DE2237047C3 - Beschickungsvorrichtung für Diffusionsofen der Halbleitertechnik - Google Patents

Beschickungsvorrichtung für Diffusionsofen der Halbleitertechnik

Info

Publication number
DE2237047C3
DE2237047C3 DE2237047A DE2237047A DE2237047C3 DE 2237047 C3 DE2237047 C3 DE 2237047C3 DE 2237047 A DE2237047 A DE 2237047A DE 2237047 A DE2237047 A DE 2237047A DE 2237047 C3 DE2237047 C3 DE 2237047C3
Authority
DE
Germany
Prior art keywords
furnace
chain
quartz
opening
outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2237047A
Other languages
German (de)
English (en)
Other versions
DE2237047A1 (de
DE2237047B2 (de
Inventor
Joseph Parsippany N.J. Redan (V.St.A.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Simmonds Precision Products Inc
Original Assignee
Simmonds Precision Products Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Simmonds Precision Products Inc filed Critical Simmonds Precision Products Inc
Publication of DE2237047A1 publication Critical patent/DE2237047A1/de
Publication of DE2237047B2 publication Critical patent/DE2237047B2/de
Application granted granted Critical
Publication of DE2237047C3 publication Critical patent/DE2237047C3/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C30B31/106—Continuous processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S254/00—Implements or apparatus for applying pushing or pulling force
    • Y10S254/06—Flexible rack and pinion

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Tunnel Furnaces (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE2237047A 1971-07-28 1972-07-28 Beschickungsvorrichtung für Diffusionsofen der Halbleitertechnik Expired DE2237047C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16673171A 1971-07-28 1971-07-28

Publications (3)

Publication Number Publication Date
DE2237047A1 DE2237047A1 (de) 1973-02-08
DE2237047B2 DE2237047B2 (de) 1974-06-12
DE2237047C3 true DE2237047C3 (de) 1975-02-20

Family

ID=22604481

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2237047A Expired DE2237047C3 (de) 1971-07-28 1972-07-28 Beschickungsvorrichtung für Diffusionsofen der Halbleitertechnik

Country Status (7)

Country Link
US (1) US3719291A (enExample)
CA (1) CA960995A (enExample)
CH (1) CH550983A (enExample)
DE (1) DE2237047C3 (enExample)
FR (1) FR2147571A5 (enExample)
GB (1) GB1384601A (enExample)
IT (1) IT961125B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557008B2 (enExample) * 1972-02-29 1980-02-21
US4362645A (en) * 1978-09-28 1982-12-07 Akzona, Inc. Temperature indicating compositions of matter
US4219328A (en) * 1979-06-06 1980-08-26 General Electric Company Apparatus for firing low density graphite/alumina cores
JPS60172429A (ja) * 1984-02-17 1985-09-05 Aioi Seiki Kk 加工機械の工具等の片折れチエン式流体圧シリンダ駆動形押引操作装置
FR2786476B1 (fr) * 1998-11-30 2001-02-23 Serapid France Colonne elevatrice de charges
FR3043747B1 (fr) * 2015-11-16 2017-12-22 Serapid France Maillon de chaine rigide et chaine rigide equipee d'un tel maillon

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3294261A (en) * 1965-06-30 1966-12-27 Jr Joseph A Cloutier Continuous drive feed for oxidationdiffusion furnace
US3563434A (en) * 1969-02-27 1971-02-16 Texas Instruments Inc Apparatus for loading and unloading furnace
US3557975A (en) * 1969-03-13 1971-01-26 St Regis Paper Co Pusher assembly for freezers

Also Published As

Publication number Publication date
IT961125B (it) 1973-12-10
CA960995A (en) 1975-01-14
DE2237047A1 (de) 1973-02-08
FR2147571A5 (enExample) 1973-03-09
GB1384601A (en) 1975-02-19
CH550983A (de) 1974-06-28
DE2237047B2 (de) 1974-06-12
US3719291A (en) 1973-03-06

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee