IT961125B - Dispositivo trasportatore caricato re per forno particolarmente adat to per far passare nel forno di diffusione i wafers per transistori - Google Patents

Dispositivo trasportatore caricato re per forno particolarmente adat to per far passare nel forno di diffusione i wafers per transistori

Info

Publication number
IT961125B
IT961125B IT12731/72A IT1273172A IT961125B IT 961125 B IT961125 B IT 961125B IT 12731/72 A IT12731/72 A IT 12731/72A IT 1273172 A IT1273172 A IT 1273172A IT 961125 B IT961125 B IT 961125B
Authority
IT
Italy
Prior art keywords
oven
wafers
transistors
passing
particularly suitable
Prior art date
Application number
IT12731/72A
Other languages
English (en)
Italian (it)
Original Assignee
Simmonds Precision Products
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Simmonds Precision Products filed Critical Simmonds Precision Products
Application granted granted Critical
Publication of IT961125B publication Critical patent/IT961125B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C30B31/106—Continuous processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S254/00—Implements or apparatus for applying pushing or pulling force
    • Y10S254/06—Flexible rack and pinion

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Tunnel Furnaces (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
IT12731/72A 1971-07-28 1972-06-16 Dispositivo trasportatore caricato re per forno particolarmente adat to per far passare nel forno di diffusione i wafers per transistori IT961125B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16673171A 1971-07-28 1971-07-28

Publications (1)

Publication Number Publication Date
IT961125B true IT961125B (it) 1973-12-10

Family

ID=22604481

Family Applications (1)

Application Number Title Priority Date Filing Date
IT12731/72A IT961125B (it) 1971-07-28 1972-06-16 Dispositivo trasportatore caricato re per forno particolarmente adat to per far passare nel forno di diffusione i wafers per transistori

Country Status (7)

Country Link
US (1) US3719291A (enExample)
CA (1) CA960995A (enExample)
CH (1) CH550983A (enExample)
DE (1) DE2237047C3 (enExample)
FR (1) FR2147571A5 (enExample)
GB (1) GB1384601A (enExample)
IT (1) IT961125B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557008B2 (enExample) * 1972-02-29 1980-02-21
US4362645A (en) * 1978-09-28 1982-12-07 Akzona, Inc. Temperature indicating compositions of matter
US4219328A (en) * 1979-06-06 1980-08-26 General Electric Company Apparatus for firing low density graphite/alumina cores
JPS60172429A (ja) * 1984-02-17 1985-09-05 Aioi Seiki Kk 加工機械の工具等の片折れチエン式流体圧シリンダ駆動形押引操作装置
FR2786476B1 (fr) * 1998-11-30 2001-02-23 Serapid France Colonne elevatrice de charges
FR3043747B1 (fr) * 2015-11-16 2017-12-22 Serapid France Maillon de chaine rigide et chaine rigide equipee d'un tel maillon

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3294261A (en) * 1965-06-30 1966-12-27 Jr Joseph A Cloutier Continuous drive feed for oxidationdiffusion furnace
US3563434A (en) * 1969-02-27 1971-02-16 Texas Instruments Inc Apparatus for loading and unloading furnace
US3557975A (en) * 1969-03-13 1971-01-26 St Regis Paper Co Pusher assembly for freezers

Also Published As

Publication number Publication date
DE2237047B2 (de) 1974-06-12
GB1384601A (en) 1975-02-19
FR2147571A5 (enExample) 1973-03-09
CA960995A (en) 1975-01-14
DE2237047A1 (de) 1973-02-08
CH550983A (de) 1974-06-28
DE2237047C3 (de) 1975-02-20
US3719291A (en) 1973-03-06

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