GB1384601A - Furnace loading mechanisms - Google Patents

Furnace loading mechanisms

Info

Publication number
GB1384601A
GB1384601A GB2342972A GB2342972A GB1384601A GB 1384601 A GB1384601 A GB 1384601A GB 2342972 A GB2342972 A GB 2342972A GB 2342972 A GB2342972 A GB 2342972A GB 1384601 A GB1384601 A GB 1384601A
Authority
GB
United Kingdom
Prior art keywords
chain
boat
trackway
boats
guideway
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2342972A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Simmonds Precision Products Inc
Original Assignee
Simmonds Precision Products Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Simmonds Precision Products Inc filed Critical Simmonds Precision Products Inc
Publication of GB1384601A publication Critical patent/GB1384601A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C30B31/106—Continuous processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S254/00—Implements or apparatus for applying pushing or pulling force
    • Y10S254/06—Flexible rack and pinion

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Tunnel Furnaces (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

1384601 Feeding charges to furnaces SIMMONDS PRECISION PRODUCTS Inc 18 May 1972 [28 July 1971] 23429/72 Heading F4B Mechanism for loading quartz boats 34 carrying semi-conductor wafers 35 into a diffusion furnace 13 comprises a driving chain 30 reciprocable in a trackway 31 and a curved guideway 45 for storage of the withdrawn section of the chain the lower surface of the boats having depressions receiving upstanding pins 54 in the interconnected chain links. The chain is engaged by a driving sprocket (16, Fig. 2), extending upwardly through the trackway 31. The sprocket is driven by an electric motor through reduction gearing and in the event of current failure may also be manipulated by hand through a knurled wheel (15a, Fig. 1), in an opening in the loader mechanism housing (10, Fig. 1), below the guideway 45. The quartz boat 34 includes converging walls as shown and end walls 53 with lifting handles. The drive mechanism may be connected to a shaft on which is mounted the contact arm of a control potentiometer, the arm being arranged to determine an electric resistance in a boat position indicating gauge. The time spent by the boat in preheating and diffusion zones is also controlled by potentiometer.
GB2342972A 1971-07-28 1972-05-18 Furnace loading mechanisms Expired GB1384601A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16673171A 1971-07-28 1971-07-28

Publications (1)

Publication Number Publication Date
GB1384601A true GB1384601A (en) 1975-02-19

Family

ID=22604481

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2342972A Expired GB1384601A (en) 1971-07-28 1972-05-18 Furnace loading mechanisms

Country Status (7)

Country Link
US (1) US3719291A (en)
CA (1) CA960995A (en)
CH (1) CH550983A (en)
DE (1) DE2237047C3 (en)
FR (1) FR2147571A5 (en)
GB (1) GB1384601A (en)
IT (1) IT961125B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4362645A (en) * 1978-09-28 1982-12-07 Akzona, Inc. Temperature indicating compositions of matter

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557008B2 (en) * 1972-02-29 1980-02-21
US4219328A (en) * 1979-06-06 1980-08-26 General Electric Company Apparatus for firing low density graphite/alumina cores
JPS60172429A (en) * 1984-02-17 1985-09-05 Aioi Seiki Kk Side-bent chain system hydraulic cylinder driving type push-pull operating device for tool and the like of working machine
FR2786476B1 (en) * 1998-11-30 2001-02-23 Serapid France LOAD LIFT COLUMN
FR3043747B1 (en) * 2015-11-16 2017-12-22 Serapid France RIGID CHAIN LINK AND RIGID CHAIN EQUIPPED WITH SUCH LINK

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3294261A (en) * 1965-06-30 1966-12-27 Jr Joseph A Cloutier Continuous drive feed for oxidationdiffusion furnace
US3563434A (en) * 1969-02-27 1971-02-16 Texas Instruments Inc Apparatus for loading and unloading furnace
US3557975A (en) * 1969-03-13 1971-01-26 St Regis Paper Co Pusher assembly for freezers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4362645A (en) * 1978-09-28 1982-12-07 Akzona, Inc. Temperature indicating compositions of matter

Also Published As

Publication number Publication date
US3719291A (en) 1973-03-06
FR2147571A5 (en) 1973-03-09
DE2237047C3 (en) 1975-02-20
CA960995A (en) 1975-01-14
IT961125B (en) 1973-12-10
DE2237047A1 (en) 1973-02-08
CH550983A (en) 1974-06-28
DE2237047B2 (en) 1974-06-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees