DE2361703C3 - Verfahren zum pyrolytischen Beschichten einer Oberfläche, insbesondere von Glas - Google Patents

Verfahren zum pyrolytischen Beschichten einer Oberfläche, insbesondere von Glas

Info

Publication number
DE2361703C3
DE2361703C3 DE2361703A DE2361703A DE2361703C3 DE 2361703 C3 DE2361703 C3 DE 2361703C3 DE 2361703 A DE2361703 A DE 2361703A DE 2361703 A DE2361703 A DE 2361703A DE 2361703 C3 DE2361703 C3 DE 2361703C3
Authority
DE
Germany
Prior art keywords
coating
temperature
evaporation
acac
reagent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2361703A
Other languages
German (de)
English (en)
Other versions
DE2361703A1 (de
DE2361703B2 (de
Inventor
Harald 6000 Frankfurt Molketin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Inc
Original Assignee
PPG Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PPG Industries Inc filed Critical PPG Industries Inc
Publication of DE2361703A1 publication Critical patent/DE2361703A1/de
Publication of DE2361703B2 publication Critical patent/DE2361703B2/de
Application granted granted Critical
Publication of DE2361703C3 publication Critical patent/DE2361703C3/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/408—Oxides of copper or solid solutions thereof
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/406—Oxides of iron group metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/229—Non-specific enumeration
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Compounds Of Iron (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Treating Waste Gases (AREA)
DE2361703A 1972-12-15 1973-12-12 Verfahren zum pyrolytischen Beschichten einer Oberfläche, insbesondere von Glas Expired DE2361703C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00315384A US3852098A (en) 1972-12-15 1972-12-15 Method for increasing rate of coating using vaporized reactants

Publications (3)

Publication Number Publication Date
DE2361703A1 DE2361703A1 (de) 1974-07-04
DE2361703B2 DE2361703B2 (de) 1976-05-20
DE2361703C3 true DE2361703C3 (de) 1982-09-30

Family

ID=23224155

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2361703A Expired DE2361703C3 (de) 1972-12-15 1973-12-12 Verfahren zum pyrolytischen Beschichten einer Oberfläche, insbesondere von Glas

Country Status (12)

Country Link
US (1) US3852098A (enExample)
JP (1) JPS5753297B2 (enExample)
AU (1) AU472118B2 (enExample)
BE (1) BE808676A (enExample)
CA (1) CA1009910A (enExample)
DE (1) DE2361703C3 (enExample)
FR (1) FR2210583B1 (enExample)
GB (1) GB1448848A (enExample)
IT (1) IT996911B (enExample)
NL (1) NL7314862A (enExample)
SE (1) SE389496B (enExample)
ZA (1) ZA737355B (enExample)

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SE367217B (enExample) * 1973-09-17 1974-05-20 Sandvik Ab
US4211803A (en) 1977-08-15 1980-07-08 International Business Machines Corporation CVD Growth of magnetic oxide films having growth induced anisotropy
US4182783A (en) * 1977-09-23 1980-01-08 Ppg Industries, Inc. Method of vapor deposition
US4359493A (en) * 1977-09-23 1982-11-16 Ppg Industries, Inc. Method of vapor deposition
US4297971A (en) * 1977-09-23 1981-11-03 Ppg Industries, Inc. Apparatus for vaporizing solid coating reactants
US4148940A (en) * 1978-03-20 1979-04-10 Ppg Industries, Inc. Method for depositing films containing cobalt oxide
BE879189A (fr) * 1978-10-19 1980-04-04 Bfg Glassgroup Procede de formation d'un revetement d'oxyde d'etain sur un support de verre chaud et produits ainsi obtenus
US4382980A (en) * 1979-03-07 1983-05-10 E. I. Du Pont De Nemours And Company Magnesium compositions and process for forming MGO film
JPS5663844A (en) * 1979-10-31 1981-05-30 Nippon Sheet Glass Co Ltd Forming method of metal oxide coat
US4344986A (en) * 1980-08-08 1982-08-17 Ppg Industries, Inc. Method of delivering powder coating reactants
US4325988A (en) * 1980-08-08 1982-04-20 Ppg Industries, Inc. Deposition of coatings from fine powder reactants
US4753191A (en) * 1980-08-08 1988-06-28 Ppg Industries, Inc. Method of and apparatus for delivering powder coating reactants
JPS5841722A (ja) * 1981-09-02 1983-03-11 Nippon Soda Co Ltd 金属酸化被膜形成組成物
JPS5841724A (ja) * 1981-09-02 1983-03-11 Nippon Soda Co Ltd 金属酸化被膜形成組成物
JPS5841720A (ja) * 1981-09-02 1983-03-11 Nippon Soda Co Ltd 金属酸化被膜形成組成物
US4374156A (en) * 1981-11-30 1983-02-15 Ford Motor Company Method for obtaining a coating of a preferred composition on a surface of a glass substrate
US4397671A (en) * 1981-11-30 1983-08-09 Ford Motor Company Method of placing a metal oxide film on a surface of a heated glass substrate
WO1983001945A1 (en) * 1981-11-30 1983-06-09 Vong, Sandy, T., S. Method of placing a metal oxide film on a surface of a heated glass substrate
US4401695A (en) * 1982-06-01 1983-08-30 Ppg Industries, Inc. Method of and apparatus for applying powder coating reactants
US4393098A (en) * 1982-07-29 1983-07-12 Ford Motor Company Process for developing a coating film on a heated glass sheet
WO1984000537A1 (en) * 1982-07-29 1984-02-16 Ford Motor Canada Process for developing a coating film on a heated glass sheet
US4900110A (en) * 1984-07-30 1990-02-13 Ppg Industries, Inc. Chemical vapor deposition of a reflective film on the bottom surface of a float glass ribbon
US4584206A (en) * 1984-07-30 1986-04-22 Ppg Industries, Inc. Chemical vapor deposition of a reflective film on the bottom surface of a float glass ribbon
DE3616332A1 (de) * 1986-05-15 1987-11-19 Hans Joachim Dipl Phys Dr -Ing Kirschning Fotovoltaisch wirksamer glasbaustein
US4689247A (en) * 1986-05-15 1987-08-25 Ametek, Inc. Process and apparatus for forming thin films
EP0409693B1 (fr) * 1989-07-21 1993-09-22 Framatome Procédé de réalisation d'une couche d'isolation en oxyde de chrome entre les pastilles et la gaine d'un élément combustible nucléaire et élément combustible comportant une telle couche d'isolation
US5108983A (en) * 1989-11-21 1992-04-28 Georgia Tech Research Corporation Method for the rapid deposition with low vapor pressure reactants by chemical vapor deposition
US6660365B1 (en) 1998-12-21 2003-12-09 Cardinal Cg Company Soil-resistant coating for glass surfaces
US6974629B1 (en) 1999-08-06 2005-12-13 Cardinal Cg Company Low-emissivity, soil-resistant coating for glass surfaces
US6964731B1 (en) 1998-12-21 2005-11-15 Cardinal Cg Company Soil-resistant coating for glass surfaces
AU2001292642A1 (en) 2000-09-11 2002-03-26 Cardinal Cg Company Temporary protective covers
US6921579B2 (en) * 2000-09-11 2005-07-26 Cardinal Cg Company Temporary protective covers
US6902813B2 (en) * 2001-09-11 2005-06-07 Cardinal Cg Company Hydrophilic surfaces carrying temporary protective covers
US6997018B2 (en) * 2003-06-02 2006-02-14 Ferro Corporation Method of micro and nano texturing glass
EP1713736B1 (en) 2003-12-22 2016-04-27 Cardinal CG Company Graded photocatalytic coatings and methods of making such coatings
US7939129B2 (en) * 2004-01-26 2011-05-10 Pilington North America, Inc. Deposition of iron oxide coatings on a glass substrate
JP2008505842A (ja) 2004-07-12 2008-02-28 日本板硝子株式会社 低保守コーティング
US8092660B2 (en) 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US7923114B2 (en) 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
WO2007124291A2 (en) * 2006-04-19 2007-11-01 Cardinal Cg Company Opposed functional coatings having comparable single surface reflectances
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
US7670694B2 (en) * 2006-12-22 2010-03-02 Hitachi Global Storage Technologies Netherlands B.V. Media for recording devices
US7820309B2 (en) 2007-09-14 2010-10-26 Cardinal Cg Company Low-maintenance coatings, and methods for producing low-maintenance coatings
MX378928B (es) * 2014-10-30 2025-03-11 Centro De Investigacion En Mat Avanzados S C Tobera de inyeccion de aerosoles y su metodo de utilizacion para depositar diferentes recubrimientos mediante deposito quimico de vapor asistido por aerosol.
EP3387163B1 (en) 2015-12-11 2020-04-29 Cardinal CG Company Method of coating both sides of a substrate
US10604442B2 (en) 2016-11-17 2020-03-31 Cardinal Cg Company Static-dissipative coating technology
CN110272278B (zh) * 2019-05-17 2021-11-05 东华大学 热障涂层用高熵陶瓷粉体及其制备方法
CN110903084B (zh) * 2019-11-12 2021-02-02 西安交通大学 一种高熵氧化物亚微米粉体及其制备方法

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US2430520A (en) * 1945-03-06 1947-11-11 Glass Science Inc Deposition of metal on glass from metal formates
US2556316A (en) * 1948-03-19 1951-06-12 Cornell Aeronautical Labor Inc Method of preparing a manganese chelated compound
US2694651A (en) * 1951-10-08 1954-11-16 Ohio Commw Eng Co Deposition of copper oxides on heat insulating material
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US2933475A (en) * 1955-09-20 1960-04-19 Du Pont Chelates and methods of making the same
US2898227A (en) * 1957-02-01 1959-08-04 Ohio Commw Eng Co Zinc gas plating
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US3410710A (en) * 1959-10-16 1968-11-12 Corning Glass Works Radiation filters
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US3356527A (en) * 1964-04-23 1967-12-05 Ross W Moshier Vapor-plating metals from fluorocarbon keto metal compounds
DE1496590C3 (de) * 1964-10-16 1973-10-31 N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) Verfahren zur Herstellung von warme reflektierenden SnO tief 2 Schichten mit reproduzierbaren optischen und elektrischen Eigenschaften auf Tragern
US3438803A (en) * 1965-05-18 1969-04-15 Anchor Hocking Glass Corp Method and means for vapor coating
US3658568A (en) * 1969-08-11 1972-04-25 Ppg Industries Inc Method of forming metal oxide coatings on refractory substrates
DE2047813B2 (de) * 1970-09-29 1971-10-07 Battelle Institut e V , 6000 Frank fürt Verfahren zur abscheidung von ueberzuegen

Also Published As

Publication number Publication date
DE2361703A1 (de) 1974-07-04
BE808676A (fr) 1974-06-14
FR2210583B1 (enExample) 1978-11-10
NL7314862A (enExample) 1974-06-18
DE2361703B2 (de) 1976-05-20
AU472118B2 (en) 1976-05-13
CA1009910A (en) 1977-05-10
SE389496B (sv) 1976-11-08
IT996911B (it) 1975-12-10
AU6175373A (en) 1975-04-24
ZA737355B (en) 1975-04-30
US3852098A (en) 1974-12-03
JPS4989718A (enExample) 1974-08-27
GB1448848A (en) 1976-09-08
FR2210583A1 (enExample) 1974-07-12
JPS5753297B2 (enExample) 1982-11-12

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee