DE2713112A1 - Hochgeschwindigkeits-feldeffekttransistor - Google Patents

Hochgeschwindigkeits-feldeffekttransistor

Info

Publication number
DE2713112A1
DE2713112A1 DE19772713112 DE2713112A DE2713112A1 DE 2713112 A1 DE2713112 A1 DE 2713112A1 DE 19772713112 DE19772713112 DE 19772713112 DE 2713112 A DE2713112 A DE 2713112A DE 2713112 A1 DE2713112 A1 DE 2713112A1
Authority
DE
Germany
Prior art keywords
layer
gallium arsenide
indium
transistor according
active layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19772713112
Other languages
German (de)
English (en)
Inventor
Lawrence William James
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of DE2713112A1 publication Critical patent/DE2713112A1/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/64—Electrodes comprising a Schottky barrier to a semiconductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes
    • H10D30/87—FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10D62/852—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs being Group III-V materials comprising three or more elements, e.g. AlGaN or InAsSbP
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/056—Gallium arsenide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/072—Heterojunctions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/088—J-Fet, i.e. junction field effect transistor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/119—Phosphides of gallium or indium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/139—Schottky barrier

Landscapes

  • Junction Field-Effect Transistors (AREA)
DE19772713112 1976-03-29 1977-03-24 Hochgeschwindigkeits-feldeffekttransistor Ceased DE2713112A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/671,189 US4075651A (en) 1976-03-29 1976-03-29 High speed fet employing ternary and quarternary iii-v active layers

Publications (1)

Publication Number Publication Date
DE2713112A1 true DE2713112A1 (de) 1977-10-13

Family

ID=24693484

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772713112 Ceased DE2713112A1 (de) 1976-03-29 1977-03-24 Hochgeschwindigkeits-feldeffekttransistor

Country Status (7)

Country Link
US (1) US4075651A (enExample)
CA (1) CA1066430A (enExample)
DE (1) DE2713112A1 (enExample)
FR (1) FR2346857A1 (enExample)
GB (1) GB1559722A (enExample)
IL (1) IL51471A (enExample)
IT (1) IT1077375B (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2386903A1 (fr) * 1977-04-08 1978-11-03 Thomson Csf Transistor a effet de champ sur support a grande bande interdite
FR2399740A1 (fr) * 1977-08-02 1979-03-02 Thomson Csf Diode a avalanche a hetero-jonction, et oscillateur en mode dit " a temps de transit " utilisant une telle diode
FR2413780A1 (fr) * 1977-12-29 1979-07-27 Thomson Csf Procede de realisation d'un contact " metal-semi-conducteur " a barriere de potentiel de hauteur predeterminee, et composant semi-conducteur comportant au moins un contact obtenu par ce procede
US4287527A (en) * 1978-08-30 1981-09-01 Bell Telephone Laboratories, Incorporated Opto-electronic devices based on bulk crystals of complex semiconductors
FR2447612A1 (fr) * 1979-01-26 1980-08-22 Thomson Csf Composant semi-conducteur a heterojonction
US4204893A (en) * 1979-02-16 1980-05-27 Bell Telephone Laboratories, Incorporated Process for depositing chrome doped epitaxial layers of gallium arsenide utilizing a preliminary formed chemical vapor-deposited chromium oxide dopant source
US4266333A (en) * 1979-04-27 1981-05-12 Rca Corporation Method of making a Schottky barrier field effect transistor
FR2462027A1 (fr) * 1979-07-20 1981-02-06 Labo Electronique Physique Dispositif semi-conducteur comportant une couche tampon isolante
JPS5932902B2 (ja) * 1980-06-12 1984-08-11 インターナシヨナルビジネス マシーンズ コーポレーシヨン 半導体オ−ミツク接点
US4366493A (en) * 1980-06-20 1982-12-28 International Business Machines Corporation Semiconductor ballistic transport device
US4396833A (en) * 1981-01-22 1983-08-02 Harris Corporation Optomicrowave integrated circuit
SE8101994L (sv) * 1981-03-27 1982-09-28 Tove Per Arne Elektronisk krets med schottky-felttransistor med kontaktelement med olika schottky-barrierhojd
EP0067566A3 (en) * 1981-06-13 1985-08-07 Plessey Overseas Limited Integrated light detection or generation means and amplifying means
US4442445A (en) * 1981-11-23 1984-04-10 The United States Of America As Represented By The Secretary Of The Army Planar doped barrier gate field effect transistor
US4471367A (en) * 1981-12-04 1984-09-11 At&T Bell Laboratories MESFET Using a shallow junction gate structure on GaInAs
US4468851A (en) * 1981-12-14 1984-09-04 The United States Of America As Represented By The Secretary Of The Navy Process for making a heterojunction source-drain insulated gate field-effect transistors utilizing diffusion to form the lattice
US4910562A (en) * 1982-04-26 1990-03-20 International Business Machines Corporation Field induced base transistor
US4553155A (en) * 1982-06-18 1985-11-12 At&T Bell Laboratories High speed bias-free photodetector
US4482906A (en) * 1982-06-30 1984-11-13 International Business Machines Corporation Gallium aluminum arsenide integrated circuit structure using germanium
US4518979A (en) * 1982-06-30 1985-05-21 International Business Machines Corporation Semiconductor transistor with graded base and collector
US4739385A (en) * 1982-10-21 1988-04-19 American Telephone And Telegraph Company, At&T Bell Laboratories Modulation-doped photodetector
US4590502A (en) * 1983-03-07 1986-05-20 University Of Illinois Camel gate field effect transistor device
US4641161A (en) * 1984-09-28 1987-02-03 Texas Instruments Incorporated Heterojunction device
US4960718A (en) * 1985-12-13 1990-10-02 Allied-Signal Inc. MESFET device having a semiconductor surface barrier layer
JPS63276267A (ja) * 1987-05-08 1988-11-14 Fujitsu Ltd 半導体装置の製造方法
US5221367A (en) * 1988-08-03 1993-06-22 International Business Machines, Corp. Strained defect-free epitaxial mismatched heterostructures and method of fabrication
US5256579A (en) * 1989-04-03 1993-10-26 Massachusetts Institute Of Technology Tunable-frequency Gunn diodes fabrication with focused ion beams
US5266818A (en) * 1989-11-27 1993-11-30 Kabushiki Kaisha Toshiba Compound semiconductor device having an emitter contact structure including an Inx Ga1 -x As graded-composition layer
US5258327A (en) * 1992-04-30 1993-11-02 Litton Systems, Inc. MBE growth method for high level devices and integrations
JPH08139360A (ja) * 1994-09-12 1996-05-31 Showa Denko Kk 半導体ヘテロ接合材料
US7791160B2 (en) * 2006-10-19 2010-09-07 International Business Machines Corporation High-performance FET device layout
US7689946B2 (en) * 2006-10-19 2010-03-30 International Business Machines Corporation High-performance FET device layout
KR102274734B1 (ko) * 2014-01-23 2021-07-07 삼성전자주식회사 반도체 장치 및 그 제조 방법
US9515186B2 (en) * 2014-01-23 2016-12-06 Samsung Electronics Co., Ltd. Semiconductor device and method of fabricating the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493811A (en) * 1966-06-22 1970-02-03 Hewlett Packard Co Epitaxial semiconductor material on dissimilar substrate and method for producing the same
DE2517049A1 (de) * 1974-04-17 1975-10-30 Matsushita Electronics Corp Sperrschicht-feldeffekttransistor und verfahren zu dessen herstellung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3289052A (en) * 1963-10-14 1966-11-29 California Inst Res Found Surface barrier indium arsenide transistor
GB1263709A (en) * 1968-11-07 1972-02-16 Nat Res Dev Semiconductor devices
US3696262A (en) * 1970-01-19 1972-10-03 Varian Associates Multilayered iii-v photocathode having a transition layer and a high quality active layer
US3982261A (en) * 1972-09-22 1976-09-21 Varian Associates Epitaxial indium-gallium-arsenide phosphide layer on lattice-matched indium-phosphide substrate and devices
US3914784A (en) * 1973-12-10 1975-10-21 Hughes Aircraft Co Ion Implanted gallium arsenide semiconductor devices fabricated in semi-insulating gallium arsenide substrates
GB1450998A (en) * 1974-03-29 1976-09-29 Secr Defence Transferred electron devices

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493811A (en) * 1966-06-22 1970-02-03 Hewlett Packard Co Epitaxial semiconductor material on dissimilar substrate and method for producing the same
DE2517049A1 (de) * 1974-04-17 1975-10-30 Matsushita Electronics Corp Sperrschicht-feldeffekttransistor und verfahren zu dessen herstellung

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
US-Z.: Electronics Letters, Vol. 5, 1969, S. 313, 314 *
Vol. 10, 1974, S. 505 *

Also Published As

Publication number Publication date
IL51471A0 (en) 1977-04-29
IL51471A (en) 1979-05-31
FR2346857B3 (enExample) 1980-02-01
US4075651A (en) 1978-02-21
IT1077375B (it) 1985-05-04
CA1066430A (en) 1979-11-13
GB1559722A (en) 1980-01-23
FR2346857A1 (fr) 1977-10-28

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8128 New person/name/address of the agent

Representative=s name: BERNHARDT, K., DIPL.-ING., PAT.-ANW., 8000 MUENCHE

8131 Rejection