DE19857253C2 - Einkristall-Hebevorrichtung - Google Patents

Einkristall-Hebevorrichtung

Info

Publication number
DE19857253C2
DE19857253C2 DE1998157253 DE19857253A DE19857253C2 DE 19857253 C2 DE19857253 C2 DE 19857253C2 DE 1998157253 DE1998157253 DE 1998157253 DE 19857253 A DE19857253 A DE 19857253A DE 19857253 C2 DE19857253 C2 DE 19857253C2
Authority
DE
Germany
Prior art keywords
lifting device
single crystal
chamber
crystal lifting
column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1998157253
Other languages
German (de)
English (en)
Other versions
DE19857253A1 (de
Inventor
Ryo Yamagishi
Kenichi Yoshizawa
Ayumi Suda
Toshiaki Tsunoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Komatsu NTC Ltd
Original Assignee
Komatsu Electronic Metals Co Ltd
Komatsu Machinery Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Electronic Metals Co Ltd, Komatsu Machinery Corp filed Critical Komatsu Electronic Metals Co Ltd
Publication of DE19857253A1 publication Critical patent/DE19857253A1/de
Application granted granted Critical
Publication of DE19857253C2 publication Critical patent/DE19857253C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Control Of Position Or Direction (AREA)
DE1998157253 1997-12-11 1998-12-11 Einkristall-Hebevorrichtung Expired - Fee Related DE19857253C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34109597A JPH11171688A (ja) 1997-12-11 1997-12-11 単結晶引上げ装置

Publications (2)

Publication Number Publication Date
DE19857253A1 DE19857253A1 (de) 1999-06-17
DE19857253C2 true DE19857253C2 (de) 2003-11-20

Family

ID=18343220

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1998157253 Expired - Fee Related DE19857253C2 (de) 1997-12-11 1998-12-11 Einkristall-Hebevorrichtung

Country Status (3)

Country Link
JP (1) JPH11171688A (enExample)
DE (1) DE19857253C2 (enExample)
TW (1) TW442830B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10102081A1 (de) * 2001-01-18 2002-07-25 Crystal Growing Systems Gmbh Kristallziehanlage
US20100300053A1 (en) * 2007-12-17 2010-12-02 Alary Jean-Andre Ceramic honeycomb structures
JP5483591B2 (ja) * 2010-10-08 2014-05-07 日鉄住金ファインテック株式会社 単結晶引上装置および坩堝支持装置
KR102344844B1 (ko) * 2020-02-04 2021-12-30 (주)한국아이티에스 반도체 단결정 잉곳의 이송 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3152850A1 (de) * 1981-05-19 1983-06-30 Ferrofluidics Corp Vorrichtung und verfahren zur handhabung von kristallen aus kristallziehoefen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3152850A1 (de) * 1981-05-19 1983-06-30 Ferrofluidics Corp Vorrichtung und verfahren zur handhabung von kristallen aus kristallziehoefen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP 63-303888 A, In: Pat. Abstr. of Jp., auf Depatis *

Also Published As

Publication number Publication date
DE19857253A1 (de) 1999-06-17
JPH11171688A (ja) 1999-06-29
TW442830B (en) 2001-06-23

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8304 Grant after examination procedure
8364 No opposition during term of opposition
R082 Change of representative

Representative=s name: MEHLER ACHLER PATENTANWAELTE, DE

Representative=s name: MEHLER ACHLER PATENTANWAELTE, 65185 WIESBADEN, DE

R082 Change of representative

Representative=s name: MEHLER ACHLER PATENTANWAELTE, DE

Representative=s name: MEHLER ACHLER PATENTANWAELTE, 65185 WIESBADEN, DE

R081 Change of applicant/patentee

Owner name: KOMATSU NTC LTD., NANTO-CITY, JP

Free format text: FORMER OWNERS: KOMATSU MACHINERY CORP., KOMATSU, ISHIKAWA, JP; KOMATSU ELECTRONIC METALS CO., LTD., TOKIO/TOKYO, JP

Effective date: 20120123

Owner name: KOMATSU ELECTRONIC METALS CO., LTD., JP

Free format text: FORMER OWNERS: KOMATSU MACHINERY CORP., KOMATSU, ISHIKAWA, JP; KOMATSU ELECTRONIC METALS CO., LTD., TOKIO/TOKYO, JP

Effective date: 20120123

Owner name: KOMATSU ELECTRONIC METALS CO., LTD., JP

Free format text: FORMER OWNER: KOMATSU MACHINERY CORP., KOMATSU ELECTRONIC METALS CO.,, , JP

Effective date: 20120123

Owner name: KOMATSU NTC LTD., NANTO-CITY, JP

Free format text: FORMER OWNER: KOMATSU MACHINERY CORP., KOMATSU ELECTRONIC METALS CO.,, , JP

Effective date: 20120123

R082 Change of representative

Representative=s name: MEHLER ACHLER PATENTANWAELTE, DE

Effective date: 20120121

Representative=s name: MEHLER ACHLER PATENTANWAELTE, DE

Effective date: 20120123

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20140701