DE3777564D1 - Aluminiumnitridprodukte und verfahren zu ihrer herstellung. - Google Patents

Aluminiumnitridprodukte und verfahren zu ihrer herstellung.

Info

Publication number
DE3777564D1
DE3777564D1 DE8787310906T DE3777564T DE3777564D1 DE 3777564 D1 DE3777564 D1 DE 3777564D1 DE 8787310906 T DE8787310906 T DE 8787310906T DE 3777564 T DE3777564 T DE 3777564T DE 3777564 D1 DE3777564 D1 DE 3777564D1
Authority
DE
Germany
Prior art keywords
production
aluminum nitride
nitride products
products
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787310906T
Other languages
English (en)
Inventor
Masahiko Tajika
Morio Shimoshimizu
Takao Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Asahi Kasei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62103313A external-priority patent/JPH01119573A/ja
Application filed by Asahi Chemical Industry Co Ltd, Asahi Kasei Kogyo KK filed Critical Asahi Chemical Industry Co Ltd
Application granted granted Critical
Publication of DE3777564D1 publication Critical patent/DE3777564D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0726—Preparation by carboreductive nitridation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/03—Particle morphology depicted by an image obtained by SEM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/32—Thermal properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Ceramic Products (AREA)
  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
DE8787310906T 1986-12-11 1987-12-11 Aluminiumnitridprodukte und verfahren zu ihrer herstellung. Expired - Lifetime DE3777564D1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP29335486 1986-12-11
JP10331487 1987-04-28
JP62103313A JPH01119573A (ja) 1986-12-11 1987-04-28 多孔質体およびその製造方法
JP16135487 1987-06-30

Publications (1)

Publication Number Publication Date
DE3777564D1 true DE3777564D1 (de) 1992-04-23

Family

ID=27469106

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787310906T Expired - Lifetime DE3777564D1 (de) 1986-12-11 1987-12-11 Aluminiumnitridprodukte und verfahren zu ihrer herstellung.

Country Status (3)

Country Link
EP (1) EP0271353B1 (de)
KR (1) KR900004488B1 (de)
DE (1) DE3777564D1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1329461C (en) * 1987-04-14 1994-05-17 Alcan International Limited Process of producing aluminum and titanium nitrides
JP3593707B2 (ja) * 1993-03-19 2004-11-24 住友電気工業株式会社 窒化アルミニウムセラミックスとその製造方法
WO1996020127A1 (en) * 1994-12-23 1996-07-04 The Dow Chemical Company Aluminum nitride powders having high green density, and process for making same
JP4987238B2 (ja) 2005-03-25 2012-07-25 日本碍子株式会社 窒化アルミニウム焼結体、半導体製造用部材及び窒化アルミニウム焼結体の製造方法
WO2011093488A1 (ja) * 2010-01-29 2011-08-04 株式会社トクヤマ 球状窒化アルミニウム粉末の製造方法及び該方法により得られた球状窒化アルミニウム粉末
JP5618734B2 (ja) 2010-09-28 2014-11-05 株式会社トクヤマ 球状窒化アルミニウム粉末
CN103608312B (zh) 2011-04-21 2016-08-31 株式会社普利司通 陶瓷烧结体和制造陶瓷烧结体的方法
KR101516991B1 (ko) * 2014-02-25 2015-05-04 한국세라믹기술원 로드 형태의 질화알루미늄 제조방법
CN105884372B (zh) * 2016-04-12 2018-11-13 武汉理工大学 有机网络法合成AlN陶瓷粉体方法
CN110903092A (zh) * 2019-12-13 2020-03-24 苏州纳迪微电子有限公司 高纯度多孔AlN陶瓷及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3347862C2 (de) * 1982-09-17 1988-05-11 Tokuyama Soda K.K., Tokuyama, Yamaguchi, Jp
US4478785A (en) * 1983-08-01 1984-10-23 General Electric Company Process of pressureless sintering to produce dense, high thermal conductivity aluminum nitride ceramic body
JPS60176910A (ja) * 1984-02-22 1985-09-11 Tokuyama Soda Co Ltd 窒化アルミニウム粉末の製造方法
DE3608326A1 (de) * 1986-03-13 1987-09-17 Kempten Elektroschmelz Gmbh Praktisch porenfreie formkoerper aus polykristallinem aluminiumnitrid und verfahren zu ihrer herstellung ohne mitverwendung von sinterhilfsmitteln

Also Published As

Publication number Publication date
KR900004488B1 (ko) 1990-06-28
KR880007356A (ko) 1988-08-27
EP0271353A3 (en) 1989-05-31
EP0271353B1 (de) 1992-03-18
EP0271353A2 (de) 1988-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee