 Ａｇｃ株式会社 透光性セラミックス焼結体とその製造方法
JP6932995B2 (ja) * 2017-05-23 2021-09-08 Tdk株式会社 窒化物の単結晶

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0075857A2 (en) * 1981-09-28 1983-04-06 Kabushiki Kaisha Toshiba Sintered bodies of aluminum nitride

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB482150A (en) * 1936-10-31 1938-03-24 Daniel Gardner Improvements in or relating to processes for the manufacture of aluminium
FR1327707A (fr) * 1956-07-31 1963-05-24 Pechiney Prod Chimiques Sa Procédé de fabrication du nitrure d'aluminium
FR1175273A (fr) * 1957-05-16 1959-03-23 Pechiney Four pour la production continue de nitrure d'aluminium
US3108887A (en) * 1959-05-06 1963-10-29 Carborundum Co Refractory articles and method of making same
US3194635A (en) * 1961-07-18 1965-07-13 Norton Co Method for the production of aluminum refractory material
GB1054631A (US20100223739A1-20100909-C00005.png) * 1963-01-31 1967-01-11
US3436179A (en) * 1964-07-27 1969-04-01 Tokyo Shibaura Electric Co Method of preparing sintered masses of aluminum nitride
US3572992A (en) * 1967-07-05 1971-03-30 Tokyo Shibaura Electric Co Preparation of moulded and sintered aluminum nitride
GB1310362A (en) * 1969-12-16 1973-03-21 United States Borax Chem Process for purification of refractory metal nitrides
JPS5839764B2 (ja) * 1978-03-10 1983-09-01 株式会社東芝 窒化アルミニウム質粉末の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0075857A2 (en) * 1981-09-28 1983-04-06 Kabushiki Kaisha Toshiba Sintered bodies of aluminum nitride

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Chemical Abstracts 83 (1975) 151373 *
Chemical Abstracts 83 (1975) 167868 *

Also Published As

Publication number Publication date
GB2127390A (en) 1984-04-11
US4618592A (en) 1986-10-21
DE3333406C2 (US20100223739A1-20100909-C00005.png) 1989-05-11
GB8325030D0 (en) 1983-10-19
DE3347862C2 (US20100223739A1-20100909-C00005.png) 1988-05-11
DE3333406A1 (de) 1984-03-22
GB2127390B (en) 1986-11-26

Similar Documents

Publication Publication Date Title
DE3327110C2 (US20100223739A1-20100909-C00005.png)
DE3325985C2 (US20100223739A1-20100909-C00005.png)
FR2525306B1 (US20100223739A1-20100909-C00005.png)
DE3319311C2 (US20100223739A1-20100909-C00005.png)
DE3347862A1 (US20100223739A1-20100909-C00005.png)
DE3278104D1 (US20100223739A1-20100909-C00005.png)
FR2523258B1 (US20100223739A1-20100909-C00005.png)
FR2521665B1 (US20100223739A1-20100909-C00005.png)
FR2522359B1 (US20100223739A1-20100909-C00005.png)
FR2520844B1 (US20100223739A1-20100909-C00005.png)
DE3346807C2 (US20100223739A1-20100909-C00005.png)
CH655495B (US20100223739A1-20100909-C00005.png)
CH665521GA3 (US20100223739A1-20100909-C00005.png)
DE3313986C2 (US20100223739A1-20100909-C00005.png)
FR2521445B3 (US20100223739A1-20100909-C00005.png)
FR2520225B1 (US20100223739A1-20100909-C00005.png)
DE3347347C2 (US20100223739A1-20100909-C00005.png)
FR2523010B1 (US20100223739A1-20100909-C00005.png)
DE3218165C2 (US20100223739A1-20100909-C00005.png)
FR2519761B1 (US20100223739A1-20100909-C00005.png)
DE3222585C2 (US20100223739A1-20100909-C00005.png)
FR2523111B1 (US20100223739A1-20100909-C00005.png)
FR2526215B1 (US20100223739A1-20100909-C00005.png)
DE3223133C2 (US20100223739A1-20100909-C00005.png)
FR2520582B1 (US20100223739A1-20100909-C00005.png)

Legal Events

Date Code Title Description
Q172 Divided out of (supplement):

Ref country code: DE

Ref document number: 3333406

8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: C04B 35/58

AC Divided out of

Ref country code: DE

Ref document number: 3333406

Format of ref document f/p: P

D2 Grant after examination
8363 Opposition against the patent
AC Divided out of

Ref country code: DE

Ref document number: 3333406

Format of ref document f/p: P

8369 Partition in:

Ref document number: 3348407

Country of ref document: DE

Format of ref document f/p: P

Q171 Divided out to:

Ref country code: DE

Ref document number: 3348407

8331 Complete revocation
8327 Change in the person/name/address of the patent owner

Owner name: TOKUYAMA CORP., TOKUYAMA, YAMAGUCHI, JP

AH Division in

Ref country code: DE

Ref document number: 3348407

Format of ref document f/p: P