TW442830B - Device for pulling up single crystal - Google Patents

Device for pulling up single crystal Download PDF

Info

Publication number
TW442830B
TW442830B TW87120103A TW87120103A TW442830B TW 442830 B TW442830 B TW 442830B TW 87120103 A TW87120103 A TW 87120103A TW 87120103 A TW87120103 A TW 87120103A TW 442830 B TW442830 B TW 442830B
Authority
TW
Taiwan
Prior art keywords
pulling
crystal pulling
chamber
single crystal
cylinder
Prior art date
Application number
TW87120103A
Other languages
English (en)
Chinese (zh)
Inventor
Ryo Yamagishi
Kenichi Yoshizawa
Ayumi Suda
Toshiaki Tsunoka
Original Assignee
Komatsu Machinery Corp
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Machinery Corp, Komatsu Denshi Kinzoku Kk filed Critical Komatsu Machinery Corp
Application granted granted Critical
Publication of TW442830B publication Critical patent/TW442830B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Control Of Position Or Direction (AREA)
TW87120103A 1997-12-11 1998-12-03 Device for pulling up single crystal TW442830B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34109597A JPH11171688A (ja) 1997-12-11 1997-12-11 単結晶引上げ装置

Publications (1)

Publication Number Publication Date
TW442830B true TW442830B (en) 2001-06-23

Family

ID=18343220

Family Applications (1)

Application Number Title Priority Date Filing Date
TW87120103A TW442830B (en) 1997-12-11 1998-12-03 Device for pulling up single crystal

Country Status (3)

Country Link
JP (1) JPH11171688A (enExample)
DE (1) DE19857253C2 (enExample)
TW (1) TW442830B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI426163B (zh) * 2010-10-08 2014-02-11 Sumitomo Metal Fine Technology Co Ltd Single crystal pulling device and crucible support device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10102081A1 (de) * 2001-01-18 2002-07-25 Crystal Growing Systems Gmbh Kristallziehanlage
US20100300053A1 (en) * 2007-12-17 2010-12-02 Alary Jean-Andre Ceramic honeycomb structures
KR102344844B1 (ko) * 2020-02-04 2021-12-30 (주)한국아이티에스 반도체 단결정 잉곳의 이송 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041038B2 (ja) * 1981-05-19 1985-09-13 フエロフルイデイクス・コ−ポレイシヨン 結晶成長炉からの結晶の処理装置及び処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI426163B (zh) * 2010-10-08 2014-02-11 Sumitomo Metal Fine Technology Co Ltd Single crystal pulling device and crucible support device

Also Published As

Publication number Publication date
DE19857253A1 (de) 1999-06-17
JPH11171688A (ja) 1999-06-29
DE19857253C2 (de) 2003-11-20

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GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees